• 반도체디스플레이기술학회지
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• 제4권4호
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• pp.19-26
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• 2005

The process optimization of ozone concentration and half life time was investigated in ultra pure water and alkaline solutions for the wet cleaning of silicon wafer surface at room temperature. In the ultra pure water,. the maximum concentration (35 ppm) of ozone was measured at oxygen flow rate of 3 liters/min and ozone generator power over 60%. The half life time of ozone increased at lower power of ozone generator. Additive gases such as $N_2$ and $CO_2$ were added to increase the concentration and half life time of ozone. Although the maximum ozone concentration was higher with the addition of $N_2$ gas, a longer half life time was observed with the addition of $CO_2$. When $NH_4OH$ of 0.05 or 0.10 vol% was added in DI water, the pH of the solution was around 10. The addition of ozone resulted in the half life time less than 1 min. In order to maintain high pH and ozone concentration, ozone was continuously supplied in 0.05 vol% ammonia solutions. 3 ppm of ozone was dissolved in ammonia solutions. The static contact angle of silicon wafer surface became hydrophilic. The particle removal was possible alkaline ozone solutions. The organic contamination can be removed by ozonated ultra pure water and then alkaline solution containing ozone can remove the particles on silicon surface at room temperature.

• 한국조경학회지
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• 제28권5호
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• pp.87-92
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• 2000

The purpose of this study is to investigate Ozone which we have to contact in our daily lives. Recently Ozone becomes a serious pollutant in the inside and outside. To select th indicator plants or the purifier plants for air pollution caused by ozone, this stud has been conducted with interior landscape plant of 10 species. The results are as follows; 1) The visible demage by Ozone was firstly observed on Viburnum awabuki among 10 species, and it occurred after the lapse of 10, 8 and 4 hours on 0.5, 1.0 and 2.0 ppm ozone treatment, respectively. The first symptom of visible demage appeared on chlorosis or blotting of leaves, then progressed on necrosis of leaves. 2) On the other hand, Litsea japonica and Ardisia japonica were so resistant against Ozone fumigation that they were not demage independently of Ozone concentration till the lapse of 60 hours. 3) Chlorophyll contents were decreased by the increased Ozone concentration. At this time, grana destruction was observed. The most sensitive plant to ozone was Viburnum awabuki, and we suggest that Viburnum awabuki would be possible one to use for the indicator plant. The most resistance plant to Ozone was Litsea japonic and Ardisia japonica, we suggest that Litsea japonica and Ardisia japonica would be possible to use for the purifier plant for Ozone pollution.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 2001년도 학술대회논문집
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• pp.135-138
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• 2001

Recently, ozone is utilized In various fields and its needs are expanding. therefore, so many ozone generation methods have been reported in the latest years, its main purpose Is to get the high ozone concentration and to improve the ozone yield. One of them is a plate-type ozone generator. In this paper, the plate-type ozone generator is piled up many folds(3 and 5 electrodes). Ozone concentration and yield were investigated in accordance with power, quantity of supplied gas and gap spacing of plate electrodes.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.908-911
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• 2002

Recently deep interests and attraction have been paid on the generation of ozone, which is widely used to remove bed smell and to clear water. In this paper the silent discharge and ozone generation characteristics of various typed discharge chambers were investigated experimentally. Dielectric of $Al_2O_3$ was embedded in the cylindrical type of discharge chamber to improve the ozone generation rate and to stabilize the silent discharge mode of operation. Discharge current and ozone concentration depend strongly on the applied voltage and frequency.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.22-23
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• 2006

A process for removal of photoresist(PR) m semiconductor manufacturing using water vapor with ozone is presented. For the realization of the ozone/vapor mixture process, high concentration ozone generator and process facilities have developed. As a result of the silicon wafer PR strip test, we confirmed the high efficiency PR strip rates of 400nm/mm or more at the ozone concentration of 16wt%/$O_2$. The ozone/vapor mixture process is more effective than the ozonized water Immersion process.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 2008년도 춘계학술대회 논문집
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• pp.379-380
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• 2008

Recently, ozone is utilized in various fields and its needs are expanding. In this paper, glass and ceramic plate tyre ozonizer have been fabricated to investigate discharge parameter(input power, flow rate of supplied gas, electrode form, etc.) effect to discharge. And the conditions of discharge parameter have been investigated for optimum ozone generation. Ozone concentration is continuously increased with increasing input power for same discharge space, and ozone yield is also increased until maximum point after that it is saturated. Ozone concentration is inversely proportional to flow rate of supplied gas but ozone generation and ozone vield characteristics are improved.

