• 제목/요약/키워드: Orientation ratio (O.R.)

검색결과 11건 처리시간 0.025초

FTS법으로 제작한 ZnO/AZO 박막의 결정학적 특성 (Crystallographic Properties of ZnO/AZO thin Film Prepared by FTS method)

  • 금민종;강태영;최형욱;박용서;김경환
    • 한국전기전자재료학회논문지
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    • 제17권9호
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    • pp.979-982
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    • 2004
  • The ZnO thin films were prepared by the FTS (facing target sputtering) system, which enables to provide high density plasma and a high deposition rate at a low working gas pressure. We introduced the AZO thin film in order to improve the crystallographic properties of ZnO thin film because of the AZO(ZnO:Al) thin film has an equal crystal structure to the ZnO thin film. ZnO/AZO thin films were deposited at a different oxygen gas flow ratio, R.T. 2mTorr working pressure and a 0.8A sputtering current. The film thickness and c-axis preferred orientation of ZnO/AZO/glass thin films were measured by ${\alpha}$-step and an x-ray diffraction (XRD) instrument. In the results, we could prepare the ZnO thin film with c-axis preferred orientation of about 6$^{\circ}$ on substrate temperature R.T. at O$_2$ gas flo rate 0.5.

초음파 분산에 의한 수직자기기록용 Ba-ferrite의 자기적 특성 향상 (Enhancement for Magnetic Property of Ba-ferrite for Perpendicular Magnetic Recording Using Ultrasonic Dispersion)

  • 최현승;김창곤;장학진;정지형;윤석영;김태옥
    • 한국세라믹학회지
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    • 제39권8호
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    • pp.758-763
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    • 2002
  • 초음파 에너지(28 kHz, 40 kHz, 70 kHz)를 사용하여 수직자기기록용 Ba-ferrite의 자기적 특성 향상에 대하여 조사하였다. 한편, 분산된 Ba-ferrite를 sheet에 수직으로 배향시키기 위해 다양한 형태의 배향기들을 사용하여 실험을 행하였다. Ba-ferrite가 도포된 sheet 중 초음파 에너지가 40 kHz이고 초음파 처리 시간이 2시간에서 자기적 특성인 S. Q. (Squareness Ratio)와 O. R. (Orientation Ratio)값이 각각 0.7831과 2.87로 비교적 좋은 값을 얻을 수 있었다. 이때 얻어진 sheet의 표면 형상을 SEM(Scanning Electron Microscopy)으로 분석한 결과 Ba-ferrite가 자화용이축인 c 축에 수직방향으로 배향되어 수직자기기록용으로서의 응용에 가능성을 보였다. 또한, VSM(Vibrating Sample Magnetometer)으로 자기장의 각도변화에 따른 S. Q.의 측정시, 자기장의 각도가 증가함에 따라 S. Q. 값이 감소하였고 이는 수직자기기록용으로써 가능성을 재확인 시켜주었다.

Cosputtering법으로 증착한 ZnO박막의 Al도핑농도가 미세구조 및 물리적 특성에 끼치는 효과 (Effects of Al Doping Concentration on the Microstructure and Physical Properties of ZnO Thin Films Deposited by Cosputtering)

  • 임근빈;이종무
    • 한국재료학회지
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    • 제15권9호
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    • pp.604-607
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    • 2005
  • Dependence of the crystallinity, surface roughness, carrier concentration, carrier mobility, electrical resistivity and transmittance of Al-doped ZnO films deposited on glass substrates by RF-magnetron sputtering on effects of the ratio of the RF power for AlZnO to that for ZnO (R) have been investigated. X-ray diffraction spectra show strong preferred orientation along the c-axis. The full width at half maximum (FWHM) of the ZnO (002) peak decreases slightly as R increases in the range of R<1.0, whereas it increases substantially in the range of R>1.0. Scanning electron micrographs (SEM) show that the ZnO film surface becomes coarse as R increases. The carrier concentration and the carrier mobility in the ZnO thin film are maximal for R=1.5 and 1.0, respectively. The electrical resistivity is minimal for R=1.0 The transmittance of the ZnO:Al film tends to increase, but to decrease slightly in the range of R>0.5. It may be concluded that the optimum R value is 1.0, considering all these analysis results. The cause of the changes in the structure and physical properties of ZnO thin films with R are also discussed.

