• 한국환경보건학회지
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• 제34권3호
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• pp.226-232
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• 2008

A feasibility study for the application of the photoelectrocatalytic decolorization of Rhodamine B (RhB) was performed in a photoelectrochemical reactor with immobilized $TiO_2$ particle. The effects of operating conditions, such as current, electrolyte and pH were evaluated. The experimental results showed that optimum $TiO_2$ dosage and current in the photoelectrocatalytic process were 83.3 g/l and 0.5 A, respectively. It was found that the RhB could be degraded more efficiently by this photoelectrocatalytic process than the sum of the two individual oxidation processes (photocatalytic and electrolytic process). The addition of NaCl increased the initial decolorization rate and reduced reaction time. The optimum dosage of NaCl was 0.15 g/l. The decolorization rate of the photoelectrocatalytic process increased sharply with a decrease in pH value. However when the NaCl was added, the pH effect was not high.

• Advances in environmental research
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• 제1권3호
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• pp.223-236
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• 2012

Biosorption of methylene blue (MB) from aqueous solution was studied with respect to the point of zero charge of coconut husk, dye concentration, particle size, pH, temperature, as well as adsorbent and NaCl concentration using coconut husk biomass. Amongst Langmuir and Freundlich adsorption isotherms studied, Langmuir adsorption isotherm showed better agreement. Pseudo second order kinetics model was found to be more suitable for data presentation as compared to pseudo first order kinetics model. Also, involvement of diffusion process was studied using intraparticle diffusion, external mass transfer and Boyd kinetic model. Involvement of intraparticle diffusion model was found to be more relevant (prominent) as compared to external mass transfer (in) for methylene blue biosorption by the coconut husk. Moreover, thermodynamic properties of MB biosorption by coconut husk were studied. Desorption of methylene blue from biomass was studied with different desorbing agents, and the highest desorption achieved was as low as 7.18% with acetone, which indicate stable immobilization. Under the experimental conditions MB sorption was not significantly affected by pH, temperature and adsorbent concentration but low sorption was observed at higher NaCl concentrations.

• 한국환경과학회지
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• 제16권6호
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• pp.683-688
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• 2007

In this study, N doped $TiO_2$ (TiO-N) thin film was prepared by DC magnetron sputtering method to show the photocatalytic activity in a visible range. Various gases (Ar, $O_2\;and\;N_2$) were used and Ti target was impressed by 1.2 kW -5.8 kW power range. The hysteresis of TiO-N thin film as a function of discharge voltage wasn't observed in 1.2 and 2.9kW of applied power. Cross sections and surfaces of thin films by FE-SEM were tiny and dense particle sizes of both films with normal cylindrical structures. XRD pattern of $TiO_2$ and TiO-N thin films was appeared by only anatase peak. Red shift in UV-Vis adsorption spectra was investigated TiO-N thin film. Photoactivity was evaluated by removal rate measurement of suncion yellow among reactive dyes. The photodegradation rate of $TiO_2$ thin film on visible radiation was shown little efficiency but TiO-N was about 18%.

• 대한두개안면성형외과학회지
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• 제18권4호
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• pp.261-263
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• 2017

Anisakis is a parasite with life cycles involving fish and marine mammals. Human infection, anisakiasis, occurs with the ingestion of raw infected seafood and usually presents with acute or chronic gastrointestinal symptoms from esophageal or gastric invasion. We report a rare caseinvolving the oral cavity. A 39-year-old male presented with oral and sub-sternal pain of one day duration after eating raw cuttlefish. Physical examination revealed areas of erythema and edema with a central white foreign particle on the labial and buccal mucosa. With microscopic field we could remove the foreign material from the lesions. The foreign material was confirmed to be Anisakis. Anisakis was also removed from the esophagus by esophagogastroduodenoscopy. The patient was discharged the following day without complication. Anisakiasis is frequently reported in Korea and Japan, countries where raw seafood ingestion is popular. The symptoms of acute anisakiasis include pain, nausea, and vomiting and usually begin 2-12 hours after ingestion. The differential diagnosis includes food poisoning, acute gastritis, and acute pancreatitis. A history of raw seafood ingestion is important to the diagnosis of anisakiasis. Treatment is complete removal of the Anisakis to relieve acute symptoms and prevent chronic granulomatous inflammation.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.50-50
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• 2007

최근 DRAM 소자 내에서 Ruthenium (Ru) 은 높은 화학적 안정성, 누설전류에 대한 높은 저항성, 고유전체와의 높은 안정성등과 같은 특성으로 인해 금속층-유전막(insulator)-금속층 캐패시터에 대한 하부전극으로 각광받고 있다. 일반적으로 Ru은 화학적으로 매우 안정하여 습식 식각으로 제거하기 어려우며, 이로인해 건식 식각을 이용하여 Ru을 제거하는 것이 널리 통용되고 있다. 하지만 칵 캐패시터의 분리를 위해 Ru을 건식 식각할 경우, 유독한 $Ru0_4$ 가스가 발생할 수 있으며 Ru 하부전극의 탈균일한 표면과 몰드 산화막의 손실을 유발할 수 있다. 이로인해 각 캐패시터간의 분리와 평탄화를 위해 CMP 공정이 도입되게 되었다. 이러한 CMP 공정에 공급되는 슬러리에는 부식액, pH 적정제, 연마입자등이 첨가되는데 이때 연마입자가 응집하여 슬러리의 분산 안정성 저하에 영향을 줄 수 있다. 그리하여 본 연구에서는 Ru CMP Slurry에서의 surfactant와 같은 첨가제에 따른 zeta potential, particle size, sedimentation의 분석을 통해 slurry 안정성에 대란 영향을 살펴보았다. 또한 선택된 surfactant가 첨가된 Ru CMP Slurry를 제조하여 Ru의 removal rate와 TEOS에 대한 selectivity를 측정해 보았다.

