• Title/Summary/Keyword: Oxide characteristic

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Effects of $O_2$ Gas Addition to Etching of Platinum Thin Film by Inductively Coupled Plasmas (유도 결합 플라즈마를 이용한 백금 박막의 식각시 $O_2$ 가스 첨가 효과)

  • Kim, Nam-Hoon;Kim, Chang-Il;Kwon, Kwang-Ho;Chang, Eui-Goo
    • Proceedings of the KIEE Conference
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    • 1998.11c
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    • pp.770-772
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    • 1998
  • The highest etch rate of Pt film was obtained at 10% $Cl_2$/90% Ar gas mixing ratio in our previous investigation. However, the problems such as the etch residues(fence) remained on the pattern sidewall, low selectivity to oxide as mask and low etch slope were presented. In this paper, the etching by additive $O_2$ gas to 10% $Cl_2$/90% Ar gas base was examined. As a result, the fence-free pattern and high etch slope was observed and the selectivity to oxide increased without decreasing of the etch rate. And the reasons for this phenomenon was investigated by XPS(x-ray photoelectron spectroscopy) surface analysis and plasma characteristic.

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Electrical Properties of Zinc Oxide Varistor with $\alpha-Zn_7Sb_2O_{12}$ ($\alpha-Zn_7Sb_2O_{12}$ 첨가에 의한 Zinc Oxide 바리스터의 전기적 특성)

  • 김경남;한상목
    • Journal of the Korean Ceramic Society
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    • v.31 no.11
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    • pp.1396-1400
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    • 1994
  • Electrical properties in the ZnO-Bi2O3-CoO-Zn7Sb2O12 system were investigated with Zn7Sb2O12 content (0.1~2 mol%). The increase of the Zn7Sb2O12 content inhibited the grain growth of ZnO, which showed a narrow grain size distribution of ZnO. The breakdown voltage (Vb) increased markedly with 1 mol% Zn7Sb2O12 addition due to the grain growth control behaviour of the Zn7Sb2O12 . The nonlinear I-V characteristic was significantly influenced by the Zn7Sb2O12 content (or Bi2O3/Zn7Sb2O12 ratio). Addition of 0.5 mol% Zn7Sb2O12 showed the highest nonlinear coefficient ($\alpha$) of 43. The leakage current in prebreakdown region was decreased with increasing Zn7Sb2O12 content.

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Study of Plasma Process Induced Damages on Metal Oxides as Buffer Layer for Inverted Top Emission Organic Light Emitting Diodes

  • Kim, Joo-Hyung;Lee, You-Jong;Jang, Jin-Nyoung;Song, Byoung-Chul;Hong, Mun-Pyo
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.543-544
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    • 2008
  • In the fabrication of inverted top emission organic light emitting diodes (ITOLEDs), the organic layers are damaged by high-energy plasma sputtering process for transparent top anode. In this study, the plasma process induced damages on metal oxide hole injection layers (HILs) including $WO_3$, $MoO_3$, and $V_2O_5$ as buffer layer are examined. With the result of IV characteristic of hole-only devices, we propose that $MoO_3$ and $V_2O_5$ are stable materials against plasma sputtering process.

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Fabrication and Properties of Under Gate Field Emitter Array for Back Light Unit in LCD

  • Jung, Yong-Jun;Park, Jae-Hong;Jeong, Jin-Soo;Nam, Joong-Woo;Berdinsky, Alexander S.;Yoo, Ji-Beom;Park, Chong-Yun
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.1530-1533
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    • 2005
  • We investigated under-gate type carbon nanotube field emitter arrays (FEAs) for back light unit (BLU) in liquid crystal display (LCD). Gate oxide was formed by wet etching of ITO coated glass substrate instead of depositing $SiO_2$ on the glass substrate. Wet etching is easer and simpler than depositing and etching of thick gate oxide to isolate the gate metal from cathode electrode in triode. Field emission characteristic s of triode structure were measured. The maximum current density of 92.5 ${\mu}A/cm^2$ was when the gate and anode voltage was 95 and 2500 V, respectively at the anode-cathode spacing of 1500 ${\mu}m$.

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Characteristics of Sticking Coefficient in BSCCO Thin Film

  • Cho, Choon-Nam;Ahn, Joon-Ho;Oh, Jae-Han;Choi, Woon-Shik;Park, Yong-Pil
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.10a
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    • pp.59-63
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    • 2000
  • BSCCO thin films are fabricated via a co-deposition process by an ion beam sputtering with an ultra-low growth rate, and sticking coefficients of the respective elements are evaluated. The sticking coefficient of Bi element exhibits a characteristic temperature dependence : almost a constant value of 0.49 below $730^{\circ}C$ and decreases linearly with temperature over $730^{\circ}C$ This temperature dependence can be elucidated from the evaporation and sublimation rates of bismuth oxide, $Bi_2O_3$, from the film surface. It is considered that the liquid phase of the bismuth oxide plays an important role in the Bi(2212) phase formation in the co-deposition process.

