• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.12
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• pp.1937-1941
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• 2004

We present lateral actuated piezoelectric actuator using U-shaped PZT strip and lever structure for the RF switch application. In the previous study of RF switch, they used horizontal contact switch fabricated by thin film metals. However, thin film metals could not generate large contact force due to low stiffness. In this work, we suggest lateral contact switch which makes large contact force by increasing stiffness. In addition, we use PZT actuator for the high force actuation. Generally actuator using thin film PZT moves to the vertical direction due to the neutral axis shift. Therefore we need lateral motion generation mechanism based on the thin film PZT actuator. In order to increase lateral motion of thin film PZT actuator, we use U-shaped PZT actuator using residual stress control. Also, thin film PZT actuator can generate very small lateral motion of 120${\times}$10$^{-6}$ ${\mu}{\textrm}{m}$/V for d$_{31}$ mode, thus we suggest lever structure to increase stroke amplification. From the experimental study, fabricated PZT actuator shows maximum lateral displacement of 1 ${\mu}{\textrm}{m}$, and break down voltage of the thin film PZT actuator is above 16V.

• Journal of the Korean Ceramic Society
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• v.32 no.7
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• pp.783-792
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• 1995

Sol-Gel derived ferroelectric PZT thin films were fabricated on ITO/Glass and Si/SiO2 substrates. In order to investigate the effect of catalysts on the densification and crystallization of PZT thin films, a nitric acid or ammonium hydroxide was added to the PZT stock solution at the state of partial hydrolysis reaction. The measured pH for a stable PZT sol was 5.2~9.3. In case of an acid-catalyzed PZT sol, a highly condensed particulate PZT sol was formed by accelerating the hydrolysis reaction. But weakly branched polymeric PZT sol was formed with a base-catalyzed condition. The difference in densification behavior was not found in the pH range of added catalyst, but the refractive index of PZT thin film was increased rapidly as the annealing temperature increased. The PZT thin film annealed at 54$0^{\circ}C$ for 10 min was fully densified and its refractive index was above 2.4. When the annealing temperature increased, the transition from the pyrochlore phase to perovskite appeared at 54$0^{\circ}C$. The base-catalyzed PZT thin film suppressed to form the pyrochlore phase and proceeded effectively to convert the perovskite phase. This was due to the formation of polymeric molecular structure by controlling the hydrolysis and condensation reaction through the additiion of the ammonium hydroxide.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.45 no.4
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• pp.558-561
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• 1996

PZT powders were prepared by the molten salt synthesis method. The porous PZT ceramics were made from a mixture of PZT and polyvinylalcohol(PVA) by BURPS(Burnout Plastic Sphere) technique. The porous PZT bodies were fabricated from the green compacts with various amounts of PVA spheres. The piezoelectric coefficient d$_{33}$ (334~350*10$^{-12}$ C/N)of porous PZT ceramics(364*10$^{-12}$ C/N). The figure of merit(d$_{h}$g$_{h}$) of porous PZT specimens evaluating the sensitivity for ultrasonic transducer applications was improved significantly(11~70times) in comparison with that of single phase PZT ceramics(100*10$^{-15}$ m$^{2}$/N). The thickness mode coupling factor k$_{t}$(0.5~0.6) of porous specimens was comparable with that of single phase PZT ceramics(k$_{t}$=0.7). The mechanical quality factor of porous PZT specimens was smaller than 10, and thus these porous PZT ceramics would be believed as a good candidate for broad band hydrophone applications. (author). 10 refs., 7 figs.igs.igs.

• Korean Journal of Materials Research
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• v.3 no.1
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• pp.19-27
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• 1993

Abstract The PZT thin film was deposited by usin. RF magnetron sputtering with PZT(52/48) target. The formation of perovskite structure PZT thin film started at 55$0^{\circ}C$ on Si substrate. The AES results showed an oxide layer formed at the between Si and PZT film during the annealing. And, Ti$O_2$ layer appeared at the between TiN and PZT film for the annealing. But, the perovskite phase PZT film was formed after the annealing on the Si$O_2$/Si substarte. The ratio in PZT film was constant across the asdeposited PZT film, but, Pb have diffused into the Si substrate and Si have out-diffused into PZT layer during the post annealing at 75$0^{\circ}C$. The dielectric constants of PZT film indicated about 1300( thickness: 1500$\AA$, at 10KHz) but, the cracks were appeared to surface for annealing.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1998.11a
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• pp.247-250
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• 1998

