• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.458-458
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• 2010

The process window for the etch selectivity of silicon nitride ($Si_3N_4$) layers to extreme ultra-violet (EUV) resist and variation of line edge roughness (LER) of EUV resist were investigated durin getching of $Si_3N_4$/EUV resist structure in a dual-frequency superimposed capacitive coupled plasma (DFS-CCP) etcher by varying the process parameters, such as the $CH_2F_2$ and $N_2$ gas flow rate in $CH_2F_2/N_2$/Ar plasma. The $CH_2F_2$ and $N_2$ flow rate was found to play a critical role in determining the process window for infinite etch selectivity of $Si_3N_4$/EUV resist, due to disproportionate changes in the degree of polymerization on $Si_3N_4$ and EUV resist surfaces. The preferential chemical reaction between hydrogen and carbon in the hydrofluorocarbon ($CH_xF_y$) polymer layer and the nitrogen and oxygen on the $Si_3N_4$, presumably leading to the formation of HCN, CO, and $CO_2$ etch by-products, results in a smaller steady-state hydrofluorocarbon thickness on $Si_3N_4$ and, in turn, in continuous $Si_3N_4$ etching due to enhanced $SiF_4$ formation, while the $CH_xF_y$ layer is deposited on the EUV resist surface. Also critical dimension (and line edge roughness) tend to decrease with increasing $N_2$ flow rate due to decreased degree of polymerization.

• Journal of Korea Entertainment Industry Association
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• v.14 no.8
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• pp.197-202
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• 2020

In this study, we investigate the effect of twenties female caffeine addiction on cardiorespiratory capacity. For this study, we divided 35 female students at H university into caffeine addict group(n=17) and none caffeine addict group(n=18). Measure maximal oxygen uptake, maximal energy consumption and METs using Cycle Ergometer to assess cardiac capacity. Measure peak inspiratory pressure, peak inspiratory flow rate, peak inspiratory capacity, average inspiratory pressure, average inspiratory flow rate, average inspiratory capacity using Power Breathe K5 to assess respiratory capacity. As a result, cardiac capacity showed a statistically significant decrease in maximal oxgen uptake and METs compared caffeine addict group to none caffeine addict group(p<.001). respiratory capacity showed a statistically significant decrease in peak inspiratory pressure(p<.05), peak inspiratory flow rate(p<.01), average inspiratory pressure(p<.01), average inspiratory flow rate(p<.01), compared caffeine addict group to none caffeine addict group. Combining the results of the study, we could see that caffeine addiction reduces the cardiorespiratory capacity in twenties female. Therefore, it could be used as a basis date to prevent caffeine addiction for twenties female.

• Archives of Pharmacal Research
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• v.20 no.5
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• pp.471-475
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• 1997

Livers isolated from 18 hours fasted rats were subjected to N$_{2}$ hypoxia (for 45 min) followed by reoxygenation (for 45 min). The perfusion medium used was Krebs-Henseleit bicarbonate buffer (KHBB, pH 7.4). Lactate and alanine were added as gluconeogenic and ureagenic substrates and Trolox C was also added to perfusate. Oxygen consumption, lactate dehydrogenase (LDH), alanine transaminase (ALT), total glutathione, oxidized glutathione, bile flow, glucose and urea were measured. After hypoxia oxygen consumption significantly dropped but Trolox C had no influence on this decrease. ALT and LDH were significantly increased by hypoxia/reoxygenation. This increase was markedly attenuated in the presence of Trolox C. The total glutathione and oxidized glutathione efflux increased following hypoxia, which were prevented by the treatment of Trolox C. Bile flow rate decreased following hypoxia/reoxygenation but did not continue to decrease in the reoxygenation phase by Trolox C. Following hypoxia/reoxygenation glucose and urea releases decreased. Trolox C had no influence on inhibition of glucose and urea production. These results suggest that Trolox C protected the liver cells against hypoxia/reoxygenation injury, yielding further evidence for a causative role of oxidative stress in this model.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.32 no.7
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• pp.504-512
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• 2008