• Tribology and Lubricants
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• 제31권6호
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• pp.239-244
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• 2015

Chemical mechanical polishing (CMP) is one of the most important processes for enabling sub-14 nm semiconductor manufacturing. Moreover, post-CMP defect control is a key process parameter for the purpose of yield enhancement and device reliability. Due to the complexity of device with sub-14 nm node structure, CMP-induced defects need to be fixed in the CMP in-situ cleaning module instead of during post ex-situ wet cleaning. Therefore, post-CMP in-situ cleaning optimization and cleaning efficiency improvement play a pivotal role in post-CMP defect control. CMP in-situ cleaning module normally consists of megasonic and brush scrubber processes. And there has been an increasing effort for the optimization of cleaning chemistry and brush scrubber cleaning in the CMP cleaning module. Although there have been many studies conducted on improving particle removal efficiency by brush cleaning, these studies do not consider the effects of brush contamination. Depending on the process condition and brush condition, brush cross contamination effects significantly influence post-CMP cleaning defects. This study investigates brush cross contamination effects in the CMP in-situ cleaning module by conducting experiments using 300mm tetraethyl orthosilicate (TEOS) blanket wafers. This study also explores brush pre-treatment in the CMP tool and proposes recipe effects, and critical process parameters for optimized CMP in-situ cleaning process through experimental results.

• 상하수도학회지
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• 제19권2호
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• pp.144-148
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• 2005

The industrial development of large scale deep bed filters has been a very important step in the process of drinking water production and more recently in the tertiary treatment of wastewater. The target of deep bed filtration is the retention is the retention of small particles generally smaller than 30 microns at relatively small concentration, generally less than 30 mg/l from natural water (surface water or aquifers) or secondary treated wastewater. The relation between the retention efficiency and the characteristics of the particles has been extensively studied experimentally and through different models of retention. During the last years the development of new technologies (fiber filter, membrane modules) lead to more intensive processes compared to conventional sand filtration. Fiber filters can combine intensification with a decrease in specific energy needed however they cannot be operated under gravity like sand filters. Membrane filters (UF or MF) are much more intensive and efficient than sand filters. The specific energy needed is not so high (about $0.1Kwh/M^3$) but is higher than sand or fiber filter. A Life Cycle Analysis (LCA) has to be made for a complete comparison between these technologies taking in account that the efficiency of particle retention obtained by membrane filters is unique.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2006년도 하계학술발표대회 논문집
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• pp.607-612
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• 2006

A pressure-type rapid automatic filter of 2000mm diameter and 170 ton/h filtering capacity was fabricated. In case of no external impurity inflow, the turbidity removal efficiency on raw water was experimented and the numbers of impurities of each sizes were analyzed by particle counter. As the result of circulated filtering, the raw water of 40 NTU was filtered to 0.44 NTU and the numbers of impurities above $1{\mu}m$ were removed by approximately 95%. With the filtering efficiency experimented and the mathematical method, the turbidity change of circulation water were calculated according to the inflow rate of external impurity and water treatment method of blow-down or filtering. The cost of blow-down water was calculated from above results. And simple payback period for this filter is calculated as about one year. Nowadays, as the cost of water is continuously increasing and environment regulations will be more strict, the water quality control using this filter will be expected to satisfy the user requirement.

• 한국초전도ㆍ저온공학회논문지
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• 제21권2호
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• pp.22-25
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• 2019

The superconducting magnetic separation system has been developing to separate the iron oxide scale from the feed water of the thermal power plant. The accumulation in the boiler lowers the heat exchange rate or in the worst case damages it. For this reason, in order to prevent scale generation, controlling pH and redox potential is employed. However, these methods are not sufficient and then the chemical cleaning is performed regularly. A superconducting magnetic separation system is investigated for removing iron oxide scale in a feed water system. Water supply conditions of the thermal power plant are as follows, flow rate 400 t / h, flow speed 0.2 m / s, pressure 2 MPa, temperature $160-200^{\circ}C$, amount of scale generation 50 - 120 t / 2 years. The main iron oxide scale is magnetite (ferromagnetic substance) and its particle size is several tens ${\mu}m$. As the first step we are considering to introduce the system to the chemical cleaning process of the thermal power plant instead of the thermal power plant itself. The current status of development will be reported.

• 한국환경과학회지
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• 제30권9호
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• pp.719-726
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• 2021

In this study, zeolitic materials were synthesized from Jeju Volcanic Rocks (JVR) using a fusion/hydrothermal method at NaOH/JVR ratios of 0.6 and 1.2. The crystallinities of the zeolitic materials at NaOH/JVR ratios of 0.6 and 1.2 were 25.5% and 59.0%, respectively. It was confirmed through the SEM image that the zeolitic materials covered the zeolite particle with a cube-shaped crystals. The Co ions adsorption by the zeolitic materials were to reach the adsorption equilibrium at 120 min. It could be better simulated in the pseudo-second order adsorption kinetic equation than in the pseudo-first order adsorption kinetic equation. The adsorption capacities (q_m) of Co ions could be to estimate Langmuir isotherm better than Freundlich isotherm. The maximum adsorption capacities (q_m) at NaOH/JVR ratios of 0.6 and 1.2 were 55.3 mg/g and 68.7 mg/g, respectively. It was found that there was a high correlation between the crystallinity of zeolitic materials and the adsorption capacity of Co ions adsorption.