• 한국표면공학회지
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• 제39권3호
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• pp.137-141
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• 2006

Process window for infinite etch selectivity of silicon nitride $(Si_3N_4)$ layers to ArF photoresist (PR) was investigated in dual frequency superimposed capacitive coupled plasma (DFS-CCP) by varying the process parameters such as low frequency power $(P_{LF})$, $CH_2F_2$ and $H_2$ flow rate in $CH_2F_2/H_2/Ar$ plasma. It was found that infinite etch selectivities of $Si_3N_4$ layers to the ArF PR on both blanket and patterned wafers can be obtained for certain gas flow conditions. The etch selectivity was increased to the infinite values as the $CH_2F_2$ flow rate increases, while it was decreased from the infinite etch selectivity as the $H_2$ flow rate increased. The preferential chemical reaction of the hydrogen with the carbon in the polymer film and the nitrogen on the $Si_3N_4$ surface leading to the formation of HCN etch by-products results in a thinner steady-state polymer and, in turn, to continuous $Si_3N_4$ etching, due to enhanced $SiF_4$ formation, while the polymer was deposited on the ArF photoresist surface.

• 전자공학회논문지D
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• 제35D권3호
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• pp.39-45
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• 1998

SrBi$_{2}$Ta$_{2}$O$_{9}$ (SBT) ferroelectric thin films for nonvolatile memory were prepared on Pt/Ti/SiO$_{2}$/Si and RuO$_{2}$/SiO$_{2}$/Si substrates by RF magnetron sputtering. The dependences of crystalline and electrical properties on the lower electrode type(Pt and RuO$_{2}$) and the annealing temperatures were investigated. SBT films regardless of their electrode types showed typeical Bi layered peroviskite crystal structures. The crystalline quality of as-deposited SBT films was improved by the rapid thermal annealing at 650.deg. C for 30 sec. The remanetn polarization of 2Pr (Pr+-Pr-) of the annealed SBT films deposited on Pt/Ti/SiO$_{2}$/Si substrates were about 11 .mu.C/cm$^{2}$ and 3 .mu.C/cm$^{2}$, respectively. The leakage currents at 3 V bias voltage were about 0.8 .mu.A/cm$^{2}$ for SBT/ Pt/Ti/SiO$_{2}$/Si and about 1 .mu.A/cm$^{2}$ for SBT/RuO$_{2}$/SiO$_{2}$/Si sample. SBT films annealed at 650 .deg. C showed no degradation in Pr values after 10$^{11}$ polarization switching cycles, indicating good fatigue properties. In addition, for SBT samples deposited on Pt/Ti/SiO$_{2}$/Si, Pr values increased to more than that of initial state, suggesting the increament of leakage current caused by repeated polarization.

• 한국재료학회지
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• 제13권10호
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• pp.645-650
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• 2003

The microstructure and electrical characteristics of $Pr_{6}$ $O_{11}$ -based ZnO varistor ceramics composed of $ZnO-Pr_{6}$ $O_{ 11}$/$-CoO-Cr_2$$O_3$-$Dy_2$$O_3$-based ceramics were investigated with $Dy_2$$O_3$content in the range of 0.0∼2.0 mol%. As $Dy_2$$O_3$content was increased, the average grain size was decreased in the range of 18.6∼4.7 $\mu\textrm{m}$ and the density of the ceramic was decreased in the range of 5.53∼4.34 g/㎤. While, the varistor voltage was increased in the range of 39.4∼436.6 V/mm and the nonlinear exponent was in the range of 4.5∼66.6 with increasing $Dy_2$$O_3$content. The addition of $Dy_2$$O_3$highly enhanced the nonlinear properties of varistors, compared with the varistor without $Dy_2$$O_3$. In particular, the varistor with $Dy_2$$O_3$ content of 0.5 mol% exhibited the highest nonlinearity, in which the nonlinear exponent is 66.6 and the leakage current is 1.2 $\mu\textrm{A}$. The donor concentration and the density of interface states were decreased in the range of $(4.19∼0.33) ${\times}$10^{18}$ //㎤ and $(5.38∼1.74) ${\times}$10^{12}$ $\textrm{cm}^2$, respectively, with increasing $Dy_2$$O_3$content. The minimum dissipation factor of 0.0302 was obtained from 0.5mol% $Dy_2$$O_3$.