The characteristics of nonpremixed oxy-fuel flame in a multi-jet burner were experimentally and numerically investigated. The overall flow rate of fuel and oxygen was fixed, and the oxygen feeding ratio (OFR) was varied by 0.25, 0.5, and 0.75. The results of numerical simulation were compared with the measured results which are temperature profile and direct flame observation. The probability density function (PDF) model was applied accounting to the description between turbulence and chemistry, and standard ${\kappa}-{\varepsilon}$ model was used for turbulent flow field. Equilibrium assumption is very reasonable due to fast chemistry of the oxy-fuel combustion. Thus, the equilibrium calculation based on Gibbs free energy minimization was guaranteed to generate the solution of the oxy-fuel combustion. The result was obtained by numerical simulation. The predicted radial temperature profiles were in good agreement with the measured results. The flame length was shorten and was intensified with the decrease of OFR because the mixture of fuel and oxidizer are fast mixed and burnt. The maximum temperature became lower as the OFR increased, as a consequence of large flame surface area.

• Journal of Microbiology and Biotechnology
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• v.21 no.9
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• pp.995-1000
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• 2011

The bioremediation potential of crude oil by Polyporus sp. S133 pre-grown in wood meal was investigated in two separate experiment trials; liquid medium and soil. The effect of three nutrients (glucose, polypeptone, and wood meal), oxygen flow, and some absorbent on the efficiency of the process was also evaluated. Degradation of crude oil in soil was significantly increased with an addition of oxygen flow and some absorbent (kapok and pulp). The highest degradation rate of crude oil was 93% in the soil with an addition of 10% kapok. The present study clearly demonstrates that, if suitably developed, Polyporus sp. S133 could be used to remediate soil contaminated with crude oil.

• Journal of the Semiconductor & Display Technology
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• v.7 no.1
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• pp.29-34
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• 2008

In this paper, the DE(double erosion) cathode for the reactive magnetron sputtering system is developed for high deposition rate and high target utilization efficiency. The utilization efficiency of the developed DE cathode is 22% higher than that of normal SE(single erosion) cathode. Sputtering process for the nickel oxide thin films with the DE cathode is performed under the following conditions; power with $1kW{\sim}3kW$, pressure with 4mtorr and 8mtorr, oxygen flow ratio with $0%{\sim}80%$. As a result, the hysteresis phenomenon of discharge voltage in 4mtorr is lower than that in 8mtorr and the hysteresis phenomenon of discharge voltage is getting lower as the applied power is getting higher. The structure of cross section and surface roughness of the thin films are observed by FE-SEM and AFM. The structure of cross section of the thin films is columnar and the average surface roughness under oxygen flow ratio of 0%, 52.5% and 65.0% are $2.08{\AA}$, $2.20{\AA}$ and $0.854{\AA}$, respectively.

• Journal of Advanced Marine Engineering and Technology
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• v.24 no.3
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• pp.70-78
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• 2000

The effects of recirculated exhaust gas on the characteristics of ;$NO_x$ and soot emissions under a wide range of engine load have been experimentally investigated by a water-cooled, four-cylinder, indirect injection, four cycle and marine diesel engine operating at two kinds of engine speeds. The purpose of the present study is to develop the EGR control system for reducing $NO_x$ and soot emissions simultaneously in diesel engines. The EGR system is used to reduce NOx emissions, and a novel diesel soot removal apparatus with a cylinder-type scrubber for the experiment system which has 6 water injectors(A water injector is made up 144 nozzles with 1.0mm in diameter) is specially designed and manufactured to reduce the soot contents in the recirculated exhaust gas to intake system of the engines. The intake oxygen concentration obtained by the intake air flow and the oxygen concentration in the recirculated exhaust gas, and the exhaust oxygen concentration measured in exhaust manifold are used to analyse and discuss the influences of EGR on NOx and soot emissions. The experiments are performed at the fixed fuel injection timing of $15.3^{\circ}$ BTDC regardless of experimental conditions. It is found that $NO_x$ emissions decrease and soot emissions increase owing to the drop of intake oxygen concentration and exhaust oxygen concentration as EGR rate rises. Also, one can conclude that it is sufficient for the scrubber EGR system with a novel diesel soot removal apparatus to reduce $NO_x$ emissions, but not to reduce soot emissions.

