• 한국입자에어로졸학회지
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• 제18권4호
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• pp.129-136
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• 2022

The line width of circuits in semiconductor devices continues to decrease down to a few nanometers. Since nanoparticles attached to the patterned wafer surface may cause malfunction of the devices, it is crucial to remove the contaminant nanoparticles. Physical cleaning that utilizes momentum of liquid for detaching solid nanoparticles has recently been tested in place of the conventional chemical method. Dropwise impaction has been employed to increase the removal efficiency with expectation of more efficient momentum exchange. To date, most of relevant studies have been focused on drop spreading behavior on a horizontal surface in terms of maximum spreading diameters and average spreading velocity of drop. More important is the local liquid velocity at the position of nanoparticle, very near the surface, rather than the vertical average value. In addition, there are very scarce existing studies dealing with microdroplet impaction that may be desirable for minimizing pattern demage of the wafer. In this study, we investigated the local velocity distribution in spreading liquid film under various impaction conditions through the CFD simulation. Combining the numerical results with the particle removal model, we estimated an effective cleaning diameter (ECD), which is a measure of the particle removal capacity of a single drop, and presented the predicted ECD data as a function of droplet's velocity and diameter particularly when the droplets are microns in diameter.

• Fisheries and Aquatic Sciences
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• 제13권2호
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• pp.150-156
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• 2010

The separation performance of a low-pressure hydrocyclone (LPH) was evaluated for suspended-solids removal in a recirculating aquaculture system (RAS). The dimensions of the LPH were 335 mm cylinder diameter, 575 mm cylinder height, 60 mm overflow diameter, 50 mm underflow diameter, and $68^{\circ}$ cone angle. The inflow rate varied (400, 600, 800, and 1,000 mL $s^{-1}$) with 25%, 25%, 20%, and 10% of bypass ($R_f$), respectively. The maximum total separation efficiency (Et) and reduced separation efficiency (E't) for suspended solids from the effluent of the second settlement tank (before biofiltration) were 58.9% and 45.2%, respectively, at an inflow rate of 600 mL $s^{-1}$ and 25% of $R_f$. The maximum Et and E't for suspended solids from the water supply channel (after biofiltration) were 24.4% and 16%, respectively, at an inflow rate of 1,000 mL $s^{-1}$ and 10% of $R_f$. The maximum grade efficiency (Ei) was 51.6% for a 300 ${\mu}m$ particle size at an inflow rate of 600 mL $s^{-1}$ with 23% of $R_f$. The maximum reduced grade efficiency (E'i) was 37.6% for a 300 ${\mu}m$ particle size at an inflow rate of 1,000 mL $s^{-1}$ with 11% of $R_f$. The results indicate that the separation performance of the LPH for suspended solids removal was size selective and that maximum removal occurred at particle sizes ranging from 300 to 500 ${\mu}m$.

• 한국대기환경학회:학술대회논문집
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• 한국대기환경학회 2005년도 추계학술대회 논문집
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• pp.494-496
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• 2005

• 한국대기환경학회지
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• 제27권3호
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• pp.272-280
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• 2011

A novel particle removal system for air handling unit (AHU) of subway station was evaluated experimentally. The novel system was designed in order to minimize the maintenance cost by applying axial-flow cyclones. The system consists of multiple cyclone units and dust trap. Based on our previous numerical study, it was found to be effective for removal $1\sim10{\mu}m$ sized dust particles. In this study, we manufactured the mock-up model and evaluated the model experimentally. Liquid and solid test particles were generated for evaluating collection efficiency of the system and the pressure drop was monitored. The collection efficiency was varied from 41.2% to 85.9% with increasing the sizes of particle from 1 to $6.5{\mu}m$ by particle count ratio of inlet and outlet. The pressure drop was maintained constant less than $20mmH_2O$. In addition, the collection efficiency was estimated by total mass for solid test particles. It was found that the collection efficiency was 65.7% by particle mass ratio of inlet and outlet. It shows that present system can replace current pre-filters used in subway HVAC system for removing particulate matters with minimal operational cost.

