• Journal of the Korean Vacuum Society
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• v.3 no.2
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• pp.179-185
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• 1994

음극에 DLC 필름이 놓여져 있는 용량결합형의 RF 플라즈마 장치에서 Ar가스에 의한 방전에서 발생된 입자의 분포를 레이져 산란에 의하여 관측하였다. 발생된 입자들은 플라즈마와 sheath의 경계면 에서 높은 밀도의 구름을 이루었으며 시간에 따라 주기적인 분포의 변화가 반복되었다, 입자 구름의 발 생은 플라즈마 물성의 변화를 야기하였으며 그 결과로 심한 self-bias 전위의 감소현상이 관측되었다. 입자 구름분포의 시간에 따른 변화와 같은 주기의 self-bias 플라즈마전위의 진동현상이 가열된 fast-scanning langmuir 탐침에 의하여 관측되었다. 이결과는 입자 표면에로의 음전하 누적에 따른 전체 음전하의 이동도 감소에 의한 것으로 해석된다. 또한 방출 분광법에 의하여 입자오염상태의 Ar 플라즈 마와 정상상태의 Ar 플라즈마의 방출 선세기의 변화를 관측하였는데 입자구름 오염시의 2차전자 차폐 현상에 의해 높은 문턱 에너지를 가진 Ar II 선의 세기 감소현상이 나타났다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.21 no.12
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• pp.2196-2208
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• 1997

In this work, a magnetic levitation (maglev) system is developed to transport a wafer between semiconductor fabrication process modules in clean rooms to take advantages of eliminating particle and oil contamination that normally exist in conventional transport systems due to contact motion of mechanical components. A main feature of the maglev system developed in this work is that a controller and power supplying part are not mounted on the moving carrier but on the stationary track, which is defined a controller-free carrier, to reduce carrier's weight. Iron-core electromagnets and irons are used for levitation, and air-core electromagnets and permanent magnets are used for stabilization. Analysis, design, and modeling of the magnetically levitated transport system are presented. The performance of the maglev system is experimentally demonstrated.

• Journal of Power Electronics
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• v.9 no.2
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• pp.243-258
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• 2009

Bearingless centrifugal pump systems are employed in the semiconductor, pharmaceutical and medical industries due to their facility for pumping high purity fluids without particle contamination. Two types of forces have to be generated by the stator units, namely bearing forces for achieving magnetic levitation, and drive forces for producing the needed pump torque. The generation of these forces requires bearing and drive windings, which can be realized as separate bearing and drive coils or as identical, combined coils on the stator claws. In this paper, a detailed comparison between these two winding concepts is undertaken, whereby the copper losses, the power electronics losses, and the achievable pump output pressure are evaluated for both concepts. For each criterion a ratio of improvement is calculated analytically which allows evaluation of the performance of the two winding concepts for any given pump operating point and design. Finally, also practical features such as control complexity, cabling effort and manufacturability are discussed and measurements on prototype systems are carried out to validate the considerations.

• 한국신재생에너지학회:학술대회논문집
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• 2008.10a
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• pp.343-346
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• 2008

To improve the reliability and extend the life for a wind-turbine gearbox, the gearbox needs to be monitored and analysed exactly. This study was conducted to analyze and detect the gearbox conditions when lubricating oil contaminated by wear particles was used. Characteristics of the gearbox failure by wear particles were monitored simultaneously by the on-line measurement sensor of vibration, oil condition and temperature. For the detail vibration analyses, frequency analysis(FFT) was performed. The results of the study were summarized as follows: Vibrational signal was found sensitive to abnormal changes of the gearbox conditions when lubricant was contaminated by wear particles. Also, using frequency analysis for the harmonics of gear mesh frequency(GMF), it is found that the failure of gearbox was caused by the damages of meshing gears. However, temperature and oil condition measuring signals were found not so effective to detect any gearbox failure by oil contamination.

• Transactions of the Korean Society of Automotive Engineers
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• v.10 no.6
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• pp.219-226
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• 2002

Filtration performance of an automotive fuel filter was evaluated based on the theory of Beta ratio. This study also introduced the fuel components' contamination performance test stand incorporating the multi-pass filtration test circuit. The theoretical basis of multi-pass test and test procedure were described in detail. The specification of commercial fuel filter currently available was just the maximum pressure drop across the filter assembly and the holding capacity of contaminants. However, test results revealed that the fuel filter tested could not maintain consistent Beta ratio, that is filtration efficiency, although it had the holding capacity close to the specification. Hence the Beta ratio should be specified in service life. The results also showed that filtration system model should be refined including desorption ratio to estimate the variable Beta ratio in the test.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.1292-1295
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• 2004

