• Title/Summary/Keyword: Out Layer Removal

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Method of Ga removal from a specimen on a microelectromechanical system-based chip for in-situ transmission electron microscopy

  • Yena Kwon;Byeong-Seon An;Yeon-Ju Shin;Cheol-Woong Yang
    • Applied Microscopy
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    • v.50
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    • pp.22.1-22.6
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    • 2020
  • In-situ transmission electron microscopy (TEM) holders that employ a chip-type specimen stage have been widely utilized in recent years. The specimen on the microelectromechanical system (MEMS)-based chip is commonly prepared by focused ion beam (FIB) milling and ex-situ lift-out (EXLO). However, the FIB-milled thin-foil specimens are inevitably contaminated with Ga+ ions. When these specimens are heated for real time observation, the Ga+ ions influence the reaction or aggregate in the protection layer. An effective method of removing the Ga residue by Ar+ ion milling within FIB system was explored in this study. However, the Ga residue remained in the thin-foil specimen that was extracted by EXLO from the trench after the conduct of Ar+ ion milling. To address this drawback, the thin-foil specimen was attached to an FIB lift-out grid, subjected to Ar+ ion milling, and subsequently transferred to an MEMS-based chip by EXLO. The removal of the Ga residue was confirmed by energy dispersive spectroscopy.

Additive Fabrication of Patterned Multi-Layered Thin Films of Ta2O5 and CdS on ITO Using Microcontact Printing Technique

  • Lee, Jong-Hyeon;Woo, Soo-Yeun;Kwon, Young-Uk;Jung, Duk-Young
    • Bulletin of the Korean Chemical Society
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    • v.24 no.2
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    • pp.183-188
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    • 2003
  • The micro-patterning of multi-layered thin films containing CdS and $Ta_2O_5$ layers on ITO substrate with various structures was successfully obtained by combining three different techniques: chemical solution depositions, sol-gel, and microcontact printing (μCP) methods using octadecyltrichlorosilane (OTS) as the organic thin layer template. $Ta_2O_5$ layer was prepared by sol-gel casting and CdS one obtained by chemical solution deposition, respectively. Parallel and cross patterns of multi-layers with $Ta_2O_5$ and CdS films were fabricated additively by successive removal of OTS layer pre-formed. This study presents the designed architectures consisting of the two types of feature having horizontal dimensions of 170 ㎛ and 340 ㎛ with constant thickness ca. 150 nm of each deposited materials. The thin film lay-out of the cross-patterning is composed of four regions with chemically different layer compositions, which are confirmed by Auger electron microanalysis.

Assessment Corrosion and Bioactive Behavior of Bioglass Coating on Co-Cr-Mo Alloy By Electrophoretic Deposition For Biomedical Applications

  • Areege K. Abed;Ali. M. Mustafa;Ali M. Resen
    • Corrosion Science and Technology
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    • v.23 no.3
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    • pp.179-194
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    • 2024
  • A layer-by-layer coating was produced using electrophoretic deposition for a HA/Al2O3 coating layer and a bioglass coating layer on Co-Cr-Mo alloy with a roughness of 0.5 ㎛ (400 emery paper SiC). The corrosion behaviour was analyzed by assessing the coating layers' exceptional corrosion resistance, which outperformed the substrate. Cr ion release test using AAS was carried out, indicating that factional graded coating inhibited ion release from the uncoated substrate to coated sample. The porosity was expressed as a percentage, representing the extent of imperfections on the surface of all coatings. These imperfections fell within an acceptable range of 1% to 3%. The roughness of the coated surface was measured using atomic force microscopy, which revealed an excellent roughness value of 3.32 nm. Tape test technique for adhesion revealed that the removal area of the substrate coating layer varied by 11.92%. X-ray diffraction analysis confirmed the presence of all coating material peaks and verified phases of the deposited coating layers. These findings provided evidence that the coating composition remains unaffected by the electrophoretic deposition process. The bioactivity was assessed by immersion in a simulated bodily fluid, which revealed the formation of HCA during a period of 5 days.

