• 제목/요약/키워드: Pad Temperature

검색결과 346건 처리시간 0.026초

CMP 결과에 영향을 미치는 열적거동 특성에 관한 연구 (Investigation of Thermal Behavior Characteristic in Chemical Mechanical Polishing Performance)

  • 정영석;김형재;최재영;김구연;정해도
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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    • pp.1283-1287
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    • 2004
  • The design rules are being more strict with requirement of operation speed and development of IC industry. For this reason, required minimum line-width has been narrowed under sub-micron region. As the length of minimum line-width is narrowed, local and global planarization are being prominent. CMP(Chemical-Mechanical Polishing), one of the planarizarion technology, is a process which polishes with the ascent of chemical reaction and relative velocity between pad and wafer without surface defects. CMP is performed with a complex interaction among many factors, how CMP has an interaction with such factors is not evident. Accordingly, the studies on this are still carrying out. Therefore, an examination of the CMP phenomena and an accurate understanding of compositive factors are urgently needed. In this paper, we will consider of the relations between the effects of temperature which influences many factors having an effect on polishing results and the characteristics of CMP in order to understand and estimate the influence of temperature. Then, through the interaction of shown temperature and polishing result, we could expect to boost fundamental understanding on complex CMP phenomena.

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국내 표준계사의 냉난방부하 특성 연구 (A Study on the Characteristics of Heating and Cooling Loads of Standard Chicken Houses in South Korea)

  • 권영철
    • 대한건축학회논문집:구조계
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    • 제35권10호
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    • pp.235-243
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    • 2019
  • In South Korea, millions of poultry have died due to repeated heat waves every year. The purpose of this study is to analyze the characteristics of heating and cooling loads of chicken houses in Korea and to present an effective insulation and ventilation measures to minimize the damage of poultry due to summer heat wave and to save energy in chicken houses in winter. The heating and cooling loads of standard chicken house were calculated. As a result of the calculation of maximum heating load based on the minimum ventilation rate in winter, the outdoor air temperature requiring heating was $6{\sim}7^{\circ}C$ to keep the indoor air temperature of chicken houses as $24^{\circ}C$. The peak cooling load of chicken houses was mostly taken by the heat generated by chickens and the heat gain due to ventilation. The heat gain through building envelopes was as small as neglectable. Most of chicken houses is usually cooled by gigantic forced ventilation in summer in Korea. When the chicken houses are cooled by electric cooling machine such as cooler or air conditioner, it is more effective to keep minimum ventilation rate to reduce the maximum cooling load. To lower the temperature of supplying water to cooling pad, it is recommended to use the underground water below 10 meters from the ground if there is abundant underground water.

Effects of various cooling methods and drinking water temperatures on reproductive performance and behavior in heat stressed sows

  • Habeeb, Tajudeen;Joseph, Moturi;Abdolreza, Hosseindoust;SangHun, Ha;Jun Young, Mun;YoHan, Choi;SooJin, Sa;JinSoo, Kim
    • Journal of Animal Science and Technology
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    • 제64권4호
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    • pp.782-791
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    • 2022
  • The purpose of this study is to evaluate the effects of multiple cooling systems and different drinking water temperatures (DWT) on the performance of sows and their hair cortisol levels during heat stress. In this study, the effect of four different cooling systems: air conditioner (AC), cooling pad (CP), snout cooling (SC), and mist spray (MS), and two DWT, namely low water temperature (LWT) and high water temperature (HWT) on 48 multiparous sows (Landrace × Yorkshire; 242.84 ± 2.89 kg) was tested. The experiment is based on the use of eight replicas during a 21-days test. Different behaviors were recorded under different cooling treatments in sows. As a result, behaviors such as drinking, standing, and position change were found to be lower in sows under the AC and CP treatments than in those under the SC and MS treatments. Lying behavior increased under the AC and CP systems as compared with that under the SC and MS, systems. The average daily feed intake (ADFI) in sows and weight at weaning in piglets was higher under the AC, CP, and LWT treatments than under the SC, MS and HWT treatments. Sows subjected to SC and MS treatment showed higher hair cortisol levels, rectal temperature, and respiratory rate during lactation than those under AC and CP treatments. Hair cortisol levels, rectal temperature, and respiratory rate were also higher under the HWT than under the LWT treatment. As per the results of this study, the LWT has no significant effect on any of the behavioral factors. Taken together, the use of AC and CP cooling treatment is highly recommended to improve the behavior and to reduce the stress levels in lactating sows.