$CeO_2$박막의 결정성 및 전기적 특성에 미치는 sputtering시 산소분압비의 영향 (Effects of oxygen partial pressure during sputtering on texture and electrical properties of $CeO_2$ thin films)

    • 한국진공학회지
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    • 제10권1호
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    • pp.51-56
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    • 2001
  • MFISFET(Metal-ferroelectric-insulator-semiconductor-field effect transistor)에의 적용을 위한 절연체로서 CeO$_2$ 박막을 r.f. magnetron sputtering법에 의해 제조하였다. 스퍼터링시 증착개스는 Ar과 $O_2$를 사용하였으며 산소분압비에 따른 $CeO_2$박막의 결정성 및 전기적 특성에 미치는 영향을 평가하였다. p형-Si(100)기판 위에 $600^{\circ}C$에서 증착된 $CeO_2$ 박막들은(200)방향으로 우선방향성을 가지고 성장하였으며 Ar만으로 증착된 박막의 우선방향성은 증가하였으나 상대적으로 많은 하전입자와 표면 거칠기로 인해 C-V특성에서 큰 이력특성을 보였고 산소분압비가 증가함에 따라 양호한 특성을 보였다. 이것은 이동가능한 이온전하의 감소에 기인한다고 할 수 있다. Ce:O의 비는 모든 박막에서 1:2.22~2.42를 보여 산소과잉의 조성을 나타냈으며 산소분압비에 따라 제조된 박막들의 누설전류값은 100 kV/cm의 전계에서 $10^{-7}$~$10^{-8}$A의 차수를 보였다.

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자기테이프용 Metal Powder의 초음파 분산에 의한 자기적 특성 향상에 관한 연구 (Study on Magnetic Property Enhancement of Metal Powders for Magnetic Tape by Using Ultrasonic Dispersion)

  • 김창곤;최현승;장학진;윤석영;김태옥
    • 한국재료학회지
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    • 제11권11호
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    • pp.972-977
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    • 2001
  • It was investigated the effect of ultrasonic treatment on magnetic property of ultra fine magnetic Fe powders ($\alpha$-Fe) for magnetic tape. The properties were characterized with vibrating sample magnetometer (VSM), particle size analyzer (PSA) and scanning electron microscope (SEM). At 4hours ultrasonic treatment of 70 kHz, magnetic properties such as squareness ratio (S.Q. : 0.8868), orientation ratio (O.R. : 2.45) and switching field distribution (S.F. D. : 0.394) before taping were relatively enhanced. Cumulative particle size distribution of less than 5$\mu\textrm{m}$ fine powder was above 90% below 1 hour leaving time after ultrasonic treatment and it was supposed that ultrasonic treatment prevent aggregation. The magnetic values of S.Q. and S.F.D. of tape manufactured at 70 kHz and 4hour ultrasonic treatment were improved from 0.7747, 0.3818 to 0.8037, 0.3706, respectively. Electro-magnetic property used as in-output signal characteristic was improved, which showed that ultrasonic treatment developed the magnetic properties.

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절연층인 CeO$_2$박막의 제조 및 Pt/$SrBi_2$$Ta_2$$O_9$/$CeO_24/Si MFISFET 구조의 전기적 특성 (Preparation of CeO$_2$ Thin Films as an Insulation Layer and Electrical Properties of Pt/$SrBi_2$$Ta_2$$O_9$/$CeO_24/Si MFISFET)

  • 박상식
    • 한국재료학회지
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    • 제10권12호
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    • pp.807-811
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    • 2000
  • MFISFET (Metal-ferroelectric-nsulator-semiconductor-field effect transistor)에의 적용을 위해 CeO$_2$와 SrBi$_2$Ta$_2$O$_{9}$ 박막을 각각 r.f. sputtering 및 pulsed laser ablation법으로 제조하였다. CeO$_2$ 박막은 증착시 스퍼터링개스비 (Ar:O$_2$)에 따른 특성을 고찰하였다. Si(100) 기판 위에 $700^{\circ}C$에서 증착된 CeO$_2$ 박막들은 (200)방향으로 우선방향성을 가지고 성장하였고 $O_2$ 개스량이 증가함에 따라 박막의 우선방향성, 결정립도 및 표면거칠기는 감소하였다. C-V특성에서는 Ar:O$_2$가 1 : 1인 조건에서 제조된 박막이 가장 양호한 특성을 보였다. 제조된 박막들의 누설전류값은 100kV/cm의 전계에서 $10^{-7}$ ~$10^{-8}$ A의 차수를 보였다. CeO$_2$/Si 기판위에 성장된 SBT는 다결정질상의 치밀한 구조를 가지고 성장을 하였다 80$0^{\circ}C$에서 열처리된 SBT박막으로 구성된 MFIS구조의 C-V 특성에서 memory window 폭은 0.9V를 보였으며 5V에서 4$\times$$10^{-7}$ A/$\textrm{cm}^2$의 누설전류밀도를 보였다.

