• 한국입자에어로졸학회지
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• 제5권1호
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• pp.17-27
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• 2009

Particle deposition on a semiconductor wafer larger than 100 mm was studied experimentally and numerically. Particularly the electrostatic effect on particle deposition velocity was investigated. The experimental apparatus consisted of a particle generation system, a particle deposition chamber and a wafer surface scanner. Experimental data of particle deposition velocity were obtained for a semiconductor wafer of 200 mm diameter with the applied voltage of 5,000 V and PSL particles of the sizes between 83 and 495 nm. The experimental data of particle deposition velocity were compared with the present numerical results and the existing experimental data for a 100 mm wafer by Ye et al. (1991) and Opiolka et al. (1994). The present numerical method took into consideration the particle transport mechanisms of convection, Brownian diffusion, gravitational settling and electrostatic attraction in an Eulerian frame of reference. Based on the comparison of the present experimental and numerical results with the existing experimental results the present experimental method for a 200 mm semiconductor wafer was found to be able to present reasonable data.

• 대한기계학회논문집B
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• 제26권12호
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• pp.1715-1721
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• 2002

Numerical analysis was conducted to characterize the gas flow field and particle deposition on a horizontal freestanding semiconductor wafer under the laminar flow field at vacuum environment. In order to calculate the properties of gas, the gas was assumed to obey the ideal gas law. The particle transport mechanisms considered were convection, Brownian diffusion and gravitational settling. The averaged particle deposition velocities and their radial distributions fnr the upper surface of the wafer were calculated from the particle concentration equation in an Eulerian frame of reference for system pressures of 1 mbar~1 atm and particle sizes of 2nm~10$^4$ nm(10 ${\mu}{\textrm}{m}$). It was observed that as the system pressure decreases, the boundary layer of gas flow becomes thicker and the deposition velocities are increased over the whole range of particle size. One thing to be noted here is that the deposition velocities are increased in the diffusion dominant particle size range with decreasing system pressure, whereas the thickness of the boundary layer is larger. This contradiction is attributed to the increase of particle mechanical mobility and the consequent increase of Brownian diffusion with decreasing the system pressure. The present numerical results showed good agreement with the results of the approximate model and the available experimental data.

• Nuclear Engineering and Technology
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• 제29권4호
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• pp.269-279
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• 1997

The errors associated with incorrect sampling and transport of radioactive aerosol from radwaste thermal process off-gas are analyzed and the conditions of representative sampling and correct transport of radioactive aerosol for off-gas system evaluation are discussed. An estimation method of sampling errors for individual radionuclides is proposed and applied to simulated vitrification melter aerosols. Prediction methods for particle deposition in sample transport tube under laminar as well as turbulent flow conditions are also described by example calculations with simulated incinerator off-gas From the results of example calculations and plots, instrumental and operational conditions of radioactive aerosol sampling system with minimized errors and correction methods for nonideal sampling and transport are recommended.

• 대한기계학회논문집B
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• 제20권5호
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• pp.1624-1638
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• 1996

A study of thermophoretic particle deposition has been carried out for a particle laden stagnation flow considering the effect of radiative heat transfer. Energy, concentration and radiative transfer equations are all coupled and have been solved iteratively assuming that absorption and scattering coefficients were proportional to the local concentration of particles. Radiative heat transfer was shown to strongly affect the profiles of temperature and particle concentration. e. g., radiation increases the thickness of thermal boundary layer and wall temperature gradients significantly. As the wall temperature gradients increase, the particle concentration at the wall decreases due to thermophoretic particle transport. The deposition rate that is thermophoretic velocity times particle concentration at the wall decreases as the effects of radiation increases. The effects of optical thickness, conduction to radiation parameter and wall emissivity have been determined. The effects of anisotropic scattering are shown as insignificant.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2006년 제4회 한국유체공학학술대회 논문집
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• pp.465-470
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• 2006

An experimental investigation is carried out to study 2-phase vertically upward hydraulic transport of solid particles by water and non-Newtonian fluids in a slim hole concentric annulus with rotation of the inner cylinder. Rheology of particulate suspensions in viscoelastic fluids is of importance in many applications such as particle removal from surfaces, transport of proppants in fractured reservoir and cleaning of drilling holes, etc. In this study a clear acrylic pipe was used in order to observe the movement of solid particles. Annular fluid velocities varied from 0.2 m/s to 3.0 m/s. Pressure drops and average flow rate and particle rising velocity are measured. For both water and 0.2% CMC solutions, the higher the concentration of the solid particles is, the larger the pressure gradients become.

