• Journal of the Korean institute of surface engineering
• /
• v.23 no.4
• /
• pp.230-236
• /
• 1990

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.08a
• /
• pp.131-131
• /
• 2012

압전재료는 그 특성상 항공우주분야에서 활용범위가 넓어지고 있는데, 특히 진동제어 분야에 널리 이용되고 있다. 최근에는 위성카메라의 영상 품질개선을 위한 구동기(actuator) 연구도 진행 중이다. 그러나 위성체가 작동하는 우주환경인 고진공상태에서는 각 부품에서 발생할 수 있는 outgassing으로 인해 위성체가 오염되어 위성임무 실패를 초래할 수도 있다. 따라서 지상에서 위성체 부품에 대해 고온($60^{\circ}C$)과 고진공(5.0 E-03 Pa 이하)의 상태를 모사하여 오염물질을 제거함으로써 outgassing 발생을 막고, 오염근원을 검출할 수 있는 bacuum bake-out 시험이 필요수적이다. 압전체의 위성부품 활용성 연구를 위하여 bake-out 챔버를 이용하여 오염측정에 관한 연구를 수행하였다. Vacuum bake-out 시험시에는 TQCM을 사용하여 발생하는 오염물질의 방출률을 측정한다. 아울러, 압전체에 대한 시험 전후의 압전특성을 비교 분석하여 진공 및 온도 환경하에서의 특성 변화를 관찰하였다.

• Journal of the Korean Vacuum Society
• /
• v.1 no.1
• /
• pp.1-10
• /
• 1992

Three chemical precleaning methods-degreasing, electropolishing and acidic etching-suitable for stainless steel vacuum chamber have been studied and compared. The techniques used in evaluating and comparing the three treatments include Auger analysis and the measurement of the outgassing rate. The obtained outgassing rates (N2 equivalent) are 1.1 $\times$ 10-10torr l/s cm2 and 3.9 $\times$ 10-11torr l/s cm2 for degreasing electropolishing, and etching method, respectively, after 48 hours from the initial pumpdown at room temperature. A simple model is introduced to analyze the pumpdown curve. Some surface parameters, such as surface coverage, mean residence time, and desorption energy, are calculated from corresponding equations derived from this model.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2003.02a
• /
• pp.222-222
• /
• 2003

• Proceedings of the Korean Vacuum Society Conference
• /
• 2003.02a
• /
• pp.162-162
• /
• 2003

• Proceedings of the Korean Vacuum Society Conference
• /
• 2002.02a
• /
• pp.196-196
• /
• 2002

• Journal of the Korean Vacuum Society
• /
• v.6 no.4
• /
• pp.298-307
• /
• 1997

TDS(Thermal Desorption Spectroscopy)system, for diagnosis of CRT manufacturing process, was designed and constructed. Outgassings and thermal desorptions from the part or materials of CRT can be measured and analysed with this system at various temperatures. The system is consisted of 3 parts, vacuum chamber and pumping system with variable conductance, sample heating stages & their controller, and outgassing measurement devices, like as ion gauge or quadrupole mass spectrometer. The ultimate pressure of the system was under $1{\times}10^{-7}$ Pa. With the variable conductance system, the effective pumping speed of the chamber could be controlled from sub l/s to 100 l/s. The effective pumping speed values were determined by dynamic flow measurement principle. The temperatures and ramp rate of sample were controlled by tungsten heater and PID controller up to 600℃ within ±1℃ difference to setting value. Ion gauge & QMS were calibrated for quantitative measurements. Some examples of TDS measurement data and application on the CRT process analysis were shown.

• Progress in Superconductivity and Cryogenics
• /
• v.24 no.4
• /
• pp.65-70
• /
• 2022

A vacuum system is designed for thermal insulation of a 10 ton/day class air liquefaction cold box for liquid air energy storage. The vacuum system is composed of a turbomolecular pump, a backing pump and vacuum piping for the vacuum pumps. The turbomolecular pump is in combination with the backing pump for pumping capacity. The vacuum piping is designed with system installation conditions, such as distance from the cold box, connections to vacuum pumps and installation space. The capacity of the vacuum pump combination, namely pumping speed, is determined by analysis of the vacuum system, and pump-down time to 1×10^-5 mbar is estimated. Vacuum piping conductance, system pumping speed and outgassing rate are calculated for the pump-down time with the ultimate pumping speed range of the vacuum pump combination of 1400 - 2300 l/s. Although the pump-down time gets shorter by larger capacity vacuum pumps, it mainly depends on target vacuum degree and outgassing rate in the cold box. The pump-down time is estimated as 3 - 6 hours appropriate for cold box operation for the pumping speed range. Considering the outgassing rate has uncertainty, the vacuum pump combination with pumping speed of 1900 l/s is chosen for the vacuum system, which is middle value of the pumping speed range.

• Journal of the Korean Vacuum Society
• /
• v.10 no.3
• /
• pp.298-302
• /
• 2001

Cleaning effect of RF/DC discharge to clean the surface of vacuum chamber was studied for various discharge conditions. Glow discharge cleaning without baking reduced the outgassing rate to 1/2, which was similar to that after the only baking treatment alone. Glow discharge cleaning treatment with baking improved the cleaning efficiency and then the outgassing rate was remarkably reduced to 1/20. It was found that the ion energy and the ion density were important factors in cleaning the surface. RF discharge cleaning was more effective than BC discharge cleaning.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.23 no.5
• /
• pp.29-35
• /
• 2009

Field emission displays(FED) are currently being study as a potential flat technology. The purpose of this project shows the research result of vacuum packaging technology for the development of FED. For FED vacuum packaging, the bonding of glass/glass, the exhaust of vacuum and getter technology have been studied for vacuum packaging technology The simulation and vacuum sealing, and glass/glass bonding are also extensively studied. The glass/glass bonding is formed by using the frit glass and the Inside pressure of complete panel showed of $2{\times}10^{-5}$[Torr]. As a getter result, the increase of pressure has been showed the decrease of outgassing effect by using thin film getter.