• Journal of Advanced Marine Engineering and Technology
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• v.28 no.7
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• pp.1159-1164
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• 2004

There is an Overhead Hoist Transport(OHT) for delivering the wafer in semiconductor processing. The transfer system is consists of carrier vehicle. rail, and support. OHTCMS(OHT Control and Management System) has to take the feature, such as the optimal control and integration with several OHT. In this paper, ESRA(Efficiency of Shortest - Route Algorithms) is proposed which can be transported optimal route and be prevented collision using the Floyd-Warshall algorithms. The proposed algorithm is verified through consecutive simulation for a long time.

• The KIPS Transactions:PartD
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• v.11D no.2
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• pp.461-470
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• 2004

As the semiconductor industrials change 200㎜-sized semiconductor wafer production process to 300㎜-sized one, it requires to develop the software for monitoring and simulating the robot which transfers a 300㎜-sized semiconductor wafer. Because such a software don't run at standalone but communicate MCS(Material Control System) and Its subsystem a robot, its architecture is very complex. Therefore, in order to develop such a software systematically, we must utilize an object-oriented development methodology. UML. This paper presents an UML process application developing the software for monitoring and simulating the robot which transfers a semiconductor wafer on the production process.

• KIPS Transactions on Computer and Communication Systems
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• v.10 no.7
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• pp.205-214
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• 2021

For smart manufacturing, most semiconductor sites utilize automated material handling systems(AMHS). As one of the AMHSs, the OHT control system(OCS) manages overhead hoist transports(OHT) that move along rails installed on the ceiling. This paper proposes a real-time scheduling system to efficiently allocate and control the OHTs in semiconductor logistics processes. The proposed system, as an independent subsystem within the OCS, is interconnected with the main subsystem of the OCS, so that it can be easily modified without the effect of other systems. To develop the system, we first identify the functional requirements of the semiconductor logistics process and classify several types of control scenarios of the OHTs. Next, based on SEMI(Semiconductor Equipment and Materials International) standard, we design sequence diagrams and interface messages between the subsystems. The developed system is interoperated with the OCS main subsystem and the database in real time and performs two major roles: 1) OHT dispatching and 2) pathfinding. Six integrated tests were carried out to verify the functions of the developed system. The system was normally operated on six basic scenarios and two exception scenarios and we proved that it is suitable for the mission planning of the OHTs.