• Proceedings of the KIEE Conference
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• 2002.07d
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• pp.2123-2125
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• 2002

This paper presents the use of piezoelectric ceramics for sensing and actuation purposes for vibration control. The PZT sensors and actuators are designed and fabricated. The transfer function of the beam is obtained via the Lagrangian method.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 2002.04a
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• pp.453-460
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• 2002

Piezoelectric solids such as PZT and PLZT have been widely used as sensors or actuators for various smart structural systems. The main problem occurring in the applications is that a larger and larger actuation force is required to maximize the function of the system. This naturally leads to local concentrations of electric or stress fields near crack tips or geometric irregularities and thereby results in a nonlinear behavior of the system Hence, it becomes more important to Predict the nonlinear behavior of piezoelectric solids In this Paper we investigate the micro-mechanism of nonlinear behavior in piezoelectric materials and propose constitutive equations. The calculation results obtained from an associated finite element Program are shown to be qualitatively consistent with experiments.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.9 s.252
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• pp.1102-1109
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• 2006

In this paper, the polarization of piezoelectric materials is considered to improve actuation since the piezoelectric polarization has influences on the performance of the actuator. The topology design of compliant mechanism can be formulated as an optimization problem of material distribution in a fixed design domain and continuous approximation of material distribution (CAMD) method has demonstrated its effectiveness to prevent the numerical instabilities in topology optimization. The optimization problem is formulated to maximize the mean transduction ratio subject to the total volume constraints and solved using a sequential linear programming algorithm. The effect of CAMD and the performance improvement of actuator are confirmed through Moonie actuator and PZT suspension design.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.10
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• pp.1514-1519
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• 2001

This paper is concerned with design, manufacturing and performance test of LIPCA ( Lightweight Piezo- composite Curved Actuator) using a top carbon fiber composite layer with near -zero CTE(coefficient of thermal expansion), a middle PZT ceramic wafer and a bottom glass/epoxy layer with high CTE. The main point of this design is to replace the heavy metal layers of THUNDER by thigh tweight fiber reinforced plastic layers without losing capabilities to generate high force and large displacement. It is possible to save weight up to about 30% if we replace the metallic backing material by the light fiber composite layer. We can also have design flexibility by selecting the fiber direction and the size of prepreg layers. In addition to the lightweight advantage and design flexibility, the proposed device can be manufactured without adhesive layers when we use epoxy resin prepreg system. Glass/epoxy prepregs, a ceramic wafer with electrode surfaces, and a graphite/epoxy prepreg were simply stacked and cured at an elevated temperature (177 $^{circ}C$ after following an autoclave bagging process. It was found that the manufactured composite laminate device had a sufficient curvature after detached from a flat mold. The analysis method of the cure curvature of LIPCA using the classical lamination theory is presented. The predicted curvatures are fairly in agreement with the experimental ones. In order to investigate the merits of LIPCA, a performance test of both LIPCA and THUNDE$^{TM}$ were conducted under the same boundary conditions. From the experimental actuation tests, it was observed that the developed actuator could generate larger actuation displacement than THUNDERT$^{TM}$.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.9 s.174
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• pp.130-136
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• 2005

This paper presents an optimal design and the performance evaluation of two-axis nano positioning stage with round notched flexure hinges. A flexure hinge mechanism with round notched flexure hinges is to guide the linear motions of a moving plate in the nano positioning stage. A Min-Max algorithm is applied to the design of the flexure hinge mechanism for nano positioning stage. In the design process, the structure of the flexure hinge mechanism is fixed, then the radius of a round hole and the width of two round holes are chosen as design variables, and finally the do sign variables are calculated by the Min-Max algorithm. The machined flexure hinge mechanism, stack type PZTs for actuation and capacitance type displacement sensors for position measurement are assembled into the nano positioning stage. The experimental results of the manufactured nano positioning stage show the first modal resonance frequency of 197 Hz, the operating range of 40 um, and the resolution of 3 nm.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.6 s.183
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• pp.166-173
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• 2006

