• 제목/요약/키워드: Patterned glass

검색결과 111건 처리시간 0.025초

Fabrication of Flexible Surface-enhanced Raman-Active Nanostructured Substrates Using Soft-Lithography

  • 박지윤;장석진;여종석
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.411-411
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    • 2012
  • Over the recent years, surface enhanced Raman spectroscopy (SERS) has dramatically grown as a label-free detecting technique with the high level of selectivity and sensitivity. Conventional SERS-active nanostructured layers have been deposited or patterned on rigid substrates such as silicon wafers and glass slides. Such devices fabricated on a flexible platform may offer additional functionalities and potential applications. For example, flexible SERS-active substrates can be integrated into microfluidic diagnostic devices with round-shaped micro-channel, which has large surface area compared to the area of flat SERS-active substrates so that we may anticipate high sensitivity in a conformable device form. We demonstrate fabrication of flexible SERS-active nanostructured substrates based on soft-lithography for simple, low-cost processing. The SERS-active nanostructured substrates are fabricated using conventional Si fabrication process and inkjet printing methods. A Si mold is patterned by photolithography with an average height of 700 nm and an average pitch of 200 nm. Polydimethylsiloxane (PDMS), a mixture of Sylgard 184 elastomer and curing agnet (wt/wt = 10:1), is poured onto the mold that is coated with trichlorosilane for separating the PDMS easily from the mold. Then, the nano-pattern is transferred to the thin PDMS substrates. The soft lithographic methods enable the SERS-active nanostructured substrates to be repeatedly replicated. Silver layer is physically deposited on the PDMS. Then, gold nanoparticle (AuNP) inks are applied on the nanostructured PDMS using inkjet printer (Dimatix DMP 2831) to deposit AuNPs on the substrates. The characteristics of SERS-active substrates are measured; topology is provided by atomic force microscope (AFM, Park Systems XE-100) and Raman spectra are collected by Raman spectroscopy (Horiba LabRAM ARAMIS Spectrometer). We anticipate that the results may open up various possibilities of applying flexible platform to highly sensitive Raman detection.

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TCO 응용을 위한 패턴된 기판위에 증착된 AZO 박막의 특성 연구 (Conformal coating of Al-doped ZnO thin film on micro-column patterned substrate for TCO)

  • 최미경;안철현;공보현;조형균
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.28-28
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    • 2009
  • Fabrications of antireflection structures on solar cell were investigated to trap the light and to improve quantum efficiency. Introductions of patterned substrate or textured layer for Si solar cell were performed to prevent reflectance and to increase the path length of incoming light. However, it is difficult to deposit conformally flat electrode on perpendicular plane. ZnO is II-VI compound semiconductor and well-known wide band-gap material. It has similar electrical and optical properties as ITO, but it is nontoxic and stable. In this study, Al-doped ZnO thin films are deposited as transparent electrode by atomic layer deposition method to coat on Si substrate with micro-scale structures. The deposited AZO layer is flatted on horizontal plane as well as perpendicular one with conformal 200 nm thickness. The carrier concentration, mobility and resistivity of deposited AZO thin film on glass substrate were measured $1.4\times10^{20}cm^{-3}$, $93.3cm^2/Vs$, $4.732\times10^{-4}{\Omega}cm$ with high transmittance over 80%. The AZO films were coated with polyimide and performed selective polyimide stripping on head of column by reactive ion etching to measure resistance along columns surface. Current between the micro-columns flows onto the perpendicular plane of deposited AZO film with low resistance.

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Submicron-scale Polymeric Patterns for Tribological Application in MEMS/NEMS

