• 제목/요약/키워드: Pattern Fabrication

검색결과 711건 처리시간 0.033초

집속이온빔을 이용한 나노 패턴 형성 (Fabrication of a Nano Pattern Using Focused Ion Beam)

  • 한진;민병권;이상조;박철우;이종항
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1531-1534
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    • 2005
  • Nano pattern is being utilized to produce micro optical components, sensors, and information storage devices. In this study, a study on nano pattern fabrication using raster-scan type Focused Ion Beam (FIB) milling is introduced. Because the intensity of ion beam has Gaussian distribution, the overlapping of the Gaussian beam results in a 3D pattern, and the shape of the pattern can be adjusted by variation of FIB milling parameters, such as overlap, ion dose, and dwell time. The Gaussian shape of single beam intensity has been investigated by experiment, and 3D nano patterns with pitch of 200nm generated by FIB is demonstrated.

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폴리머 적층 시스템을 이용한 다양한 3 차원 미세 구조물 제작에 관한 연구 (A Study on the Fabrication of Various 3D Microstructures using Polymer Deposition System)

  • 김종영
    • 한국정밀공학회지
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    • 제29권6호
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    • pp.686-692
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    • 2012
  • Solid free-form fabrication (SFF) technology was developed to fabricate three-dimensional (3D) scaffolds for tissue engineering (TE) applications. In this study, we developed a polymer deposition system (PDS) and created 3D microstructures using a bioresorbable polycaprolactone (PCL) polymer. Fabrication of 3D scaffolds by PDS requires a combination of several devices, including a heating system, dispenser, and motion controller. The system can process a polymer with extremely high precision by using a 200 ${\mu}m$ nozzle. Based on scanning electron microscope (SEM) images, both the line width and the piled line height were fine and uniform. Several 3D micro-structures, including the ANU pattern (a pattern named after Andong National University), $45^{\circ}$ pattern square, frame, cylindrical, triangular, cross-shaped, and hexagon, have been fabricated using the polymer deposition system.

디지털 프린팅을 위한 전도성 배선에 관한 연구 (Investigation of Conductive Pattern Line for Direct Digital Printing)

  • 김용식;서상훈;이로운;김태훈;박재찬;김태구;정경진;윤관수;박성준;정재우
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.502-502
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    • 2007
  • Current thin film process using memory device fabrication process use expensive processes such as manufacturing of photo mask, coating of photo resist, exposure, development, and etching. However, direct printing technology has the merits about simple and cost effective processes because inks are directly injective without mask. And also, this technology has the advantage about fabrication of fine pattern line on various substrates such as PCB, FCPB, glass, polymer and so on. In this work, we have fabricated the fine and thick metal pattern line for the electronic circuit board using metal ink contains Ag nano-particles. Metal lines are fabricated by two types of printing methods. One is a conventional printing method which is able to quick fabrication of fine pattern line, but has various difficulties about thick and high resolution DPI(Dot per Inch) pattern lines because of bulge and piling up phenomenon. Another(Second) methods is sequential printing method which has a various merits of fabrication for fine, thick and high resolution pattern lines without bulge. In this work, conductivities of metal pattern line are investigated with respect to printing methods and pattern thickness. As a result, conductivity of thick pattern is about several un.

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나노인덴테이션을 이용하여 극미세 패턴을 제작하기 위한 나노 변형의 유한요소해석(I) (Finite Element Analysis of Nano Deformation for the Hyper-Fine Pattern Fabrication by using Nanoindentation)

  • 이정우;윤성원;강충길
    • 한국정밀공학회지
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    • 제20권5호
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    • pp.210-217
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    • 2003
  • In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numerical method by ABAQUS S/W. Polymer (PMMA) and brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic restoration and pile-up was proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1-l0mm. The result of the investigation will be applied to the fabrication of the hyper-fine pattern and mold.