• 한국지하수토양환경학회:학술대회논문집
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• 한국지하수토양환경학회 2003년도 총회 및 춘계학술발표회
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• pp.322-325
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• 2003

The feasibility of treating 2-chlorophenol (2CP) contaminated soils with ozone venting was investigated in this research. Adding ozone to the existing air-venting process provides an alternative to achieve a complete in-situ treatment by oxidizing the contaminant in the process. A column study with artificial soil was used to simulate the venting process. Ozone concentrations at 2.4, 7.6 and 19.4 mg/L, and flow rates at 100 and 150 mL/min were used. The reaction times were 10, 20, 50, and 60 minutes. Blank samples using air venting were also run for comparison. It is obvious that ozone-venting had a much faster removal rate than air-venting. As higher concentration of ozone is applied, the reaction rate increased significantly. As higher concentration was applied, the flux of ozone to the liquid film increased. This also increased the removal rate of 2CP and therefore the breakthrough curve came out earlier.

• 한국염색가공학회지
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• 제16권2호
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• pp.34-40
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• 2004

This study was conducted to remove the reactive dyes by the Ozone demand flask method which are one of the main pollutants in dye wastewater, Ozone oxidation of three kinds of the reactive dyes was examined to investigate the reactivity of dyes with ozone, Trihalomethane formation potentials(THMFPs), competition reaction and ozone utilization on various conditions for single- and multi-solute dye solution. Concentration of dyes was decreased continuously with increasing ozone dosage in the single-solute dye solutions. THMFPs per unit dye concentration were gradually increased with increase of ozone dosage. By the result of THMFPs change with reaction time, THMFPs were rapidly decreased within 1 minute in single-solute dye solutions. Dey were increased after 1 minute of reaction time, and then they were consistently decreased again after longer reaction time. Competition quotient values were calculated to investigate the preferential oxidation of individual dyes in multi-solute dye solutions. Competition quotients$(CQ_i)$ and values of the overall utilization efficiency, no$_3$, were increased at 40mg/1 of ozone dosage in multi-solute dye solutions.

• Environmental Engineering Research
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• 제10권2호
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• pp.71-78
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• 2005

A series of column experiments was conducted to develop a monitoring system for in-situ and realtime measurement of ozone transport in unsaturated porous media using a fiber optic sensor. The calibration of the fiber optic transflection dip probe (FOTDP) system was successfully carried out at various ozone concentrations using a column with length of 30 cm and diameter of 5 cm packed with glass beads, which don't react with gaseous ozone. The breakthrough curves (BTCs) of ozone were obtained by converting the normalized intensity into ozone concentration. The FOTDP system worked well for in-situ monitoring of gas phase ozone at various water saturations and in presence of soil organic matter (SOM). However, the FOTDP system did not measure the ozone concentration at more than 70% water saturation.

• 자연과학논문집
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• 제10권1호
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• pp.103-109
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• 1998

본 연구는 오존의 강한 산화력을 이용하여 기상의 처리방법에 따른 비스코스 레이온의 탈색효과를 연구하였다. 오존이 발생할 때는 기체상태로 고농도이지만, 수용액 상태로 물에 녹이는 과정에서 기화요인에 의하여 오존의 손실이 많았다. 따라서 기존의 오존처리방법인 수용액상태의 처리방법이 아니라 기상의 오존을 직접 직물에 처리하므로 고농도의 오존을 단시간동안 처리하여 직물에 존재하는 색소를 산화시켜 탈색하는 방법을 사용하였다. 기상의 오존은 직접 유기색소와 반응하지 않기 때문에 물을 매개체로 하여 pick up ratio를 60%, 50%, 40%, 30%, 20%로 변화시키면서 비스코스 레이온의 탈색에 대하여 연구하였다. Pick up ratio가 40%일 때가 유기색소를 분해하는데 필요한 최적의 수산기가 발생하므로 처리포의 탈색효과가 가장 좋았다. 그러나 처리기간이 길수록 너무 과다하게 오존에 의해 산화되므로 강도와 신도의 저하를 초래하였다. 따라서 최적의 기상오존 처리시간은 60분정도에서 처리하는 것이 강도와 신도의 저하를 가장 적게 할 수 있고 백도도 향상시킬 수 있는 것으로 사료된다.