• Journal of the Korean Society of Manufacturing Process Engineers
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• v.15 no.4
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• pp.148-154
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• 2016

A study on the micro particle blasting was conducted to find the optimum conditions of the blasted surface of aluminum 6061. The particle type such as $Al_2O_3$ and SiC, nozzle diameter, pressure, standoff distance and injection time were used as blasting conditions. Statistical method of orthogonal arrays(ANOVA) was used to find optimum conditions of maximum depth and maximum diameter of blasted surface. Particle type, nozzle diameter, and pressure were found to be the main factors of maximum blasted depth and diameter. Maximum blasted diameter was affected by increasing pressure and nozzle diameter but saturated maximum diameter. Maximum blasted depth was affected by pressure and nozzle diameter when aluminum 6061 was blasted with $Al_2O_3$ particle. The value of surface roughness was increased as pressure and nozzle diameter increased when aluminum 6061 was blasted with SiC.

• Transactions of the Korean Society of Automotive Engineers
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• v.10 no.1
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• pp.9-16
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• 2002

The particles velocity in the instantaneous flow field and velocity change of particles along the jet centerline for various particle diameter in a circular turbulent impingement jet are investigated by using particle image velocimetry(PIV) and an equation of particle motion simplified by terms of inertia forces, drag and gravitational force. The jet Reynolds number was 3300 and 8700, and glass beads of 30,58 and 100$\mu$m in diameter were used. The PIV results show that the direction and size of velocity depends not only on the number density of particle but also on the particle momentum. The results obtained form calculation suggest that the particle velocity near the first impingement region deviated from local air velocity, which accords well with the PIV results. The rebound height of particle increase with the particle diameter. In the second-impingement, particle velocities increased sluggishly with Re=3300 but particle velocities uniformed with Re=8700 in stagnation region.

• Particle and aerosol research
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• v.13 no.4
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• pp.159-164
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• 2017

The detection efficiency and characteristics of an optical particle counter (OPC), with various sample nozzle outlet diameters, were experimentally investigated. The OPC system, which was built with original design, was made up of a diode laser, two photodetectors, and a variety of optics such as a beam splitter and a concave mirror. The cone-shaped sampling nozzle was designed to be changeable to alter the outlet diameter, within the range of 1 to 3 mm. For samples, sets of polystyrene latex (PSL) standard particle with various sizes of 1 to $3{\mu}m$, were used. As a result, detection efficiency of the OPC greatly decreased with larger nozzle outlet diameter. Moreover, increased nozzle outlet diameter means broader sample flow, thus caused light interference and multiple scattering which results in abnormal high peaks in scattered light signal. The ratio of abnormal peaks to regular signal of single particle increased with larger nozzle outlet diameter.

• Particle and aerosol research
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• v.13 no.2
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• pp.53-63
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• 2017

As semiconductor process was highly integrated, particle contamination became a major issue. Because particle contamination is related with process yields directly, particles with a diameter larger than half pitch of gate should be controlled. PBMS (Particle beam mass spectrometry) is one of powerful nano particle measurement device. It can measure 5~500 nm particles at ~ 100 mtorr condition in real time by in-situ method. However its usage is restricted to research filed only, due to its big device volume and high price. Therefore aperture changeable aerodynamic lenses (ACALs) which can control particle focusing characteristics by changing its aperture diameter was proposed in this study. Unlike conventional aerodynamic lenses which changes particle focusing efficiency when operating condition is changed, ACALs can maintain particle focusing efficiency. Therefore, it can be used for a multi-monitoring system that connects one PBMS and several process chambers, which greatly improves the commercialization possibility of the PBMS. ACALs was designed based on Stokes number and evaluated by numerical method. Numerical analysis results showed aperture diameter changeable aerodynamic lenses can focus 5 to 100 nm standard particles at 0.1 to 10 torr upstream pressure.

• Particle and aerosol research
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• v.19 no.4
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• pp.155-164
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• 2023

APS (Aerodynamic Particle Sizer) and OPC (Optical Particle Counter) have been widely used to real-time measurement of indoor and outdoor aerosols. The APS measures the size distribution based on an aerodynamic diameter, while the OPC uses optical diameter to measure the size distribution of aerosols. Since obtaining a size distribution based on aerodynamic diameter is important to understand aerosol characteristics, lots of researcher had been developed experimental equations which can convert optical diameter into aerodynamic diameter. However, previous studies have conducted repeated experiments on particles having a single diameter. In this study, an experimental method of converting optical diameter into aerodynamic diameter through a single experiment was presented. The collection efficiencies of an axial cyclone were measured using APS and OPC at the same time, and the correlation equation between aerodynamic diameter and optical diameter was driven through a theoretical model. Using the proposed method, the size distribution of NaCl particles measured by OPC showed a high correlation with the size distribution obtained by APS (0.93 of R-squared value). In the tests conducted on ISO A1, A2, and A4 test particles, the converted OPC size distribution tended to be similar to the APS size distribution, and for each of test particles (ISO A1, A2, and A4), the R-squared values for the APS particle size distribution were 0.75, 0.86, and 0.89, respectively.

• International Journal of Aeronautical and Space Sciences
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• v.12 no.3
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• pp.296-304
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• 2011

In order to design a shear coaxial injector of solid particles with water, basic experiments on a particle laden jet are necessary. The purpose of the present study is to understand the effect of particle loading ratio on the particle spray characteristics (i.e. spreading angle, distribution of particle number density, velocity profiles, and particle developing region length). Hydro-reactive Al2O3 particles with a primary particle diameter of 35~50 ${\mu}m$ are used in this experiment. An automated particle feeder was designed to supply constant particle mass flowrates. Air is used as the carrier gas. To determine the air velocity at the orifice exit, tracers (aluminum oxide, 0.5~2 ${\mu}m$ primary diameter) are also supplied by a tracer feeder. A plain orifice type injector with 3 mm diameter, and 20 mm length was adopted. Particle image velocimetry is used to measure the mean and fluctuating velocity components along the axial and radial directions.