  • Singh R. Arvind;Yoon Eui-Sung;Kim Hong Joon;Kong Hosung;Jeong Hoon Eui;Suh Kahp Y.
    • KSTLE International Journal
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    • 제6권2호
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    • pp.33-38
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    • 2005
  • Submicron-scale patterns made of polymethyl methacrylate (PMMA) were fabricated on silicon-wafer using a capillarity-directed soft lithographic technique. Polyurethane acrylate (PUA) stamps (Master molds) were used to fabricate the patterns. Patterns with three different aspect ratios were fabricated by varying the holding time. The patterns fabricated were the negative replica of the master mold. The patterns so obtained were investigated for their adhesion and friction properties at nano-scale using AFM. Friction tests were conducted in the range of 0-80 nN. Glass (Borosilicate) balls of diameter 1.25 mm mounted on cantilever (Contact Mode type NPS) were used as tips. Further, micro-friction tests were performed using a ball-on-flat type micro-tribe tester, under reciprocating motion, using a soda lime ball (1 mm diameter) under a normal load of 3,000 mN. All experiments were conducted at ambient temperature ($24{\pm}1^{\circ}C$) and relative humidity ($45{\pm}5\%$). Results showed that the patterned samples exhibited superior tribological properties when compared to the silicon wafer and non-patterned sample (PMMA thin film) both at the nano and micro-scales, owing to their increased hydrophobicity and reduced real area of contact. In the case of patterns it was observed that their morphology (shape factor and size factor) was decisive in defining the real area of contact.

Chemical weathering in King George Island, Antarctica

  • Jeong, Gi-Young
    • 한국광물학회:학술대회논문집
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    • 한국광물학회.한국암석학회 2003년도 공동학술발표회 논문집
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    • pp.66-66
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    • 2003
  • King George island, Antarctica, is mostly covered by ice sheet and glaciers, but the land area is focally exposed for several thousand years after deglaciation. For a mineralogical study of chemical weathering in the polar environment, glacial debris was sampled at the well-developed patterned ground which was formed by long periglaclal process. As fresh equivalents, recently exposed tills were sampled at the base of ice cliff of outlet glaciers and at the melting margin of ice cap together with fresh bedrock samples. Fresh tills are mostly composed of quartz, plagioclase, chlorite, and illite, but those derived from hydrothermal alteration zone contain smectite and illite-smectite. In bedrocks, chlorite was the major clay minerals in most samples with minor illite near hydrothermal alteration zone and interstratified chlorite-smectite in some samples. Smectite closely associated with eolian volcanic glass was assigned to alteration in their source region. Blocks with rough surface due to chemical disintegration showed weathering rinds of several millimeter thick. Comparision between inner fresh and outer altered zones did not show notable change in clay mineralogy except dissolution of calcite and some plagioclase. Most significant weathering was observed in the biotite flakes, eolian volcanic glass, sulfides, and carbonates in the debris. Biotite flakes derived from granodiorite were altered to hydrobiotite and vermiculite of yellow brown color. Minor epitactic kaolinite and gibbsite were formed in the cleaved flakes of weathered biotite. Pyrite was replaced by iron oxides. Calcite was congruently dissolved. Volcanic glass of basaltic andesite composition showed alteration rim of several micrometer thick or completely dissolved leaving mesh of plagioclase laths. In the alteration rim, Si, Na, Mg, and Ca were depleted, whereas Al, Ti, and Fe were relatively enriched. Mineralization of lichen and moss debris is of much interest. They are rich of A3 and Si roughly in the ratio of 2:1 to 3:1 typical of allophane. In some case, Fe and Ti are enriched in addition to Al and Si. Transmission electron microscopy of the samples rich of volcanic glass showed abundant amorphous aluminosilicates, which are interpreted as allophane. Chemical weathering in the King George Island is dominated by the leaching of primary phyllosilicates, carbonates, eolian volcanic glass, and minor sulfides. Authigenesls of clay minerals is less active. Absence of a positive evidence of significant authigenic smectite formation suggests that its contribution to the clay mineralogy of marine sediments are doubtful even near the maritime Antarctica undergoing a more rapid and intenser chemical weathering under more humid and milder climate.

