• 제목/요약/키워드: PVD coating

검색결과 145건 처리시간 0.022초

전자빔을 이용한 물리기상증착법으로 제조된 열차폐용 4 mol% YSZ 코팅의 내열특성 (Thermal Durability of 4YSZ Thermal Barrier Coating Deposited by Electron Beam PVD)

  • 박찬영;양영환;김성원;이성민;김형태;임대순;장병국;오윤석
    • 한국분말재료학회지
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    • 제20권6호
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    • pp.460-466
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    • 2013
  • 4 mol% Yttria-stabilized zirconia (4YSZ) coatings with $200{\mu}m$ thick are fabricated by Electron Beam Physical Vapor Deposition (EB-PVD) for thermal barrier coating (TBC). $150{\mu}m$ of NiCrAlY based bond coat is prepared by conventional APS (Air Plasma Spray) method on the NiCrCoAl alloy substrate before deposition of top coating. 4 mol% YSZ top coating shows typical tetragonal phase and columnar structure due to vapor phase deposition process. The adhesion strength of coating is measured about 40 MPa. There is no delamination or cracking of coatings after thermal cyclic fatigue and shock test at $850^{\circ}C$.

Fabrication of TiAl Target by Mechanical Alloying and Applications in Physical Vapour Deposition Coating

  • Gabbitas, Brian;Cao, Peng;Raynova, Stiliana;Zhang, Deliang
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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    • pp.729-730
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    • 2006
  • The research involves the development of a powder metallurgical route for producing good quality TiAl targets for making physical vapour deposition (PVD) coatings. Mixtures of elemental titanium and aluminium powders were mechanically milled using a novel discus milling technique under various conditions. Hot isotropic pressing (HIP) was then employed for consolidation of the mechanically alloyed powders. A cathodic arc vapour deposition process was applied to produce a TiAlN coating. Microstructural examination was conducted on the target material and PVD coatings, using X-ray diffractometry (XRD), X-ray photoelectron spectrometry (XPS) and scanning electron microscopy (SEM). It has been found that combining mechanical alloying and HIP enable us to produce fairly good quality of TiAl based target. The PVD coatings obtained from the TiAl target showed very high microhardness values.

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복합표면처리된 CrZrN 박막의 밀착력에 미치는 스퍼터링 효과에 관한 연구 (Study on the Effect of Sputtering Process on the Adhesion Strength of CrZrN Films Synthesized by a Duplex Surface Treatment Process)

  • 김명근;김은영;이상율
    • 한국표면공학회지
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    • 제39권6호
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    • pp.268-275
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    • 2006
  • In this study, effect of sputtering on the plasma-nitriding substrate and before PVD coating on the microstucture, microhardness, surface roughness and the adhesion strength of CrZrN thin films were investigated. Experimental results showed that this sputtering process not only removed surface compound layer which formed during a plasma nitriding process but also induced an alteration of the surface of plasma nitrided substrate in terms of microhardness distribution, surface roughness. This in turn affected the adhesion strength of PVD coatings. After sputtering, microhardness distribution showed general decrease and the surface roughness became increased slightly. The critical shear stress measured from the scratch test on the CrZrN coatings showed an approximately 1.4 times increase in the adhesion strength through the sputtering prior to the coating and this could be attributed to a complete removal of compound layer from the plasma nitrided surface and to an increase in the surface roughness after sputtering.

복합표면처리된 CrN박막의 밀착력에 미치는 스퍼터링 효과에 관한 연구 (Study on the Effect of Sputtering Process on the Adhesion Strength of CrN Films Synthesized by a Duplex Surface Treatment Process)

  • 김명근;김은영;김정택;이상율
    • 한국표면공학회지
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    • 제39권1호
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    • pp.1-8
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    • 2006
  • In this study, effect of sputtering after plasma nitriding and before PVD coating on the microstucture, microhardness, surface roughness and the adhesion strength of CrN thin films were investigated. Experimental results showed that this sputtering process not only removed surface compound layer which formed during a plasma nitriding process but also induced an alteration of the surface of plasma nitrided substrate in terms of microhardness distribution and surface roughness, which in turn affected the adhesion strength of PVD coatings. After sputtering, microhardness distribution showed general decrease and the surface roughness became increased slightly. The critical shear stress measured from the scratch test on the CrN coatings showed an approximately twice increase in the binding strength through the sputtering prior to the coating and this could be attributed to a complete removal of compound layer from the plasma nitrided surface and to an increase in the surface roughness after sputtering.

