반도체 클린룸용 증기가습 및 수분무가습 외기공조시스템의 에너지소비량 평가 (An Assessment of Energy Consumption in Steam-Humidification- and Water-Spray-Humidification-Type Outdoor Air Conditioning Systems for Semiconductor Manufacturing Clean Rooms)
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- 설비공학논문집
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- 제25권2호
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- pp.55-63
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- 2013