• 제목/요약/키워드: Organic dielectric

검색결과 411건 처리시간 0.024초

Fabrication of Thin Film Transistor on PES substrate using Sequential Lateral Solidification Crystallized Poly-Si Films

  • Kim, Yong-Hae;Chung, Choong-Heui;Yun, Sun-Jin;Park, Dong-Jin;Kim, Dae-Won;Lim, Jung-Wook;Song, Yoon-Ho;Moon, Jae-Hyun;Lee, Jin-Ho
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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    • pp.269-271
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    • 2005
  • Using optimized sputtering condition of a-Si and $SiO_2$ thin film, we can obtained the large grained poly-Si film on PES substrate. The gate dielectric grown by plasma enhanced atomic layer deposition, laser activation and organic interlayer dielectric material make TFTs on PES possible with mobility of $11cm^2/Vs$ (nMOS) and $7cm_2/Vs$ (pMOS).

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PE-MOCVD에 의한 $SrTiO_3$ 박막의 제조 및 전기적 특성에 관한 평가 (Preparation and Electrical Properties of $SrTiO_3$ Thin Films by Plasma Enhanced Metal Organic Chemical vapor Deposition)

  • 김남경;윤순길
    • 한국세라믹학회지
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    • 제33권2호
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    • pp.177-182
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    • 1996
  • strontium titanate (SrTiO3) thin films deposited on Pt/MgO were prepared by Plasma Enhanced Metal Orgainc Chemical vapor Deposition (Pe-MOCVD). The crystallinity of SrTiO3 thin films increased with increasing depo-sition temperature and SrF2 second phase disappeared at 55$0^{\circ}C$ The films showed a dielectric constant of 177 and a dissipation factor of 0.0195 at 100 kHz. The variation of capacitance of the films with applied voltage was small showing paraelectric properties. The charge storage density and leakage current density were 40fC/${\mu}{\textrm}{m}$2 and 3.49$\times$10-7 A/cm2 at 0.25 MV/cm, respectively.

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$Co^{60}$ 조사에 대한 A 급 절연채로의 방사선 손상에 관한 연구 (The Experimental Study of Co$^{60)$ Irradiaton Effect on Radiation Damage of A-Kind Insulator)

  • 지철근;김병수
    • 전기의세계
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    • 제20권3호
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    • pp.27-31
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    • 1971
  • The main focus of this paper is on the study of the radiation effect upon the electrical property of a A-Kind insulator which is one of the organic insulators. The varnished cloth is so typical of the A-Kind insulators as to be selected for a sample. AC and Impluse voltage is applied to the variable Gamma ray irradiated dose samples with the constant time duration and the dielectric breakdown voltage are measured from the sample. The experimental data of the dielectric breakdown voltage are considerably decreased. The above conclusion is useful for the selection and application of the orgainc insulators under the irradiation effects.

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MOCVD를 이용한 Hafnium Oxide 박막 증착 (The Deposition of Hafnium Oxide Thin Film using MOCVD)

  • 오재민;이태호;김영순;현광수;안진호
    • 한국마이크로전자및패키징학회:학술대회논문집
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    • 한국마이크로전자및패키징학회 2002년도 춘계 기술심포지움 논문집
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    • pp.198-202
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    • 2002
  • $HfO_2$films were grown on Si substrate in the temperature range $250~550^{\circ}C$ using metal organic chemical vapor deposition (MOCVD) technique for a gate dielectric. Hafnium tart-butoxide and Oxygen gas were used as precursors and N2 was used as carrier gas. Impurity distribution and film structure(including interfacial layer) were studied at the deposition temperature range between 25$0^{\circ}C$ and $550^{\circ}C$. The growth rate and impurty distribution decreased with increasing temperature. The electrical properties of $HfO_2$were investigated with C-V, 1-V method and showed it has a good properties as a gate dielectric.

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폴리이미드 랭뮤어-블로젯막의 전기적 특성에 관한 연구 (A Study on the Electrical Properties of Polyimide Langmuir-Blodgett Films)

  • 정순욱;임현성
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 추계학술대회 논문집
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    • pp.480-483
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    • 2000
  • Polyimide is a well-known organic dielectric material, which has not only high chemical and thermal stability but also good electrical insulating and mechanical properties. In this research, the electrical properties of PI LB films were investigated at room temperature. At low electric field, ohmic conduction(I∝V) was observed and the calculated electrical conductivity was about 9.7$\times$10$^{-15}$ S/cm. At high electric field, conduction(I∝V$^2$) was observed and the conduction mechanism was explained by space charge limited region effect. The dielectric constant of LB film was about 7.5.

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$SrTiO_3$/유기물 복합재료의 유전특성에 실란 커플링 처리의 효과 (Effect of Silane Coupling Treatment on Dielectric Properties of Strontium Titanate/Organic Composite)

  • 김준영;김상현;유명재;이우성
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.219-220
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    • 2007
  • 실란 커플링제 종류에 따른 $SrTiO_3$/유기물 복합재료의 유전특성에 미치는 영향을 조사하여 비교하였다. 실란 커플링제는 amino계, epoxy계, methacryloxy계, acryloxy계, vinyl계를 사용하였으며, tape casting 방법으로 제작한 복합체 필름을 vacuum lamination 공정을 통하여 기판을 만들어 유전특성을 측정하였다. 실란 괴플링제의 종류에 따라 유전특성은 상이한 결과를 나타냈으며, acryloxy계를 제외한 다른 커플링제를 처리한 복합재료는 유전상수와 유전손실이 감소하는 경향을 확인할 수 있었다. Acryloxy계 커플링제를 처리한 복합재료는 커플링제가 처리되지 않은 복합재료와 비교하여 유전상수가 6%정도 증가하였며, 유전손실은 25%정도 감소하였다.