나노인덴테이션 공정을 이용하여 극미세 패턴을 제작하기 위한 나노변형의 유한요소해석(II) (Finite Element Analysis of Nano Deformation for Hyper-fine Pattern Fabrication by Application of Nanoidentation Process (II))

  • 이정우;윤성원;강충길
    • 한국정밀공학회지
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    • 제20권9호
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    • pp.47-54
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    • 2003
  • In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numerical method by ABAQUS S/W. Polymer (PMMA) and brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic re cover and pile-up were proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1 -l0nm. Comparison between the experimental data and numerical result demonstrated that the finite element approach is capable of reproducing the loading-unloading behavior of a nanoindentation test. The result of the investigation will be applied to the fabrication of the hyper-fine pattern.

극미세 Mold 및 패턴 제작물 위한 나노변형의 기초연구 (Fundamental Study on Deformation Behavior of the Nano Structure for Application to the Hyper-fine Pattern and Mold Fabrication)

  • 이정우;윤성원;강충길
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2002년도 추계학술대회 논문집
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    • pp.333-336
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    • 2002
  • In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numberical method by ABAQUS S/W. Polymer (PMMA) and brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic restoration and bur was proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1-l0nm. The result of the investigation will be applied to the fabrication of the hyper-fine pattern and mold.

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Electric Circuit Fabrication Technology using Conductive Ink and Direct Printing

  • 정재우;김용식;윤관수
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2009년도 춘계학술발표대회
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    • pp.12.1-12.1
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    • 2009
  • For the micro conductive line, memory device fabrication process use many expensive processes such as manufactur-ing of photo mask, coating of photo resist, exposure, development, and etching. However, direct printing technology has the merits about simple and cost effective processes because nano-metal particles contained inks are directly injective without mask. And also, this technology has the advantage about fabrication of fine pattern line on various substrates such as FPCB, PCB, glass, polymer and so on. In this work, we have fabricated the fine and thick metal pattern line on flexible PCB substrate for the next generation electronic circuit using Ag nano-particles contained ink. To improve the line tolerance on flexible PCB, metal lines are fabricated by sequential prinitng method. Sequential printing method has vari-ous merits about fine, thick and high resolution pattern lines without bulge.

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나노스크래치 공정을 이용하여 극미세 패턴을 제작하기 위한 나노 변형의 유한요소해석 (Finite Element Analysis of Nano Deformation for Hyper-fine Pattern Fabrication by Application of Nano-scratch Process)

  • 이정우;강충길;윤성원
    • 한국정밀공학회지
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    • 제21권3호
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    • pp.139-146
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    • 2004
  • In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation scratch test was studied with numerical method by ABAQUS S/W. Brittle materials (Si, Pyrex glass 7740) were used as specimens, and forming conditions to reduce the elastic recovery and pile-up were proposed. The indenter was modeled as a rigid surface. Minimum mesh sizes of specimens are 1-l0nm. Variables of the nanoindentation scratch test analysis are scratching speed, scratching load, tip radius and tip geometry. The nano-indentation scratch tests were performed by using the Berkovich pyramidal diamond indenter. Comparison between the experimental data and numerical result demonstrated that the FEM approach can be a good model of the nanoindentation scratch test. The result of the investigation will be applied to the fabrication of the hyper-fine pattern.

소실모형주조법에 의한 내마모 복합조직층 형성에 미치는 공정인자의 영향 (Effects of Parameters on Abrasion-Resistant Layer of Composite Structure Formed by Evaporation Pattern Casting)

  • 최창영;모남규;김건호;윤종천;정유현;김동혁;최용진;이인규;조용재
    • 한국기계가공학회지
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    • 제17권2호
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    • pp.89-94
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    • 2018
  • Due to industrial advancement and environmental concerns, there is a demand for light-weight material parts with high-performance characteristics. In order to meet this demand, various studies have been conducted on developing high-performance castings to achieve composite features by coating only specific parts that require high performance, with dissimilar joining, rather than coating the entire material part. This study analyzed the possibility of forming a local composite layer on an aluminum alloy through evaporation pattern casting, and the effects of parameters on the aluminum alloy.