Study on Correlation Between the Internal Pressure Distribution of Slit Nozzle and Thickness Uniformity of Slit-coated Thin Films (슬릿 노즐 내부 압력 분포와 코팅 박막 두께 균일도 간의 상관관계 연구)
-
- Journal of the Semiconductor & Display Technology
- /
- v.22 no.4
- /
- pp.19-25
- /
- 2023