본 연구는 Cu CMP공정 중 알루미나 연마입자의 wafer 표면에서의 점착과 오염을 AFM (Atomic Force Microscopy)을 사용하여 슬러리내에서 점착력 측정과 실제 연마 후 wafer 표면의 오염을 실험적으로 비교 평가하였다. 연마입자의 adhesionn force 측정에 있어서도 역시 wafer들의 zetapotential 결과와 잘 일치하였으며, 모든 wafer 종류에 관계없이, 산성 영역에서 염기성영역의 슬러리가 적용됨에 따라 adhesion force가 작아짐을 확인할 수 있었다. 특히 FSG wafer의 zetapotential 결과는 비록 산성 분위기에서는 양성 전하값을 나타내었으나, 염기성 분위기의 pH에서는 급격하게 음성 전하값을 나타내었고, 이는 adhesionn force결과와 FESEM 결과와 잘 일치하였다.

• Asian Pacific Journal of Cancer Prevention
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• v.14 no.4
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• pp.2461-2476
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• 2013

To assess environmental contamination with carcinogens, carbonaceous compounds, water-soluble ionic species and trace gaseous species were identified and quantified every three hours for three days st three different atmospheric layer at the heart of chiang-Mai, bangkok and hat-Yai from December 2006 to February 2007. A DRI model 2001 Themal/Optical Carbon Analyzer with the IMPROVE thermal/optical reflectance (TOR) protocol was used to quantify the organic carbon(OC) and elemental carbon content in $PM_{10}$. Diurnal and vertical variability was also carefully investigated. In general, OC and EC contenttration shoeed the highest values at the monitoring period o 21.00-00.00 as consequences of human activities at night bazaar coupled with reduction of mixing layer, decreased wind speed and termination of photolysis nighttime. Morning peaks of carboaceous compounds were observed during the sampling period of 06:00 -09:00, emphasizing the main contribution of traffic emission in the three cities. The estimation of incremental lifetime partculate matter exposure (ILPE) raises concern of high risk of carbonaceous accumulation over workers and residents living close to the observatory sites. The average values of incremental lifrtime particulate matter exposure (ILPE) of total carbon at Baiyoke Suit Hotel and Baiyoke Sky Hotel are approsimately ten time shigher then those air sample collected at prince of songkla University Hat-Yai campus corpse incinerator and fish-can maufacturing factory but only slightly higher than those of rice straw burnig in Songkla province. This indicates a high risk of developing lung cancer and other respiratory diseases across workers and residents living in high buildings located in Pratunam area. Using knowledge of carbonaceous fractions in $PM_{10}$, one can estimate the gas-particle partitioning of polycyclic aromatic hydrocarbons (PAHs). Dachs-Eisenreich model highlights the crucial role of adsorption in gas-particle partitioning of low molecular weight PAHs, whereas both absorption and adsorption tend to account for gas-particle partitioning of high molecular weight PAHs in urban residential zones of Thailand. Interestingly, the absorption mode alone plays a minor role in gas-partcle partitiining of PAHs in Chiang-Mai, Bangkok and hat-Yai.

• Economic and Environmental Geology
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• v.34 no.3
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• pp.271-281
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• 2001

The characteristics of the heavy metal contamination in the soils affected by the tailings of the Palbong mine have been studied. The soils in the studied area consist mostly of loam by the particle size analysis, but a little of it, located near the stream, consist of loamy sand to sandy loam, finally to loam downward. The organic contents of soils are significantly low aoom 2 percent and the pH is in acidic ranging 6.0 $\pm$ 0.1. The samples of the parent rocks, the normal soils, the tailings and the channel deposits from the studied area were chemically analysed. From the result, the heavy metal concenlration of the soils is a little Jow compared with that of the parent rocks, shows the hydrologic process of the surface and the groundwater. The contamination of the tailings from the ore mining are high in lead, copper and arsenic. In the channel deposits the concenlrations of lead and copper are abnormally high but that of arsenic is uniquely low. And most of heavy metal contamination are decreased with the distance from the mine. It is caused by the properties of the surface and the ground water during the process of the heavy metal migration. The correlation-coefficient between sand and silt contents and the concentrations of Cd, Cu and Pb are significant but the amounts of As and Hg are increased with the clay contents. The dispersion of the heavy metals with the distance shows that the concentrations of them in the soils sampled at distance of 100 m to 200 m along the stream started near the Palbong mine are extremely high compared with those from other distances. These discrepancies are significant in Cd, Cu, Pb and Hg, but low in As. All the samples contain below detection limit of Cr+6 In the present stream water the concentrations of the heavy metals are not detected. So, it is interpreted that the concentrations in the soils are caused by the activities of the mining during the operation and have been continued by the dispersion from the tailings since after the closure of the mining, especially by the surface and ground water. The concentrations are diminished with the distance from the mining site, but in the interval of 800-2000 m increases abruptly. In the soil samples counted on the dispersion direction by wind, the lowering of the concentration is relatively uniform with the distance from the mining site. So, the rapid increase of the heavy metal concentrations is presumed to have been caused by the ground-water movement. In the migration of the heavy metals, the groundwater conditions, such as pH, Eh, the contents of colloidal particles, and Mn and Fe oxides are closely involveo. Integrating with these factors, it is interpreted that the groundwater conditions which have caused the heavy metal contamination of the studied area are those that the pH is about 3 in oxidized conditions, the contents of the colloidal particles are low, and Mn and Fe oxides are not involved in the migration of the heavy metals. Meanwhile, the vegetables growing on the soils in the studied area are not affected by the contamination of the heavy metals.

