• Tribology and Lubricants
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• v.31 no.3
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• pp.79-85
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• 2015

RC delay is a critical issue for achieving high performance of ULSI devices. In order to minimize the RC delay time, we uses the CMP process to introduce high-conductivity Cu and low-k materials on the damascene. The low-k materials are generally soft and fragile, resulting in structure collapse during the conventional high-pressure CMP process. One troubleshooting method is electrochemical mechanical polishing (ECMP) which has the advantages of high removal rate, and low polishing pressure, resulting in a well-polished surface because of high removal rate, low polishing pressure, and well-polished surface, due to the electrochemical acceleration of the copper dissolution. This study analyzes an electrochemical state (active, passive, transpassive state) on a potentiodynamic curve using a three-electrode cell consisting of a working electrode (WE), counter electrode (CE), and reference electrode (RE) in a potentiostat to verify an electrochemical removal mechanism. This study also tries to find optimum conditions for ECMP through experimentation. Furthermore, during the low-pressure ECMP process, we investigate the effect of current density on surface roughness and removal rate through anodic oxidation, dissolution, and reaction with a chelating agent. In addition, according to the Faraday’s law, as the current density increases, the amount of oxidized and dissolved copper increases. Finally, we confirm that the surface roughness improves with polishing time, and the current decreases in this process.

• Journal of the Korean Arthroscopy Society
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• v.2 no.2
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• pp.124-128
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• 1998

From Feb. 1996 to Feb. 1997. among sixty-four patients of anterior cruciate ligament(ACL) reconstruction using multi-stranded hamstring tendon and EndoButton fixation, twenty-five patients of volunteer, 15 men and 10 women, from 16 to 50 years of age(mean 27.6 years) underwent arthroscopic evaluation. Arthroscopic evaluation was routinely performed one year after surgery along with an examination of stability. The purpose of this study was to arthroscopically evaluate the morphological changes that occurred in hamstring tendon autograft one year after ACL reconstruction. Both of the tendon graft and the adjacent fibrous tissues were observed for gross appearance and physical properties with probing and response to passive anterior translation. Biopsy samples were taken from the surrounding fibrous tissue and the tendon graft. Grossly, we found a well-defined ligamentous structure with good tension tested with a probe. A common finding was that the reconstructed ligaments were embedded in a layer of the synovium, and blood vessels could be seen on the anterior surface of the ligament. The biopsy tissue was placed in formalin solution and subjected to histological preparation by hematoxylin and eosin staining method. The hamstring tendon graft appeared histologically normal under light microscopic finding. There were a few vessels located between existing collagen bundles, and the vessels had an orderly pattern. The surrounding fibrous tissue envelope was covered with synovium. We pleased with preliminary findings in our evaluation.

• Journal of Information Display
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• v.10 no.4
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• pp.149-157
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• 2009

Reported herein is the architecture for a nonvolatile n-type memory paper field-effect transistor. The device was built via the hybrid integration of natural cellulose fibers (pine and eucalyptus fibers embedded in resin with ionic additives), which act simultaneously as substrate and gate dielectric, using passive and active semiconductors, respectively, as well as amorphous indium zinc and gallium indium zinc oxides for the gate electrode and channel layer, respectively. This was complemented by the use of continuous patterned metal layers as source/drain electrodes.

• Proceedings of the Optical Society of Korea Conference
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• 2000.08a
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• pp.28-29
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• 2000

Optical power splitters and/or couplers are important components for optical signal distribution between channels both in wavelength division multiplexing(WDM) systems and photonic integrated circuits(PICs). Since polarization is usually not known after propagation in an optical fiber, passive WDM components have to be polarization insensitivity, Compared to alternatives such as directional couplers or Y-junction splitters, splitters based on multimode interference(MMI) have found a growing interest in recent yens because of their desirable characteristics, such as compact size, low excess loss, wide bandwidth, polarization independence, and relaxed fabrication tolerances$^{(1)}$ . These devices have been fabricated in polymers, silica, or III-V semiconductor materials. A1 $\times$ 4 MMI power splitter on InP materials that were suitable for application in the 1.55-${\mu}{\textrm}{m}$ region$^{(2)}$ . However, the fabrication process of the structure is too complicated and the photolithography tolerance is very tight. Also, a 1 $\times$ 16 InGaAsP/InP MMI power splitter with an excess loss of 2.2dB and a splitting ratio of 1.5dB was demonstrated by using deep etching$^{(3)}$ . The deep etching of the sidewalls through the entire guide layer of the slab waveguide resulted in a number of drawbacks$^{(4)}$ . (omitted)

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.32 no.7
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• pp.43-50
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• 2004

For the simultaneous measurement of strain and damage signal a fiber Bragg grating sensor system with a dual demodulator was proposed. The dual demodulator is composed of a demodulator using a tunable Fabry-Perot filter measuring the low-frequency signal with large magnitude such as strain and the other using a passive Mach-Zehnder interferometer detecting the high-frequency signal with small amplitude such as impact or damage signal. Using the proposed fiber Bragg grating sensor system, both the strain and damage signals of a cross-ply laminated composite beam under tensile loading were simultaneously measured. The strain and damage signals detected by single fiber Bragg grating sensor showed that sudden strain shifts were accompanied with vibration at a maximum frequency of several hundreds of kilohertz at the instant of matrix crack propagation in the 90 degree layer in composite beam.