• 한국연소학회지
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• 제14권2호
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• pp.32-41
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• 2009

The transported probability density function model combined with the consistent finite volume (FV) method has been applied to simulate the turbulent bluff-body reacting flows. To realistically account for the non-isotropic turbulence effects on the turbulent bluff-body reacting flows, the present PDF transport approach is based on the joint velocity- turbulent frequency-composition PDF formulation. The evolution of the fluctuating velocity of a particle is modeled by a simplified Langevin equation and the particle turbulence frequency is represented by the modified Jayesh - Pope model. Effects of molecular diffusion are represented by the interaction by exchange with the mean (IEM) mixing model. To validate this hybrid FV/PDF transport model, the numerical results are compared with experimental data for the turbulent bluff-body reacting flows.

• Bulletin of the Korean Chemical Society
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• 제28권8호
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• pp.1371-1374
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• 2007

The velocity auto-correlation (VAC) function of liquid argon in the Green-Kubo formula decays quickly within 5 ps to give a well-defined diffusion coefficient because the velocity is the property of each individual particle, whereas the stress (SAC) and heat-flux auto-correlation (HFAC) functions for shear viscosity and thermal conductivity have non-decaying, long-time tails because the stress and heat-flux appear as system properties. This problem can be overcome through N (number of particles)-fold improvement in the statistical accuracy, by considering the stress and the heat-flux of the system as properties of each particle and by deriving new Green-Kubo formulas for shear viscosity and thermal conductivity. The results obtained for the transport coefficients of liquid argon obtained are discussed.

• 한국초전도저온공학회:학술대회논문집
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• 한국초전도저온공학회 2002년도 학술대회 논문집
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• pp.343-345
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• 2002

The influence of starting precursor powders on the phase formation and transport properties of Bi-2223/Ag tapes has been studied. The experimental results show that the average particle size of precursors as fine as 1.64 ${\mu}{\textrm}{m}$ and 1.51 ${\mu}{\textrm}{m}$ can still increase the transport properties. The J$_{c}$-B behavior is also enhanced in tapes fabricated with powders in finer particle sizes. However, at higher magnetic fields, J$_{c}$ of tape started from the powder with the finest particles drops rapidly at the direction of H//c, which is possibly attributed to the small grain sizes and weak flux pinning ability that due to the short induction period at the initial stage of phase formation as the result of fine particles in precursor powder.der.

• 지질공학
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• 제5권2호
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• pp.155-165
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• 1995

열극암반내의 지하수유동 및 용질이동 해석을 위해서는 추계론적인(Simulation Techique) 3차원 불연속체 모형(Discrete Fracture Model)이 요구된다. Monte Carlo 모의기법(Simulation Techique)에 의해 구성된 추계론적 불연속체모형을 지하 유류저장공동의 기밀성평가를 위한 지하수유동 및 용질이동 모의에 적용하였다. 불연속체모형구성에 영향을 미치는 열극 특성요소는 방향서 및 크기로 분석되었으며, 구성도니 모형(Model)에서의 지하수유동에 영향을 미치는 요소는 투수성 열극밀도로 분석되었다. Particle Tracking 기법을 사용한 불연속체모형의 용질이동 모의에서는 열극의 투수성에 의해 이동경로 및 이동속도에 많은 차이가 관찰되었다. 검증된 추계론적 불연속체모형은 지하 유류저장공동 기밀성평가에 적용이 가능함이 부분적으로 인정되었다.

• 한국항공우주학회지
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• 제33권9호
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• pp.97-103
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• 2005

본 연구에서는 소형 동-소결윅 히트파이프를 대상으로 소결윅의 구조적 인자들이 히트파이프의 열수송 한계에 미치는 영향을 이론적으로 분석하였다. 소결윅의 입자 크기의 균일성과 소결 조건이 전체적인 기공분포와 기공률을 포함한 물리적 특성에 지배적인 요소로 작용했으며, 윅 두께 및 기공의 작은 편차가 히트파이프의 열수송 한계에 대체로 큰 영향을 미치는 것으로 나타났다. 특히, 증기온도와 경사각에 따라서 윅 두께와 평균 입자 반경, 그리고 모세관반경의 미세한 변화가 히트파이프의 모세관한계를 현저하게 변화시켰다.