• 동의신경정신과학회지
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• 제23권3호
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• pp.47-62
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• 2012

Objectives : This study is to figure the relations of the heart rate variability, body component analysis and accompanying symptoms of 350 insomnia patients. Methods : For this study we evaluated Heart Rate Variability(HRV) and body component analysis on 350 insomnia patients who visited Dongeui oriental hospital of Dongeui university from January 2008 to March 2012. The accompanying symptoms was collected based on each patient's progress note. Results : 1. There was no difference between PR, LF and VLF of male and female groups. HF was higher in the patients' of female group and LF/HF ratio was higher in the male group. The patients' group of age under 39 had higher HF, LF, VLF and LF/HF ratio than the group over 39. 2. The average of LF was the smallest, and the average of VLF was in the middle, while the average of HF was the largest. 3. Regarding patients' age and gender, as the patients' age increased, their HF, LF, VLF and LF/HF ratio decreased significantly. HF, LF, VLF, and LF/HF ratios were, however, independent on the patients' gender. As the patients' age increased, their BMI increased, while the patients' gender did not affect on their BMI. The amount of visceral fat increased with the patients' age, but wasn't dependent on the patients' gender. 4. As the patients' BMI increased, PR and LF decreased. As the patients' amount of visceral fat increased, PR, HF, LF and VLF decreased. 5. The most frequent accompanying symptoms of the insomnia patients was headache. Neither HF nor LF/HF ratio was dependant on any of the accompanying symptoms. Patients with anxiety showed significantly higher LF than those without anxiety. Patients with fatigue and physical pain showed significantly higher VLF than those without either of them. Conclusions : The study showed that as the insomnia patients age increased, the HF, LF, VLF, LF/HF ratio significantly decreased, but the BMI and visceral fat increased. The HF, LF, VLF, LF/HF ratio BMI, or the visceral fat was independent on the gender. As BMI increased, PR and LF decreased. As visceral fat increased, PR HF, LF and VLF decreased. Patients presenting anxiety had higher LF. Patients either with fatigue or physical pain had higher VLF. Neither HF nor LF/HF ratio had any significant correlation with any of the accompanying symptoms.

• 한국세라믹학회지
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• 제40권10호
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• pp.943-948
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• 2003

Dy$_2$ $O_3$의 첨가량이 0.0∼2.0 ㏖% 범위인 Zn-Pr-Co-Cr-Dy 산화물계 바리스터의 미세구조 및 전기적 특성을 조사하였다. Dy$_2$ $O_3$의 첨가량을 증가시킴에 따라 평균 결정립 크기는 18.2∼4.6 $\mu\textrm{m}$ 범위로 감소하였으며, 세라믹스 밀도는 5.49∼4.64 g/㎤ 범위로 감소하였다 Dy$_2$ $O_3$가 첨가된 바리스터는 Dy$_2$ $O_3$가 첨가되지 않은 바리스터에 비해 비직선 지수가 9배이상 증가하는 현저한 비직선성의 증가를 나타내었다. 0.5∼l.0 ㏖% 범위의 Dy$_2$ $O_3$가 첨가된 바리스터는 비직선 지수가 55 이상이고 누설전류가 1.0 $\mu\textrm{A}$ 이하의 높은 비직선성을 나타내었다. C-V특성에 있어서, 도너농도 및 계면상태밀도는 Dy$_2$ $O_3$의 첨가량 증가에 따라 각각 (4.66∼0.25)${\times}$$10^{18}$/㎤, (5.70∼1.39)${\times}$$10^{12}$/$\textrm{cm}^2$ 범위에서 감소하는 경향을 나타내었다. 유전손실계수는 Dy$_2$ $O_3$의 첨가량 증가에 따라 0.5 ㏖% 첨가시 최소치 0.0023을 정점으로 하여 다시 증가하는 경향을 나타내었다.

