• 제목/요약/키워드: Pattern fidelity

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4 Inch Wafer-Scale Replicability Enhancement in Hot Embossing by using PDMS-Cushioned Si Mold (PDMS 쿠션을 갖는 Si 몰드에 의한 핫엠보싱 공정에서의 4 인치 웨이퍼 스케일 전사성 향상)

  • Kim Heung-Kyu;Ko Young-Bae;Kang Jeong-Jin;Heo Young-Moo
    • Journal of the Korean Society for Precision Engineering
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    • v.23 no.8 s.185
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    • pp.178-184
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    • 2006
  • Hot embossing is to fabricate desired pattern on the polymer substrate by pressing the patterned mold against the substrate which is heated above the glass transition temperature, and it is a high throughput fabrication method for bio chip, optical microstructure, etc. due to the simultaneous large area patterning. However, the bad pattern fidelity in large area patterning is one of the obstacles to applying the hot embossing technology for mass production. In the present study, PDMS pad was used as a cushion on the backside of the micro-patterned 4 inch Si mold to improve the pattern fidelity over the 4 inch PMMA sheet by increasing the conformal contact between the Si mold and the PMMA sheet. The pattern replicability improvement over 4 inch wafer scale was evaluated by comparing the replicated pattern height and depth for PDMS-cushioned Si mold against the rigid Si mold without PDMS cushion.

A study on the prizm pattern replication in injection molding (사출 도광판의 프리즘 패턴 전사성에 관한 실험적 연구)

  • Kim, Chang-Wan;Yoo, Yeong-Eun;Kim, Tae-Hoon;Je, Tae-Jin;Choi, Doo-Sun
    • Proceedings of the KSME Conference
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    • 2007.05a
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    • pp.1537-1541
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    • 2007
  • We injection molded a wedge type of plate with micro prizm patterns on its surface and investigated the fidelity of replication of the micro pattern depending on the process parameter such as mold temperature, melt temperature, injection rate or packing pressure. The size of the size of the $90^{\circ}$ prizm pattern is $50{\mu}m$ and the size of the plate is about 300㎜${\times}$200㎜. The thicknesses are 2.6㎜. and 0.7mm at each edge of the wedge type of plate. The fidelity of the replication turned out quite different according to the process parameters and location of the patterns on the plate. We measured the cavity pressure and temperature in real-time during the molding to analyze the effect of the local melt pressure and temperature on the micro pattern replication.

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Fabrication of Lateral and Stacked Color Patterns through Selective Wettability for Display Applications

  • Hong, Jong-Ho;Na, Jun-Hee;Li, Hongmei;Lee, Sin-Doo
    • Journal of Information Display
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    • v.11 no.4
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    • pp.140-143
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    • 2010
  • A simple and versatile method of fabricating color patterns in two-dimension (2D) and three-dimension (3D) was developed using the selective-wettability approach. Red, green, and blue color elements are sequentially formed on a single substrate in a pattern-by-pattern and/or pattern-on-pattern fashion, through a simple coating process. Either 2D or 3D structures in an array format are produced by controlling the thickness of the hydrophobic layer (HL) coating a substrate within the framework of wetting transition. Moreover, it was demonstrated that the stacked geometry of two successive patterns can be easily tailored for various types of color arrays, with the pattern fidelity of a few tens of nanometers in terms of only a parameter of the HL thickness.

Analysis of IR-UWB Tapered Slot Antenna Radiation Pattern using the Group delay and Fidelity (군 지연 및 충실도를 이용한 IR-UWB용 테이퍼 슬롯 안테나 방사패턴 분석)

  • Kim, Keun-Yong;Ko, Yong-Mok;Park, Kyoung-Jin;Kang, Een-Kyun;Lee, Dae-Woo;Park, Jong-Hyun;Ra, Keuk-Whan
    • Journal of the Institute of Electronics and Information Engineers
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    • v.50 no.8
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    • pp.308-315
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    • 2013
  • In this paper, Tapered slot antenna of IR-UWB was Designed and fabricated using HFSS and we suggest the beam width of the broadband antenna using group-delay and fidelity. For this purpose, acquired data from the Network Analyzer was analyzed in the time domain by using the chirp-Z transform and Simulation was conducted and confirmed with the CST microwave studio. Analysis of the antenna radiation pattern is the antenna separation at intervals of 0.5 metres and then transmit antenna is fixed and the receiving antenna 360 degree intervals of 10 degree each, The results of the analysis are as follows, and analyzer of the fidelity of the antenna's performance. An analysis of more than 90 percent of the cases is less than ${\pm}40$ degrees in good fidelity, more than 90% less than ${\pm}40$ degrees and lowe fidelity. In conclusion, Analysis of Beam width of wideband antenna with more precise is possible through using these radiation pattern using fidelity.