• Nuclear Engineering and Technology
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• v.39 no.5
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• pp.603-616
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• 2007

Roy Huddle, having invented the coated particle in Harwell 1957, stated in the early 1970s that we know now everything about particles and coatings and should be going over to deal with other problems. This was on the occasion of the Dragon fuel performance information meeting London 1973: How wrong a genius be! It took until 1978 that really good particles were made in Germany, then during the Japanese HTTR production in the 1990s and finally the Chinese 2000-2001 campaign for HTR-10. Here, we present a review of history and present status. Today, good fuel is measured by different standards from the seventies: where $9*10^{-4}$ initial free heavy metal fraction was typical for early AVR carbide fuel and $3*10^{-4}$ initial free heavy metal fraction was acceptable for oxide fuel in THTR, we insist on values more than an order of magnitude below this value today. Half a percent of particle failure at the end-of-irradiation, another ancient standard, is not even acceptable today, even for the most severe accidents. While legislation and licensing has not changed, one of the reasons we insist on these improvements is the preference for passive systems rather than active controls of earlier times. After renewed HTGR interest, we are reporting about the start of new or reactivated coated particle work in several parts of the world, considering the aspects of designs/ traditional and new materials, manufacturing technologies/ quality control quality assurance, irradiation and accident performance, modeling and performance predictions, and fuel cycle aspects and spent fuel treatment. In very general terms, the coated particle should be strong, reliable, retentive, and affordable. These properties have to be quantified and will be eventually optimized for a specific application system. Results obtained so far indicate that the same particle can be used for steam cycle applications with $700-750^{\circ}C$ helium coolant gas exit, for gas turbine applications at $850-900^{\circ}C$ and for process heat/hydrogen generation applications with $950^{\circ}C$ outlet temperatures. There is a clear set of standards for modem high quality fuel in terms of low levels of heavy metal contamination, manufacture-induced particle defects during fuel body and fuel element making, irradiation/accident induced particle failures and limits on fission product release from intact particles. While gas-cooled reactor design is still open-ended with blocks for the prismatic and spherical fuel elements for the pebble-bed design, there is near worldwide agreement on high quality fuel: a $500{\mu}m$ diameter $UO_2$ kernel of 10% enrichment is surrounded by a $100{\mu}m$ thick sacrificial buffer layer to be followed by a dense inner pyrocarbon layer, a high quality silicon carbide layer of $35{\mu}m$ thickness and theoretical density and another outer pyrocarbon layer. Good performance has been demonstrated both under operational and under accident conditions, i.e. to 10% FIMA and maximum $1600^{\circ}C$ afterwards. And it is the wide-ranging demonstration experience that makes this particle superior. Recommendations are made for further work: 1. Generation of data for presently manufactured materials, e.g. SiC strength and strength distribution, PyC creep and shrinkage and many more material data sets. 2. Renewed start of irradiation and accident testing of modem coated particle fuel. 3. Analysis of existing and newly created data with a view to demonstrate satisfactory performance at burnups beyond 10% FIMA and complete fission product retention even in accidents that go beyond $1600^{\circ}C$ for a short period of time. This work should proceed at both national and international level.

• Applied Chemistry for Engineering
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• v.18 no.2
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• pp.126-129
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• 2007

In order to ruduce traffic-jam, it is requested to extend road. As a result, the construction of tunnels is inevitable considering our mountatinous topography. In tunnel construction work, major contamination materials occur from rock drilling, blasting rock, rock transporting, and short-creat. After rock blasting, a very high concentration of particles over $5000{\mu}g/m^3$ is maintained for 4 h when air is supplied by pans, by which the construction work has to be delayed at least 30 min. Although dry dust collectors are used, the effective operation time span is limited to 3 h. In this work, the behavior of particles in air and use of particle removal instruments are investigated. As a result, it was important to compare efficiencies of dry and hydro dust collectors.