• Title/Summary/Keyword: Particle charge

Search Result 409, Processing Time 0.024 seconds

Model of Particle Growth in Silane Plasma Reactor for Semiconductor Fabrication (반도체 제조용 사일렌 플라즈마 반응기에서의 입자 성장 모델)

  • 김동주;김교선
    • Journal of the Korean Vacuum Society
    • /
    • v.10 no.2
    • /
    • pp.275-281
    • /
    • 2001
  • We used the discrete-sectional model to analyze the particle growth by coagulation of particles in silane plasma reactor, considering the Gaussian distribution function for particle charges. The effects of process conditions such as monomer size and mass generation rate of monomers on particle growth in plasma reactor were analyzed theoretically/ Based on the Gaussian distribution function of particle charges, the large particles of more than 40 nm in size are almost found to be charged negatively, but some fractions of small, tiny particles are in neutral state or even charged positively. As the particle size and surface area increase with time by particle coagulation, the number of charges per particle increases with time. As the large particles are generated by particle coagulation, the particle size distribution become bimodal. The results of discrete-sectional model for the particle growth in silane plasma reactor were in close agreement with the experimental results by Shiratani et al. [3] for the same plasma conditions. We believe the model equations for the particle charge distribution and coagulation between particles can be applied to understand the nano-sized particle growth in plasma reactor.

  • PDF

ELECTRON TEMPERATURE ESTIMATION OF NON-THERMAL ATMOSPHERIC-PRESSURE NEON AND OXYGEN ADMIXTURE PLASMA JET BY CONVECTIVE WAVE PACKET MODEL

  • SORNSAKDANUPHAP, Jirapong;SUANPOOT, Pradoong;Hong, Young June;Ghimire, Bhagirath;CHO, Guangsup;CHOI, EunHa
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2016.02a
    • /
    • pp.207-207
    • /
    • 2016
  • plasma group velocities of neon with oxygen admixture (ug) are obtained by intensified charge coupled device (ICCD) camera images at fixed gate width time of 5 ns. The propagation velocities outside interelectrode region are in the order of 104 m/s.The plasma ambipolar diffusion velocities are calculated to be in the order of 102 m/s. Plasma jet is generated by all fixed sinusoidal power supply, total gas flow and repetition frequency at 3 kV, 800 sccm and 40 kHz, respectively. The amount of oxygen admixture is varied from 0 to 2.75 %. By employing one dimensional convective wave packet model, the electron temperatures in non-thermal atmospheric-pressure plasma jet are estimated to be in a range from 1.65 to 1.95 eV.

  • PDF

ELECTRON TEMPERATURE ESTIMATION OF NON-THERMAL ATMOSPHERIC-PRESSURE NEON AND ARGON PLASMA JET BY CONVECTIVE WAVE PACKET MODEL

  • SORNSAKDANUPHAP, Jirapong;SUANPOOT, Pradoong;Hong, Young June;Ghimire, Bhagirath;CHO, Guangsup;CHOI, Eun Ha
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2015.08a
    • /
    • pp.156.1-156.1
    • /
    • 2015
  • Neon and argon plasma group velocities (ug) are obtained by intensified charge coupled device (ICCD) camera images at fixed gate width time of 5 ns. The propagation velocities in upstream and downstream region are in the order of 104-105 m/s. The plasma ambipolar diffusion velocities are calculated to be in the order of 101-102 m/s. Plasma jet is generated by sinusoidal power supply in varying voltages from 1 to 4 kV at repetition frequency of 40 kHz. By employing one dimensional convective wave packet model, the neon and argon electron temperatures in non-thermal atmospheric-pressure plasma jet are estimated to be 1.95 and 1.18 eV, respectively.

  • PDF

A Study on the Insulation Diagnosis to measure Radiated Electromagnetic Waves with Partial Discharge Propagation at being of Conductive Particle in model GIS (모의 GIS 내부에 도전성 이물질 존재시 부분방전 진전에 따른 전자파 측정에 의한 절연진단연구)

  • Park, Kwang-Seo
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
    • /
    • v.22 no.1
    • /
    • pp.157-164
    • /
    • 2008
  • Partial discharge were simulated by conductive particle which could be easy accumulated charge and concentrated electric field in the model GIS. Radiated electromagnetic waves were measured and analyzed by using spectrum analyzer and antenna ($30{\sim}2000[MHz]$) for measurement of EMI EMC in accordance with occurrence and propagation of partial discharge. This paper suggested the other method of detecting and estimating of partial discharge for insulation diagnosis of GIS being conductive particle by measurement and analysis of radiated electromagnetic waves. From results of this study, it was confirmed that if the suggested method should be used for the diagnosis of insulation in the model GIS being conductive particle, detecting partial discharge and estimating discharge propagation will be possible.

