• Title/Summary/Keyword: Oxygen flow rate

검색결과 689건 처리시간 0.031초

대기압 플라즈마를 이용한 감광제 제거 공정과 damage에 관한 연구 (A Study on Photoresist Stripping and Damage Using Atmospheric Pressure Plasma)

  • 황인욱;양승국;송호영;박세근;오범환;이승걸;이일항
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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    • pp.152-155
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    • 2003
  • Ashing of photoresist was investigated in dielectric barrier discharges in atmospheric pressure by changing applied voltage, frequency, flow rate. we analyzed the plasma by Optical Emission Spectroscopy(OES) to monitor the variation of active oxygen species. Another new peaks of oxygen radical is observed by addition of argon gas. This may explain the increase in ashing rate with argon addition. With the results of Optical Emission Spectroscopy(OES), we can find the optimized ashing conditions. MIS capacitor for monitoring charging damage by the plasma was also studied. The results suggest the dielectric barrier discharges(DBD) can be an efficient, alternative Plasma source for general surface processing.

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Effect of oxygen deficiency on electronic properties and local structure of amorphous tantalum oxide thin films

  • Denny, Yus Rama;Firmansyah, Teguh;Park, Chanae;Kang, Hee Jae;Yang, Dong-Seok;Heo, Sung;Chung, Jae Gwan;Lee, Jae Cheol
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.122.1-122.1
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    • 2015
  • The dependence of electronic properties and local structure of tantalum oxide thin film on oxygen deficiency have been investigated by means of X-ray photoelectron spectroscopy (XPS), Reflection Electron Energy Loss Spectroscopy (REELS), and X-ray absorption spectroscopy (XAS). The XPS results showed that the oxygen flow rate change results in the appearance of features in the Ta 4f at the binding energies of 23.2 eV, 24.4 eV, 25.8, and 27.3 eV whose peaks are attributed to Ta1+, Ta2+, Ta3+, Ta4+, and Ta5+, respectively. The presence of nonstoichiometric state from tantalum oxide (TaOx) thin films could be generated by the oxygen vacancies. The REELS spectra suggested the decrease of band gap for tantalum oxide thin films with increasing oxygen deficiency. In addition, XAS spectra manifested both the increase of coordination number of the first Ta-O shell and a considerable reduction of the Ta-O bond distance with the decrease of oxygen deficiency.

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0.5 MWth 케미컬루핑 연소 시스템 적용을 위한 신규 산소전달입자의 고온·고압 반응 특성 (Reaction Characteristics of New Oxygen Carrier for 0.5 MWth Chemical Looping Combustion System at High Temperature and High Pressure Conditions)

  • 김정환;이도연;남형석;조성호;황병욱;백점인;류호정
    • 한국수소및신에너지학회논문집
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    • 제29권5호
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    • pp.473-482
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    • 2018
  • To check applicability of recently developed new oxygen carrier for 0.5 MWth chemical looping combustion system, reactivity tests were carried out at high temperature and high pressure conditions. Pressure, temperature, gas velocity, $CH_4$ flow rate, and solid height were considered as operating variables. The new oxygen carrier (N016-R4) showed not only high fuel conversion but also high $CO_2$ selectivity within all the operating conditions in this study. The reactivity of N016-R4 particle was compared with previous oxygen carriers. The N016-R4 particle represented outstanding reactivity among 10 oxygen carriers in terms of fuel conversion and $CO_2$ selectivity.

CDMA-Based Ubiquitous $SaO_2$ Monitoring System for Oxygen Therapy Patients

  • Lee, Seung-Yup;Kang, Jae-Min;Shin, Il-Hyeung;Lee, Jae-Ho;Lee, Choon-Taek;Kim, Hee-Chan
    • 대한의용생체공학회:의공학회지
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    • 제27권5호
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    • pp.274-281
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    • 2006
  • In this paper, we propose a ubiquitous $SaO_2$ monitoring system for patients using oxygen therapy. For these patients, the ability to monitor oxygen saturation ubiquitously is very important fur accurate adjustment of ventilator's flow rate to match the patient's time-varying requirements with the shortest lag time possible. We have developed a portable device to measure $SaO_2$ and transmit it to hospital in real-time or in store-and-forward mode through the integration of $Bluetooth^{TM}$ technology and the code division multiple access (CDMA) cellular network. We also developed software for doctors to receive and manage the patients' $SaO_2$ information. Performance of the developed system was evaluated as acceptable by assessing the accuracy of the measured oxygen saturation value and the stability of communication network. Test results in real clinical setting demonstrate that our system is feasible for immediate use in home oxygen therapy.

