• Journal of the Microelectronics and Packaging Society
• /
• v.27 no.3
• /
• pp.41-47
• /
• 2020

The effect of Co interlayer on the interfacial reliability of SiN_x/Co/Cu thin film structure for advanced Cu interconnects was systematically evaluated by using a double cantilever beam test. The interfacial adhesion energy of the SiN_x/Cu thin film structure was 0.90 J/㎡. This value of the SiN_x/Co/Cu thin film structure increased to 9.59 J/㎡.Measured interfacial adhesion energy of SiN_x/Co/Cu structure was around 10 times higher than SiN_x/Cu structure due to CoSi₂ reaction layer formation at SiN_x/Co interface, which was confirmed by X-ray photoelectron spectroscopy analysis. The interfacial adhesion energy of SiN_x/Co/Cu structure decreased sharply after post-annealing at 200℃ for 24 h due to Co oxidation at SiN_x/Co interface. Therefore, it is required to control the CoO and Co₃O₄ formation during the environmental storage of the SiN_x/Co/Cu thin film to achieve interfacial reliability for advanced Cu interconnections.

• Journal of the Korean Magnetics Society
• /
• v.3 no.2
• /
• pp.108-114
• /
• 1993

This paper presents a study on the effects of silica coating in the production of ${\gamma}-Fe_{2}O_{3}$ powders suitable for magnetic recording media. Emphasis has been put on investigating the relationship between the powder characteristics and the effects of silica coating in the heat-treatment stage of ${\gamma}-Fe_{2}O_{3}$ production. After we prepared non-coated ${\gamma}-Fe_{2}O_{3}$ and silica coated ${\gamma}-Fe_{2}O_{3}$ with coating water glass on the surface of goethite and heattreatment process, we compared and investigated powder characteristics. As silica coated layer played a role of preventing the powders from overreduction to metal iron and rapid oxidation, silica coated ${\gamma}-Fe_{2}O_{3}$ showed superior magnetization value due to inhibiting t!1e adulteration of ${\alpha}-Fe_{2}O_{3}$ into the final product. When silica coated layer acted as a sintering restrainer, silica coated ${\gamma}-Fe_{2}O_{3}$ showed high coercivity and specific sur-face area due to good acicularity.

• Economic and Environmental Geology
• /
• v.41 no.3
• /
• pp.327-334
• /
• 2008

Understanding the chemical characteristics of sediments and the nutrient diffusion from sediments to the water body is important in the management of surface water quality. Changes in chemical properties and nutrient concentration of a submerged soil were monitored for 6 months using a microcosm with the thickness of 30cm for upland soil and 15cm of water thickness above the soil. The soil color changed from yellowish red to grey and an oxygenated layer was formed on the soil surface after 5 week flooding. The redox potential and the pH of the pore water in the microcosm decreased during the flooding. The nitrate concentration of the surface water was continuously increased up to $8\;mg\;l^{-1}$ but its phosphate concentration decreased from $2\;mg\;l^{-1}$ to $0.1\;mg\;l^{-1}$ during flooding. However, the concentrations of $NH_4^+$, $PO_4^{3-}$, Fe and Mn in the pore water were increased by the flooding during this period. The increased $NO_3^-$ in the surface water was due to the migration of $NH_4^+$ formed in the soil column and the oxidation to $NO_3^-$ in the surface water. The increased phosphate concentration in the pore water was due to the reductive dissolution of Fe-oxide and Mn-oxide, which scavenged phosphate from the soil solution. The oxygenated layer played a role blocking the migration of phosphate from the pore water to the water body.

• Journal of Sensor Science and Technology
• /
• v.8 no.2
• /
• pp.115-123
• /
• 1999

A micro-gas sensor with heater and sensing electrode on the same plane was fabricated on phosphosilicate glass(PSG, 800nm)/$Si_3N_4$ (150nm) dielectric membrane. PSG film was provided by atmospheric pressure chemical vapor deposition(APCVD), and $Si_3N_4$ film by low pressure chemical vapor deposition (LPCVD). Total area of the fabricated device was $3.78{\times}3.78mm^2$. The area of diaphragm was $1.5{\times}1.5mm^2$, and that of the sensing layer was $0.24{\times}0.24mm^2$. Finite-element simulation was employed to estimate temperature distribution for a square-shaped diaphragm. The power consumption of Pt heater was about 85mW at $350^{\circ}C$. Tin thin films were deposited on the silicon substrate by thermal evaporation at room temperature and $232^{\circ}C$, and tin oxide films($SnO_2$) were prepared by thermal oxidation of the metallic tin films at $650^{\circ}C$ for 3 hours in oxygen ambient. The film analyses were carried out by SEM and XRD techniques. Effects of humidity and ambient temperature on the resistance of the sensing layer were found to be negligible. The fabricated micro-gas sensor exhibited high sensitivity to butane gas.

