• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.149-153
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• 2003

Chemical mechanical polishing (CMP) technology for global planarization of multi-level inter-connection structure has been widely studied for the next generation devices. CMP process has been paid attention to planarized pre-metal dielectric (PMD), inter-layer dielectric (ILD) interconnections. Expecially, shallow trench isolation (STI) used to CMP process on essential. Recently, the direct STI-CMP process without the conventional complex reverse moat etch process has established by using slurry additive with the high selectivity between $SiO_2$ and $Si_3N_4$ films for the purpose of process simplification and n-situ end point detection(EPD). However, STI-CMP process has various defects such as nitride residue, tom oxide and damage of silicon active region. To solve these problems, in this paper, we studied the planarization characteristics using a high selectivity slurry(HSS). As our experimental results, it was possible to achieve a global planarization and STI-CMP process could be dramatically simplified. Also we estimated the reliability through the repeated tests with the optimized process conditions in order to identify the reproducibility of HSS STI-CMP process.

• Journal of Sensor Science and Technology
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• v.24 no.6
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• pp.419-422
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• 2015

Pure and Mo-doped ZnO hollow nanofibers were prepared by single capillary electrospinning and their gas sensing characteristics toward 5 ppm ethanol, trimethylamine (TMA), CO and $H_2$ were investigated. The gas responses and responding kinetics were dependent upon sensing temperature and Mo doping. Mo-doped ZnO hollow nanofibers showed high response to 5 ppm TMA ($R_a/R_g=111.7$, $R_a$: resistance in air, $R_g$: resistance in gas) at $400^{\circ}C$, while the responses of pure ZnO hollow nanofibers was low ($R_a/R_g=47.1$). In addition, the doping of Mo enhanced selectivity toward TMA. The enhancement of gas response and selectivity to TMA by Mo doping to ZnO nanofibers was discussed in relation to the interaction between basic analyte gas and acidic additive materials.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.547-548
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• 2006

In order to realize the commercial application of HTSC materials, it is necessary to develop the fabrication process of high Tc oxide superconductor materials with desired shape and for practical application and high critical current density as well as good mechanical strength which can withstand high lorenz force generated at high magnetic field. Much studies have been concentrated to develop the fabrication technique for high critical current density but still there are a lot of gap which should be overcome for large scale application of HTSC materials at liquid nitrogen temperature. Recently some new fabrication techniques have been developed for YBaCuO bulk superconductor with high mechanical strength and critical current density. In this project, the establishment of fabrication condition and additive effects of second elements were examined so as to improve the related properties to the practical use of YBaCuO superconductor, and we reported the production of the YBaCuO high Tc superconductor by the pyrolysis method.

• Korean Journal of Metals and Materials
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• v.50 no.5
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• pp.383-387
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• 2012

The activation of Mg-10 wt%$Fe_2O_3$ was completed after one hydriding-dehydriding cycle. Activated Mg-10 wt%$Fe_2O_3$ absorbed 5.54 wt% H for 60 min at 593 K under 12 bar $H_2$, and desorbed 1.04 wt% H for 60 min at 593 K under 1.0 bar $H_2$. The effect of the reactive grinding on the hydriding and dehydriding rates of Mg was weak. The reactive grinding of Mg with $Fe_2O_3$ is believed to increase the $H_2$-sorption rates by facilitating nucleation (by creating defects on the surface of the Mg particles and by the additive), by making cracks on the surface of Mg particles and reducing the particle size of Mg and thus by shortening the diffusion distances of hydrogen atoms. The added $Fe_2O_3$ and the $Fe_2O_3$ pulverized during mechanical grinding are considered to help the particles of magnesium become finer. Hydriding-dehydriding cycling is also considered to increase the $H_2$-sorption rates of Mg by creating defects and cracks and by reducing the particle size of Mg.

• Bulletin of the Korean Chemical Society
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• v.22 no.7
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• pp.709-715
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• 2001

We have been studied photosensitization mechanism's additive effect, of perylene 3,4,9,10-tetracarboxyl-diimide and X-phthalocyanine (charge generation materials), using the photochemical and photoelectrochemical approach. It was found that the photoreceptor on the excited state reacts with metal oxide, which creates the charge transfer on the interface of SnO2/electrolyte. In the electrode (X5P1) made of five X-phthalocyanine and single perylene 3,4,9,10-tetracarboxyldiimide layers, the cathodic photocurrent of X-phthalocyanine in the 400-600 nm region was increased by the addition of perylene 3,4,9,10-tetracarboxyldiimide. The maximum wavelength of fluorescence of perylene 3,4,9,10-tetracarboxyldiimide showed no dependence on the temperature. The addition of 4-dibenzylamino-2-methylbenzaldehyde diphenylhydrazone known as charge transport material was represented as decreasing photocurrent for X-phthalocyanine and perylene 3,4,9,10-tetracarboxyldiimide, respectively. In the electrode (X1P1) made of single X-phthalocyanine and single perylene 3,4,9,10-tetracarboxyldiimide layers, an anodic photocurrent of about 10.5 nA was generated by addition of hydroquinone at 550 nm. And the characteristic of photoinduced discharge was shown to decrease by a factor of 5 and the speed of dark decay was increased by a factor of 1.2.

