• Proceedings of the Computational Structural Engineering Institute Conference
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• 2011.04a
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• pp.299-302
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• 2011

본 논문에서는 보 구조물의 응력 변화에 따른 구조역학적 임피던스의 특성을 분석하였다. 이를 위해 다음과 같은 연구가 수행되었다. 먼저 외팔보 형식의 알루미늄 보에 PZT센서와 strain gage를 부착하고, 하중을 단계적으로 증가시키면서 임피던스를 계측하였다. 다음으로 strain gage에서 계측된 변형률과 PZT로 부터 계측된 임피던스 사이의 관계를 분석하였다. 마지막으로 수치해석을 통해 변형률과 임피던스의 관계를 분석하여, 실험결과와 비교하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.193-193
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• 2011

To obtain ceramic films, the sol-gel coating technique has been broadly used with heat treatment, but crack formation tend to occur during heat treatment in thick sol-gel films. We prepared PZT thin films by sol-gel method with single-step spin coating process. The PZT solution have been synthesized using lead acetate ($Pb(CH_3COO)_2$), zirconium acetylacetonate ($Zr(OC_3H_7^n)_4$), and titanium diisopropoxide bis(acetylacetonate) 75wt% in isopropanol ($Ti(OC_3H_7^i)_2(OC_3H_7^n)_2$) as starting materials and n-propanol was selected as a solvent. The poly(vynilpyrrolidone) (PVP) was added with 0, 0.25, 0.5, 0.75, and 1 molar ratios to control viscosity of solution. We investigated influence of the viscosity on thickness, microstructure, and electrical properties of final PZT films. Thermo-gravimetric analysis and differential scanning calorimeter (TGA/DSC) was carried out from room temperature to $800^{\circ}C$ in order to measure pyrolysis temperature. Structural characteristics were analyzed by X-ray diffraction (XRD) and scanning electron microscopy (SEM). Ferroelectric and dielectric properties were measured by RT66A (Radiant) and impedance analyzer (Agilent), respectively. The thicknesses of PZT films depended on incorporation of an excess amount of PVP. Finally, we obtained PZT films of good quality without crack formation via single-step spin coating.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.10a
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• pp.579-580
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• 2014

In this research, modeling and analysis of an ultrasonic transducer composed of single crystal piezoelectric material(PMN-28PT) are conducted with FEM in reference with that composed of piezoelectric ceramic(PZT-4). Acoustic performances of the ultrasonic transducer are compared with magnitude, phase of impedance and trasmitting voltage response according to the type of piezoelectric materials.

• The Journal of the Acoustical Society of Korea
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• v.17 no.2
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• pp.25-31
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• 1998

본 연구에서는 자동차 유리판에 초음파 대역 진동을 효율적으로 발생시킬 수 있는 압전 액츄에이터를 개발하고자 하였다. 자동차 유리판을 단순지지 평판으로 가정하였으며, 액츄에이터로는 PZT 진동자를 사용하였다. 유한 요소법(Finite Element Method)을 통하여 유리판의 최적 공진 주파수와 유리판에 부착할 압전 진동자의 구조 조건인 최적 위치와 개 수를 결정하였다. 설계 결과에 따라 자동차 유리판에 압전 진동자를 부착하여 임펄스 응답 해석(impulse response analysis)과 임피던스 해석(impedance analysis)을 수행하여 구동 주 파수를 확인하였다. 그 결과, 이 주파수로 가진하여 유리판 전면에 걸쳐 고른 초음파 진동이 분포함을 확인하였으며, 나아가 전기적 임피던스 매칭(impedance matching)을 통해 더 큰 효율의 진동을 발생시킬 수 있었다.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 2011.04a
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• pp.32-35
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• 2011

전기역학적 임피던스(electromechanical impedance)를 이용한 구조물 건전성 모니터링(structural health monitoring; SHM) 기술은 구조물의 주요 부재에 압전센서를 부착하여 이로부터 획득한 임피던스 신호의 변화를 관찰함으로써 구조물의 국부적 상태를 실시간으로 진단하는 것이다. 임피던스는 손상뿐만 아니라 외부 온도에도 민감하게 반응하기 때문에 구조물 진단 결과에 상당한 오차를 유발할 수 있으므로 이에 대한 보상을 수행해야 한다. 따라서 본 논문에서는 온도변화가 임피던스 기반 진단 결과에 미치는 영향을 PZT 센서를 사용하여 실험적으로 연구하였다. 리액턴스(reactance)의 주성분 분석(Principal Component Analysis; PCA)을 통해 도출된 첫번째 주성분과 저항(resistance)으로부터 계산된 손상지수 사이의 관계를 분석함으로써, 온도변화에 의해 구별되지 않았던 손상을 보다 확연하게 구별 할 수 있음을 확인하였다.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.32 no.8
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• pp.277-283
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• 1983

