• Title/Summary/Keyword: Oxide unetch

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Improved Mechanical Motion in Oxide Wet Etch Process with BOE chemical (BOE 약액을 사용하는 공정의 로봇 동작 개선)

  • Kim, Eung-Do;Son, Won-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2010.06a
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    • pp.363-363
    • /
    • 2010

  • After oxide wet etch with BOE(Buffered Oxide Etchant), triangle type defect maps were inspected and SEM image showed them unetch of oxide layer. As decreasing design rule, oxide unetch has become a crucial issue and has affected the yield and quality.

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