In this study, a probe array has been developed for use in a data storage device that is based on scanning probe microscope (SPM) and MEMS technology. When recording data bits by poling the PZT thin layer and reading them by sensing its piezoresponse, commercial probes of which the tip heights are typically shorter than $3{\mu}m$ raise a problem due to the electrostatic forces occurring between the probe body and the bottom electrode of a medium. In order to reduce this undesirable effect, a poly-silicon probe with a high aspect-ratio tip was fabricated using a molding technique. Poly-silicon probes fabricated by the molding technique have several features. The tip can be protected during the subsequent fabrication processes and have a high aspect ratio. The tip radius can be as small as 15 nm because sharpening oxidation process is allowed. To drive the probe, electrostatic actuation mechanism was employed since the fabrication process and driving/sensing circuit is very simple. The natural frequency and DC sensitivity of a fabricated probe were measured to be 18.75 kHz and 16.7 nm/V, respectively. The step response characteristic was investigated as well. Overshoot behavior in the probe movement was hardly observed because of large squeeze film air damping forces. Therefore, the probe fabricated in this study is considered to be very useful in probe-based data storages since it can stably approach toward the medium and be more robust against external shock.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.30 no.5
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• pp.94-100
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• 2002

This paper is concerned with the development, and performance test of LIPCA (Lightweight Piezo-composite Curved Actuator) that is lighter than other conventional piezo-composite type actuators. LIPCA is composed of top fiber composite layers with a high modulus and low CTE (Coefficient of Thermal Expansion), a middle PZT cermaic wafer, and base layers with a high modulus and high CTE. The performance of each actuator was evaluated using an actuator test system consisting of an actuator supporting jig, a high voltage actuating power supplier, and a non-contact laser measuring system. The simply supported condition actuator was excited by the power supplier with 1.0Hz cycle and up to $100\sim400V_{pp}$. The displacement at the center point of actuator was measured with non-contact laser displacement measuring system, It has been shown that the LIPCA-C2 can 34% decrease in mass and 13% increase in displacement compared to THUNDER.

• Journal of Electrical Engineering and Technology
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• v.5 no.2
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• pp.337-341
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• 2010

In this paper, an extremely low voltage operated micro corner cube retroreflector (CCR) was fabricated for free-space optical communication applications by using bulk silicon micromachining technologies. The CCR was comprised of an orthogonal vertical mirror and a horizontal actuated mirror. For low voltage operation, the horizontal actuated mirror was designed with two PZT cantilever actuators, torsional bars, hinges, and a mirror plate with a size of $400{\mu}m{\times}400{\mu}m$. In particular, the torsional bars and hinges were carefully simulated and designed to secure the flatness of the mirror plate by using a finite element method (FEM) simulator. The measured tilting angle was approximately $2^{\circ}$ at the applied voltage of 5 V. An orthogonal vertical mirror with an extremely smooth surface texture was fabricated using KOH wet etching and a double-SOI (silicon-on-insulator) wafer with a (110) silicon wafer. The fabricated orthogonal vertical mirror was comprised of four pairs of two mutually orthogonal flat mirrors with $400{\mu}m4 (length) $\times400{\mu}m$ (height) $\times30{\mu}m$ (thickness). The cross angles and surface roughness of the orthogonal vertical mirror were orthogonal, almost $90^{\circ}$ and 3.523 nm rms, respectively. The proposed CCR was completed by combining the orthogonal vertical and horizontal actuated mirrors. Data transmission and modulation at a frequency of 10 Hz was successfully demonstrated using the fabricated CCR at a distance of approximately 50 cm.

• Journal of the Korea institute for structural maintenance and inspection
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• v.18 no.1
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• pp.166-173
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• 2014

A noncontact nondestructive testing (NDT) method is proposed to detect the damage of pipeline structures and to identify the location of the damage. To achieve this goal, a scanning laser source actuation technique is utilized to generate a guided wave and scans a specific area to find damage location more precisely. The ND: YAG pulsed laser is used to generate Lamb wave and a piezoelectric sensor is installed to measure the structural responses. The measured responses are analyzed using three dimensional Fourier transformation (3DFT). The damage-sensitive features are extracted by wavenumber filtering based on the 3D FT. Then, flaw imaging techniques of a pipeline structures is conducted using the damage-sensitive features. Finally, the pipes with notches are investigated to verify the effectiveness and the robustness of the proposed NDT approach.