• 한국물환경학회지
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• 제20권6호
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• pp.625-630
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• 2004

입상여과는 표준식 정수처리 공정에서 입자물질 제거의 최종공정으로 대부분 사용되고 있다. 따라서 양질의 수돗물을 만들기 위해서는 입상여과에서 높은 수준의 입자물질 제거가 요구되고 있다. 그러나 여과공정에서 모든 입자물질을 제거할 수 없으며, 또한 입자물질의 부착특성은 입자와 용액의 물리화학적 특성에 따라 달라진다. 실험실규모의 여과칼럼과 입경 0.55mm의 유리구슬을 여재로 한 여과실험이 수행되었다. Min-U-Sil 5가 입자물질로 사용되었으며 입자물질을 불안정화하기 위하여 액반을 사용하였다. 운전조건은 표준입상여과와 동일하였으며 여과속도는 5m/h 였다. 입자와 여재가 모두 음의 표면전하를 갖을 경우 작은 표면 전하를 갖는 입자가 여과초기에 여재에 잘 부착되었다. 작은 표면전하를 갖는 입자의 선택적 부착은 유출수의 제타 전위분포를 더 음인 방향으로 이동시켰다. 한편 입자의 표면전하가 양의 값을 갖을 경우는 여과수 입자의 표면전하가 양의 큰 값에서 작은 값으로 변하였는데 이는 입자와 여재사이의 이온전이에 기인하는 것으로 생각된다.

• E2M - 전기 전자와 첨단 소재
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• 제10권8호
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• pp.830-835
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• 1997

In this study an experimental investigation has been conducted to remove NOx and SO$_2$simultaneously from a combustion flue gases were consisted of NO-SO$_2$-$CO_2$-$N_2$-O$_2$([NO]o:200ppm and [SO$_2$]o:800ppm) and the injection gases used as radical source gases were NH$_3$-Ar-air and CH$_4$-Ar-air. NOx and SO$_2$removal efficiency and the other by-products were measured by Fourier Transform Infrared(FTIR) as well as SO$_2$, NOx and NO$_2$gas detectors. and SEM images after sampling. The results showed that a significant Nucleating Particle Counter(CNPC) and SEM images after sampling. The results showed that a significant aerosol particle formation was observed during a simultaneous NOx and SO$_2$removal operation in corona radical shower systems. The diameter of aerosol particles was in the range of 0.18 to 3.6${\mu}{\textrm}{m}$ with a maximum fraction of particles at particles diameter of 1${\mu}{\textrm}{m}$. The NOx removal efficiency significantly increased with increasing applied voltage and NH$_3$molecule ratio. The SO$_2$removal efficiency was not significantly effected by applied voltage and slightly increased with increasing NH$_3$molecule ratio. It could be found that it is possible to use CH$_4$for NOx and SO$_2$removal by corona radical shower systems.

• 한국재료학회지
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• 제18권6호
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• pp.307-312
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• 2008

In this study, a new cleaning process with a low cost of ownership (CoO) was developed with ozonated DI water ($DIO_3$). An ozone concentration of 40 ppm at room temperature was used to remove organic wax film and particles. Wax residues thicker than $200\;{\AA}$ remained after only a commercial dewaxer treatment. A $DIO_3$ treatment in place of a dewaxer showed a low removal rate on a thick wax layer of $8000\;{\AA}$ due to the diffusion-limited reaction of ozone. A dewaxer was combined with a $DIO_3$ rinse to reduce the wax removal time and remove wax residue completely. Replacing DI rinse with the $DIO_3$ rinse resulted in a surface with a contact angle of less than $5^{\circ}$, which indicates no further cleaning steps would be required. The particle removal efficiency (PRE) was further improved by combining a SC-1 cleaning step with the $DIO_3$ rinsing process. A reduction in the process time was obtained by introducing $DIO_3$ cleaning with a dewaxing process.

