• Title/Summary/Keyword: Oxidatio

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A Study on the Reduction of Bird's Beak in the LOCOS Process (LOCOS 공정에서 새부리 크기 감소를 위한 연구)

  • 이찬용;박상민;윤석범;오환술
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.27 no.1
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    • pp.91-95
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    • 1990
  • We study the process for the reduction of bird's beak at LOCOS processing with changing the representative coefficients, oxide thickness, silicon nitride thickness, oxidetion temperature and field oxide thickness that induced the condition of bird'beak. In order to eliminate the gate oxide defects induced by selective oxidation, we used additional sacrific oxidatio. Finally we obtained the length of bird's beak to be 5000\ulcornerby SEM.

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The effects of pile dup Ge-rich layer on the oxide growth of $Si_{1-x}Ge_{x}$/Si epitaxial layer (축적된 Ge층이 $Si_{1-x}Ge_{x}$/Si의 산화막 성장에 미치는 영향)

  • 신창호;강대석;박재우;송성해
    • Proceedings of the IEEK Conference
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    • 1998.06a
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    • pp.449-452
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    • 1998
  • We have studied the oxidatio nrte of $Si_{1-x}Ge_{x}$ epitaxial layer grown by MBE(molecular beam epitaxy). Oxidation were performed at 700.deg. C, 800.deg. C, 900.deg. C, and 1000.deg. C. After the oxidation, the results of AES(auger electron spectroscopy) showed that Ge was completely rejected out of the oxide and pile up at $SiO_{2}/$Si_{1-x}Ge_{x}$ interface. It is shown that the presence of Ge at the $SiO_{2}$/$Si_{1-x}Ge_{x}$ interface changes the dry oxidation rate. The dry oxidation rate was equal to that of pure Si regardless of Ge mole fraction at 700.deg. C and 800.deg.C, while it was decreased at both 900.deg. C and 1000.deg.C as the Ge mole fraction was increased. The ry oxidation rates were reduced for heavy Ge concentration, and large oxidation time. In the parabolic growth region of $Si_{1-x}Ge_{x}$ oxidation, The parabolic rate constant are decreased due to the presence of Ge-rich layer. After the longer oxidation at the 1000.deg.C, AES showed that Ge peak distribution at the $SiO_{2}$/$Si_{1-x}Ge_{x}$ interface reduced by interdiffusion of silicon and germanium.

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Electrochemical Oxidation of Ethanol at Nickel Hydroxide Electrodes in Alkaline Media Studied by Electrochemical Impedance Spectroscopy

  • Kim, Jae-Woo;Park, Su-Moon
    • Journal of the Korean Electrochemical Society
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    • v.8 no.3
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    • pp.117-124
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    • 2005
  • Electrochemical oxidation of ethanol at nickel electrodes has been studied in 1 M KOH solution containing 0.20M ethanol using electrochemical impedance spectroscopy. Equivalent circuits have been worked out by simulating the impedance data, and the results were used to model the oxidation of ethanol as well as the passivation of the electrode. The maximum rate of oxidation of $Ni(OH)_2$ to NiOOH was observed at about 0.37V vs. Ag/AgCl reference electrode, while the maximum rate of ethanol oxidation at the Ni electrode was observed at about 0.42V, The charge-transfer resistance for oxidation of the electrode itself became smaller in the presence of ethanol than in its absence. These results suggest that the $\beta-Ni(OH)_2/\beta-NiOOH$ redox couple is acting as an effective electron transfer mediator far ethanol oxidation. The kinetic parameters also were obtained by the experimental and simulated results.

A Study on the Improvement of Oxidation and Corrosion Resistance of Stainless Steel by Sol-Gel Ceramic Coating (II); Effect on Oxidation and Corrosion REsistance of $CeO_2$ Stabilized Zirconia Thin Film (졸-겔 세라믹 코팅에 의한 스테인레스강의 내산화 및 내식성 향상에 관한 연구 (II);$CeO_2$ 안정화 지르코니아 박막의 내산화 및 내식성 효과)