산소 플라즈마 처리된 활성탄소의 세슘 이온 흡착 (Cesium Ions Adsorption of Activated Carbon Treated by Oxygen Plasma)

  • 하성민;곽철환;임채훈;김석진;이영석
    • 공업화학
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    • 제33권1호
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    • pp.38-43
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    • 2022
  • 산소 플라즈마 처리에 따른 활성탄소의 산소 관능기 도입이 세슘 이온 흡착 특성에 미치는 영향에 대하여 고찰하였다. 산소 플라즈마 처리 시 주파수, 전력 및 산소 가스 유량은 각각 100 kHz, 80 W 및 60 sccm으로 고정하였으며, 반응시간을 변수로 수행하였다. 본 실험조건에서는 산소 가스와의 반응시간이 10분일 때 C-O-C 및 O=C-O 결합 내 산소 기능기 함량이 증가함에 따라 세슘 이온 흡착량이 증가하였다. 그러나 반응 시간이 15분일 때 산소 관능기 함량이 감소하게 되어 세슘 이온 흡착량이 오히려 감소되었다. 한편, 표면 처리된 활성탄소의 산소 함량과는 달리 그 비표면적 및 기공 특성은 산소 플라즈마 반응 시간에 따라 거의 영향을 받지 않았다. 결과적으로 산소 플라즈마 처리된 활성탄소는 미처리 활성탄소에 비하여 세슘 이온 제거율이 최대 97.3%까지 향상되었다. 이는 산소 플라즈마 처리로 활성탄소 표면에 도입된 C-O-C 및 O=C-O 결합 내 산소 기능기의 함량에 기인한 것으로 판단된다.

Continuos-Flow culture of Hepatocytes in Sugar-derivatized poly (lactide-co-glycolide) Scaffolds Prepared by Gas-foaming/salt-leaching Method

  • 윤준진;박태관
    • 한국생물공학회:학술대회논문집
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    • 한국생물공학회 2000년도 춘계학술발표대회
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    • pp.141-144
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    • 2000
  • Highly open porous polymer matrices are required for high density cell seeding, efficient nutrient, and oxygen supply to the cells cultured in the three dimensional matrices. However, there are severe problems of mass transfer limitations within the cell/scaffolds culture system. Thus we hypothesize that continuos-flow culture conditioning of cells with the scaffolds may improve the cell viability and the differentiated function. In this study, we fabricated porous PLGA scaffolds by using gas-foaming/salt-leaching method as previous described. Viscous PLGA gel paste contains ammonium bicarbonate particulates, acting as a gas-foaming agent as well as a salt-leaching porogen, were cast into Teflon mold and dried. Ammonium bicarbonate salt upon contact to an acidic aqueous solution evloves gaseous ammonia and carbon dioxide by itself. And we conjugated galactose moiety [AGA; $N-(aminobuty1)-O-{\beta}-D-galactopyranosyl-(1{\rightarrow}4)-D-glucoamide]$ to the terminal end group of a PLGA to increase the cell adhesion and matain the differentiated function of hepatocytes. Cell-seeded scaffolds were secured in a flow bioreactor chamber and exposed to continuous flow at 5 ml/min. As a result of our study, the high yield of hepatocytes attachment was accomplished by increasing the concentration of PLGA-AGA conjugate in polymer scaffolds and cells in the scaffolds under continuos flow condition maintained a high level of viability and albumin secretion rate of cultured hepatocytes showed a higher level that of control groups.

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연료 과농 환경에서 분사기 유량 통과 특성 연구 (Study of Flow Discharging Characteristics of Injectors at Fuel Rich Conditions)

  • 서성현;임병직;김문기;안규복;김종규;최환석
    • 한국추진공학회:학술대회논문집
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    • 한국추진공학회 2010년도 제35회 추계학술대회논문집
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    • pp.9-12
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    • 2010
  • 본 논문은 연료 과농 연소 환경 하의 이중 와류 동축형 분사기의 유량 통과 특성 파악을 위해 수행한 실험결과를 수록하였다. 액체산소와 케로신(Jet A-1)을 사용하여 연소시험을 수행하고 유량 통과 특성을 유량계수로 표현하였다. 유량계수 산출을 위해 유량, 압력, 온도를 계측하였다. 연료 분사기의 경우, 산화제 측 분사기 형상, 연소압, 혼합비에 관계없이 일정한 유량 계수 값을 보였다. 이에 반해 산화제 분사기는 연소압과 혼합비 변화에 영향을 받는 것으로 나타났다. 화염 형성 변화가 유량계수 변화에 특히 산화제 측에 영향을 주고 있음을 밝혔다.