A study on the micro pattern replication properties of large area in injection molding (대면적 미세패턴 사출성형에서의 전사 특성 실험)

  • Kim, T.H.;Yoo, Y.E.;Je, T.J.;Kim, C.W.;Park, Y.W.;Choi, D.S.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2007.05a
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    • pp.205-208
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    • 2007
  • We injection molded a thin plate with micro prism patterns on its surface and investigated the fidelity of replication of the micro pattern depending on the process parameter such as mold temperature, injection rate or packing pressure. The size of the $90^{\circ}$ prism pattern is $50{\mu}m$ and the size of the plate is $400mm{\times}400mm$. The thickness is 1mm. The fidelity of the replication turned out quite different according to the process parameters and location of the patterns of the plate. We measured the cavity pressure and temperature in real-time during the molding to analyze the effect of the local melt pressure and temperature on the micro pattern replication.

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A study on the micro pattern replication difference in injection molding (사출성형시 미세패턴 전사성 차이에 관한 연구)

  • Kim, Tae-Hoon;Yoo, Yeong-Eun;Je, Tae-Jin;Park, Yeong-Woo;Roh, Seung- Hwan;Choi, Doo-Sun
    • Design & Manufacturing
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    • v.2 no.4
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    • pp.48-53
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    • 2008
  • We injection molded a thin type of plate and wedge type of plate with micro prizm patterns on its surface and investigated the fidelity of replication of the micro pattern depending on the process parameter such as mold temperature, melt temperature, injection rate or packing pressure. The size of the $90^{\circ}$ prizm pattern is $50{\mu}m$ and the size of the plate is about $335mm{\times}213mm$ and $400mm{\times}400mm$. The thicknesses are 2.6mm and 0.7mm at each edge of the wedge type of plate and 1mm at each edge of the thin type of plate. The fidelity of the replication turned out quite different according to the process parameters and location of the patterns on the plate. We measured the cavity pressure and temperature in real-time during the molding to analyze the effect of the local melt pressure and temperature on the micro pattern replication.

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Enhancement of Pattern Fidelity for Metal Layer in Attenuated PSM Lithography by OPC

  • Lee Hoong Joo;Lee Jun Ha
    • Proceedings of the IEEK Conference
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    • 2004.08c
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    • pp.784-786
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    • 2004
  • Overlap errors and side-lobes can be simultaneously solved by the rule-based correction using scattering bars with the rules extracted from test patterns. Process parameters affecting the attPSM lithography simulation have been determined by the fitting method to the process data. Overlap errors have been solved applying the correction rules to the metal patterns overlapped with contact/via. Moreover, the optimal insertion rule of the scattering bars has made it possible to suppress the side-lobes and to get additional pattern fidelity at the same time.

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A study on the UWB Antenna Design Techniques for Improving Pulse Fidelity (펄스 충실도 개선을 위한 UWB 안테나 설계기법 연구)

  • Kim, Jung-Min;Kang, Eun-Kyun
    • Journal of the Institute of Electronics and Information Engineers
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    • v.50 no.8
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    • pp.299-307
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    • 2013
  • In this paper, design of UWB Antenna which propagate impulse by pulse fidelity and distortion equation was induced and applied. UWB Antenna which has directional characteristic in UWB band should have low radiation loss and impulse radiation distortion. As a result, the paper designed wide band impedance transformer and microstrip slotline transit region structured antenna feeder line. By using the fabricated UWB antenna, the radiation pattern was measured in the radio anechoic chamber. Pulse fidelity of impulse radiation show good results more than 93% within ${\pm}30^{\circ}$ beam width.

Design and Performance Evaluation of IR-UWB Tapered Slot Antenna for Optimum Impulse Radio Radiation (임펄스 신호 방사를 위한 IR-UWB용 테이퍼 슬롯 안테나 설계 및 성능평가)

  • Kim, Jong-Min;Koh, Young-Mok;Ra, Keuk-Whan
    • The Journal of The Korea Institute of Intelligent Transport Systems
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    • v.11 no.5
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    • pp.103-115
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    • 2012
  • In this paper, design and performance evaluation of Tapered Slot Antenna for IR-UWB which propagates impulse radio is performed. TSA which has directional characteristic in UWB band should have low radiation loss and minimized impulse radiation distortion. In order to achieve these objectives, the paper designed wide band Impedance transformer and microstrip-slotline transit region structured TSA feeder line. By using the fabricated TSA, the radiation pattern was measured in the radio anechoic chamber. Pulse fidelity and distortion equation was induced to evaluate time domain characteristics according to the impulse radiation. Pulse fidelity of Impulse radiation show favorable results more than 93% within ${\pm}30^{\circ}$ beam width.