• Journal of the Korean Ceramic Society
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• v.40 no.1
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• pp.77-80
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• 2003

Adsorption of glycine on$Si_3N_4$powder surface has been investigated, which is supposed to enhance the formation of passive layer inhibiting oxidation in aqueous solution. In the basic solution, multinuclear surface complexing between Si and dissociated ligands was responsible for the saturated adsorption of glycine. In addition, $CeO_2$-based CMP slurry containing glycine was manufactured and then applied to planarize$SiO_2$and$Si_3N_4$thin film. Owing to the passivation by glycine, the removal rates, Rh, were decreased, however, the selectivities, RE(SiO$_2$)/RR($Si_3N_4$), increased and showed maximum at pH=12. The suppressed oxidation and dissolution by adsorbate were correlated with the dissociation behavior of glycine at different pH and subsequent chemical adsorption.

• The Journal of the Acoustical Society of Korea
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• v.33 no.3
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• pp.163-173
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• 2014

Sound propagation algorithm for a sonar simulator is required to run in real-time and should be able to model the range and depth dependence of the Korean ocean environments. Ray model satisfies these requirements and we developed an algorithm for range-dependent ocean environments. In this algorithm, we considered depth-dependence of sound speed through rays based on a rectangular cell method and layer method. Range-dependence of sound speed was implemented based on a split-step method in the range direction. Eigen-ray is calculated through an interpolation of ray bundles and Gaussian interpolation function was used. The received time signal of sonar was simulated by Fourier transform of eigen-ray solution in the frequency domain. Finally, for the verification of proposed algorithm, we compared the results of transmission loss with other validated models such as BELLHOP, SNUPE, KRAKEN and OASES, for the Pekeris waveguide, wedge, and deep ocean environments. As a result, we obtained satisfactory agreements among them.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2004.04a
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• pp.95-102
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• 2004

For the simultaneous measurement of strain and damage signal, a fiber Bragg grating sensor system with a dual demodulator was proposed. One demodulator using a tunable Fabry-Perot filter can measure low-frequency signal such as strain and the other demodulator using a passive Mach-Zehnder interferometer can detect high-frequency signal such as damage signal or impact signal. Using a proposed fiber Bragg grating sensor system, both the strain and damage signal of a cross-ply laminated composite beam under tensile loading were simultaneously measured. Analysis of the strain and damage signals detected by single fiber Bragg grating sensor showed that sudden strain shifts were induced due to transverse crack propagation in the 90 degree layer of composite beam and vibration with a maximum frequency of several hundreds of kilohertz was generated.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.45 no.8
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• pp.114-120
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• 2008

In this paper, we extract the parasitic elements of the metal-insulate-metal(MIM) capacitor using short-open calibration (SOC). The scattering matrixes of short, open, and MIM structures in strip lines are measured by full electro-magnetic (EM) simulator and vector network analyser. The full EM simulations are performed by finite element method (FEM) that was fitted three dimensional structure analysis. The electro-magnetic effects of MIM capacitor laminated in the multi-layered structures are proposed the II equivalent circuit with lumped elements, and the relations between the measured scattering parameters of the MIM structures and lumped elements in the circuits are shown by performing 2 port network analysis. The extracted lumped elements using the proposed SOC method are independent to frequencies.

• The Journal of the Acoustical Society of Korea
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• v.30 no.2
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• pp.63-72
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• 2011

Since the detection probability is critically dependent on the target strength (TS) in active sonar and on the radiated noise level (RNL) in passive sonar, the acoustic materials for echo reduction (ER) and transmission loss (TL) are widely used for the stealth of underwater targets. In this paper, a measurement system based on the small water tank, for the frequency range of greater than 30 kHz, is developed and verified using reference targets. In order to design the water tank and the geometry of test samples, a program is developed to calculate the arrival time of interfering signals due to the reflection from water tank walls and also due to the diffraction from the edge of the test samples. Considering all the interfering signals, an optimal experimental configuration for water tank and test samples is designed and used throughout the experiment. Next, the signal processing algorithms to estimate ER and TL are developed based on the measured propagation loss reflecting the geometric spreading characteristics of the transducer. Finally, a set of reference targets such as aluminium plate and perfectly reflecting plate are used in a small water tank to verify the developed measurement system.