• Title/Summary/Keyword: Original material

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Effect of Pad Surface Characteristics on Within Wafer Non-uniformity in CMP (연마불균일도에 영향을 미치는 패드 표면특성에 관한 연구)

  • Park, Ki-Hyun;Park, Boum-Young;Kim, Hyoung-Jae;Jeong, Hae-Do
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.4
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    • pp.309-313
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    • 2006
  • Pad surface characteristics such as roughness, groove and wear rate of pad have a effect on the within wafer non-uniformity(WIWNU) in chemical mechanical polishing(CMP). Although WIWNU increases as the uniformity of roughness(Rpk: Reduced peak height) becomes worse in an early stage of polishing time, WIWNU decreases as non-uniformity of the Rpk value. Also, WIWNU decreases with the reduction of the pad stiffness, though original mechanical properties of pad are unchanged by the grooving process. In addition, conditioning process causes the inequality of pad wear during in CMP. The profile of pad wear generated by the conditioning process has a significant effect on the WIWNU. These experiments results could help to understand the effect of pad surface characteristics in CMP.

A Study on Life Estimate of Insulation Cable for Image Processing of Electrical Tree (전기트리의 영상처리를 이용한 절연케이블의 수명예측에 관한 연구)

  • 정기봉;김형균;김창석;최창주;오무송;김태성
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.319-322
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    • 2001
  • The proposed system was composed of pre-processor which was executing binary/high-pass filtering and post-processor which ranged from statistic data to prediction. In post-processor work, step one was filter process of image, step two was image recognition, and step three was destruction degree/time prediction. After these processing, we could predict image of the last destruction timestamp. This research was produced variation value according to growth of tree pattern. This result showed improved correction, when this research was applied image Processing. Pre-processing step of original image had good result binary work after high pass- filter execution. In the case of using partial discharge of the image, our research could predict the last destruction timestamp. By means of experimental data, this Prediction system was acquired ${\pm}$3.2% error range.

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Fine YBaCuO Powder Prepared by Sol-gel Method

  • Soh, Deawha;Li, Fenghua;Wang, Jue;Fan, Zhanguo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07a
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    • pp.470-473
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    • 2002
  • In order to get proper original suspension for the electrophoresis process of making YBaCuO films, YBaCuO superconductor powder was prepared with the Sol-gel method. The composition of the powder was analyzed by X-ray diffraction, which was identified as YBa$_2$Cu$_3$O$\sub$7-x/(Yl23) phase. The form of YBaCuO single particle was showed to be spherical by scanning electronic microscope and its size was among 0.2-1 $\mu\textrm{m}$. The critical transition temperature (T$\sub$c/) and the critical current density (J$\sub$c/) were measured with the four-probe, method. The T$\sub$c/ was about 91 K, and the J$\sub$c/ was 5-30 A/$\textrm{cm}^2$.

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Humidity effects on surface resistivities in PE and PP mixtures (PE 및 PP혼합 재료의 표면저항에 미치는 습도효과)

  • 강전홍;유황민;김한준;한상옥;김종석
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07a
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    • pp.424-426
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    • 2002
  • The surface and volume resistivity in the polymers, PE(polyethylene) and PP(polypropylene) mixtures are tested and measured by the ASTM D257(KS M3015) standard. Humidity effects on surface and volume resistivity in two polymers have been studied qualitatively at room temperature. The results of resistivity in these polymers show that the values of surface resistivity (and volume resistivity) at the humidity of 90% are remarkably small compared with those at the humidity of 50%, independing on applied voltage. When we varied the humidity in two polymers, it was found to takes many hours to recover into original surface resistivity (and volume resistivity) of these polymers.

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Observation of SWCNT Stretching in homogeneously aligned nematic liquid Crystal medium (수평 배향된 양의 액정 내에서의 단일벽 탄소 나노튜브 Stretching 관찰)

  • Yang, Gyu-Hyung;Kang, Byeong-Gyun;Lee, Seung-Hee;Lee, Kyu;Lee, Young-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.170-170
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    • 2010
  • In this paper, we observed stretching of single-wall carbon nanotubes (SWCNTs) aggregates driven by the in-plane field in a homogeneously aligned nematic liquid crystal (LC) medium. Aggregates of SWCNTs started to stretch above the 0.5 V/${\mu}m$ and stretched up to $1.83\;{\mu}m$ from original size with $0.74\;{\mu}m$ at 3.5 V/${\mu}m$.

