• Journal of Sensor Science and Technology
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• v.17 no.3
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• pp.183-187
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• 2008

A sub-ppm level MEMS gas sensor that can be used for the detection of formaldehyde (HCHO) is presented. It is realized by using a zinc oxide (ZnO) thin-film material with a Ni-seed layer as a sensing material and by bulk micromachining technology. To enhance sensitivity of the MEMS gas sensor with Ni-seed layer was embedded with ZnO sensing material and sensing electrodes. As experimental results, the changed sensor resistance ratio for HCHO gas was 9.65 % for 10 ppb, 18.06 % for 100 ppb, and 35.7 % for 1 ppm, respectively. In addition, the minimum detection level of the fabricated MEMS gas sensor was 10 ppb for the HCHO gas. And the measured output voltage was about 0.94 V for 10 ppb HCHO gas concentration. The noise level of the fabricated MEMS gas sensor was about 50 mV. The response and recovery times were 3 and 5 min, respectively. The consumption power of the Pt micro-heater under sensor testing was 184 mW and its operating temperature was $400^{\circ}C$.

• Transactions on Electrical and Electronic Materials
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• v.13 no.6
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• pp.305-309
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• 2012

In this study, ZnO nanorods and $SnO_2$-CuO heterogeneous oxide were grown on membrane-type gas sensor platforms and the sensing characteristics for carbon monoxide (CO) were studied. Diaphragm-type gas sensor platforms with built-in Pt micro-heaters were made using a conventional bulk micromachining method. ZnO nanorods were grown from ZnO seed layers using the hydrothermal method, and the average diameter and length of the nanorods were adjusted by changing the concentration of the precursor. Thereafter, $SnO_2$-CuO heterogeneous oxide thin films were grown from evaporated Sn and Cu thin films. The average diameters of the ZnO nanorods obtained by changing the concentration of the precursor were between 30 and 200 nm and the ZnO nanorods showed a sensitivity value of 21% at a working temperature of $350^{\circ}C$ and a carbon monoxide concentration of 100 ppm. The $SnO_2$-CuO heterogeneous oxide thin films showed a sensitivity value of 18% at a working temperature of $200^{\circ}C$ and a carbon monoxide concentration of 100 ppm.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.31 no.7
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• pp.521-526
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• 2018

In particular, gas sensors require characteristics such as high speed, sensitivity, and selectivity. In this study, we fabricated a $NO_X$ gas sensor by using a multi-walled carbon nanotube (MWCNT)/zinc oxide (ZnO) composite film. The fabricated MWCNT/ZnO gas sensor was then treated by a $450^{\circ}C$ temperature process to increase its detection sensitivity for NOx gas. We compared the detection characteristics of a ZnO film gas sensor, MWCNT film gas sensor, and the MWCNT/ZnO composited film gas sensor with and without the heat-treatment process. The fabricated gas sensors were used to detect $NO_X$ gas at different concentrations. The gas sensor absorbed $NO_X$ gas molecules, exhibiting increased sensitivity. The sensitivity of the gas sensor was increased by increasing the gas concentration. Additionally, while changing the temperature inside the chamber for the MWCNT/ZnO composite film gas sensor, we obtained its sensitivity for detecting $NO_X$ gas. Compared with ZnO, the MWCNT film gas sensor is excellent for detecting $NO_X$ gas. From the experimental results, we confirmed the enhanced gas sensor sensing mechanism. The increased effect by electronic interaction between the MWCNT and ZnO films contributes to the improved sensor performance.

• Journal of Sensor Science and Technology
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• v.22 no.4
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• pp.286-291
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• 2013

This paper presents to analyze patterns from single and complex malodors using gas sensor array based on metal oxide semiconductors. The aim of research is to identify and discriminate single malodors such as $NH_3$, $CH_3SH$ and $H_2S$ and their mixtures according to concentration levels. Measurement system for analyzing patterns from malodors is constructed by an array of metal oxide semiconductor sensors which are available commercially together with associate electronics. The patterns from sensory system are analyzed by Principal Component Analysis (PCA) which is simple statistical pattern recognition technique. Throughout the experimental trails, we confirmed the experimental procedure for measurement system such as sensors calibration time and gas flow rate, and discriminated malodors using pattern analysis technique.