• Applied Chemistry for Engineering
• /
• v.7 no.6
• /
• pp.1105-1114
• /
• 1996

The characteristic and performance of ${\beta}-PbO_2$ layer electrodeposited on ${\alpha}-PbO_2/IrO_2-TiO_2/Ti$ substrate by adding sodium lauryl sulfate and $TiO_2$ powder in lead nitrate solution were investigated by using XRD, SEM, cyclic voltammograms, and macro-elctrolysis. Results of XRD analysis ascertain that ${\beta}-PbO_2$ layers electrodeposited in the presence of sodium lauryl sulfate and $TiO_2$, powder on ${\alpha}-PbO_2/IrO_2-TiO_2/Ti$ substrate have the same tetragonal structure as pure ${\beta}-PbO_2$ layers. The SEM results show that sodium lauryl sulfate tend to diminish crystal size of the deposited layer. The ${\beta}-PbO_2$ electrode electrodeposited in the presence of sodium lauryl sulfate and $TiO_2$ powder gives significantly improved oxygen overvoltage and durability for anodic oxidation in KOH and $HClO_4$ supporting electrolyte. Electrode performance and durability for the evolution of ozone in perchloric acid solution have been investigated by using ${\beta}-PbO_2$ electrodes electrodeposited on Titanium $madras^{(R)}$. It was ascertained that the $PbO_2$ electrode electrodeposited on ${\alpha}-PbO_2/IrO_2-TiO_2/Ti$ $madras^{(R)}$ by adding sodium lauryl sulfate and $TiO_2$ powder in $HClO_4$ supporting electrolyte had the highest current efficiency and durability.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.24 no.2
• /
• pp.65-69
• /
• 2014

Crystallographic phases of Plasma electrolytic oxidized Al alloy, A1100, A5052, A6061, A6063, A7075, were investigated. Two types of electrolyte $Na_2Si_2O_3$ and Na2P2O7 were also compared. Bipolar pulse, $2000{\mu}sec$ with $400{\mu}sec+420V$ impulse and $300{\mu}sec$ - impulse were applied for 20 min. ${\alpha}-alumina$, ${\gamma}-alumina$, ${\eta}-alumina$, $Al_{4.95}Si_{1.05}O_{9.52}$, and $(Al_{0.9}Cr_{0.1})_2O_3$ were mainly observed. Si, component of electrolyte, were moved into the PEO layer by bipolar pulse. Glassy phase was also observed at the surface of $Na_2Si_2O_3$ electrolyte treated PEO layer, and increased with the Mg content of Al alloy. It is concluded that at first glassy phase was formed by the micro plasma, and the high temperature of plasma turns glassy phase to several crystalline phases. And we could expect that many other crystalline phase could be formed by PEO process.

• Korean Journal of Soil Science and Fertilizer
• /
• v.43 no.1
• /
• pp.68-74
• /
• 2010

Since ${NO_3}^-$ is amore favorable electron acceptor than Fe, high ${NO_3}^-$ loads function as a redox buffer limiting the reduction of Fe and following release of ${PO_4}^{3-}$ in flooded paddy soil. The effect ${NO_3}^-$ loaded through irrigation water on Fe reduction and ${PO_4}^{3-}$ release in paddy soil was investigated. Pot experiment was conducted where irrigation water containing 5 or 10 mg N $L^{-1}$ of ${NO_3}^-$ was continuously applied at 1 cm $day^{-1}$, and changes of ${NO_3}^-$, $Fe^{2+}$ and ${PO_4}^{3-}$ concentrations in soil solution at 5 and 10 cm depths beneath the soil surface were monitored as a function of time. Irrigation of rice paddy with water containing 5 mg N $L^{-1}$ of ${NO_3}^-$ led to reduced release of $Fe^{2+}$ and prevented solubilization of P at 5 cm depth beneath the soil surface. And application of irrigation water containing 10 mg N $L^{-1}$ of ${NO_3}^-$ could further suppress Fe reduction and solubilization of P through 10 cm depth soil layer beneath the surface. These results suggest that the introduction of high level ${NO_3}^-$ with irrigation water in rice paddy can strongly limit Fe reduction and P solubilization in root zone soil layer in addition to the excessive supply of N to rice plants.

