• 제목/요약/키워드: Patterned electrodes

검색결과 97건 처리시간 0.032초

비정질 실리콘 박막 트랜지스터 소자 특성 향상을 위한 저 저항 금속 박막 전극의 형성 및 전기적 저항 특성 평가 (Metallizations and Electrical Characterizations of Low Resistivity Electrodes(Al, Ta, Cr) in the Amorphous Silicon Thin Film Transistor)

  • 김형택
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1993년도 춘계학술대회 논문집
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    • pp.96-99
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    • 1993
  • 대면적 액정 표시판 (Liquid Crystal Display:LCD) panel내(內)의 구동소자인 비정질 실리콘 (amorphous silicon) 박막 트랜지스터 (Thin Film Transistor:TFT)의 구동신호전달 소자특성 향상을 위한 본(本) 연구의 목적은 액정 panel TFT 제조공정 상(上)의 증착금속 전극박막들의 Test Elements Group(TEG) metal line pattern별(別) 전기적 저항특성 평가에 있다. 현(現) TFT 전극용(用)으로 개발이 진행 중(中)인 Aluminum(Al), Tantalum(Ta) 및 Chromium(Cr) 이 특성평가 대상 금속 박막으로 선정 되었으며, 이들 금속막의 증착 thickness 와 TEG metal line width가 저항특성 변수로 성립 되었다. 본(本) 실험을 통해 금속 박막의 TEG line width별(別) 체적(體積)저항 (bulk resistance), 면(面)저항(sheet resistance), 비(比)저항 (resistivity) 및 기판 상(上)의 metal pattern 위치 변화에 따른 전기적 저항 uniformity 특성변화 평가가 있었다. TEG metal line 측정 변위에 따른 저항율의 선형변화 특성도 연구 되었으며, metal line별(別) 전기적 연속, 불연속 배선 단락 특성(electrical continuity test) 관찰도 있었다.

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신축성 금속 나노선 압저항 전극 기반 로젯 스트레인 센서 (Rosette Strain Sensors Based on Stretchable Metal Nanowire Piezoresistive Electrodes)

  • 김강현;차재경;김종만
    • 대한금속재료학회지
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    • 제56권11호
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    • pp.835-843
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    • 2018
  • In this work, we report a delta rosette strain sensor based on highly stretchable silver nanowire (AgNW) percolation piezoresistors. The proposed rosette strain sensors were easily prepared by a facile two-step fabrication route. First, three identical AgNW piezoresistive electrodes were patterned in a simple and precise manner on a donor film using a solution-processed drop-coating of the AgNWs in conjunction with a tape-type shadow mask. The patterned AgNW electrodes were then entirely transferred to an elastomeric substrate while embedding them in the polymer matrix. The fabricated stretchable AgNW piezoresistors could be operated at up to 20% strain without electrical or mechanical failure, showing a maximum gauge factor as high as 5.3, low hysteresis, and high linearity ($r^2{\approx}0.996$). Moreover, the sensor responses were also found to be highly stable and reversible even under repeated strain loading/unloading for up to 1000 cycles at a maximum tensile strain of 20%, mainly due to the mechanical stability of the AgNW/elastomer composites. In addition, both the magnitude and direction of the principal strain could be precisely characterized by configuring three identical AgNW piezoresistors in a delta rosette form, representing the potential for employing the devices as a multidimensional strain sensor in various practical applications.

Soft Lithographic Patterning Method for Flexible Graphene-based Chemical Sensors with Heaters

  • Kang, Min-a;Jung, Min Wook;Myung, Sung;Song, Wooseok;Lee, Sun Suk;Lim, Jongsun;Park, Chong-Yun;An, Ki-Seok
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.176.2-176.2
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    • 2014
  • In this work, we demonstrated that the fabrication of flexible graphene-based chemical sensor with heaters by soft lithographic patterning method [1]. First, monolayer and multilayer graphene were prepared by thermal chemical vapor deposition transferred onto SiO2 / Si substrate in order to fabrication of patterned-sensor and -heater. Second, patterned-monolayer and multilayer graphene were detached through soft lithography process, which was transferred on top and bottom sides of PET film. Third, Au / Ti (Thickness : 100/30 nm) electrodes were deposited end of the patterned-graphene line by sputtering system. Finally, we measured sensor properties through injection of NO2 and CO2 gas on different temperature with voltage change of graphene heater.

