• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2014.10a
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• pp.585-588
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• 2014

This paper presents a self-powered sensor node circuit using photovoltaic and vibration energy harvesting. The harvested energy from a solar cell and a vibration device(PZT) is stored in a storage capacitor. The stored energy is managed by a PMU(Power Management Unit). In order to supply a stable voltage to the sensor node, an LDO(Low Drop Out Regulator) is used. The LDO drives a temperature sensor and a SAR ADC(Successive Approximate Register Analog-to-Digital Converter), and 10-bit digital output data corresponding to current temperature is obtained. The proposed circuit is designed in a 0.35um CMOS process, and the designed chip size including PADs is $1.1mm{\times}0.95mm$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.59-61
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• 2005

In this paper, in order to develop the low temperature sintering ceramics for multilayer piezoelectric transformer, $Pb[(Mn_{1/3},Nb_{2/3})_{0.07}(Zn_{1/3}Nb_{2/3})_a(Zr_{0.48}Ti_{0.52})_{1-0.07-a}O_3]$ ceramics were manufactured with the variations of PZN from 2 to 14mol% and their dielectric and piezoelectric properties were investigated. Sintering temperature was varied from 910 to $1000^{\circ}C$. At 8mol% PZN substituted specimen sintered at $970^{\circ}C$, electromechanical coupling factor(kp), mechanical quality factor(Qm), dielectric constant and peizoelectric constant($d_{33}$) showed the optimal values of 0.536, 1803, 1551 and 328[pC/N), respectively, for multilayer piezoelectric transformer application.

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1553-1555
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• 1999

Recently, $SrBi_2Ta_2O_9$(SBT) and $Pb(ZrTi)O_3$(PZT) were much attracted as materials of capacitor for ferroelectric random access memory(FRAM) showing higher read/write speed, lower power consumption and nonvolartility. Bi-layered SBT thin film has appeared as the most prominent fatigue free and low operation voltage for use in nonvolatile memory. To highly integrate FRAM, SBT thin film should be etched. A lot of papers on SBT thin film and its characteristics have been studied. However, there are few reports about SBT thin film due to difficulty of etching. In order to investigate properties of etching of SBT thin film, SBT thin film was etched in $CF_4$/Ar gas plasma using magnetically enhanced inductively coupled plasma (MEICP) system. When $CF_4/(CF_4+Ar)$ is 0.1, etch rate of SBT thin film was $3300{\AA}/min$, and etch rate of Pt was $2495{\AA}/min$. Selectivities of SBT to Pt. $SiO_2$ and photoresist(PR) were 1.35, 0.6 and 0.89, respectively. With increasing $CF_4$ gas, etch rate of SBT thin film and $P_t$ decreased.

• Journal of IKEEE
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• v.16 no.3
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• pp.224-234
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• 2012

This paper describes an energy harvesting circuit using solar and vibration energy with MPPT(Maximum Power Point Tracking) control for micro sensor nodes. The designed circuit employs MPPT control to harvest maximum power available from a PZT vibration element and an integrated solar cell. The harvested energies are simultaneously combined and stored in a storage capacitor, and then managed and transferred into sensor node by PMU(Power Management Unit). MPPT controls are implemented using the linear relationship between the open-circuit voltage of an energy transducer and its MPP(Maximum Power Point) voltage. The proposed circuit is designed in a CMOS 0.18um technology and its functionality has been verified through extensive simulations. The designed energy harvesting circuit and integrated solar cell occupy $2.85mm^2$ and $8mm^2$ respectively.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.37 no.4
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• pp.1-6
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• 2000

Recently, SrBi$_{2}$Ta$_{2}$ $O_{9}$(SBT) and Pb(Zr,Ti) $O_{3}$(PZT) were much attracted as materials of capacitor for ferroelectric random access memory(FRAM) with higher read/ write speed, lower power consumption and nonvolartility. SBT thin film has appeared as the most prominent fatigue free and low operation voltage. To highly integrate FRAM, SBT thin film has to be etched. A lot of papers have been reported over growth of SBT thin film and its characteristics. However, there are few reports about etching SBT thin film owing to difficult of etching ferroelectric materials. SBT thin film was etched in CF$_{4}$Ar plasma using magnetically enhanced inductively coupled plasma (MEICP) system. In order to investigate the chemical reaction on the etched surface of SBT thin films, X-ray Photoelecton spectrosocpy (XPS) and Secondary ion mass spectroscopy(SIMS) was performed.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2013.10a
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• pp.346-349
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• 2013

This paper describes a triple-input energy harvesting circuit using solar, vibration and thermoelectric energy with MPPT(Maximum Power Point Tracking) control. The designed circuit employs MPPT control to harvest maximum power available from a solar cell, PZT vibration element and thermoelectric generator. The harvested energies are simultaneously combined and stored in a storage capacitor, and then managed and transferred into a sensor node by PMU(Power Management Unit). MPPT controls are implemented using the linear relation between the open-circuit voltage of an energy transducer and its MPP(Maximum Power Point) voltage. The proposed circuit is designed in a CMOS 0.18um technology and its functionality has been verified through extensive simulations. The designed chip occupies $945{\mu}m{\times}995{\mu}m$.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.8 no.4
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• pp.599-604
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• 1998

We have investigated Pt and $RuO_2$ as a bottom electrode for ferroelectric capacitor applications. The bottom electrodes were prepared by using an RF magnetron sputtering method. Some of the investigated parameters were a substrate temperature, gas flow rate, RF power for the film growth, and post annealing effect. The substrate temperature strongly influenced the surface morphology and resistivity of the bottom electrodes as well as the film crystallographic structure. XRD results on Pt films showed a mixed phase of (111) and (200) peak for the substrate temperature ranged from RT to $200^{\circ}C$, and a preferred (111) orientation for $300^{\circ}C$. From the XRD and AFM results, we recommend the substrate temperature of $300^{\circ}C$ and RF power 80W for the Pt bottom electrode growth. With the variation of an oxygen partial pressure from 0 to 50%, we learned that only Ru metal was grown with 0~5% of $O_2$ gas, mixed phase of Ru and $RuO_2$ for $O_ 2$ partial pressure between 10~40%, and a pure $RuO_2$ phase with $O_2$ partial pressure of 50%. This result indicates that a double layer of $RuO_2/Ru$ can be grown in a process with the modulation of gas flow rate. Double layer structure is expected to reduce the fatigue problem while keeping a low electrical resistivity. As post anneal temperature was increased from RT to $700^{\circ}C$, the resistivity of Pt and $RuO_2$ was decreased linearly. This paper presents the optimized process conditions of the bottom electrodes for memory device applications.