기생 성분을 고려한 Wi-Fi와 WiMAX용 LTCC 무선 전단부 모듈의 구현 (Implementation of an LTCC RF Front-End Module Considering Parasitic Elements for Wi-Fi and WiMAX Applications)

  • 김동호;백경훈;김동수;유종인;김준철;박종철;박종대
    • 한국전자파학회논문지
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    • 제21권4호
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    • pp.362-370
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    • 2010
  • 본 논문에서는 저온 동시 소성 세라믹(Low Temperature Co-fired Ceramic: LTCC) 기술을 이용하여 Wi-Fi와 WiMAX에 적용할 수 있는 무선 전단부(RF front-end) 모듈을 구현하였다. 무선 전단부 모듈은 3개의 LTCC 대역 통과 여파기와 FBAR 여파기, embedded된 정합 회로, Wi-Fi와 WiMAX 모드 선택용 SPDT 스위치, 송 수신택용 SPDT 스위치 그리고 대역 선택용 SP4T 스위치로 구성되어 있다. 모드 선택용 SPDT 스위치의 DC block 패시터를 실장하기 위한 패드 패턴에서 LTCC의 적층 구조의 특성으로 인해 0.2~0.3 pF의 값을 가지는 기생 성분이 생기게 된다. 이러한 기생 성분은 설계된 회로의 매칭을 틀어지게 만들어 결과적으로 모듈의 전기적 성능을 저하시킨다. 따라서 기생 커패시터 성분에 상응하는 칩 인덕터를 DC block 커패시터 패드 패턴과 병렬로 달아서 기생 성분을 상쇄하여 모듈의 특성을 최적화하였다. 제작된 무선 전단부 모듈은 내부 접지(inner GND) 3개 층을 포함한 12층으로 설계되었으며, 크기는 $6.0mm{\times}6.0mm{\times}0.728mm$이다.

Blood Flow and Skin Temperature Increases by Monochromatic Infrared Energy Irradiation

  • Lee, Jae-Hyoung;Kim, Gi Won
    • The Journal of Korean Physical Therapy
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    • 제24권3호
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    • pp.202-207
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    • 2012
  • Purpose: The purpose of this study was to determine the effect of monochromatic infrared energy (MIRE) on the blood flow of the superficial radial artery and local skin temperature in healthy subjects. Methods: Forty healthy volunteers were recruited and randomly assigned to MIRE group (n=20) and placebo group (n=20). The MIRE group received a 890 nm MIRE irradiation on the forearm using two therapy pads for 30 minutes. The therapy pad was composed of an array of 60 diodes. MIRE unit was set at bar 8, that corresponds to a diode power of 10 mW and a power density of $63mW/cm^2$. The placebo group received sham MIRE. Peak blood flow velocity (PBFV), mean blood flow velocity (MBFV), and skin temperature (ST) were measured pre- and post-MIRE irradiation. Results: There was a significant difference in PBFV (p<0.001), MBFV (p<0.001), and ST (p<0.001) between the pre- and post-treated values in the MIRE group. In contrast, no significant difference was found between the pre- and post-treated values in the placebo group. There was significant difference in mean change values from baseline of PBFV (p<0.001), MBFV (p<0.001), and ST (p<0.001) between the MIRE group and the placebo group. There was a significant increase in PBFV (p<0.001), MBFV (p<0.001), and ST (p<0.001) following MIRE irradiation. Conclusion: The arterial blood flow and local skin temperature of the forearm in the healthy subjects were significantly increased following MIRE irradiation.

복부 가열 패드를 부착한 상의 베이스 레이어의 여유량에 따른 인체 반응 (Human Responses to Pattern Ease of Base Layer with Abdominal Heating Pads)

  • 이경미;홍경희;이예진
    • 한국의류학회지
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    • 제41권4호
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    • pp.687-697
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    • 2017
  • To figure out an appropriate pressure level for a body warming base layer, human responses were observed when the pattern reduction of base layers varied. Under the condition of $2^{\circ}C$, 60% RH, 0.1m/s, ten male subjects participated in the experiment with four sizes of experimental vests where heating pads were attached. The subjective evaluations of the heating vests with different sizes were reported using 7 or 9 point scales. We simultaneously observed chest, abdomen and scapula skin temperatures and microclimate humidity. It was found that the tight pattern as in the case of A or B provided a warmer subjective sensation and skin temperature than C or D; however, there were no differences in skin temperature at the chest. Eventually, the chest temperature decreased after about 30 mins of heating; however, temperature of abdomen increased and indicated that heating with two commercial pads used was inadequate for whole body warming. The pressure sensation of 'tight' was improved after warming the abdomen in a cold environment. Overall, the gaps beyond the original circumference of the abdomen, as in C or D, were not desirable for the local heating of abdomen under the conditions of this experiment where walking was included in the protocol. The experiment garment B with nude waist circumference was the best, and D with the largest ease, was the worst for a comfortable warming vest.

마찰재에 함유된 금속섬유와 마찰 특성의 연관관계 (The Effect of Metal Fibers on the Tribology of Automotive Friction Materials)

  • 고길주;조민형;장호
    • Tribology and Lubricants
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    • 제17권4호
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    • pp.267-275
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    • 2001
  • Friction and wear properties of brake friction materials containing different metal fibers (Al, Cu or Steel fibers) were investigated. Based on a simple experimental formulation, friction materials with the same amount of metal fibers were tested using a pad-on-disk type friction tester. Two different materials (gray cast iron and aluminum metal matrix composite (MMC)) were used for disks rubbing against the friction materials. Results front ambient temperature tests revealed that the friction material containing Cu fibers sliding against gray cast iron disk showed a distinct negative $\mu$-v (friction coefficient vs. sliding velocity) relation implying possible stick-slip generation at low speeds. The negative $\mu$- v relation was not observed when the Cu-containing friction materials were rubbed against the Al-MMC counter surface. Elevated temperature tests showed that the friction level and the intensity of friction force oscillation were strongly affected by the thermal conductivity and melting temperature of metallic ingredients of the friction couple. Friction materials slid against cast iron disks exhibited higher friction coefficients than Al-MMC (metal matrix composite) disks during high temperature tests. On the other hand, high temperature test results suggested that copper fibers in the friction material improved fade resistance and that steel fibers were not compatible with Al-MMC disks showing severe material transfer and erratic friction behavior during sliding at elevated temperatures.