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PVA 모드를 이용한 반투과형 액정디스플레이의 전기광학 특성 (Electro-optical Characteristics of Transflective Liquid Crystal Display using the PVA mode)

  • 전연문;임영진;김연식;김상균;유재진;이승희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.461-462
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    • 2006
  • A single-gap and single-gamma transflective liquid-crystal (LC) display using patterned vertical alignment (PVA) mode was designed. In the device, a vertical electric field drives a vertically aligned LC to tilt down to optimize polarization efficiency. Electrodes of transmissive and reflective area were patterned $22.5^{\circ}$ and $45^{\circ}$ with respect to the polarizer so that a tilt-down direction of the LC director was $22.5^{\circ}$ and $45^{\circ}$ in the reflective and transmissive regions, respectively. In the device, the cell gap was the same for both regions, and the gamma curve matched each other in both regions because tilt angle of LC director was the same according to the applied voltage. Moreover, the dark state was irrespective of the cell retardation value at normal direction, which was highly important in massive fabrications. The switching principle and electro-optic characteristics of the device are reported herein.

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A Low-Power Portable ECG Touch Sensor with Two Dry Metal Contact Electrodes

  • Yan, Long;Yoo, Hoi-Jun
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제10권4호
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    • pp.300-308
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    • 2010
  • This paper describes the development of a low-power electrocardiogram (ECG) touch sensor intended for the use with two dry metal electrodes. An equivalent ECG extraction circuit model encountered in a ground-free two-electrode configuration is investigated for an optimal sensor read-out circuit design criteria. From the equivalent circuit model, (1) maximum sensor resolution is derived based on the electrode's background thermal noise, which originates from high electrode-skin contact impedance, together with the input referred noise of instrumentation amplifier (IA), (2) 60 Hz electrostatic coupling from mains and motion artifact are also considered to determine minimum requirement of common mode rejection ratio (CMRR) and input impedance of IA. A dedicated ECG read-out front end incorporating chopping scheme is introduced to provide an input referred circuit noise of 1.3 ${\mu}V_{rms}$ over 0.5 Hz ~ 200 Hz, CMRR of IA > 100 dB, sensor resolution of 7 bits, and dissipating only 36 ${\mu}W$. Together with 8 bits synchronous successive approximation register (SAR) ADC, the sensor IC chip is implemented in 0.18 ${\mu}m$ CMOS technology and integrated on a 5 cm $\times$ 8 cm PCB with two copper patterned electrodes. With the help of proposed touch sensor, ECG signal containing QRS complex and P, T waves are successfully extracted by simply touching the electrodes with two thumbs.

스크린 인쇄와 리버스 오프셋 인쇄를 혼합한 대면적 미세 전극용 인쇄공정 (A Printing Process Combining Screen Printing with Reverse Off-set for a Fine Patterning of Electrodes on Large Area Substrate)

  • 박지은;송정근
    • 한국전기전자재료학회논문지
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    • 제24권5호
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    • pp.374-380
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    • 2011
  • In this paper a printing process for patterning electrodes on large area substrate was developed by combining screen printing with reverse off-set printing. Ag ink was uniformly coated by screen printing. And then etching resist (ER) was patterned in the Ag film by reverse off-set printing, and then the non-desired Ag film was etched off by etchant. Finally, the ER was stripped-off to obtain the final Ag patterns. We extracted the suitable conditions of reverse Using the process we successfully fabricated gate electrodes and scan bus lines of OTFT-backplane used for e-paper, in which the diagonal size was 6 inch, the resolution $320{\times}240$, the minimum line width 30 um, and sheet resistance 1 ${\Omega}/{\Box}$.