• Journal of Sensor Science and Technology
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• v.27 no.4
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• pp.221-226
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• 2018

Misfueling accidents significantly damage the engines of both gasoline and diesel vehicles, and should be avoided by rapid and accurate fuel discrimination. Gasoline fuel contains bioethanol. Thus, the detection of ethanol vapor produced by gasoline can be used to distinguish between gasoline and diesel. In the present study, Pt-doped $SnO_2$ hollow nanospheres, Mg-doped $In_2O_3$ hollow microspheres, and Pt-doped ZnO nanostructures have been used as gas sensors to discriminate between gasoline and diesel fuels. All three sensors are able to detect and discriminate between gases evaporating from gasoline and diesel. Among the sensors, the Mg-doped $In_2O_3$ hollow microspheres show a significant gas response (resistance ratio = 4.97) quickly (~3 s) after exposure to gasoline-evaporated gas at $225^{\circ}C$, but did not show any substantial response to diesel-evaporated gas. This demonstrates that gasoline and diesel fuels can be discriminated using small and cost-effective oxide semiconductor gas sensors.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.6 no.2
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• pp.315-322
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• 2002

A thin film oxide semiconductor micro gas sensor array which shows only 60㎽ of power consumption at an operating temperature of 30$0^{\circ}C$ has been fabricated using microfabrication and rnicrornachining techniques. Excellent thermal insulation of the membrane is achieved by the use of a double la! or structure of 0.1${\mu}{\textrm}{m}$ thick Si$_3$N$_4$ and 1${\mu}{\textrm}{m}$ thick phosphosilicate glass(PSG) prepared by low pressure chemical vapor deposition(LPCVD) and atmospheric－pressure chemical-vapor deposition(APCVD), respectively. The sensor way consists of such thin film oxide semiconductor sensing materials as 1wt.％ Pd-doped SnO$_2$, 6wt.% AI$_2$O$_3$-doped ZnO, WO$_3$ and ZnO. The thin film oxide semiconductor micro gas sensor array exhibited resistance changes usable for subsequent data processing upon exposure to various gases and the sensitivity strongly depended on the sensing layer materials. Heater Part of the sensor structure has been modified in order to improve the process yield of the sensor, and as a result of modified heater structure improved process yield has been achieved.

• Journal of Sensor Science and Technology
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• v.29 no.2
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• pp.112-117
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• 2020

Xylene is a hazardous volatile organic compound that should be precisely measured to monitor indoor air quality. However, the selective and sensitive detection of ppm-level xylene using oxide-semiconductor gas sensors remains a challenge. In this study, pure and Cr-doped Co₃O₄ nanoparticles (NPs) were prepared using flame spray pyrolysis, and their gas-sensing characteristics to 5-ppm xylene at 250 ℃ were investigated. The 4 at% Cr-doped Co₃O₄ NPs exhibited a high gas response to 5-ppm xylene (resistance ratio to gas and air = 39.1) and negligible cross-responses to other representative and ubiquitous indoor pollutants such as ethanol, benzene, formaldehyde, carbon monoxide, and ammonia. In this paper, the enhancement of the gas response and selectivity of Co₃O₄ NPs to xylene by Cr doping was discussed in relation to the catalytic promotion of the gas-sensing reaction. This sensor can be used to monitor indoor xylene.

• Journal of Sensor Science and Technology
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• v.23 no.3
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• pp.192-196
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• 2014

The effects of additives on gas sensing properties of $In_2O_3$ ethanol gas sensor were investigated. Gas sensors were fabricated by the painting method. The $In_2O_3-La_2O_3-Pt$ sensor heat treated $400^{\circ}C$ displayed fast response and recovery behavior with a maximum sensitivity to ethanol gas in air at an operating temperature of $300^{\circ}C$.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.479-482
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• 2003

We propose a real time gas monitoring system for classifying various gases with different concentrations. Using thermal modulation of operating temperature of two sensors, we extract patterns of gases from the voltage across the load resistance. We adopt the relative resistance as a pre-processing method and an ART2 neural network as a pattern recognition method. The proposed method has been implemented in a real time embedded system with tin oxide gas sensors, TGS 2611, 2602 and an MSP430 ultra-low power microcontroller in the test chamber.

• Applied Chemistry for Engineering
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• v.33 no.6
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• pp.630-635
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• 2022

Copper(II) oxide (CuO), electroless plated on a nitrogen-containing carbon sponge prepared by a melamine sponge thermal treatment, was developed as a nitric oxide (NO) gas sensor that operates without a wafer. The CuO content on the surface of the carbon sponge increased as the plating time increased, but the content of nitrogen known to induce NO gas adsorption decreased. The untreated carbon sponge showed a maximum resistance change (5.0%) at 18 min. On the other hand, the CuO plated sample (CuO30s-CS) showed a maximum resistance change of 18.3% in 8 min. It is considered that the improvement of the NO gas sensing capability was caused by the increase in hole carriers of the carbon sponge and improved movement of electrons due to CuO. However, the NO gas detection resistance of the CuO electroless plated carbon sponge for 60 s decreased to 1.9%. It is considered that the surface of the carbon sponge was completely plated with CuO, resulting in a decrease in the NO gas adsorption capacity and resistance change. Thus, CuO-plated carbon sponge can be used as an effective NO gas sensor because it has fast and excellent resistance change properties, but CuO should not be completely plated on the surface of the carbon sponge.