• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.9
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• pp.681-685
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• 2012

We investigated the dry etching characteristics of TiN in $TiN/Al_2O_3$ gate stack using a inductively coupled plasma system. TiN thin film is etched by BCl3/He plasma. The etching parameters are the gas mixing ratio, the RF power, the DC-bias voltages and process pressures. The highest etch rate is in $BCl_3/He$ (25%:75%) plasma. The selectivity of TiN thin film to $Al_2O_3$ is pretty similar with $BCl_3/He$ plasma. The chemical reactions of the etched TiN thin films are investigated by X-ray photoelectron spectroscopy. The intensities of the Ti 2p and the N 1s peaks are modified by $BCl_3$ plasma. Intensity and binding energy of Ti and N could be changed due to a chemical reaction on the surface of TiN thin films. Also we investigated that the non-volatile byproducts such as $TiCl_x$ formed by chemical reaction with Cl radicals on the surface of TiN thin films.

• Proceedings of the KIEE Conference
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• 1992.07b
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• pp.744-746
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• 1992

In this study, we investigated structural, electrical characteristics and studied the conditions which improved hydrostatic constants in hydrophones as we changed x = 0.1, 0.25, 0.35, 0.4 and y = 0.04, 0.08, 0.12, 0.16 in $(Pb_{1-x}Ca_x)[(Mg_{1/3}Nb_{2/3})_yTi_{1-0.01}Mn_{0.01}]O_3$ ceramics in which Ca was substituted with Pb and $Pb(Mg_{1/3}Nb_{2/3})O_3$ was added to decrease sintering temperature in $PbTiO_3$. When Ca was substituted 0.25[mol], the largest electro-mechanical anisotropy ($k_t/k_p$) was found ($k_t{\fallingdotseq}50,k_p{\fallingdotseq}4$), and the less $Pb(Mg_{1/3}Nb_{2/3})O_3$ and the stronger poling field, the larger this anisotropy was. When Ca=0.25[mol], $Pb(Mg_{1/3}Nb_{2/3})O_3=0.08[mol]$ were substituted, ($k_t/k_p$)(=12, 3) was large, permittivity was low and hydrostatic constants were high. Therefore, this composition is promising as wide band ultrasonic devices in water.

• Journal of the Korean Ceramic Society
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• v.18 no.2
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• pp.119-125
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• 1981

The thermostable resistor was made by using P.T.C.R-N.T.C.R. ceramics. In this study $BaTiO_3$ type P.T.C.R. ceramics and $SnO_2-Sb_2O_3$ type N.T.C.R. ceramics were cocrystallized in one body and electrical resistance was stable under the temperature variation between $25^{\circ}C$-40$0^{\circ}C$. The ceramics showed the most stable electrical resistance for the mal variation when the composition was 0.6P.T.C.R. $BaTiO_3$,$ 0.4SnO_2$ and 0.01 $Sb_2O_3$.

• Journal of Powder Materials
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• v.25 no.4
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• pp.316-321
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• 2018

Composites of P25 $TiO_2$ and hexagonal $WO_3$ nanorods are synthesized through ball-milling in order to study photocatalytic properties. Various composites of $TiO_2/WO_3$ are prepared by controlling the weight percentages (wt%) of $WO_3$, in the range of 1-30 wt%, and milling time to investigate the effects of the composition ratio on the photocatalytic properties. Scanning electron microscopy, x-ray diffraction, and transmission electron microscopy are performed to characterize the structure, shape and size of the synthesized composites of $TiO_2/WO_3$. Methylene blue is used as a test dye to analyze the photocatalytic properties of the synthesized composite material. The photocatalytic activity shows that the decomposition efficiency of the dye due to the photocatalytic effect is the highest in the $TiO_2/WO_3$ (3 wt%) composite, and the catalytic efficiency decreases sharply when the amount of $WO_3$ is further increased. As the amount of $WO_3$ added increases, dye-removal by adsorption occurs during centrifugation, instead of the decomposition of dyes by photocatalysts. Finally, $TiO_2/WO_3$ (3 wt%) composites are synthesized with various milling times. Experimental results show that the milling time has the best catalytic efficiency at 30 min, after which it gradually decreases. There is no significant change after 1 hour.

• Journal of the Korean Ceramic Society
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• v.37 no.4
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• pp.308-313
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• 2000

Hydrous titanium oxide particles with anatase phase were prepared from 0.05 mol TiCl4 solution using NH4HCO3 as precipitant by the droopping precipitant method. The sequential change of pH is completed by a sudden and steep increase in a pH value of the range of 6~7 to which the concentration of adsorbed OH- and H+ ions on TiO2 surface is equal. Rutile phase started precipitating with anatase phase as an increase of reaction temperature above 6$0^{\circ}C$ in aqueous 0.05mol TiCl4 solution and its specific surface area was found to decrease from 452 $m^2$/g($25^{\circ}C$) to 164$m^2$/g(8$0^{\circ}C$). Specific surface area decreased rapidly when anatase powders precipitated at 4$0^{\circ}C$ were heat-treated at temperature higher 40$0^{\circ}C$. FT-IR result confirmed that it was due to the decrease of OH species within hydrous titanium oxides. The loss of ethanol after illumination of the powder heated at $600^{\circ}C$ and $700^{\circ}C$ for 4 h was 66 and 68.8%, respectively.