• 한국환경과학회지
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• 제27권2호
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• pp.109-122
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• 2018

This study was conducted to investigate the removal characteristics of heavy metals and sulfate ion from acid mine drainage by porous zeolite-slag ceramics (ZS ceramics) that was prepared by adding wood flour as pore-foaming agent while calcining the mixtures of natural zeolite and converter slag. The batch test showed that the removal efficiency of heavy metals by pellet-type porous ZS ceramics increased as the particle size of wood flour was decreased and as the weight mixing ratio of wood flour to ZS ceramics was increased. The optimal particle size and weight mixing ratio of wood flour were measured to be $75{\mu}m$ and 7~10%, respectively. The removal test with the porous ZS ceramics prepared in these optimal condition showed very high removal efficiencies: more than 98.4% for all heavy metals and 73.9% for sulfate ion. Relative to nonporous ZS ceramics, the increment of removal efficiency of heavy metals by porous ZS ceramics with $75{\mu}m$ and 10% wood flour was 5.8%, 60.5%, 36.9%, 87.7%, 10.3%, and 57.4% for Al, Cd, Cu, Mn, Pb, and Zn, respectively. The mechanism analysis of removal by the porous ZS ceramics suggested that the heavy metals and sulfate ion from acid mine drainage are eliminated by multiple reactions such as adsorption and/or ion exchange as well as precipitation and/or co-precipitation.

• 대한기계학회논문집B
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• 제34권1호
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• pp.27-34
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• 2010

본 연구에서는 순환방식의 1000 CMH급 전기집진장치 성능평가 시스템 구축하여, 대용량 순산소 연소 장치 없이 순산소 연소가스 모사 조건(고농도 $CO_2$ 조건)에서 엣지-평판형 전기집진장치를 방전극 형상, 집진판 간격, 유입속도, 가스조성 및 분진 입경에 따라 성능을 평가하였다. $CO_2$ 70% 조건에서 3 종 방전극에 대해 성능 비교를 한 결과, 방전극 편 면적이 넓은 방전극이 상대적으로 높은 포집효율을 나타내었다. 또한 유입속도가 감소할수록, 분진 입경이 증가할수록, 집진판 간격이 좁을수록 분진 집진 효율이 증가하였으나, $CO_2$ 농도가 증가할수록 효율이 감소하였다. 그러므로 $CO_2$ 농도가 높을 것으로 예상되는 순산소 연소 등 배기가스 조건에 적용되는 전기집진장치를 설계할 경우, 기존과 동일한 단위 가스 체적 당 코로나 전력 조건에서 집진장치 내부 유속을 줄이거나 집진판 간격을 좁히는 설계변화가 요구되며, 방전극의 경우 방전편 면적이 넓으면서 코로나 전류가 높은 방전극이 적용되야 할 것으로 판단된다.

• Korean Chemical Engineering Research
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• 제43권2호
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• pp.286-293
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• 2005

기체 수송층 흡수탑과 기포 유동층 재생탑으로 구성된 $CO_2$ 회수 공정에 대한 해석의 첫 단계로 이 공정에서 고체 순환특성을 해석하였다. 흡수제 고체 입자에 대한 입도별 물질수지를 해석하여 공정의 흐름에서 고체 흐름량과 입도 분포를 결정하였다. 실험실 규모 공정(흡수탑: 직경 25 mm, 높이 6 m; 재생탑: 직경 0.1 m, 높이 1.2 m)에서 고체순환특성을 모사하였다. 흡수탑의 입도분포는 재생탑의 입도분포와 거의 같았다. 흡수탑에서 유속과 정체층 높이가 증가함에 따라서 고체순환량과 새 흡수제 주입량은 증가하였다. 반면에 흡수탑 내 입자의 평균입경은 감소하였다. 흡수탑사이클론의 절단입도가 증가함에 따라서 고체순환속도는 감소하였으며, 새 흡수제 주입속도와 흡수탑 내 입자의 평균 입경은 증가하였다. 흡수제 입자의 마모계수가 증가함에 따라서 고체순환속도는 증가하고, 새 흡수제 주입속도는 증가하며, 흡수탑 내 입자의 평균입경은 감소하였다.