• 한국통신학회논문지
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• 제39C권7호
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• pp.608-614
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• 2014

이 논문에서는 비간섭 전력 부하 감시에 알맞은 패턴 인식 시스템을 다룬다. 전력 신호의 고차 적률 정보를 써서 전기기구를 효과적으로 분별하여 인식할 수 있는 새로운 특징 추출 방법을 제안한다. 동작 특성이 비슷한 두 전기기구를 제안한 고차 적률 특징과 커널 판별 분석을 쓰는 패턴 인식 시스템이 효과적으로 분별하여 인식할 수 있다는 것을 모의실험으로 보인다.

• Transactions on Electrical and Electronic Materials
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• 제13권5호
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• pp.262-265
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• 2012

The Microstructure and nonlinear electrical properties of the ZPCCYT (ZnO-$Pr_6O_{11}$-CoO-$Cr_2O_3$-$Y_2O_3$-$Tb_4O_7$) varistors were investigated for different amounts of $Tb_4O_7$. The addition of $Tb_4O_7$ has a significant effect on microstructure and electrical properties. Analysis of the microstructure indicated that the ceramics consisted of ZnO grain as a main phase and a few secondary phases as a mix of $Pr_6O_{11}$, $Y_2O_3$, and $Tb_4O_7$. As the amount of $Tb_4O_7$ increased, the sintered densities of pellets increased from $\rho$ = 5.70 to $5.78g/cm^3$ and the average grain size decreased from d = 4.8 to $3.6{\mu}m$. The increase in the amount of $Tb_4O_7$ increased from $E_B$ = 7,473 to 10,035 V/cm and from ${\alpha}$ = 39.7 to 52.2. In particular, it was found that the ceramics modified with 1.0 mol% in the amount of $Tb_4O_7$ are suited for the varistors for high voltage in the light of a high sintered density and a high voltage gradient.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.641-643
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• 2003

The ferroelectric properties of PZT(53/47) thin film was investigated by methoxy enthanol solution based on sol-gel method. The thickness of each layer by spincoating 0.25M sol at one time was $0.1{\mu}m$ and crack-free film was formed. $LaNiO_3/Si(100)$ electrode and $Pt/Ti/SiO_2/Si(100)$ electrode was coated by PZT sol at several times. PZT orientation was confirmed as a method of XRD and coercive field(Ec) as well as remnant polarization(Pr) was investigated from hysterisis curve. As a result of XRD analysis, we can know that the orientation of on PZT/LNO/Si(100) is better than on $Pt/Ti/SiO_2/Si(100)$. The remnant polarization(Pr) in LNO electrode was $87.5{\mu}C/cm^2$ and $39.8{\mu}C/cm^2$ in Pt. From this figures, it is investigated that the Pr in LNO electrode was better than in Pt.

• Bulletin of the Korean Chemical Society
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• 제17권6호
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• pp.511-514
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• 1996

The interactions between Ln(dpm)3 [Ln3+=Eu3+, Yb3+, Pr3+, Sm3+, Tb3+and Ho3+; dpm=tris 2,2,6,6-tetramethylheptane-3,5-dionate] and acetamide in CCl4 solution were investigated using near IR absorption spectroscopy. From the measured 2 νC=O+ amide Ⅲ combination band of acetamide in the region of 2130-2180 nm(4695-4587 cm-1), it was found that acetamide is coordinating through its carbonyl oxygen atom to Ln(dpm)3[C=O…Ln(dpm)3)] and forms only 1 : 1 stoichiometric Ln(dpm)3- acetamide complex. The ΔHo values for the formation of Ln(dpm)3-acetamide obtained from the temperature studies are -39.1, -28.4, -25.5, -24.7, -21.1 and -17.7 kJ mol-1 for Eu(dpm)3, Yb(dpm)3, Pr(dpm)3, Sm(dpm)3, Tb(dpm)3 and Ho(dpm)3, respectively, which are larger than those of the hydrogen bond between amide and various hydrogen acceptors. Except Eu(dpm)3 and Yb(dpm)3, -ΔHovalue increases as the ionic size increases.

• International Journal of Computer Science & Network Security
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• 제21권11호
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• pp.287-293
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• 2021

The purpose of this article is to consider the distance education system, its principles, features and means. One of its existing and promising tools is video conferencing. The article discusses the types of video conferencing, hardware and software, features and requirements for communication channels, types of information transmitted through these channels.