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성 pheromone에 의한 이화명나방의 교미교란에 관한 연구 (Field Study on Mating Confusion of Synthetic Sex Pheromone in the Striped Rice Borer, Chilo suppressalis (Lepidoptera: Pyralidae))

  • 이정운;박중수;고현관;김정한;전종갑
    • 한국응용곤충학회지
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    • 제20권1호
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    • pp.25-30
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    • 1981
  • 성 pheromone을 이용한 이화명나방의 교미교란효과를 구명하고저 합성 성 pheromone, (Z)-11-hexadecenal과 (Z)-13-octadecenal을 4,5 : 1로 공시하여 본 시험을 야외에서 수행한 결과 1화기에는 30a당 합성성 pheromone 29.3g 처리한 구에서 $90.4\%$의 교미교란효과가 인정되었고 2화기에는 $20m^2$당 합성 성 pheromone 33mg 처리까지도 교란효과가 있었다.

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Travelin Solvent Floating Zone법에 의한 LaAlO$_3$ 단결정의 성장 및 특성 (Growth and Characterization of LaAlO$_3$ Single Crystals by the Traveling Solvent Floating Zone Method)

  • 정일형;임창성;오근호
    • 한국세라믹학회지
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    • 제35권3호
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    • pp.280-286
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    • 1998
  • LaAlO3 Single crystals used as a substrate for thin film depositions of a high temperature oxide su-perconductor YB2Cu3O7 and applied to microwave frequencies were grown by the Traveling Solvent Flati-ing Zone (TSFZ) method and characterized. For the growth of LaAlO3 single crystals polycrystalline fe-edrods were prepared from powder mixture of La2O3 and Al2O3 with a mole ratio of 1:1 calcined at 110$0^{\circ}C$ for 3h and sintered at 140$0^{\circ}C$ for 4h The growth LaAlO3 crystals was 4-5mm in diameter 30mm in length and dark brown. The growth rate was 2-3mm/h and the rotation speeds were 10rpm for an upper ro-tation and 40 rpm for a lower rotation The growing crystals and the feedrods were counter-rotated. The orientation of the grown single crystals of LaAlO3 was identified to be [111] direction. Dielectric constants were measured to be 30-33 between 100 kHz and 1 MHz in the 30$0^{\circ}C$ to 45$0^{\circ}C$ temperature range and 102 in a range of 100 kHz at the phase transformation temperature of 522$^{\circ}C$ Dielectric losses were calculated to be 1.8$\times$10-4 at the room temperature and 5.7$\times$10-3 at the phase transformation temperature. Lattice con-stants of the grown crystlals were determined to be aR=5.3806 $\AA$ and $\alpha$=60.043$^{\circ}$ by the least square method.

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유연성 기판위에 스퍼터링 방법으로 증착한 CdS 박막의 전기적 특성 및 신뢰성 평가 (Electrical Properties and Reliability of CdS Thin Film Deposited by R.F. Sputtering)

  • 허성기;황미나;안준구;윤순길
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.26-26
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    • 2010
  • Cadmium sulfide (CdS) thin film for flexible optical device applications were prepared at $H_2(Ar+H_2)$ flow ratios on polyethersulfon(PES) flexible polymer substrates at room temperature by radio frequency magnetron sputtering technique. The CdS thin films deposited at room temperature showed a (002) preferred orientation and the smooth surface morphologies. Films deposited at a hydrogen flow ratio of 25% exhibited a photo- and dark-sheet resistance of about 50 and $2.7{\times}10^5{\Omega}$/square, respectively. From the result of the bending test, CdS films exhibit a strong adhesion with the PES polymer substrates and the $Al_2O_3$ passivation layer deposited on the CdS films only shows an increase of the resistance of 8.4% after exposure for 120 h in air atmosphere.