A study on the Coating Structure and Printability of Coated Paper (I) - Effect of Ionic Monomer on Paper-coating Latex Properties - (도공층 구조 및 도공지의 인쇄적성에 관한 연구 (I) - 이온성 단량체가 도공용 라텍스의 물성에 미치는 영향 -)

  • Lee, Yong-Kyu
    • Journal of the Korean Wood Science and Technology
    • /
    • v.25 no.3
    • /
    • pp.75-82
    • /
    • 1997
  • To improve the quality of coated paper, the continuous research to the coating components and development of alternative latices is required. Recently, amphoteric latex is getting a great concern due to their changable properties of surface charge through controlling pH and some methods have been tried to prepare amphoteric latices. This study was carried out to synthesize amphoteric latex using seeding polymerization method with low concentration emulsifier. Styrene was used as a main monomer in addition to acrylonitrile for a hydrophilic comonomer. acrylic acid for a anionic comonomer and N,N-dimethylaminoethyl methacrylate for a cationic comonomer. Particle size and viscosity of latex were greatly affected by addition of acrylic acid and ammonium persulfate as an initiator. Negative charge of latex in alkali condition was changed to zero to positive charge in around pH 4.

  • PDF

Analysis of Driving Characteristics by Putting Voltage of Charged Particle Type Display Device (대전입자형 디스플레이 소자의 충전전압에 따른 구동특성 분석)

  • Kim, Jin-Sun;Kim, Young-Cho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.25 no.1
    • /
    • pp.48-52
    • /
    • 2012
  • The charged particle type display device is a kind of the reflectivity type display and shows an image by absorption and reflection of external light source. The charged particle is important factor for driving of the display and quantity of charge per mass of the charged particle determines the driving voltage, contrast ratio, response time, etc. But it is easy for the charged particles to be damaged in the putting process of the display and the damages cause lumping phenomenon of the charged particles. Because the lumping phenomenon makes high driving voltage, low quality of optical properties, short life time, etc, so the charged particles must be filled by stable putting methods. In this paper, we filled the charged particles into the panels by electric fields to improve the electrical and optical characteristics of the display. Also, we analyzed the driving characteristics of the charged particles according to the applied putting voltages.

Effects of Particle Shapes on Unipolar Diffusion Charging of Non-Spherical Particles (비구형 입자의 형상에 따른 단극 확산 하전 특성)

  • Oh, Hyun-Cheol;Park, Hyung-Ho;Kim, Sang-Ho
    • Transactions of the Korean Society of Mechanical Engineers B
    • /
    • v.28 no.5
    • /
    • pp.501-509
    • /
    • 2004
  • Unipolar diffusion charging of non-spherical particles was investigated for various particle shapes. We researched with TiO$_2$agglomerates produced by the thermal decomposition of titanium tetraisopropoxide (TTIP) vapor. TTIP was converted into TiO$_2$, in the furnace reactor and was subsequently introduced into the sintering furnace. Increasing the temperature in the sintering furnace, aggregates were restructured into higher fractal dimensions. The aggregates were classified according to their mobility using a differential mobility analyzer. The projection area and the mass fractal dimension of particles were measured with an image processing technique performed by using transmission electron microscope (TEM) photograph. The selected aggregates were charged by the indirect photoelectric-charger and the average number of charges per particle was measured by an aerosol electrometer and a condensation particle counter. For the particles of same mobility diameter, our results showed that the particle charge quantity decreases as the sintering temperature increases. This result is understandable because particles with lower fractal dimension have larger capacitance and geometric surface area.

A Comparative Study on the Conditioning and Dewaterability of Digested Sludge from Intermittent Aerobic Digestion (간헐포기 소화슬러지의 개량과 탈수 특성에 관한 비교 연구)

  • Kim, Seong Hong;Choi, Young Gyun;Chung, Tai Hak
    • Journal of Korean Society on Water Environment
    • /
    • v.20 no.4
    • /
    • pp.370-375
    • /
    • 2004
  • Synthetic organic polyelectrolytes can be used to condition sludges to enhance their dewaterability. When conditioning biological sludges, the charge on the polymer has a significant impact on the effectiveness of the polymer as a conditioner. The objectives of this investigation were to determine the most effective type and dosage of polymer for conditioning digested sludge prior to dewatering, and to investigate the relationship between dewaterability and particle size. 3 types of digested sludge were used under the different digestion processes like anaerobic digestion, aerobic digestion and intermittent aerobic digestion. CST(capillary suction time), TTF(time-to-filter) and SRF(specific resistance to filtration) were tested as a dewaterability index and the number of particle distribution was analyzed using particle size analyzer. The results indicate that cationic polymer appears to be required for effective conditioning of these 3 types digested sludge and the optimal polymer dosage is about 0.6% of SS. CST and TTF are well correlated with mean particle diameter of which the dimension order is 1.7.

Development and Performance Evaluation of PN-PEMS (PN-PEMS 장비의 개발 및 평가)

  • Hwang, In-Kyu;Kim, Min-Ho;Woo, Seung-Chul;Lee, Ki-Hyung;Ah, Kang-Ho
    • Particle and aerosol research
    • /
    • v.10 no.4
    • /
    • pp.163-167
    • /
    • 2014
  • Particle number portable emission measurement system (PN-PEMS) is an instrument for measuring number concentration of automobile exhaust. The principle of some pre-existing commercial PN-PEMS is to charge particles and display the number of particles by measuring current. However, this method has some problems for measuring exhaust. In this study, to solve these issues, we have developed a single particle counting PN-PEMS based condensation particle counter (CPC). The PN-PEMS based CPC does not affect driving conditions and it is convenient for mobile because the instrument is small and light in structure. We evaluated counting efficiency of PN-PEMS based CPC by using electrostatic method (electrometer and Faraday cup).