초고장력강판 성형용 냉간 프레스 금형의 Ti/Cr계 PVD코팅에 대한 마모 특성 평가 (Evaluation of Wear Characteristics on Ti/Cr PVD Coatings of Cold Press Die for the Forming of UHSS)

  • 허재영;윤국태;송재선;강익수;윤일채;박춘달
    • 소성∙가공
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    • 제31권4호
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    • pp.186-193
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    • 2022
  • The application of UHSS sheet is being expanded up to 50% to reduce the weight of automobiles and improve safety. However, due to the high strength and low elongation of the ultra-high tensile strength steel sheet, product defects such as spring back and mold defects such as cracks and chippings also occur. In this study, Pin/Ring on Disc and Spiral wear tests were conducted to evaluate the durability of Ti/Cr-coated molds for forming 1.2GPa grade UHSS sheets. Component analysis and thickness were measured for each coating layer, and hardness and adhesion were investigated to determine mechanical properties. Combining the results of various wear tests, it was found that the TiAlN coating had the best wear and sticking resistance.

EB-PVD법으로 코팅된 Y2O3의 내플라즈마 특성 (Plasma Resistances of Yttria Deposited by EB-PVD Method)

  • 김대민;윤소영;김경범;김희식;오윤석;이성민
    • 한국세라믹학회지
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    • 제45권11호
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    • pp.707-712
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    • 2008
  • Plasma resistant nanocrystalline $Y_2O_3$ films were deposited on alumina substrates through the electron-beam PVD technique. Increasing substrate temperature to $600^{\circ}C$ resulted in the textured microstructures with significantly enhanced adhesion force of the coating to the substrate. During the exposure to fluorine plasma, erosion rate of the coated specimen was higher than that of a sintered yttria specimen, but significantly lower than that of a single crystalline alumina. Considering the adhesion and erosion behaviors observed in the coated specimen prepared at $600^{\circ}C$, the deposition technique appears effective in reducing contamination particles generated from the ceramic parts in the plasma environment.

다층 PVD 코팅을 이용한 SKD 61다이캐스팅 강의 표면 특성 비교 분석 (Comparative Analysis on the Surface Property of SKD 61 Die-casting Steel Using Multilayer PVD Coating)

  • 김승욱
    • 반도체디스플레이기술학회지
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    • 제20권2호
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    • pp.43-50
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    • 2021
  • The properties of materials which are widely used in industry fields like automobile, shipbuilding, casting, and electronics are strongly needed to have higher surface hardness, lower surface roughness, and higher compressive residual stress. As mentioned above, for the purpose of satisfying three factors, a variety of researches with respect to surface improvement have been actively studied and applied to every industry. SKD61 which is mostly used for die casting process of cold chamber method must meet a countless number of problems which are thermal, mechanical and chemical from highly specific working environment at high temperature over 600℃. Above all, in case of plunger sleeves used for die casting process, thermal fatigue has a bad effect on the surface of an inlet where molten metal is repeatedly injected. On account of it, plunger sleeves cause manufacturers to deteriorate quality of products. Therefore, in this paper, to improve the surface of an inlet of plunger sleeve, multilayer PVD coating using Ti, Cr and Mo is suggested. Furthermore, The surface characteristics such as surface roughness(Rsa, Rsq), surface hardness(HRB, HRC) and residual stress using XRD(X-ray diffractometer) of coated samples and specimens are studied and discussed.

금속 Strip의 연속 PVD 코팅기술 개발 현황 (Development Status of Continuous PVD Coating Technology on Metal Strips)

  • 김태엽;이동열;정우성
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2015년도 추계학술대회 논문집
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    • pp.205-205
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    • 2015
  • PVD 기술이 반도체나 LCD 등의 전자산업에서 주력기술로 성장하는 과정에서, 금속 Strip 소재에 연속적으로 PVD 코팅을 실시하기 위한 연구개발과 상용화 노력이 진행되어왔다. 이미 1960년대에 강판 표면에 Al을 증착시키기 위한 공정이 상용화된 실적이 있었지만, 전기도금이나 용융도금에 비해 기술의 확산이 빠르게 이루어지지 않았고, 1980년대 후반에 일본에서 전기도금을 대체하기 위한 공정으로 상용화공정을 건설하였지만, 결국은 경제성을 확보하지 못하여 도태되는 과정을 겪어왔다. 하지만, 1990년대 이후 유럽과 한국을 중심으로 연속코팅기술에 대한 연구개발이 꾸준히 진행되어 왔으며, 최근 이슈가 되고 있는 자동차용 초고강도강의 코팅기술로 PVD 기술이 재조명되고 있다.

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