  • 이재호;우일기;김병호
    • Journal of the Korean Ceramic Society
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    • v.32 no.1
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    • pp.95-105
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    • 1995
  • Ceria(CeO2) stabilized zirconia(CeSZ) sol was synthesized with zirconium n-butoxide Zr(OC4H9)4 and cerium nitrate hexahydrate Ce(NO3)3.6H2O as precursors and ethylacetoacetate(EAcAc) as a chelating agent under atmosphere. CeSZ films were deposited on AISI 304 stainless steel using the prepared polymeric sol by dipcoating and the coating characteristics were investigated by XRD, ellipsometry, scratch test and SEM. The CeSZ film began to crystallize from amorphous to tetragonal phase at 40$0^{\circ}C$ and it was not converted into monoclinic phase up to 100$0^{\circ}C$ by the addition of 16mol% CeO2 as a stabilizer which could suppress phase transformation of zirconia. The CeSZ films were prepared by varying the EAcAc contents and the cncentration of CeSZ sol and measured the thickness and refractive index. From these results, it was found that the EAcAc contents and concentration of CeSZ coating sol evidently affect the densification of CeSZ film. The CeSZ film coated with 0.4M CeSZ sol and heat-treated at $600^{\circ}C$ for 10min had thickness of 50nm and 17% porosity. The CeSZ film on 304 stainless steel effectively acted as a protective layer against oxidation up to 80$0^{\circ}C$ and had superior corrosion resistance in 25% H2SO4 solution for 4.5 hrs.

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The embryological studies on the interspecific hybrid of ginseng plant (Panax ginseng x P. Quiuquefolium) with special references to the seed abortion (인삼의 종간잡종 Panax ginseng x P Quinquefoilium의 발생학적 연구 특히 결실불능의 원인에 관하여)

  • Jong-Kyu Hwang
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.5 no.1
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    • pp.69-86
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    • 1969
  • On the growing of the interspecific hybrid ginseng plant, the phenomena of hybrid vigoures are observed in the root, stem, and leaf, but it can not produce seeds favorably since the ovary is abortive in most cases in interspecific hybrid plants. The present investigation was undertaken in an attempt to elucidate the embryological dses of the seed failure in the interspecific hybrid of ginseng (Panax Ginseng ${\times}$ P. Quinque folium). And the results obtained may be summarized as follows. 1). The vegetative growth of the interspecific hybrid ginseng plant is normal or rather vigorous, but the generative growth is extremely obstructed. 2). Even though the generative growth is interrupted the normal development of ovary tissue of flower can be shown until the stage prior to meiosis. 3). The division of the male gameto-genetic cell and the female gameto-genetic cell are exceedingly irregular and some of them are constricted prior to meiosis. 4). At meiosis in the microspore mother cell of the interspecific hybrid, abnormal division is observed in that the univalent chromosome and chromosome bridge occure. And in most cases, metaphasic configuration is principally presented as 23 II+2I, though rarely 22II+4I is also found. 5). Through the process of microspore and pollen formation of F1, the various developmental phases occur even in an anther loclus. 6). Macro, micro and empty pollen grains occur and the functional pollen is very rare. 7). After the megaspore mother cell stage, the rate of ovule development is, on the whole, delayed but the ovary wall enlargement is nearly normal. 8). Degenerating phenomena of ovules occur from the megaspore mother cell stage to 8-nucleate embryo sac stage, and their beginning time of constricting shape is variously different. 9). The megaspore arrangement in the parent is principally of the linear type, though rarely the intermediate type is also observed, whereas various types, viz, linear, intermediate, Tshape, and I shape can be observed in hybrid. 10). After meiosis, three or five megaspore are some times counted. 11). Charazal end megaspore is generally functional in the parents, whereas, in F1, very rarely one of the center megaspores (the second of the third megaspore) grows as an embryo sac mother cell. 12). In accordance with the extent of irregularity or abnormality in meiosis, division of embryo sac nuclei and embryo sac formation cause more nucellus tissue to remain within th, embryo sac. 13). Even if one reached the stage of embryo sac formation, the embryo sac nuclei are always precarious and they can not be disposed to theil proper, respective position. 14). Within the embryo sac, which is lacking the endospermcell, the 4-celled proembryo, linear arrangement, is observed. 15). Through the above respects, the cause of sterile or seed failure of interspecific hybrid would be presumably as follows, By interspecific crossing gene reassortments takes place and the gene system influences the metabolism by the interference of certain enzyme as media. In the F1 plant, the quantity and quality of chemicals produced by the enzyme system and reaction system are entirely different from the case of the parents. Generally, in order to grow, form, and develop naw parts it is necessary to change the materials and energy with reasonable balance, whereas in the F1 plant the metabolic process becomes abnormal or irregular because of the breakdown of the balancing. Thus the changing of the gene-reaction system causes the alteration of the environmental condition of the gameto-genetic cells in the anther and ovule; the produced chemicals cause changes of oxidatio-reduction potential, PH value, protein denaturation and the polarity, etc. Then, the abnormal tissue growing in the ovule and emdryo sac, inhibition of normal development and storage of some chemicals, especially inhibitor, finally lead to sterility or seed failure. Inconclusion, we may presume that the first cause of sterile or seed abortion in interspecific hybrids is the gene reassortment, and the second is the irregularity of the metabolic system, storage of chemicals, especially inhibitor, the growth of abnormal tissue and the change of the polarity etc, and they finally lead to sexual defect, sterility and seed failure.

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