드롭랜딩 시 국소부위 온열처치와 동적 준비운동이 하지의 운동역학적 변인에 미치는 영향 (Thermotherapy and Dynamic Warm-up on the Kinetic Parameters during Drop-landing)

  • Kim, Sungmin;Song, Jooho;Han, Sanghyuk;Moon, Jeheon
    • 한국운동역학회지
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    • 제31권4호
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    • pp.297-307
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    • 2021
  • Objective: The aim of this study was to analyze kinetic variables between thermotherapy and dynamic warm-up during drop-landing. Method: Twenty male healthy subjects (Age: 21.85 ± 1.90 years, Height: 1.81 ± 0.06 cm, Weight: 68.5 ± 7.06 kg) underwent three treatments applied on the thermotherapy of femoral muscles and a dynamic warm-up. The thermotherapy was performed for 15 minutes while sitting in a chair using an electric heating pad equipped with a temperature control device. Dynamic warm-up performed 14 exercise, a non-treatment was sitting in a chair for 15 minutes. Core temperature measurements of all subjects were performed before landing at a height of 50 cm. During drop-landing, core temperature, joint angle, moment, work of the sagittal plane was collected and analyzed. All analyses were performed with SPSS 21.0 and for repeated measured ANOVA and Post-hoc was Bonferroni. Results: Results indicated that Thermotherapy was increased temperature than other treatments (p = .000). During drop-landing, hip joint of dynamic warm-up was slower for angular velocity (p < .005), and left ankle joint was fastest than other treatments (p = .004). Maximum joint moment of dynamic warm-up was smaller for three joints (hip extension: p = .000; knee flexion/extension: p = .001/.000; ankle plantarflexion: p = .000). Negative work of dynamic warm-up was smaller than other treatments (p = .000). Conclusion: In conclusion, the thermotherapy in the local area doesn't affect the eccentric contraction of the thigh. The dynamic warm-up treatment minimized the joint moment and negative work of the lower joint during an eccentric contraction, it was confirmed that more active movement was performed than other treatment methods.

u-IT 전기안전통합관리시스템의 모듈별 성능평가와 보안방법 연구 (A Study on Performance Evaluation and Security Methods of u-IT Electrical Safety Integrated Management System's Module)

  • 박대우;김응식;최종문
    • 한국정보통신학회논문지
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    • 제14권6호
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    • pp.1447-1452
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    • 2010
  • Ubiquitous 사회에서 기본 인프라를 구축하는 전력 공급망과 전력기기의 안전은 중요하다. u-City의 재난을 방지하기 위하여 u-IT전력기기의 모듈별 성능평가와 보안은 u-City 안전을 위해 꼭 필요하다. 본 논문에서는 u-IT전력기기의 모듈에 온도센서, 습도센서, 화재센서들을 탑재한 수배전반, 홈 분전반, Home Network Wall-Pad, 차단기, MPNP 블랙박스, 아크 검출기, 아크 안전기, 아울렛의 모듈별 성능평가 방안과 방법 및 보안방법을 연구한다. u-IT전력기기들은 센서의 정보들을 전달 및 분석하여 위험성을 사전 예방하여 안전성을 확보하고, 접근제어, 인증 등 보안대책으로 u-IT 전기안전통합관리시스템의 보안성을 강화시켜, 안전성과 보안성을 갖춘 u-City건설과 운영에 기여하게 될 것이다.

Membrane Embedded Polisher Head의 Plate 구조의 영향 (The Influence of Plate Structure in Membrane Embedded Head Polisher)

  • 조경수;이양원;김대영;이진규;김활표;정제덕;하현우;정호석;양원식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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    • pp.136-139
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    • 2004
  • The requirement of planarity, such as with-in-wafer nonuniformity, post thickness range, have become increasingly stringent as critical dimensions of devices are decreased and a better control of a planarity become important. The key factors influencing the planarity capability of the CMP process have been well understood through numerous related experiments. These usually include parameters such as process pressures, relative velocities, slurry temperature, polishing pad materials and polishing head structure. Many study have been done about polishing pad and its groove structure because it's considered as one of the key factors which can decide wafer uniformity directly. But, not many study have been done about polisher head structure, especially about polisher head plate design. The purpose of this paper is to know how the plate structure can affect wafer uniformity and how to deteriorate wafer yield. Furthermore, we studied several new designed plate to improve wafer uniformity and also improve wafer yield.

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