• Journal of Physiology & Pathology in Korean Medicine
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• v.17 no.5
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• pp.1257-1263
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• 2003

The modified engineering methodology and the modified electronic circuit in classical ultrasonic principles were applied to ultrasonic aerosol nebulizer for inhalation toxicology study of cadmium aerosol. 1532.96ppm Cd nebulizing solution was used to generate cadmium aerosol for particle size analysis with the modifying source and inlet temperatures. The results of particle size analysis for cadmium aerosol were as following. The highest particle counting for source temperature 20℃ was 399.75 × 10² in inlet temperature 100℃ and particle diameter 0.75㎛. The highest particle counting for source temperature 50℃ was 399.70 × 10² in inlet temperature 50℃ and particle diameter 0.75㎛. The highest particle counting for source temperature 70℃ was 411.14 × 10² in inlet temperature 100℃ and particle diameter 0.75㎛. The ranges of geometric mean diameter were 0.74-0.79㎛ in source temperature 20℃, 0.65-0.72㎛ in source temperature 50℃, and 0.65-0.80㎛ in source temperature 70℃. The smallest geometric mean diameter was 0.65㎛ in source temperature 50, 70℃ and inlet temperature 20, 50℃, and the largest geometric mean diameter was 0.80㎛ in source temperature 70℃ and inlet temperature 100℃. The ranges of geometric standard deviation were 1.71-1.80 in source temperature 20℃, 1.27-1.61 in source temperature 50℃, and 1.27-2.29 in source temperature 70℃. The lowest geometric standard deviation was 1.27 in source temperature 50, 70℃ and inlet temperature 20, 50℃, and the highest geometric standard deviation was 2.29 in source temperature 70℃ and inlet temperature 100℃. Generated aerosol for cadmium inhalation toxicology study was polydisperse aerosol with the above geometric standard deviation 1.2. The ranges of mass median diameter(MMD) were 1.75-2.25㎛ in source temperature 20℃, 1.27-1.61㎛ in source temperature 50℃, and 1.27-2.29㎛ in source temperature 70℃. The smallest MMD was 1.27㎛ in source temperature 50, 70℃ and inlet temperature 20, 50℃, and the largest MMD was 2.29㎛ in source temperature 70℃ and inlet temperature 100℃. Cadmium chloride concentration in nebulizing solution affected the particle size and distribution of cadium aerosol in air. MMO for inhalation toxicology testing in OECD and EU is less than 3㎛ and EPA guidance is less than 4㎛. In our results, in source temperatures of 20, 50, 70℃, and inlet temperatures of 20, 50, 100, 150, 200, 250℃ were conformed to the those guidance.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.13 no.7
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• pp.579-587
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• 2001

This study investigates particle collection characteristics of a cylindrical electrostatic precipitator. Experimental work has been made for the submicron particles. The effects of polarity of discharge electrode wire, particle diameter, gas velocity, gas temperature, and specific corona power on the particle collection efficiency are investigated. The efficiency of negative corona is higher than that of positive corona. as the particle diameter increases, the efficiency is decreased when the diameter is in the range of 0.02-0.6 micron, but is increased for the nanometer particles with diameter smaller than 0.02 micron. The efficiency is increased with increase of specific corona power. As the gas temperature increases, overall collection efficiency is increased for a negative corona, but is deceased for a positive corona.

• Particle and aerosol research
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• v.8 no.1
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• pp.29-35
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• 2012

The Faraday cup electrode of different size has been developed and evaluated to investigate the diffusion effect of particles by Brownian motion in a particle beam mass spectrometer(PBMS). Particles which focused and accelerated by aerodynamic lens are charged to saturation in an electron beam, and then deflected electrostatically into a Faraday cup detector for measurement of the particle current. The concentration of particles is converted from currents detected by Faraday cup. Measurements of particle current as a function of deflection voltage are combined with measured relationships between particle velocity and diameter, charge and diameter, and mass and diameter, to determine the particle size distribution. The particle currents were measured using 5, 10, 20, 40 mm sized Faraday cup that can be move to one direction by motion shaft. The current difference for each sizes as a function of position was compared to figure out diffusion effect during transport. Polystyrene latex(PSL) 100, 200 nm sized standard particles were used for evaluation. The measurement using 5 mm sized Faraday cup has the highest resolution in a diffusion distance and the smaller particles had widely diffused.

• Particle and aerosol research
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• v.8 no.2
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• pp.89-95
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• 2012

Spherical mesoporous silica particles, of which main pore diameter was 3.8 nm, were successfully prepared by spray pyrolysis from aqueous silicic acid. The effect of precursor concentration, reaction temperature, and the addition of urea and PEG on the particle diameter and pore properties such as pore diameter, total pore volume, and specific surface area were investigated by using FE-SEM, particle size analyzer, and nitrogen absorption-desorption analysis. With an increase of the precursor concentration from 0.2 M to 0.7 M, the average particle diameter, total pore volume, and specific surface area of the porous silica particles increased from 0.56 to $0.96\;{\mu}m$, 0.434 to $0.486\;cm^3/g$, 467.8 to $610.4\;m^2/g$, respectively. Within the temperature range $(600\;^{\circ}C{\sim}800\;^{\circ}C)$, there was no significant difference in the pore diameter, total pore volume, and specific surface area. In addition, the addition of urea as an expansion aid led to slight increases in particle diameter, pore diameter, and specific surface area. However, when the polyethylene glycol (PEG) as an organic template was used, the total pore volume of porous particles increased dramatically.