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유기 발광 소자 디스플레이를 위한 적외선 램프 소스를 활용한 열 전사 픽셀 패터닝 (Thermal Transfer Pixel Patterning by Using an Infrared Lamp Source for Organic LED Display)

  • 배형우;장영찬;안명찬;박경태;이동구
    • 센서학회지
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    • 제29권1호
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    • pp.27-32
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    • 2020
  • This study proposes a pixel-patterning method for organic light-emitting diodes (OLEDs) based on thermal transfer. An infrared lamp was introduced as a heat source, and glass type donor element, which absorbs infrared and generates heat and then transfers the organic layer to the substrate, was designed to selectively sublimate the organic material. A 200 nm-thick layer of molybdenum (Mo) was used as the lightto-heat conversion (LTHC) layer, and a 300 nm-thick layer of patterned silicon dioxide (SiO2), featuring a low heat-transfer coefficient, was formed on top of the LTHC layer to selectively block heat transfer. To prevent the thermal oxidation and diffusion of the LTHC material, a 100 nm-thick layer of silicon nitride (SiNx) was coated on the material. The fabricated donor glass exhibited appropriate temperature-increment property until 249 ℃, which is enough to evaporate the organic materials. The alpha-step thickness profiler and X-ray reflection (XRR) analysis revealed that the thickness of the transferred film decreased with increase in film density. In the patterning test, we achieved a 100 ㎛-long line and dot pattern with a high transfer accuracy and a mean deviation of ± 4.49 ㎛. By using the thermal-transfer process, we also fabricated a red phosphorescent device to confirm that the emissive layer was transferred well without the separation of the host and the dopant owing to a difference in their evaporation temperatures. Consequently, its efficiency suffered a minor decline owing to the oxidation of the material caused by the poor vacuum pressure of the process chamber; however, it exhibited an identical color property.

Imaging on a Vapor Deposited Film by Photopolymerization of a Rod-Like Molecule Consisting of Two Diacetylenic Groups

  • Chang, Ji-Young;Kyung Seo;Cho, Hyun-Ju;Lee, Cheol-Ju;Lee, Changjin;Yongku Kang;Kim, Jaehyung
    • Macromolecular Research
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    • 제10권4호
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    • pp.204-208
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    • 2002
  • A linear rod-like molecule, bis[4-(1,3-octadynyl)phenyl] terephthalate (2), consisting of two diacetylenic groups, was prepared. The unsymmetric diacetylene was prepared by the Cadiot-Chodkiewicz coupling reaction of 1-bromohexyne with 4-ethynylphenol and linked to a benzene core by an esterification reaction with terephthaloyl chloride in tetrahydrofuran. The thin film (200 nm thickness) of compound 2 was fabricated by the physical vapor deposition on a glass plate with a thermal evaporator. In the X-ray diffraction (XRD) study, the vapor deposited film on the glass plate showed peaks with d spacings of 19.4, 5.7, and 4.5 $\AA$. This XRD pattern was quite different from that observed for compound 2 isolated by recrystallization from methylene chloride/hexane. The vapor deposited film was polymerized by UV irradiation. Photopolymerization was carried out through a photomask, resulting in a patterned image, where the irradiated part became isotropic.

A Brief Investigation on the Performance Variation and Shelf Lifetime in Polymer:Nonfullerene Solar Cells

  • Lee, Sooyong;Kim, Hwajeong;Lee, Chulyeon;Kim, Youngkyoo
    • Current Photovoltaic Research
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    • 제7권3호
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    • pp.55-60
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    • 2019
  • Polymer:nonfullerene solar cells with an inverted-type device structure were fabricated by employing the bulk heterojunction (BHJ) active layers, which are composed of poly[(2,6-(4,8-bis(5-(2-ethylhexyl)thiophene-2-yl)-benzo[1,2-b:4,5-b']dithiophene))-alt-(5,5-(1',3'-di-2-thienyl-5',7-bis(2-ethylhexyl)benzo[1',2'-c:4',5'-c']dithiophene-4,8-dione))] (PBDB-T) and 3,9-bis(6-methyl-2-methylene-(3-(1,1-dicyanomethylene)-indanone))-5,5,11,11-tetrakis(4-hexylphenyl)-dithieno[2,3-d:2',3-d']-s-indaceno[1,2-b:5,6-b']dithiophene (IT-M). The BHJ layers were formed on a pre-patterned indium-tin oxide (ITO)-coated glass substrate by spin-coating using the blend solutions of PBDB-T and IT-M. The solar cell performances were investigated with respect to the cell position on the ITO-glass substrates. In addition, the short-term shelf lifetime of solar cells was tested by storing the PBDB-T:IT-M solar cells in a glovebox filled with inert gas. The results showed that the performance of solar cells was relatively higher for the cells close to the center of substrates, which was maintained even after storage for 24 h. In particular, the PCE of PBDB-T:IT-M solar cells was marginally decreased after storage for 24 h owing to the slightly reduced fill factor, even though the open circuit voltage was unchanged after 24 h.