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General Pharmacology of PEG-Hemoglobin SB1

  • Kim, Eun-Joo;Lee, Rae-Kyong;Bak, Ji-Yeong;Choi, Gyu-Kap
    • Biomolecules & Therapeutics
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    • 제7권2호
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    • pp.170-177
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    • 1999
  • PEG-hemoglobin SB1 (SB1), which is a hemoglobin-based oxygen carrier, is intended to use as a safe blood substitute against brain ischemia and stroke. The general pharmacological profiles of SB1 were studied. The doses given were 0, 5, 10, 20 ml/kg and drugs were administered intravenously. The animals used for this study were mouse, rat and guinea pig. SB1 showed no effects on general behavior, motor coordination, spontaneous locomotor activity, hexobarbital sleeping time, anticonvulsant activity, analgesic activity, blood pressure and heart rate, left ventricular peak systolic pressure, left ventricular end diastolic pressure, left ventricular developing pressure, double product, heart rate, coronary flow rate, smooth muscle contraction using guinea pig ileum, gastrointestinal transport, gastric secretion, urinary volume and electrolyte excretion at all doses tested except the decrease of body temperature. These findings demonstrated that SB1 possesses no general pharmacological effects at all doses tested.

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물분사 수소 가스터빈의 출력 향상을 위한 연구 (A Study for the Output Increament of the Hydrogen Gas Turbine with Water Injection)

  • 정귀성;오병수
    • 한국수소및신에너지학회논문집
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    • 제9권1호
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    • pp.1-7
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    • 1998
  • Most of today's energy supply is obtained from fossil fuels. Despite of high energy density, higher store efficiency and long mileage, fossil fuels cause environmental pollution and their reserves are limited. In this study pure hydrogen gas and oxygen gas are burned without the emission of pollution. A gas turbine is used to obtain power. Water is injected into a combustor, which prevents overheating and recovers cooling heat. Excessively supplied water is recirculated. With variation of mass flow rate and equivalence ratio, the affection of water injection rate and the temperature of injected water on efficiency and power are experimented. Injected water gets cooling heat, is expanded from liquid to vapor and raises the thermal efficiency. It is enable to determine the rate of water injection, which makes the maximum power. The increase of temperature of water injection raises the efficiency of the system.

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만경강 유역의 비점오염물질 유출모의를 통한 새만금 만 유입부의 수질 예측 (Prediction of Water Quality at the Inlet of Saemangeum Bay by using Non-point Sources Runoff Simulation in the Mankyeong River Watershed)

  • 류범수;이채영
    • 상하수도학회지
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    • 제27권6호
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    • pp.761-770
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    • 2013
  • This study was carried out to forecast the flow rate and water quality at the inlet of the Saemangeum bay in Korea using the SWMM(Storm Water Management Model) and the WASP(Water Analysis Simulation Program), and to analyze the impacts of pollutant loading from non-point source on the water quality of the bay. The calibration and validation of flow rate and water quality were performed using those from two monitoring points in the Mankyeong river administrated by Korean Ministry of Environment as part of the national water quality monitoring network. When the river flow rate was calibrated and validated using the rainfall intensities during 2011-2012, $R^2$ (i.e., coefficient of determination) was ranged from 0.91 to 0.96. For water qualities, it was shown that $R^2$ of BOD(Biochemical Oxygen Demand) was ranged from 0.56 to 0.86, and $R^2$ of T-N(Total Nitrogen) was from 0.64 to 0.75, and $R^2$ of T-P(Total Phosphorus) was from 0.67 to 0.89. The integrated modeling system showed significant advances in the accuracy to estimate the water quality. Finally, further simulations showed that annual average flow of the river running into the bay was estimated to be $1.439{\times}10^9m^3/year$. The discharged load of BOD, T-N, and T-P into the bay were anticipated to be 618.7 ton/year, 331.5 ton/year, and 40.4 ton/year, respectively.