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도시.농촌 지역 초등학생의 가족환경, 건강행위 및 건강상태에 관한 비교 (Comparision of Family Environment, Health Behavior and Health State of Elementary Students in Urban and Rural Areas)

  • 배연숙;박경민
    • 지역사회간호학회지
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    • 제9권2호
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    • pp.502-517
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    • 1998
  • This research intends to survey family environment, health behavior and health status of the students in urban-rural elementary schools and analyze those factors comparatively, and use the result as basic material for school health teacher to teach health education in connection with family and regional areas. It also intends to improve a pupil's self-abilitiy in health care. The subjects involve 2,774 students of urban elementary schools and 583 student in rural ones, who were selected by means of a multi -stage probability sampling. Using the questionnaire and school documents, we collected data on family environment, health behavior and health status for 19 days. Feb. 2nd 1998 through Feb. 20th 1998. The R -form of Family Environment Scale (Moos, 1974) was used in the analysis of family environment(Cronbach's Alpha =0.80). Questionnaires of Health Behavior in School-aged children used by the WHO in Europe(Aaro et al., 1986) and the ones developed by the Health Promotion Committee of the Western Pacific(WHO, 1995)(adapted by long Young-suk and Moon Young-hee(1996)) were used in the analysis of health behavior, as well documents on absences due to sickness, school health room-visits, levels of physical strength, height, weight and degree of obesity were used to determine health status. In next step, We used them with an $X^2$-test, t-test, Odds Ratio, and a 95% Confidence Interval. 1. In two dimensions of three, family-relationship (t=3.41, p=0.001) and system -maintenances(t= 2.41, p=0.0l6) the mean score of urban children were significantly higher than those of rural ones. In the personal development dimension however, there was little significant difference. Assorting family environment into 10 sub-fields and analyzing them, we recognized that urban children were superior to rural children in the sub-fields of expressiveness (t =3.47, p=0.001), conflict (t=0.48, p=0.001), active-recreational orientation (t = 1.97, p=0.049) and organization (t=4.33, p=0.000). 2. Referring to the Odds Ratios of urban-rural children's health behaviors, urban children set up more desirable behavior than rural children wear ing safety belts (Odds Ratio =0.32, p=0.000), washing hands after meals(Odds Ratio = 0.43, p= 0.000), washing hands after excreting (Odds Ratio = 0.39, p=O.OOO), washing hands after coming - home ( Odds Ratio = 0.75, p = 0.003), brushing teeth before sleeping(Odds Ratio =0.45, p=0.000), brushing teeth more than once a day (Odds Ratio =0.73, p=0.0l2), drinking boiled water (Odds Ratio = 0.49, p=0.000), collecting garbage at home(Odds Ratio=0.31, p=0.000) and in the school(Odds Ratio =0. 67, p=0.000). All these led to significant differences. As to taking milk(Odds Ratio = 1.50, p=0.000), taking care of eyesight(Odds Ratio=1.41, p=0.001) and getting physical exercise in(Odds Ratio = 1.33, p=0.0l9) and outside the school(Odds Ratio = 1.32, p=0.005), rural children had more desirable behavior which also revealed a significant difference. There was little significant difference in smoking, but the smoking rate of rural children(5.5%) was larger than that of urban children(3.9%). 3. Health status was analyzed in terms of absences, school health room-visits, levels of physical strength, and the degree of obesity, height and weight. Considering Odds Ratios of the health status of urban-rural children, the health status of rural children was significantly better than that of the urban ones in the level of physical strength(t=1.51, p=0.000) and the degree of obesity(t=1.84, p=0.000). The mean height of urban children ($150.4{\pm}7.5cm$) is taller than that of their counterparts($149.5{\pm}7.9$), which revealed a significant difference (t =2.47, p=0.0l4). The mean weight of urban children($42.9{\pm}8.6kg$) is larger than that of their counterparts($41.8{\pm}9.0kg$), which was also a significant difference(t=2.81, p=0.005). Considering the results above, we can recognize that there are significant differences in family environment, health behavior, and health status in urban-rural children. These results also suggestion ideas for health education. What we would suggest for the health program of elementary schools is that school health teachers should play an active role in promoting the need and importance of health education, develop the appropriate programs which correspond to the regional characteristics, and incorporate them into schools to improve children's ability to manage their own health management.

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