Survey of underwater deposits using ground penetrating radar (지표레이다 (GPR) 탐사에 의한 하상퇴적물 조사)

  • Chang, Hyun-Sam;Jeong, Seong-Tae
    • 한국지구물리탐사학회:학술대회논문집
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    • 2002.09a
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    • pp.163-178
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    • 2002
  • Investigation of underwater sedimentary layers has been carried out with GPR (Ground Penetration Radar) survey. GPR survey has been proved to be very satisfactory since the target area has shallow water depth of about 2.5 m, is lake with no water flow, and the thickness of mud layer, which is a main survey target, is relatively thin. The results clearly showed the underwater sedimentary layers, which includes mud, sand, gravel and basement layer. Specially, the distribution and total amount of mud layers from the survey, which is main target of removal, can be used as a basic data for the dredging of mud layer in the area.

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Fabrication of Ti/Ir-Ru electrode by spin coating method for electrochemical removal of copper

  • Kim, Joohyun;Bae, Sungjun
    • Environmental Engineering Research
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    • v.24 no.4
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    • pp.646-653
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    • 2019
  • Recovery of valuable metals in the industrial wastewater and sludge has attracted an attention owing to limited metallic resources in the earth. In this study, we firstly fabricated Ti/Ir-Ru electrodes by spin coating technique for effective recovery of Cu in electrowinning process. Two different Ti/Ir-Ru electrodes were fabricated using 100 and 500 mM of precursors (i.e., Ir-Ru). SEM-EDX and AFM revealed that Ir and Ru were homogenously distributed on the surface of Ti plate by the spin coating, in particular the electrode prepared by 500 mM showed distinct boundary line between Ir-Ru layer and Ti substrate. XRD, XPS, and cyclic voltammetry also revealed that characteristics of IrO2, RuO2, and TiO2 and its electrocatalytic property increased as the concentration of coating precursor increased. Finally, we carried out Cu recovery experiments using two Ti/Ir-Ru as anodes in electrowinning process, showing that both anodes showed a complete removal of Cu (1 and 10 g/L) within 6 h reaction, but much higher kinetic rate constant was obtained by the anode prepared by 500 mM. The findings in this study can provide a fundamental knowledge for surface characteristics of Ti/Ir-Ru electrode prepared by spin coating method and its potential feasibility for effective electrowinning process.

Weldability Increase of Aluminum by Variable Polarity Arc (가변 극성 아크의 알루미늄 용접성 향상에 관한 연구)

  • Cho, Jungho
    • Journal of Welding and Joining
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    • v.32 no.1
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    • pp.108-111
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    • 2014
  • Low arc weldability of aluminum alloy is enhanced by applying variable polarity TIG and the result is theoretically investigated to figure out the mechanism. Conventionally, it is well known fact that DCEP (reverse polarity) arc is effective on aluminum welding. The reason is due to oxide layer removal by plasma ion bombardment and therefore it is named as cleaning effect. Another fact of polarity characteristic is that DCEN shows higher heat input efficiency therefore conventional variable polarity arc used to apply DCEP portion as small as possible. However, higher DCEP portion shows bigger weldment in this research and it is explained by adopting a theory of arc concentration on oxide layer with tunneling effect which was not clearly mentioned before in several variable polarity TIG welding research. Disagreement between variable polarity TIG welding result and conventional arc polarity theory is rationally explained for the first time with help of electron emission theory.

ADHESION STUDIES OF MAGNETRON-SPUTTERED COPPER FILMS ON INCONEL SUBSTRATES

  • Lee, G.H.;Kwon, S.C.;Lee, S.Y.
    • Journal of the Korean institute of surface engineering
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    • v.32 no.3
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    • pp.410-415
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    • 1999
  • The adhesion strength of sputtered copper films to Inconel substrates has been studied using the scratch test. The effects of substrate treatments before deposition such as chemical or ion bombardment etching were investigated by means of a mean critical load derived from a Weibull-like statistical analysis. It was found that the mean critical load was very weak unless the amorphous layer produced by mechanical polishing on the substrate surface was eliminated. Chemical etching in a nitric-hydrochloric acid bath was shown to have practically no effect on the enhancement of the adhesion. In contrast, the addition in this bath of nickel and copper sulphates allowed removal of the amorphous layer and an increase in the values of the mean critical load. However, it was observed that excessive chemical etching could cancel out the mean critical load enhancement. The results obtained in the case of ion bombardment etching pretreatments could be far higher than those obtained with chemical etching. Moreover, for a sufficiently long period of ion bombardment etching, the adhesion strength was so high that it was impossible to observe evidence of an adhesion failure.