• Journal of Korean Society on Water Environment
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• v.22 no.3
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• pp.475-481
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• 2006

The major problem in closing water like lakes and ponds in Korea is that because they are exposed to surrounding, so easily polluted. The pollution in closing water can be caused by not only artificial factor like sewage but also natural factor like elution from sediment. For insurance of safe and satisfied water source, lots of studies and projects are now going on. In this study, we examined the behavior and effect of microbubble ($3{\sim}10{\mu}m$) produced by device called O.S.D (Oxygen Solubillization Device) in small size pond. The value of oxygen transfer coefficient ($K_La$) was 0.68/min independently of air flow rate, 6.5 times higher than commercial aeration stone and the variation of nitrogen concentration was $0.008NO_3/O_2$, DO concentration was potentially saturated for 24 hr. From the results of pilot plant, SOD of experiment (O.S.D) and control were $12.18gO_2{\cdot}m^{-2}{\cdot}d^{-1}$ and $47.95gO_2{\cdot}m^{-2}{\cdot}d^{-1}$ respectively. In conclusion, because O.S.D has extraordinary physico-chemical characteristics, it can contribute to improvement of both the waterbody and the sediment environment.

• Korean Journal of Fisheries and Aquatic Sciences
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• v.25 no.6
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• pp.529-537
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• 1992

Airlift pumps were tested to evaluate their pumping and aeration capacities. The pumps were 34.5 inch long made of 2, 3, 4 and 6 inch nominal diameter PVC pipes. An one hp air blower was used to supply the air. The air-flow rate was measured by an anemometer type air-flow meter and air pressure was level changes in a water tank from which water was pumped. Aeration by the pumps was tested by the standard aeration test method with the center of pump outlet positioned 3 inches above water surface. Oxygen concentrations in water were measured to determine aeration rate. As pumping head increased by water level draw-down in the tank water flow decreased while air flow increased. The reduction rate of water flow was higher with 4 and 6-inch pumps. Small pumps showed very minor changes in the reduction. Aeration rates were similar among 3, 4, and 6 inch pumps. With one hp air blower 6-inch pump at the minimum pumping head achieved the best performance in terms of water circulation.

• Journal of Korean Society of Water and Wastewater
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• v.25 no.4
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• pp.591-596
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• 2011

Surface floating air cathode microbial fuel cell (MFC) having horizontal flow was developed for the application of MFC technology. RVC (Reticulated vitreous carbon) coated with anyline was used as anode electrode and carbon cloth coated with Pt (5.0 g Pt/$m^2$, GDE LT250EW, E-TEK) was used as cathode electrode. As results of continuous operation with changing the flow rate from 4.3 mL/min to 9.5 mL/min, maximum power density of 4.5 W/$m^3$ was acquired at 5.4 mL/min, which was at 0.35 m/hr of flow velocity under anode electrode. When the ratio of cathode surface area to anode surface area($A_c/A_a$) was changed to 1.0, 0.5, and 0.25, the maximum power density of 2.7 W/$m^3$ was shown at the ratio of 1.0. As the ratio decreased from 1.0 to 0.25, the power density also decreased, which is caused by increasing the internal resistance resulted from reducing the surface area to contact with oxygen. Actually, internal resistances of the ratio of 1.0, 0.5, and 0.25 were 63.75${\Omega}$, 142.18${\Omega}$, and 206.12${\Omega}$, respectively.