• Electrical & Electronic Materials
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• v.5 no.2
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• pp.198-206
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• 1992

(P $b_{1-x}$L $a_{x}$)[(S $b_{1}$2/S $n_{1}$2/) $Ti_{y}$ Z $r_{1-y}$] $O_{3}$(0.leq.x.leq.0.04, 0.25.leq.y.leq.0.40) 세라믹을 1250[.deg.C]에서 2시간동안 유지시켜 일반 소성법으로 제작하였으며 조성 및 L $a_{2}$ $O_{3}$첨가량에 따른 구조적, 압전적 특성을 관찰하였다. L $a_{2}$ $O_{3}$의 첨가량이 3-4[mol%]인 경우 La-rich의 pyrochlore상이 형성되었다. 시편의 평균결정립 크기는 1-2[.mu.n]의 크기를 나타내었으며 PbTi $O_{3}$조성이 증가함에 따라 다소 감소하는 경향을 나타내었다. 각 조성의 시편에 대해 PbTi $O_{3}$ 및 L $a_{2}$ $O_{3}$의 첨가량이 증가할수록 유전상수는 증가하는 경향을 나타내었으며 상전이 온도인 큐리온도는 PbTi $O_{3}$조성이 감소할수록 L $a_{2}$ $O_{3}$첨가량이 증가할수록 감소하는 경향을 나타내었다. 압전 전하계수 및 전기기계 결합계수는 L $a_{2}$ $O_{3}$첨가량 및 PbTi $O_{3}$조성에 따라 증가하였으며 L $a_{2}$ $O_{3}$가 4[mol%]첨가된 0.10PSS-0.40PT-0.50PZ 시편에서 각각 250x$10^{-12}$[C/N], 29.7[%]의 최대값을 나타내었다. 기계적 품질계수는 L $a_{2}$ $O_{3}$첨가량 및 PbTi $O_{3}$조성이 증가할수록 감소하는 경향을 나타내었으며 0.10PSS-0.25PT-0.65PZ 시편에서 138의 최대값을 나타내었다.다.

• Journal of Industrial Technology
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• v.25 no.A
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• pp.157-162
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• 2005

In this study, the fabrication of PZT films was performed from a multilayer structure comprising $TiO_2$, $ZrO_2$ and PbO thin films prepared by rapid themal chemical vapor deposition(RTMOCVD). $TiO_2$, $ZrO_2$ and PbO are the component layers of oxide multilayer system for a single phase PZT thin film. The composition control of PZT thin film was done by the thickness control of individual component layer. The composition ratio of Pb:Ti:Zr with thickness were 1:0.94:0.55. Occurrence of a single-phase of PZT was initiated at around $550^{\circ}C$ and almost completed at $750^{\circ}C$ under the fixed time of 1hr. As the concentration of Pb increased, the roughness and crystallization in the film increased. From the as result of using XPS and TEM, the single phase formation through annealing is evident. The electrical properites of the prepared PZT thin film(Zr/Ti=40/60, 300 nm) on a Pt-coated substrate were as follow: dielectric constant ${\varepsilon}_r=475$, coercive field Ec=320 kV/cm, and remanant polarization $P_r=11{\mu}C/cm^2$ at an applied voltage of 18 V.

• Korean Journal of Materials Research
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• v.12 no.8
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• pp.641-649
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• 2002

The redox properties of a homogeneously-precipitated $TiO_2$ rutile powder with a BET surface area of ~$200 m^2$/g, consisting of an acicular primary particle, were characterized using photocatalytic reaction in aqueous 4-chlorophenol, Cu-EDTA and Pb-EDTA solutions under ultraviolet irradiation, compared to those of commercial P-25 X$200 m_2$ powder with a spherical primary particle as well as home-made anatase $TiO_2$ powder with ~$200 m^2$/g BET surface area. Here, the anatase powder also includes mainly the primary particles very similar to the acicular shapes of the rutile $TiO_2$ powder. The rutile powder showed the fastest decomposition rate and the largest amount in the photoredor, compared with the anatase or P-25 powder, while the anatase powder unexpectedly showed the slowest rate and the smallest amount in the same experiments regardless of almost the same surface area. From results, the excellent photoredox abilities of this rutile powder appears to be due to specific powder preparation method, like a homogeneous precipitation leading to direct crystallization from the solution, regardless of their crystalline structures even when having the similar particle shape and surface area.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.230-231
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• 2006

In this paper, we examined effects by the binder in manufacturing titanium dioxide film for dye sensitized solar cell. Binder(PEG and PEO) was added the amount of 10-40wt% to commercial $TiO_2$ (P25), Respectively. All of $TiO_2$ film was showed porous structure owing to the addition of binders. But the difference of film's porosity could not be confirmed. The transmittance of $TiO_2$ film was decreased with the increase of binder's amount, generally. In case of 20wt%, however. The transmittance of $TiO_2$ films was showed the highest value.

• Proceedings of the KAIS Fall Conference
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• 2002.05a
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• pp.121-123
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• 2002

졸-겔법(Sol-Gel Method)으로 강유전체 Bi/sub 3.3/La/sub 0.7/Ti/sub 3/O/sub 12/(BLT) 박막을 Pt/Ti/SiO₂/Si 기판위에 스핀 코팅하여 Metal-Ferroelectric-Metal(MFM 구조를 형성하였다. As-coated BLT 박막은 650℃ 이상에서 결정화되었으며, 전형적인 Bi층상의 페롭스카이트 결정구조를 나타내었다. 또한 열처리 온도를 증가시킴에 따라 결정성이 향상되었다. 3V 전압에서 650℃로 열처리된 박막의 경우 누설전류가 약 2.25×10/sup -8/A/㎠ 정도를 보였다. 650℃에서 열처리된 BLT박막은 5V의 인가 전압에서 잔류분극 2Pr(±(P/sup */-P/sup A/)) 값은 약 29.5μC/㎠을 나타내었으며, 1.5×10/sup 10/ 스위칭 cycles까지 분극 스위칭을 반복한 후에도 거의 잔류 분극의 변화가 없었다.