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Electrochemical Polarization Characteristics and Effect of the CMP Performances of Tungsten and Titanium Film by H2O2 Oxidizer (H2O2 산화제가 W/Ti 박막의 전기화학적 분극특성 및 CMP 성능에 미치는 영향)

  • Na, Eun-Young;Seo, Yong-Jin;Lee, Woo-Sun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.6
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    • pp.515-520
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    • 2005
  • CMP(chemical mechanical polishing) process has been attracted as an essential technology of multi-level interconnection. Also CMP process got into key process for global planarization in the chip manufacturing process. In this study, potentiodynamic polarization was carried out to investigate the influences of $H_2O_2$ concentration and metal oxide formation through the passivation on tungsten and titanium. Fortunately, the electrochemical behaviors of tungsten and titanium are similar, an one may expect. As an experimental result, electrochemical corrosion of the $5\;vol\%\;H_2O_2$ concentration of tungsten and titanium films was higher than the other concentrations. According to the analysis, the oxidation state and microstructure of surface layer were strongly influenced by different oxidizer concentration. Moreover, the oxidation kinetics and resulting chemical state of oxide layer played critical roles in determining the overall CMP performance. Therefore, we conclude that the CMP characteristics tungsten and titanium metal layer including surface roughness were strongly dependent on the amounts of hydrogen peroxide oxidizer.

A Case of Using Hominis Placenta and Soyeom Mixed Pharmacopuncture to Remove Melanocytic Nevus

  • Seo, Hyung-Sik
    • Journal of Pharmacopuncture
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    • v.21 no.1
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    • pp.14-17
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    • 2018
  • Objective: It has been attempted to find out that Homine Placents and Soyeom mixed Pharmacopuncture (HSP) procedure is effective for the removal of melanocytic nevus of considerable size which cannot be applied to general acupuncture. Methods: Hominis placenta (0.5ml) and Soyeom (0.5ml) mixed pharmacopuncture (1.0ml) was subcutaneously injected in several places of melanocytic nevus. The treatment was performed about 20 times, once a week. Layer analysis of pigmentation was carried out using ECOSKIN. Results: One year after the HSP procedure, the pigmentation of the melanocytic nevus was slightly reduced and completely removed after 2 years of procedure. Conclusion: The HSP could be effective for removing hyperpigmentation in the melanocytic nevus.

Desalination of Brackish Water by Capacitive Deionization System Combined with Ion-exchange Membrane (이온교환막을 결합한 축전식 탈염 시스템을 이용한 염수의 탈염)

  • Kim, Yu-Jin;Choi, Jae-Hwan
    • Applied Chemistry for Engineering
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    • v.21 no.1
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    • pp.87-92
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    • 2010
  • Desalination experiments were carried out with two types of cell configuration; a CDI cell constructed with carbon electrodes only and a membrane capacitive deionization (MCDI) cell having a cation-exchange membrane on the cathode surface. The salt removal rate and desalination efficiencies increased linearly with increasing the cell potential. Although the same carbon electrodes were used in the desalination experiments, the MCDI cell showed higher salt removal efficiency than that of the CDI cell. The amount of salt removal for the MCDI cell was enhanced by 33.1~135% compared to the CDI cell, depending on the applied cell potential in the range of 0.8~1.2 V. In addition, the current efficiency for the MCDI cell was about 80%, whereas the efficiency was under 40% for the CDI cell. The higher salt removal efficiency in the MCDI cell was attributed to the fact that ions were selectively transported between the electric double layer and the bulk solution in the MCDI cell configuration.