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Thermal Conductivity Properties of Magnesium Oxide Matrix using Vermiculite and Anthracite (버미큘라이트 및 안트라사이트를 활용한 산화마그네슘 경화체의 열전도율 특성)

  • Lim, Hyun-Ung;Gwon, Oh-Han;Pyeon, Su-Jung;Lim, Gguk-Jeong;Lee, Sang-Soo
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2017.05a
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    • pp.80-81
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    • 2017
  • The study conducted a thermal conductivity test of magnesium oxide to manufacture boards using absorbent to produce board of radon gas molecules that are absorbed into the indoor air pollutants, which are currently in question, among other indoor air pollutants. Using material are the vermiculite and anthracite, in case of the vermiculite, which results in large porosity due to the expansion, in case of the anthracite, which characteristic generates pore on the matrix. As a result of the experiment, the lowest value was given to 0.6161 kcal/mh℃ which adding vermiculite 10% and anthracite 40%. However, adding vermiculite 40% and anthracite 10%, slightly higher 0.7229 kcal/mh℃, it is deemed the anthracite has more porosity than the vermiculite and, it judged that pore occurrence during the mixing process, appeared that the heat conductivity go down.

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Analysis of Sticking Coefficient in BSCCO Superconductor Thin Film Fabricated by Co-deposition (공증착법으로 제작한 BSCCO 초전도 박막의 부착계수 해석)

  • An, In-Soon;Chun, Min-Woo;Park, Yong-Pil
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11b
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    • pp.300-303
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    • 2001
  • BSCCO thin films are fabricated via a co-deposition process by an ion beam sputtering with an ultra-low growth rate, and sticking coefficients of the respective elements are evaluated. The sticking coefficient of Bi element exhibits a characteristic temperature dependence : almost a constant value of 0.49 below $730^{\circ}C$ and decreases linearly with temperature over $730^{\circ}C$. This temperature dependence can be elucidated from the evaporation and sublimation rates of bismuth oxide, $Bi_{2}O_{3}$, from the film surface. It is considered that the liquid phase of the bismuth oxide plays an important role in the Bi 2212 phase formation in the co-deposition process.

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Evaluation of Sticking Coefficient in BSCCO Thin Film Fabricated by Co-sputtering

  • Lee, Hee-Kab;Park, Yong-Pil;Lee, Kwon-Hyun;Lee, Joon-Ung
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.1
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    • pp.80-84
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    • 2000
  • BSCCO thin films are fabricated via a co-deposition process by an ion beam sputtering with an ultra-low growth rate, and sticking coefficients of the respective elements are evaluated. The sticking coeffi-cient of Bi element exhibits a characteristic temperature dependence : almost a constant value of 0.49 below 73$0^{\circ}C$ and decreases linearly with temperature over 73$0^{\circ}C$. This temperature dependence can be elucidated from the evaporation and sublimation rates of bismuth oxide, Bi\ulcornerO\ulcorner, from the film surface. It is considered that the liquid phase of the bismuth oxide plays an important role in the Bi(2212) phase formation in the co-deposition process.

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Multifunctionality in Ceramic/Metal Nanocomposites

  • Sekino, Tohru;Kondo, Hiroki;Niihara, Koichi
    • Journal of Powder Materials
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    • v.8 no.3
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    • pp.186-191
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    • 2001
  • Several fabrication processes, corresponding nanostructural features and multifunctionality as well has been investigated for oxide ceramic based nanocomposites with metal nanodispersion (i.e., ceramic/metal nanocomposites). Transition metal (Ni, Co, etc) dispersed alumina and zirconia based nanocomposites have been synthesized by reducing and hot-press sintering of ceramic and metal oxide mixtures prepared by several method. Improved fracture strength (1.1 and 1.9 GPa for $Al_2O_3/Ni$ and $ZrO_2/Ni$ nanocomposites, respectively) of these composites have been achieved according to their nanostructures. In addition, ferromagnetic characteristic has been kept. The variation of magnetization with an applied stress has found to be more sensitive as smaller as the magnetic metal dispersion is. This result thus suggests the possibility of fracture and/or stress sensing of the composites by simple magnetic measurement.

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Weldability Increase of Aluminum by Variable Polarity Arc (가변 극성 아크의 알루미늄 용접성 향상에 관한 연구)

  • Cho, Jungho
    • Journal of Welding and Joining
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    • v.32 no.1
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    • pp.108-111
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    • 2014
  • Low arc weldability of aluminum alloy is enhanced by applying variable polarity TIG and the result is theoretically investigated to figure out the mechanism. Conventionally, it is well known fact that DCEP (reverse polarity) arc is effective on aluminum welding. The reason is due to oxide layer removal by plasma ion bombardment and therefore it is named as cleaning effect. Another fact of polarity characteristic is that DCEN shows higher heat input efficiency therefore conventional variable polarity arc used to apply DCEP portion as small as possible. However, higher DCEP portion shows bigger weldment in this research and it is explained by adopting a theory of arc concentration on oxide layer with tunneling effect which was not clearly mentioned before in several variable polarity TIG welding research. Disagreement between variable polarity TIG welding result and conventional arc polarity theory is rationally explained for the first time with help of electron emission theory.