A Study on an Inspection System of Repeated Pattern in PDP panel

  • Jung, Ji-Hun;Nam, Sang-woon;Hwang, Yong-Ha;Park, Yong-June;Kang, Tea-Kyu;Jeong, Dea-Hwa
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2004년도 ICCAS
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    • pp.126-131
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    • 2004
  • The popularity of flat-panel display(FPD), including plasma display panel(PDP) and liquid-crystal display(LCD), has given rise to the need to streamline their production. In these days, PDP is one of the most popular display devices because of its expansion of manufacturing process and simplicity. Bus electrodes, sustain electrodes, barrier ribs and RGB phosphors are patterned on PDP panel to display an image. Since a minute damage on the pattern can cause a serious defect to display, it is important to inspect the pattern precisely. In this paper, an automatic inspection system of repeated pattern in PDP panel has been introduced to find the defect, such as open, short, dirt, island, and so on. And the inspection system has been operated in the mass production line of PDP.

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Fabrication of transparent conductive thin films with Ag mesh shape using the polystyrene beads monolayer

  • Jung, Taeyoung;Choi, Eun Chang;Hong, Byungyou
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.313-313
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    • 2016
  • Transparent conductive oxide (TCO) films have many disadvantages, such as rarity, possible exhaustion, process temperature limitations, and brittleness on a flexible substrate. In particular, as display technology moves toward flexible displays, TCO will become completely unsuitable due to its brittleness. To address theses issue, many researchers have been studying TCO substitutes. In recent efforts, metal nanowires, conducting polymers, carbon nanotube networks, graphene films, hybrid thin films, and metal meshes/grids have been evaluated as candidates to replace TCO electrodes. In this study, we fabricated the TCO film with Ag meshes shape using polystyrene (PS) beads monolayer on the substrate. The PS beads were used as a template to create the mesh pattern. We fabricated the monolayer on the flexible substrate (PES) with the well-aligned PS beads. Electrodes with Ag mesh shape were formed using this patterned monolayer. We could fabricated the Ag mesh electrode with the sheet resistance with $8ohm{\Omega}/{\Box}$.

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Improved Vertically-Aligned Nematic Mode for High Performance Displays

  • Jhun, Chul Gyu;Gwag, Jin Seog
    • Journal of the Optical Society of Korea
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    • 제18권6호
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    • pp.783-787
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    • 2014
  • This paper presents an improved vertical alignment nematic liquid crystal mode characterized by the protrusions or slits of the top substrate and additional stripe type common electrodes with polarity switching of the bottom substrate to improve multi-domain vertically aligned (MVA) and patterned vertically aligned (PVA) nematic modes. MVA and PVA modes have disadvantages such as an LC disclination in the vicinity of the middle region of electrodes between the top and bottom protrusions in MVA mode or the top and bottom slits in PVA mode. Therefore, the stripe type common electrode generating a horizontal electric field and the protrusion or slit producing some pretilt of liquid crystals (LCs) were used to improve the LC disclination, which influences the transmittance and response speed. The simulation results showed that the proposed VA mode has higher transmittance than the MVA and PVA modes. As a result, the proposed VA mode can improve the response speed and transmittance remarkably, which makes it useful for upgrading the LCD display quality.

Fabrication of organic thin film transistor using ink-jet printing technology

  • Kim, Dong-Jo;Jeong, Sun-Ho;Park, Bong-Kyun;Lee, Sul;Moon, Joo-Ho
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.1126-1129
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    • 2006
  • Here we developed a conductive ink which contains silver nanoparticles from which the electrodes for organic thin film transistor were directly patterned by ink-jet printing. To fabricate a coplanar type OTFT, solution processable semiconducting oligomer, ${\alpha},{\omega}-dihexylquaterthiophene$ (DH4T) was drop-cast onto between the ink-jet printed silver electrodes and I-V characteristics were measured.

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