• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.479-480
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• 2006

The purpose of this paper is to investigate the relationship between CMP(Chemical Mechanical Polishing) characteristics of ITO thin film and friction signal by using the CMP monitoring system. Suba 400 pad and MSW2000 slurry of the Rohm & Haas Co. was used in this experiment to investigate the charateristics of ITO CMP. From this experiment, it is proven that the coefficient of friction is related to uniformity of the removal rate of the ITO thin film. Therefore, the prediction of polishing result would be possible by measuring friction signal.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.05a
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• pp.184-186
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• 2002

In this paper, we studies EMTP analysis and characteristics of critical voltage of pulse corona and load impedance on variable electrode length. To obtain a stable pulse voltage, we designed a compact pulse generator switched MOSFET and tested their characteristics by adjusting electrode length and pulse repetition. As a result, critical voltage of pulse corona and load impedance on increasing electrode length were decreased. These results indicate we can control critical voltage of pulse corona and suppress arc discharging between two electrodes.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.514-517
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• 2005

Microstereolithography(MSL) has evolved from the stereolithography technique, and is also based on a light-induced layer-stacking fabrication. Although integral MSL allows the manufacture of a complete layer by one irradiation only, there is a problem related with shape precision due to the light-intensity distribution of focused image. In this study, we developed the integral MSL apparatus using Digital Micromirror Device ($DMD^{TM})$, Texas Instruments) as dynamic pattern generator. It is composed of Xenon-Mecury lamp, optical devices, pattern generator, precision stage, controllers and the control program. Also, we have studied curing depth and width of photocurable resin according to the change of exposure energy.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1181-1185
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• 2005

Microstereolithography has evolved from the stereolithography technique, and is also based on a light-induced layer-stacking manufacturing. Integral microstereolithography is proposed for building a 3D microstructure rapidly, which allows the manufacture of a complete layer by one irradiation only. In this study, we developed the integral microstereolithography apparatus based on the use of $DMD^{TM}$ as dynamic pattern generator. It is composed of Xenon-Mercury lamp, optical devices, pattern generator, precision stage, controllers and the control program. Also, we estimated curing characteristics in photopolymer. The relationship between the viscosity of diluent-oligomer solutions and curing width, irradiation time and curing property has been studied.

• Journal of Korean Society for Atmospheric Environment
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• v.19 no.5
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• pp.583-594
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• 2003

Ozone is an important atmospheric pollutant that is occurred in tropospheric chemical process and it also affects the human health and plants. For a correct application of abatement strategies for ozone, it is necessary to understand the factors that control atmospheric ozone removal by dry deposition processes. The present study investigates the numerical simulation of the dry deposition velocity (V$^{d}$ ) obtained from PNU/DEM (Pusan National University Deposition Model). PNU/DEM includes seasonal categories, meteorological factors, surface properties and land-use types and proposes for an accurate numerical computation. And, this study examines the ability of the PNU/DEM to compute V$_{d}$ of ozone over water surfaces and evaluates PNU/DEM by comparing its estimated V$_{d}$ to past observed V$_{d}$ over water. The parametrization was found to yield V$_{d}$ values generally in good agreement with the observations for the deciduous forest and the coniferous forest. Ozone is removed slowly at wet surface or water due to its low water solubility. Therefore V$_{d}$ values over water were lower than Vd values over the other surfaces. Comparison of PNU/DEM simulated V d values to observations of ozone V$_{d}$ that have been reported in the literature implies that PNU/DEM produces realistic results.

• Journal of the Korea Institute of Military Science and Technology
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• v.21 no.3
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• pp.379-385
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• 2018

Boresight process is to match the misalignment between PNU(Position Navigation Unit) and the reference axis of K-MLRS cage. It is important process to ensure accuracy of K-MLRS. When PNU is removed from cage in the previous alignment procedure, there is a misalignment angle with cage of K-MLRS during reassembly process. Therefore, boresight process is always need to align reference axes between PNU and K-MLRS cage. However, this study has proposed the case alignment process that it enable to correspond to reference axes between ISA (Inertial Sensor Assembly) block and PNU case. So, improved alignment procedure enables to install PNU in the reassembly process without additional boresight process.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1818-1820
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• 2003

In this study, we developed friendly-environment device through various applications of pulse power system and studied research about pulse energy transfer characteristics. We have studied the mutual relation between characteristics of the load impedance and consumed power of the pulse power system. The consumed power means electrical power from the wall plug. For changing the load impedance, we could change elecrode length. As results, we can get electrical characteristics between pulse generator and load. When the pulse energy was triggered the microbes, caused waste water, they were almost removed in the waste water.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1831-1833
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• 2003

Nowadays, CO2 lasers are used widely in many applications such as materials fabrication, communications, remote sensing and military purpose etc. Especially, CO2 lasers are in the spotlight at surface handling and heat processing. It is important to control the laser output power and beam quality in those fields. To increase beam qualify, We used the feedback system by various sensors. Although, CO2 lasers' output beam became feedback, its beam affected the irradiated material target already. Since, ideal real time control have still the problem to solve. Hence, we need the new proposal for more precise laser processing. So we expect the new effect how to change the irradiated material target as the kind of, processing time and output density caused by the CO2 laser beam. In this study, We have investigated the characteristics of the temperature and HAZ(Heat Affected Zone) by CO2 laser output with IR temperature sensor and RTD.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.38-39
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• 2005

We have investigated the effect of the pad surface characteristics such as roughness, groove density and wear of pad on within wafer non-uniformity(WIWNU) in chemical mechanical polishing(CMP). We found that WIWNU increases as pad surface roughness($R_{pk}$; Reduced peak height) increases in an early stage of polishing. But after polishing time goes to a certain extent, WIWNU decreases as uniformity of pad surface roughness. Also, groove of pad has effect on relative pad stiffness although original mechanical properties of pad are unchanged by grooving. WIWNU decreases as relative pad stiffness decreases. In addition, conditioning process causes non-uniform wear of pad during in CMP. The profile of pad wear has a significant effect on WIWNU.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.653-654
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• 2005

Stick-slip friction is one of the material removal mechanisms in tribology. This stick-slip friction occurs when the static friction force is larger than the dynamic friction force, and make the friction curve fluctuated. In the friction force monitoring system for chemical mechanical polishing(CMP), the friction force also vibrates just as stick-slip friction. It seems that the stick-slip friction causes scratches on the surface of moving parts. In this paper, A study on the scratches which occur during copper CMP was conducted in a view of stick-slip friction.