• Journal of Electrical Engineering and information Science
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• 제2권3호
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• pp.82-87
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• 1997

Ion-Sensitive Field-Effect Transistors(ISFETs) with LPCVD silicon nitride as a sensitive gate were fabricated on the basis of a CMOS process. The silicon nitride was deposited directly on a poly silicon gate-electrode. Using a specially designed measuring cell, the hydrogen ions sensing properties of the ISFET in liquid could be investigated without any bonding or encapsulation. At first, th sensitivity was estimated by simualtions according to the site-binding theory and the experimental results were analysed and compared with simulated results. The measured dta were in good agreement with the simulated results. The silicon nitride based ISFET has good linearity evaluated from correlation factor ($\geq$0.9998) and a mean pH-sensitivity of 56.8mV/pH. The maximum hysteresis width between forward(pH=3\longrightarrowpH=11)- and backward(pH=11\longrightarrowpH=3) titration was 16.7mV at pH=6.54.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 하계학술대회 논문집 A
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• pp.141-143
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• 1994

In this paper, an electrostatic micro-actuator is fabricated using flat p+ diaphragm. To avoid the buckling of the flat p+ diaphragm, the processes are designed appropriately. The fabrication processes of the actuator are the anisotropic etching with EPW, the boron diffusion process, Al deposition and the silicon to glass bonding using the negative photoresist. The distance between the p+ and Al electrodes is $10{\mu}m$, and the thickness of the p+ diaphragm is $2{\mu}m$. The measurement of the characteristic of the actuator is performed at 50V. The center displacement of the diaphragm is $1.5{\mu}m$ at 10Hz. In comparison with the experimental data of the actuator with corrugated diaphragm, it is confirmed that the actuator with flat diaphragm is more effective than that with corrugated one in the small deflection region.

• 한국광학회:학술대회논문집
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• 한국광학회 1989년도 제4회 파동 및 레이저 학술발표회 4th Conference on Waves and lasers 논문집 - 한국광학회
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• pp.172-175
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• 1989

1.3${\mu}{\textrm}{m}$ surface-emitting GaInAsP/InP LED was fabricated by two-phase supercooling LPE technique. The lattice mismatch of the grown DH wafer was typically 0.03%. The processes involve SiO2 CVD, lithography, Zn diffusion, lift-off, lapping, annealing, and wire bonding. The fabricated LED shows the optical power of 600㎼ at 70mA driving current, differential resistance of 4$\Omega$, the f3dB of 35MHz, and the FWHM of 1040{{{{ ANGSTROM }}. The peak wavelength of the fabricated LED was at 1.29${\mu}{\textrm}{m}$(100mA).

• Restorative Dentistry and Endodontics
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• 제29권6호
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• pp.504-514
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• 2004

LED 광중합기(Elipar FreeLight, 3M-ESPE)와 할로겐 광중합기(VIP Bisco)로 광조사한 수종의 상아질 접착제에 대해서 상아질 전단접착강도를 비교하였다 또한 이번 연구의 광학적 근거를 얻기 위해 두 광중합기의 파장에 따른 광강도와 스펙트럼을 비교하였다. 이번 연구에서 사용된 상아질 접착제는 Scotchbond Multipurpose (3M ESPE), Single Bond (3M ESPE). One-Step (Bisco), Clearfil SE Bond (Kuraray), Adper Prompt (3M ESPE) 이다. VIP는 487 nm에서 최대정점을 가지는 넓은 스펙트럼의 분포를 보이는 반면에, Elipar FreeLight는 465 nm에서의 최대정점을 중심으로 좁은 스펙트럼의 분포를 보였다. Clearfil SE bond를 제외하고 할로겐과 LED로 광조사 한 각 상아질 접착제에서 상아질 전단접착강도값의 유의성 있는 차이는 보이지 않았다 (P > 0.05). 이러한 결과는 camphoroquinone의 흡수스펙트럼과 LED의 좁은 영역의 스펙트럼사이에 강한 연관성으로 설명할 수 있다.

• 한국세라믹학회지
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• 제27권3호
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• pp.311-320
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• 1990

Hydroxyapatite powders were synthesized with Ca/P=1.67, 1.70 and pH=7, 11 by precipitation method and fluorine substituted hydroxyapatite ceramics were prepared using these powders. After characterization of these hydorxyapatite bioceramics, chemical bonding between these sepcimens in simulated body fluid was investigated. Bysubstitution of 7.5% of fluorine, hydroxyapatite was prevented to decompose into β-tricalcium phosphate and its sintered density and mechanical strength were increased. The bending strength of these hydroxyapatite ceramics was 137MPa. The hydroxyapatite ceramics chemically bonded each other in Ringer's solution and the component of bonded layer was also hydroxyapatite.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 디스플레이 광소자분야
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• pp.203-205
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• 2003

레이저 다이오드를 p-side-down 방식으로 본딩하기 위하여 AuSn 솔더합금을 증착한 후 온도와 압력, 시간을 변화시켜 본딩상태를 조사하였다. CuW위에 adhsion layer와 확산방지층을 각각 $500{\AA}$과 $2000{\AA}$을 증착하였으며 솔더층으로 AuSn을 $2.6{\mu}m$ 증착 하였다. 열처리는 질소 분위기에서 행하였으며, 표면의 거칠기는 AFM으로 측정하였다.