• Transactions of the Korean hydrogen and new energy society
• /
• v.30 no.6
• /
• pp.523-530
• /
• 2019

For the low-Pt electrodes for polymer electrolyte fuel cells (PEMFCs), the optimization of ionomer content for anode catalyst layers was carried out. A commercial catalyst of 20 wt.% Pt/C was used instead of 50 wt.% Pt/C which is commonly used for PEMFCs. The ionomer content varies from 0.6 to 1.2 based on ionomer to carbon ratio (I/C) and the catalyst layer is formed over the electrolyte by the ultrasonic spray process. Evaluation of the prepared MEA in the unit cell showed that the optimal ionomer content of the air electrode was 0.8 on the I/C basis, while the hydrogen electrode was optimal at the relatively high ionomer content of 1.0. In addition, a large difference in cell performance was observed when the ionomer content of the hydrogen electrode was changed. Increasing the ionomer content from 0.6 to 1.0 by I/C in a hydrogen electrode with 0.05 mg/㎠ platinum loading resulted in more than double cell performance improvements on a 0.6 V. Through the analysis of various electrochemical properties in the single cell, it was assumed that the change in ionomer content of the hydrogen electrode affects the water flow between the hydrogen and air electrodes bounded by the membrane in the cell, which affects the overall performance of the cell. A more specific study will be carried out to understand the water flow mechanism in the future, and this study will show that the optimization process of hydrogen electrode can also be a very important cell design variable for the low-Pt and high-performance MEA.

• The Korean Journal of Ecology
• /
• v.28 no.2
• /
• pp.93-98
• /
• 2005

The effects of the presence of a submerged plant, Zizania latifolia, on physico-chemical characteristics, including Eh, pH, and concentrations of nitrogen and phosphorus in the sediments were studied under pot culture condition. It was shown that Eh value at reduced layer of the sediments was higher in the planted pots than in the non-planted. It was also revealed that $NH_4^+-N$ concentration of the sediments in the planted pots was lower than that of the non-planted, which might be due to the uptake by the plants. In contrast, $NO_3^--N$ concentration in the sediment increased in the presence of the plants compared to the non-planted, which might be attributed to oxygen released from the roots to the reduced layer. The concentration of organic phosphorus in the sediments was much higher than that of NAIP at the beginning of the planting experiment. However, at the end of the experiment, it was reversed; NAIP concentration was much higher than that of organic phosphorus, possibly indicating the transformation of organic phosphorus to NAIP during the experimental period. Both concentrations of $NH_4^+-N$ and $PO_4^{3-}-P$ in the overlying and percolated water were lower in the planted pots than in the non-planted. The concentration of $NO_3^--N$ in the percolated water, however, was higher in the planted pots than in the non-planted. The data was discussed with regard to the potential effects of a submerged plant on dynamics of phosphorus and nitrogen in the rhizosphere of the sediment.

• Journal of Korean Society of Environmental Engineers
• /
• v.38 no.6
• /
• pp.291-298
• /
• 2016

Electrochemical water treatment process as a useful treatment method for the removal of non-degradable matter has been consistently studied for several decades. Key process of electrochemical water treatment are oxidation reaction from an anode and reduction from a cathode. In this study, the effect of pre-treatment methods in the insoluble electrode manufacturing process for the water treatment has been evaluated for the life time of electrode The results of this study showed that pre-treatment methods of a base metal such as surface roughness, clean method and interlayer formation influenced to life time of electrode when the same condition (catalyst electrode layer coating method and material system) was applied for pre-treatment methods. This study was conducted by using $IrO_2/Ti$ electrode In the test of sand-blasting process, an electrode manufactured by using sanding media of different sizes resulted in the most effective electrode life time when the size of alumina was used for $212{\sim}180{\mu}m$ praticle size (#80). The most effective method was considered using arc plasma in the additional roughness control and cleaning process, sputtering method to form Ta type interlayer formation process.