Ferroelectric PZT(10/90)PZT(90/10) heterolayered thin films were fabricated by spin-coating method on the Pt/Ti/SiO$^2$/Si substrate alternately using PZT(10/90) and PZT(90/10) metal alkoxide solutions. The coating and heating procedure was repeated six times to form PZT heterolayered films. The surface, cross-sectional microstructures and thickness of the films were observed using scanning electron microscope(SEM). The relative dielectric constant and dielectric loss of the 5-coated PZT heterolayered films were 1331 and 4.8% respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1995.11a
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• pp.205-208
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• 1995

PZT powders were prepared by the molten salt synthesis method. The porous PZT specimens were prepared from a mixture of PZT and Polyvinylalcohol(PVA) powders by BURPS(Burnout Plastic Sphere) technique. The pulse-echo response of PZT-polymer 3-3 type composite transducer with various PVA wt.% were studied, The fall time of pulse-echo response of PZT-polymer 3-3 type composite transducer was shorten to that of solid PZT-maded transducer. Therefore, a good transmitting and receiving properties could be obtained. The distance between transducer and reflector was in good agreement both solid PZT and PZT-polymer 3-3 type composite fabricated transducer.

• Proceedings of the KIEE Conference
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• 1995.11a
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• pp.358-360
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• 1995

PZT powders were prepared by the molten salt synthesis method. The porous PZT specimens were prepared from a mixture of PZT and polyvinylalcohol(PVA) powders by BURPS(Burnout Plastic Sphere) technique. The pulse-echo response of porous PZT transducer with various PVA wt.% were studied. The fall time of pulse-echo response of porous PZT transducer was shorten to that of solid PZT-maded transducer. Therefore, a good transmitting and receiving properties could be obtained. The distance between transducer and reflector was in good agreement both solid PZT and porous PZT fabricated transducer.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.223-224
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• 2006

In this study, we have investigated the micromachining of PZT to fabricate interdigitated electrodes of electro active material actuator using Nd:YAG laser We have observed groove shapes of PZT with changing beam power, scanning speed, gas, and so on to find optimum conditions of the laser processing for PZT grooves. As a result, this method has been applied to the laser micromachining for grooves in PZT surface, and we could have optimum parameters of Nd:YAG laser Finally it was shown that the laser micromachining of PZT can substitute fer bonding, etching and deposition processes in fabricating electro active material actuator embedded with interdigitated electrodes.

• Structural Engineering and Mechanics
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• v.58 no.2
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• pp.347-378
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• 2016

Within the scope of the plane-strain state, by utilizing the three-dimensional linearized theory of elastic waves in initially stressed piezoelectric and elastic materials, Lamb wave propagation and the influence of the initial stresses on this propagation in a sandwich plate with pre-stressed piezoelectric face and pre-stressed metal elastic core layers are investigated. Dispersion equations are derived for the extensional and flexural Lamb waves and, as a result of numerical solution to these equations, the corresponding dispersion curves for the first (fundamental) and second modes are constructed. Concrete numerical results are obtained for the cases where the face layers' materials are PZT-2 or PZT-6B, but the material of the middle layer is Steel (St) or Aluminum (Al). Sandwich plates PZT-2/St/PZT-2, PZT-2/Al/PZT-2, PZT-6B/St/PZT-6B and PZT-6B/Al/PZT-6B are examined and the influence of the problem parameters such as piezoelectric and dielectric constants, layer thickness ratios and third order elastic constants of the St and Al on the effects of the initial stresses on the wave propagation velocity is studied.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.189.1-189.1
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• 2014

Lead zirconium titanate (PZT) is usually used as bulk and thin films. Due to high flexibility and piezoelectric, ferroelectric and pyroelectric properties, PZT fiber has attracted in a variety of fields such as sensor devices, non-electromechanical systems and non-volatile ferroelectric memory devices. And PZT fiber can be numerously synthesized and almost with the diameter of PZT fiber thicker than $10{\mu}m$. However, the electrospinnig method is cost effective and convenient. PZT obtained by electrospinning methodhas the diameter from sub-micro to nanometer. In this paper, the PZT/PVP nanofibers were synthesized with three precursors, lead nitrate, zirconium ethoxide and titanium isopropoxide. And the PZT nanofibers were fabricated after removal of PVP by annealing process at various temperature. The obtained PZT nanofibers were characterized by means of X-ray photoelectron spectroscopy (XPS) for chemical properties, X-ray diffraction (XRD) for crystallinity and phase, scanning electron microscopy (SEM) for morphologies. The diameter of PZT nanofibers were measured with SEM. From the SEM images, we confirmed that diameter of PZT nanofibers was hundreds of nanometers and decreased with increasing the annealing temperature. When the annealing temperature increased, the crystallinity of PZT nanofibers changed from pyrochlore to perovskite structure.