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Conformational Change of Optically Active [Co(acac)$_2$(diamine)]$^+$ Complexes in Some Organic Solvents

  • Kim, Yang;Oh Chang-Eon
    • Bulletin of the Korean Chemical Society
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    • 제8권6호
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    • pp.441-444
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    • 1987
  • The circular dichroism(CD) spectra of the optically active [$Co(acac)_2(diamine)]^+$ complexes were measured in the several protic and aprotic solvents, where acac = acetylacetonate anion and diamine = ethylenediamine and trimethylenediamine. The degree of the CD variation in protic solvents was enhanced as the dielectric constant decreases except n-butanol and benzylalcohol. And the degree of the CD variation in aprotic solvents was roughly increased as both dipole moment and dielectric constant decrease except aromatic solvents and the solvents having no dipole moment. It was deduced that the CD variations of the complexes have been due to the conformational change of acetylacetonate ligands coordinated to Co(III) ion.

유기물 게이트 절연체를 사용한 pentacene 유기 박막 트랜지스터의 전기적 특성에 관한 연구 (A Study on the Electrical Characteristics of Pentacene Organic Thin Film Transistor using Organic Gate Insulator)

  • 김윤명;김옥병;김정수;김영관;정태형
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 추계학술대회 논문집 학회본부 C
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    • pp.446-448
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    • 2000
  • Organic semiconductors based on vacuum-deposited films of fused-ring polycyclic aromatic hydrocarbon have great potential to be utilized as an active layer for electronic and optoelectronic devices. In this study, pentacene thin films and electrode materials were deposited by Organic Molecular Beam Deposition (OMBD) and vacuum evaporation respectively. For the gate dielectric layer, OPTMER PC403 photo acryl (JSR Coporation.) was spin-coated and cured at $220^{\circ}C$. Electrical characteristics of the devices were investigated, where the channel length and width was $50{\mu}m$ and 5 mm. It was found that field effect mobility was $0.039\;cm^2V^{-1}s^{-1}$, threshold voltage was -7 V, and on/off current ratio was $10^6$.

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Fabrication of Flexible OTFT Array with Printed Electrodes by using Microcontact and Direct Printing Processes

  • Jo, Jeong-Dai;Lee, Taik-Min;Kim, Dong-Soo;Kim, Kwang-Young;Esashi, Masayoshi;Lee, Eung-Sug
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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    • pp.155-158
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    • 2007
  • Printed organic thin-film transistor(OTFT) to use as a switching device for an organic light emitting diode(OLED) were fabricated in the microcontact printing and direct printing processes at room temperature. The gate electrodes($5{\mu}m$, $10{\mu}m$, and $20{\mu}m$) of OTFT was fabricated using microcontact printing process, and source/drain electrodes ($W/L=500{\mu}m/5{\mu}m$, $500{\mu}m/10{\mu}m$, and $500{\mu}m/20{\mu}m$) was fabricated using direct printing process with hard poly(dimethylsiloxane)(h-PDMS) stamp. Printed OTFT with dielectric layer was formed using special coating system and organic semiconductor layer was ink-jet printing process. Microcontact printing and direct printing processes using h-PDMS stamp made it possible to fabricate printed OTFT with channel lengths down to $5{\mu}m$, and reduced the process by 20 steps compared with photolithography. As results of measuring he transfer characteristics and output characteristics of OTFT fabricated with the printing process, the field effect characteristic was verified.

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Investigation of Top-Contact Organic Field Effect Transistors by the Treatment Using the VDP Process on Dielectric

  • Kim, Young-Kwan;Hyung, Gun-Woo;Park, Il-Houng;Seo, Ji-Hoon;Seo, Ji-Hyun;Kim, Woo-Young
    • 한국응용과학기술학회지
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    • 제24권1호
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    • pp.54-60
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    • 2007
  • 이 논문에서는 게이트 절연막 위에 vapor deposition polymerization(VDP)방법을 사용하여 성막한 유기 점착층을 진공 열증착하여 유기 박막 트랜지스터(OTFTs)소자를 제작할 수 있음을 증명하였다. 우리가 제작한 Staggered-inverted top-contact 구조를 사용한 유기 박막 트랜지스터는 전기적 output 특성이 포화 영역안에서는 포화곡선을, triode 영역에서는 비선형적인 subthreshold를 확실히 볼 수 있음을 발견했다. $0.2{\mu}m$ 두께를 가진 게이트 절연막위에 유기 점착층을 사용한 OTFTs의 장 효과 정공의 이동도와 문턱전압, 그리고 절멸비는 각각, 약 0.4cm2/Vs, -0.8V, 106 이 측정되었다. 게이트 절연막의 점착층으로써 폴리이미드의 성막을 위해, 스핀코팅 방법 대신 VDP 방법을 도입하였다. 폴리이미드 고분자막은 2,2bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride(6FDA)와 4,4'-oxydianiline(ODA)을 고진공에서 동시에 열 증착 시킨 후, 그리고 $150^{\circ}C$에서 1시간, 다시 $200^{\circ}C$에서 1시간 열처리하여 고분자화된 막을 형성하였다. 그리고 점착층이 OTFTs의 전기적 특성에 주는 영향을 설명하기 위해 비교 연구하였다.