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Damping Characteristic of Silicone Rubber-Filled Honeycomb Sandwich Composite (Silicone Rubber-Filled 허니콤 샌드위치 복합재료의 댐핑 특성)

  • Joe Chee-Ryong;Hao Huang;Kim Dong-Uk
    • Proceedings of the Korean Society For Composite Materials Conference
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    • 2004.10a
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    • pp.290-293
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    • 2004
  • In this paper a new sandwich composite is developed by injection silicone rubber into the honeycomb core. This composite material is designed to have a improved damping performance. For verification damping tests were conducted to the specimens with different stacked USNl25 carbon/epoxy prepreg laminate facesheets, $[0/90]_{4s},\;[0/45-45/90]_{2s},\;[45/-45]_{4s}$. Frequency response, displacement response and damping ratio were checked and compared for the both groups of specimens, with and without rubber fillings. The experimental results provided a good agreement with our original material design concept.

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A preliminary research on improving track material components for increasing train speed on conventional lines (기존선 속도향상을 위한 궤도재료 개선에 관한 기초 연구)

  • Won, Yong-Hoan;Kim, Kwan-Hyung;Kim, Soon-Cheol;Ku, Su-Hwan
    • Proceedings of the KSR Conference
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    • 2007.05a
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    • pp.456-460
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    • 2007
  • The original conventional railway was designed to be stand against 150km/h and it is still being operated at the present. However, if the speed of train is improved up to 200km/h in the near future in order to get competitiveness, we examined how the speed effect on the rail and we analyzed the effect of vibration, the stress and the displacement of the rail material by the change of the speed and the change of the property of matter through the hydrostatical and the dynamic analysis about the absence of the rail. As the result of the analysis by the above method, we got the prove that the best synthetic hardness of the rail is $75{\pm}10KN/mm$. Therefore, it is proved that rail pad has to be improved.

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유한요소법을 이용한 전방압출공정의 내부결함에 관한 연구

  • 김태형;김병민;강범수;최재한
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1992.04a
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    • pp.79-83
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    • 1992
  • According to the variation of hydrostatic pressure on the central axis of deformable material, the V-shaped central bursting defect may be created on extrusion or drawing processes. The process factors whichaffect the generation of defects are die semi-angle, reduction ratio of cross-sectional area, friction factor, material properties and so on. The combination of these factors can determine the prossibility of defect creation and the shape of various round holes which have been created inside already. By the rigid plastic finite element method, this paper describes the observations of change in shape of a round hole with process conditions suchas die semi-angle, reduction ratio of cross-sectional area and friction factorat the unsteady state of axi-symmetrical extrusion process when the round hole is alreadyexisted inside the original billet, and also, the effects of process factors are investigated to prevent the possible defects.

Insulation Life Estimation for Magnet Wire Under Inverter Surge and Temperature Stress (인버터 서지와 온도 스트레스 하에서 Magnet Wire 절연 수명평가)

  • Park, Jae-Jun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.29 no.10
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    • pp.641-646
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    • 2016
  • Coil specimen was prepared by coating a copper wire with two varnish thin layers: the first was polyamideimide (PAI)/nanosilica (5 wt%) varnish and the second was anti-corona PAI/nanosilica (15 wt%) varnish. Insulation breakdown voltage was investigated under inverter surge condition at $20^{\circ}C$, $70^{\circ}C$, $100^{\circ}C$, $150^{\circ}C$, $200^{\circ}C$, $250^{\circ}C$, respectively. The insulation lifetime of the two layered coil was tens of times longer than that of original PAI coil. And the insulation lifetime decreased with increasing ambient temperature because there was weak binding strength between copper and varnish layer.

Structural Analysis of Boiler Module for Sea-Transportation (해상 운송을 위한 보일러 모듈의 구조 해석)

  • Jeon, Y.C.;Kim, T.W.;Jeong, D.G.
    • Proceedings of the KSME Conference
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    • 2001.06a
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    • pp.788-793
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    • 2001
  • Finite element analysis was carried out to investigate the integrity and reliability of boiler module during sea transportation. The boiler module was supported by steel structure to relieve the instantaneous shock from oceanic wave and its primary parts were strengthened with several reinforcements. Finned tube walls which were used in the furnace wall were assumed as orthotropic plates having equivalent material properties. The bank tubes were also equivalently modeled in accordance with ASME B31.1 for the convenience of finite element modeling. The calculation results were compared with the yield stress of the material. In particular, the bank tube stress, which was evaluated by converting the calculated stresses in equivalent tubes into those in original tubes by using the ratio of diameter, was also examined with yield stress.

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