정수압을 이용한 미세 패턴 전사 신공정 개발 (Development of New Micro Pattern Fabrication Process by U sing Isostatic Pressing)

  • 설재완;주병윤;임성한
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2009년도 추계학술대회 논문집
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    • pp.267-270
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    • 2009
  • In the present investigation, we are newly developing a new forming process which can fabricate micro patterns on large-area polymeric substrates for high speed mass production. The key idea of the new process is to pressurize multiple vacuum-packed substrate-mold stacks above the glass transition temperature ($T_g$) of the polymeric substrates. The new process is thought to be promising micro-pattern fabrication technique in three aspects; firstly, isostatic pressing ensures the uniform micro-pattern replicating condition regardless of the substrate area. Secondly, the control of forming condition such as temperature and pressure can realize well-defined process condition exploited in the conventional hot embossing research field. Thirdly, multiple substrates can be patterned at the same time. A prototype forming machine for the new process was developed with the design consideration realizing the present idea. With a developed machine, micro prismatic array patterns with 50 um in size were successfully made on the $380{\times}300{\times}6\;mm$ PMMA plate.

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Light Scattering Effect of Incorporated PVP/Ag Nanoparticles on the Performance of Small-Molecule Organic Solar Cells

  • 허일수;박다솜;임상규
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.221-221
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    • 2012
  • Small-molecule organic photovoltaic cells have recently attracted growing attention due to their potential for the low-cost fabrication of flexible and lightweight solar modules. The PVP/Ag nanoparticles were synthesized by the reaction of poly vinylpyrrolidone (PVP) and silver nitrate at $150^{\circ}C$. In the reaction, the size of the nanoparticles was controlled by relative mole fractions between PVP and Ag. The PVP/Ag nanoparticles with various sizes were then spin coated on the patterned ITO glass prior to the deposition of the PEDOT:PSS hole transport layer. The scattering of the incident light caused by these incorporated nanoparticles resulted in an increase in the path length of the light through the active layer and hence the enhancement of the light absorption. This scattering effect increased as the size of the nanoparticles increased, but it was offset by the decrease in total transmittance caused by the non-transparent nanoparticles. As a result, the maximum power conversion efficiency, 0.96% which was the value enhanced by 14% compared to the cell without incorporation of nanoparticles, was obtained when the mole fraction of PVP:Ag was 24:1 and the size of the nanoparticles was 20~40 nm.

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탄소 나노튜브가 코팅된 은 메탈-메쉬 전극의 특성 (Characteristics of Silver Metal-mesh Electrodes Coated by Carbon Nanotubes)

  • 김부종;박종설;황영진;박진석
    • 반도체디스플레이기술학회지
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    • 제14권1호
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    • pp.55-59
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    • 2015
  • This study demonstrates hybrid-type transparent electrodes for touch screen panels. The hybrid-type electrodes were fabricated by coating carbon nanotubes (CNTs) on metal meshes. To form the metal-meshes, thin films of silver (Ag) were deposited on glass substrates using the sputtering method and then patterned via photolithography to obtain mesh structures whose line width was $10{\mu}m$ and line-to-line spacing was $300{\mu}m$. CNTs were coated on Ag-meshes by using two different methods, such as spray coating and electrophoretic deposition (EPD). For the samples of a Ag-meshes and CNTs-coated Ag-meshes, their surface morphologies, electrical sheet resistances, and visible-range transmittances and reflectances were characterized and compared. The experimental results indicated that the reflectance of Ag-mesh electrodes was substantially reduced by coating of CNTs. Especially, the hybrid electrodes of Ag-meshes with EPD-coated CNTs showed excellent properties such as sheet resistance lower than $20{\Omega}/{\Box}$, transmittance higher than 90 %, and reflectance lower than 8%.