• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.848-853
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• 2001

Electrostatic actuation was adopted for ease of fabrication. We proposed a new driving scheme that uses the vector sum of force generated by comb-finger and by parallel plate. The moving and fixed electrodes are arranged to maximize the driving force. In this paper, an electrostatic field analysis is performed by Maxwell analysis tool for micro actuators. From the analysis, a comb-parallel type micro-actuator with 4${\mu}{\textrm}{m}$ width, 6${\mu}{\textrm}{m}$ overlap and 45${\mu}{\textrm}{m}$ height could be designed. In order to compare the new type of actuator with the conventional comb type of actuator, we arranged that both types have the same area and the same number of actuators. To make a high aspect ratio structure, we are developing fabrication process using SU-8 and electro-plating.

• Proceedings of the KSME Conference
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• 2000.04a
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• pp.475-480
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• 2000

A new positioning mechanism with Parallel type actuator using piezoelectric material and with dual type actuators using voice coil motor (VCM) and piezoactuator is proposed for optical disk drive or near-field recording type drive, and high speed position and vibration control are investigated. Parallel type bimorph piezoactuator is used as a fine motion actuator with self-sensing technique, which allows a piezoelectric material to concurrently sense and actuate in a closed loop frame work, and positive position feedback control algorithm is adopted to further control residual vibration. For positioning control of VCM, PID control algorithm is adopted.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.311-312
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• 2006

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.7
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• pp.367-372
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• 2006

A novel coil gun type actuator has been proposed and tested for its possibility as an actuator for a high voltage circuit breaker by experimental method. The 20kJ capacitor bank with the electrolytic condensers was charged up to 500V and discharged to a couple of 100 turn coils connected with parallel through a thyristor switch. The repulsive force between coil and the actuator made by copper conductor of 20kg reached up to 23,000 N, and over 800J of energy was transferred to the kinetic energy of the conductor. The experimental results showed that the coil gun type actuator has a good possibility for the high voltage circuit breaker.

• Journal of Mechanical Science and Technology
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• v.16 no.1
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• pp.13-23
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• 2002

This paper presents inverse kinematic and dynamic analyses of HexaSlide type six degree-of-freedom parallel manipulators. The HexaSlide type parallel manipulators (HSM) can be characterized as an architecture with constant link lengths that are attached to moving sliders on the ground and to a mobile platform. In the inverse kinematic analyses, the slider and link motion (position, velocity, and acceleration) is computed given the desired mobile platform motion. Based on the inverse kinematic analysis, in order to compute the required actuator forces given the desired platform motion, inverse dynamic equations of motion of a parallel manipulator is derived by the Newton-Euler approach. In this derivation, the joint friction as well as all link inertia are included. Relative importance of the link inertia and joint frictions on the computed torque is investigated by computer simulations. It is expected that the inverse kinematic and dynamic equations can be used in the computed torque control and model-based adaptive control strategies.

• 제어로봇시스템학회:학술대회논문집
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• 1992.10a
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• pp.965-970
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• 1992

A dynamic modeling and analysis for the Stewart platform type of parallel robot is addressed. The dynamic modeling is performed based on the method of Kinematic Influence Coefficients(KIC) and transfering of the generalized coordinates. The optimum geometric configurations of the system that minimize the actuating forces at the linear actuator are found for several trajectories by using the optimization technique.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.429-429
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• 2000

Micro positioning mechanism is the key technology in many fields, such as scanning electron microscopy (SEM), x-ray lithography, mask alignment and micro-machining. In the paper, a 3DOF parallel-type micro-positioning mechanism is proposed. This mechanism uses piezo-actuators and Flexure hinge to control x, y and $\theta$ motion. It is shown both analytically and numerically that 2 DOF flexure hinge model was better precision than 1 DOF flexure hinge design.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.4
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• pp.59-67
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• 2003

This paper presents a new approach for the use of smart materials, piezoelectric materials of PVDF and PZT, for vibration attenuation of a planar parallel manipulator. Since lightweight linkages of parallel manipulators deform under high acceleration/deceleration, an active damper is needed to attenuate vibration due to structural flexibility of linkages. Based on the dynamic model of a planar parallel manipulator, an active damping controller is developed, which consists of a PD feedback control scheme, applied to linear electrical motors, and a linear velocity feedback (L-type) scheme applied to either PVDF layer or PZT actuator(5). Simulation results show that piezoelectric materials yield good damping performance, resulting in precise manipulations of a planar parallel manipulator.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.10
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• pp.83-88
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• 2000

multi-beam optical drive is a method to improve the data transfer rate for the optical disc systems by parallel recording and reading on neighboring multi-tracks. In this paper, the beam rotating actuator, which is necessary for the multi-bean optical disc drive to from beam spots on multi-tracks simultaneously, has been developed. The Voice Coil Motor is used as a drive mechanism for high resolution and small size of the actuator. And rotating guide based on link structure is designed for frictionless and axisless rotation of rotating part including dove prism and for rotating in axis of geometric center of dove prism. The characteristics of the actuator are experimented by laser vibrometer, Polytec OFV1102 and a dynamic analyzer, HP35670A. It shows that the actuator has good linearity, rotating range $\pm0.34^\circ$, minimum rotating angle $0.0066^\circ$and natural frequency 113.9Hz. Therefore the actuator can be applied in a multi-beam optical disc system.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.12
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• pp.1281-1286
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• 2013

In this paper, a miniaturized stage with two prismatic-prismatic joints (2-PP) type parallel compliant mechanism driven by piezo actuators is proposed. This stage consists of two layers which are a motion guide layer and an actuation layer. The motion guide layer has 2-PP type parallel compliant mechanism to guide two translational motions, whereas the actuation layer has two leverage type amplification mechanisms and two piezo actuators to generate forces. Since the volume of the stage is too small to mount displacement sensors, the piezo actuators embedding strain gauge sensors are chosen. With the strain gauge-embedded piezo actuators, a semi-control is implemented, which results in hysteresis compensation of the stage. As the results, the operating range of $30{\mu}m$, the resolution of 20 nm, and the bandwidth of 400 Hz in each axis were obtained in the experiments.