• Journal of Powder Materials
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• v.26 no.5
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• pp.415-420
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• 2019

SiAlON ceramics are used as ceramic cutting tools for heat-resistant super alloys (HRSAs) due to their excellent fracture toughness and thermal properties. They are manufactured from nitride and oxide raw materials. Mixtures of nitrides and oxides are densified via liquid phase sintering by using gas pressure sintering. Rare earth oxides, when used as sintering additives, affect the color and mechanical properties of SiAlON. Moreover, these sintering additives influence the cutting performance. In this study, we have prepared $Yb_{m/3}Si_{12-(m+n)}Al_{m+n}O_nN_{16-n}$ (m = 0.5; n = 0.5, 1.0) ceramics and manufactured SiAlON ceramics, which resulted in different colors. In addition, the characteristics of the sintered SiAlON ceramics such as fracture toughness and microstructure have been investigated and results of the cutting test have been analyzed.

• Journal of Powder Materials
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• v.26 no.4
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• pp.305-310
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• 2019

In the present work, spheroidization of angular vanadium powders using a radio frequency (RF) thermal plasma process is investigated. Initially, angular vanadium powders are spheroidized successfully at an average particle size of $100{\mu}m$ using the RF-plasma process. It is difficult to avoid oxide layer formation on the surface of vanadium powder during the RF-plasma process. Titanium/vanadium/stainless steel functionally graded materials are manufactured with vanadium as the interlayer. Vanadium intermediate layers are deposited using both angular and spheroidized vanadium powders. Then, 17-4PH stainless steel is successfully deposited on the vanadium interlayer made from the angular powder. However, on the surface of the vanadium interlayer made from the spheroidized powder, delamination of 17-4PH occurs during deposition. The main cause of this phenomenon is presumed to be the high thickness of the vanadium interlayer and the relatively high level of surface oxidation of the interlayer.

• Korean Journal of Materials Research
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• v.33 no.1
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• pp.1-7
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• 2023

The physical and antibacterial properties of ophthalmic lenses fabricated by copolymerization with hydrogel monomers using two types of graphene were measured, and their usability as contact lens materials was analyzed. For polymerization, silicone monomers, including SID-OH, 3-(methacryloxy)propyl tris(trimethylsiloxy)silane, and decamethylcyclopentasiloxane, were used, and N,N-dimethylacetamide, ethylene glycol dimethacrylate as a crosslinking agent, and azobisisobutyronitrile as an initiator were added. Also, graphene oxide nanoparticle (GON) and graphene nanoplate (GNP) were used as an additive, and the physical properties of the lenses fabricated after copolymerization were evaluated. The fabricated lenses satisfied the basic physical properties of general hydrogel contact lenses and showed the characteristics of lenses with high water content, and the disadvantage of very weak durability, due to low tensile strength. However, it was confirmed that the tensile strength and antibacterial properties were greatly improved by adding GON and GNP. With GON, the oxygen permeability and refractive index of the fabricated lenses were slightly improved. Therefore, it was determined that the graphene materials used in this study can be used in various ways as a contact lens material.

• Composites Research
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• v.19 no.6
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• pp.32-37
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• 2006

This paper summarizes the processing inorganic continuous fibers from Korean minerals. Continuous filament fibers have been produced from two rocks, basalt and quartz diorite porphyry(QDP), by melting method. The essence of the method is that the vitrified materials was placed into the bushing, platinum/rhodium alloy crucible with a nozzle, and heated electrically to a temperature which allowed fiber spinning. Vitrified basalt without additive was suitable for producing continuous filament fiber. However doping quartz diorite porphyry with boric oxide yielded a material which could be pulled continuously.

• Nuclear Engineering and Technology
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• v.28 no.5
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• pp.458-466
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• 1996

The effects of dopants on the modification of microstructure of UO$_2$ and UO$_2$-4wt%CeO$_2$ sintered pellets have been studied in hydrogen and $CO_2$/CO mixture atmospheres by using $Ta_2O_5$, TiO$_2$ and $Nb_2O_5$ as sintering additives. The dopant were added as oxide powders and homogenized by attrition milling. The mixed powders were pressed, and then sintered in hydrogen at 1$700^{\circ}C$ , or in oxidizing atmosphere using Controlled $CO_2$/CO mixtures at 125$0^{\circ}C$. Both density and microstructure of UO$_2$ are modified by the addition of dopants in reducing atmosphere. The sintered density is increased with $Ta_2O_5$ addition up to 0.33wt% and subsequently decreased with higher content of the additive. The effect on the densification and the gain growth are apparent with the addition of 0.24wt% $Nb_2O_5$. With 0.lwt% titania and 0.6wt% $Ta_2O_5$, the sintered density is decreased, but the grain size is increased. In oxidizing atmosphere, the grain sizes for UO$_2$ doped with the above additives are smaller than that for pure UO$_2$. The grain size of Ta or Nb-doped UO$_2$ is decreased with increasing $CO_2$/CO ratio, but that of pure UO$_2$or T-doped UO$_2$ is increased. A large portion of second phases is observed in UO$_2$ doped with 0.lwt% TiO$_2$ sintered in hydrogen atmosphere, while, in $CO_2$/CO atmospheres, the second phases or dopant agglomerates are not observed. For UO$_2$-4wt%CeO$_2$ mixed oxide, the effect of additives on the gain growth is not so much as that for the pure UO$_2$. This is attributed to the formation of clusters by dopant cations and Ce ions, so that the additives contribute to a lesser exent to the grain growth for the mixed oxide.