• 대한전자공학회논문지
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• 제16권5호
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• pp.34-41
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• 1979

도푸안된 n- 또는 P-형 규소표적으로부터 알곤과 사이렌(S1H4) 혼합기체 속에서 스펏터한 결과를 보고한다. 도푸된 박막이 생성되었다. 그러나 도푸효율을 극히 낮았다. 이것은 도판트 원자가 그들 본래의 가(가)에 만족하고 전기적으로 활성이 아니라고 할 수 있겠다. 적외선흡수분광법으로 박막내에 수소가 결합되어 있음을 알 수 있었다. 박막내에서 수소의 결합과 전기적성질사이에 어떤 관계가 있다고는 밝혀지지 않았다.

• Bulletin of the Korean Chemical Society
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• 제16권1호
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• pp.42-47
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• 1995

Interpolymer complex formation between basic polypeptide poly(L-proline) Form Ⅱ (PLP(Ⅱ)) and acidic polypeptides poly(L-glutamic acid) (PLGA) and poly(L-aspartic acid)(PLAA) has been studied in water-methanol (1:2 v/v) mixed-solvent by viscometry, potentiometry, light scattering and circular dichroism (CD) measurements. It has been found that polymer complexes between PLP(Ⅱ) and PLGA (or PLAA) are formed via hydrogen bonding with a stoichiometric ratio of PLP(Ⅱ)/PLGA (or PLAA)=1:2 (in unit mole ratio) and that PLP(Ⅱ) forms polymer complex more favorably with PLGA than with PLAA. In addition, the minimum (for pH 5.0) and the maximum (for pH 3.2) in reduced viscosity of dilute PLP(Ⅱ)-PLGA mixed solutions are observed at 0.67 unit mole fraction of PLGA (i.e., [PLP(Ⅱ)]/[PLGA]=1/2). These findings could be explained in terms of molecular structure (or conformation) of the complementary polymers associated with the complex formation.

• Bulletin of the Korean Chemical Society
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• 제32권8호
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• pp.2711-2716
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• 2011

para-Substituted phenoxide derivatives of Pd(II) having an NCN pincer, Pd(NCN)($OC_6H_4$-p-X) (NCN = 2,6-$(CH_2NMe_2)_2C_6H_3$; X = $NO_2$ (1), Me (2)) were prepared by the reaction of Pd(NCN)($OSO_2CF_3$) with equi-molar amount of $NaOC_6H_4$-p-X. Treatment of Pd(NCN)($OSO_2CF_3$) with an excess amount of $NaOC_6H_4$-p-Me affords the hydrogen-bonding adduct complex 3 ($2{\cdot}HOC_6H_4$-p-Me). Complex 3 can also be obtained from benzene solution of 2 in the presence of free $HOC_6H_4$-p-Me. Complex 1 does not undergo adduct formation with $HOC_6H_4-p-NO_2$ neither from metathesis reaction of Pd(NCN)($OSO_2CF_3$) with an excess amount of $NaOC_6H_4-p-NO_2$ nor from treatment of 1 with free $HOC_6H_4-p-NO_2$. Complex 3 undergoes fast exchange of the coordinated p-cresolate with the hydrogen-bonding p-cresol. Complex 2 undergoes ${\sigma}$-ligand exchange reaction with $HOC_6H_4-p-NO_2$ to give 1. The exchange reaction, however, is irreversible as readily anticipated from their respective $pK_a$ values of the phenol derivatives. Reaction of 2 with diphenyliodium chloride quantitatively produced Pd(NCN)Cl and PhI along with liberation of O-phenylated product $PhOC_6H_4$-p-Me which was identified by GC/MS spectroscopy.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2002년도 ITC-CSCC -1
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• pp.365-368
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• 2002

We investigated the influence of RTP annealing of multi-layered metal films deposited on oxides layer. Two types of oxides, BPSG and P-7205, were used as a bottom layer under multi-layered metal film. The bonding was not good in metal/BPSG/Si samples because adhesion between metal layer and BPSG oxide layer was poor by interfacial reaction during RTP annealing above 650$^{\circ}C$. On the other hand bonding was always good in metal/ P-TEOS /Si samples regardless of annealing temperature. We observed the interface between oxide and metal layers using AES and TEM. The phosphorus and oxygen profile in interface between metal and oxide layers were different in metal/BPSG/Si and metal/P-TEOS/Si samples. We have known that the properties of interface was improved in metal/BPSG/Si samples when the sample was annealed below 650$^{\circ}C$.