The pulse generating circuit system of the so-called turbulently-heated theta pinch is experimentally investigated, and its results are compared with the predictions based on the conventional theory. The conventional theory assumes that the impedance of the pinch coil is independent on the time rate of change in voltage (or current) across the pinch coil. The experimental pulse height of the voltage actross the pinch coil is about 1.5% fo that predicted by the conventional theory.

• Journal of the Semiconductor & Display Technology
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• v.22 no.3
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• pp.21-27
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• 2023

In this article, a plate-type megasonic cleaning system with cooling pins is proposed for the sliced ingot, which is a raw material of silicon (Si) wafers. The megasonic system is operated with a lead zirconate titanate (PZT) actuator, which has high electric resistance, thus when it is being operated, it dissipates much heat. So this article proposes a megasonic system with cooling pins. In the design process, finite element analysis was performed and the results were used for the design of the waveguide. The frequency with the maximum impedance value was 998 kHz, which agreed well with the measured value of 997 kHz with 0.1 % error. Based on the results, the 1 MHz waveguide was fabricated. Acoustic pressures were measured, and analyzed. Finally, cleaning tests were performed, and 90 % particle removal efficiency (PRE) was achieved over 10 W power. These results imply that the developed 1 MHz megasonic will effectively clean sliced ingot wafer surfaces.

• Journal of Biosystems Engineering
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• v.34 no.4
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• pp.260-268
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• 2009

As a basic study to develop a high sensitive biosensor using film bulk acoustic resonator, the mathematical model for analyzing the resonance characteristics of bulk acoustic resonator with acoustic Bragg reflectors was investigated. The simulation results due to the number of acoustic Bragg reflectors with low and high acoustic impedance materials were compared with the experimental results for 1, 2.25 and 5 MHz of PZT based bulk acoustic resonators with various acoustic Bragg reflectors. At the fabricated bulk acoustic resonator with an odd number of acoustic Bragg reflectors, low and high acoustic impedance materials in sequence under the bottom electrode showed better resonance characteristics than even number of acoustic Bragg reflectors. The changes of resonance frequencies due to the increase of number of acoustic Bragg reflectors by simulation and experiment, respectively showed approximately similar tendency but some differences in input impedance between the experiment and simulation were found. The derived mathematical model for describing the resonance characteristics of the bulk acoustic resonator with acoustic Bragg reflector will be available for analyzing the design parameters for development of biosensor using bulk acoustic resonator.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.17 no.7
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• pp.1645-1652
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• 2013

In this paper, a new piezoelectric transducer for high performance ultrasonic flaw detector used in non-destructive test (NDT) is implemented. Here, the goals for some major characteristics such as piezoelectric strain constant and electro-mechanical coupling factor are fixed in advanced. Then, the parameters obtained by finite element analysis (FEA) are exploited to design and implement the piezoelectric transducer. As a result of experiments using manufactured samples, it is proved that the new PZT ceramics satisfy the goals very well. It has much improved impedance characteristic at the resonant frequency and generation of ultrasonic signals. In addition, ultrasonic flaw detector with the new transducer provides increased flaw detecting gain than the conventional one. Thus, it is considered that the new flaw detector contributes significantly to improve reliability of the NDT.

• The Journal of the Acoustical Society of Korea
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• v.30 no.8
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• pp.436-445
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• 2011

In this paper, equivalent properties of 2-2 mode piezocomposites were studied. Variation of the properties of 2-2 mode piezocomposites was analyzed by the finite element method, and the result was compared with experimental measurement data to confirm the validity of the analysis. The equivalent properties of a single phase material to represent the piezocomposite composed of PZT-5H and polymer were derived by the asymptotic averaging method. Accuracy of the derived equivalent properties was enhanced by minimizing the discrepancy between the impedance spectra of full 2-2 piezocomposite and equivalent single phase material resonators of various vibration modes by the least square method. The equivalent properties of 2-2 piezocomposites derived in this study can be utilized to the design of diverse acoustic sensors.