• Title/Summary/Keyword: Organic Contaminants

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Surface Cleaning of a Wafer Contaminated by Fingerprint Using a Laser Cleaning Technology (레이저 세정기술을 이용한 웨이퍼의 표면세정)

  • Lee, Myong-Hwa;Baek, Ji-Young;Song, Jae-Dong;Kim, Sang-Bum;Kim, Gyung-Soo
    • Journal of ILASS-Korea
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    • v.12 no.4
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    • pp.185-190
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    • 2007
  • There is a growing interest to develop a new cleaning technology to overcome the disadvantages of wet cleaning technologies such as environmental pollution and the cleaning difficulty of contaminants on integrated circuits. Laser cleaning is a potential technology to remove various pollutants on a wafer surface. However, there is no fundamental data about cleaning efficiencies and cleaning mechanisms of contaminants on a wafer surface using a laser cleaning technology. Therefore, the cleaning characteristics of a wafer surface using an excimer laser were investigated in this study. Fingerprint consisting of inorganic and organic materials was chosen as a representative of pollutants and the effectiveness of a laser irradiation on a wafer cleaning has been investigated qualitatively and quantitatively. The results have shown that cleaning degree is proportional to the laser irradiation time and repetition rate, and quantitative analysis conducted by an image processing method also have shown the same trend. Furthermore, the cleaning efficiency of a wafer contaminated by fingerprint strongly depended on a photothermal cleaning mechanism and the species were removed in order of hydrophilic and hydrophobic contaminants by laser irradiation.

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Bioavailability of slow-desorbable naphthalene in a biological air sparging system

  • Li, Guang-Chun;Chung, Seon-Yong;Park, Jeong-Hun
    • Advances in environmental research
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    • v.1 no.3
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    • pp.201-210
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    • 2012
  • The bioavailability of sorbed organic contaminants is one of the most important factors used to determine their fate in the environment. This study was conducted to evaluate the bioavailability of slow-desorbable naphthalene in soils. An air sparging system was utilized to remove dissolved (or desorbed) naphthalene continuously and to limit the bacterial utilization of dissolved naphthalene. A biological air sparging system (air sparging system with bacteria) was developed to evaluate the bioavailability of the slow-desorption fraction in soils. Three different strains (Pseudomonas putida G7, Pseudomonas sp. CZ6 and Burkholderia sp. KM1) and two soils were used. Slow-desorbable naphthalene continuously decreased under air sparging; however, a greater decrease was observed in response to the biological air sparging system. Enhanced bioavailability was not observed in the Jangseong soil. Overall, the results of this study suggests that the removal rate of slow-desorbable contaminants may be enhanced by inoculation of degrading bacteria into an air sparging system during the remediation of contaminated soils. However, the enhanced bioavailability was found to depend more on the soil properties than the bacterial characteristics.

A Study on the Performance Improvement of the Air Washer System for Semiconductor Manufacturing Clean Rooms (반도체 클린룸용 에어와셔 시스템의 성능개선을 위한 연구)

  • Park, Sang-Tae;Yoo, Kyung-Hoon;Son, Seung-Woo
    • Proceedings of the KSME Conference
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    • 2007.05b
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    • pp.3413-3417
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    • 2007
  • In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from the outdoor air introduced into clean room. In the present study, an experiment was carried out to examine the improvement of removal efficiency for the gaseous contaminants. In order to improve the gas removal efficiency, a hot water contact heat exchanger was installed upstream of the air washer to heat and humidify the incoming outdoor air before entering the air washer.

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Removal of TCE using zero valent iron (ZVI) with other contaminants

  • 조현희;박재우
    • Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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    • 2002.04a
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    • pp.58-61
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    • 2002
  • An alternative to pump and treat groundwater remediation is the use of reactive barriers. Zero valent iron (ZVI) is particularly useful as a reductant of chlorinated hydrocarbons because of its low cost and lack of toxicity ZVI can drive the dechlorination of chlorinated organic compounds and the reduction of chromium from the Cr(Ⅵ) to the Cr(III) state. The contaminants in subsurface environment usually exist as the mixed compounds. Therefore, the objective of this research is to study the effect of the other compounds on TCE removal by ZVI. The removal mechanism of TCE by ZVI is separated the dechlorination and sorption. TCE removal by ZVI slightly increased in presence of naphthalene as the non-reduced compound. TCE removal by ZVI remarkable decreased in presence of carbon tetrachloride, nitrate, and chromate as the reduced compounds. This research suggests that the effect of the coexisted compounds on the removal chlorinated compounds by reactive barrier technology should be considered for practical application.

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Evaluation of Biodegradation in an Aquifer Contaminated with Petroleum Hydrocarbon

  • 이지훈;이진용;이강근
    • Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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    • 2001.04a
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    • pp.120-123
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    • 2001
  • To evaluate the biodegradability of contaminants in an aquifer, computer modeling with RT3D model (Clement, 1997) was used. The RT3D model simulates the biodegradation of organic contaminants using a number of aerobic and anaerobic electron acceptors. The RT3D model was applied to a well-studied petroleum hydrocarbon plume in a shallow unconfined aquifer in Uiwang, Korea. The results of this study demonstrate tile importance of biodegradation processes in the monitored natural attenuation and in reducing contaminant concentrations in a shallow aquifer. The modeling results tell that the amount of electron acceptors is the key factor affecting biodegradation of TEX, the petroleum hydrocarbon contaminant in shallow groundwater

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BIOLOGICAL REMEDIATION OF CONTAMINATED AQUIFER (오염지하수출의 미생물학적 복원기술)

  • 배우근
    • Proceedings of the Korean Geotechical Society Conference
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    • 1992.12a
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    • pp.1-18
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    • 1992
  • The contaminatlon of soil and groundwater by leachate from impmperly managed landfills, or by cheiicals and gasoline leaked flu underground storage tanks has buou a serious urldwide environmental problei. Most of those contaminants are adsorptive and absorptive into soul, while they are hardly soluble in water. Thus, the rate of self purification is very slow, causing persistent problems in water use and environmental protection when the contamination is left untreated. Biological remediatlon technologies utilize the ertraordlnary caperbllity of microorganisms In degrading a tilde spectrum of organic compounds. Among them, an in situ bioremediation technology Involves injection of supplementary materials into the subsurfce in order to bring about a significant Increase in the microbial activity. The Increased microbial activity helps remove the pollutants in situ, that is, without digging out contaminants, soil, or water. This paper focused on the features, possibilities, and limitations of the bioremedition technology.

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An Investigation on the Air Pollution for Distribution Facilities In Metropolitan Area (22.9kV-Y 배전설비에 부착된 대도시 대기오염성분에 대한 조사연구)

  • Kim, Dong-Myung;Yoon, Tae-Sang;Park, Sang-Man;Yi, Sue-Muk
    • Proceedings of the KIEE Conference
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    • 2000.07c
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    • pp.1548-1550
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    • 2000
  • The effect of air pollution on the distribution facilities was investigated. In order to evaluate the pollution level in the metropolitan area, contaminated specimens were analyzed with various technique such as ICP-AES, EA, and so on. The contaminants on the surface of the distribution line or insulators were combined with approximately 10 percent of organic and 90 percent of inorganic materials. We found out that the electric facilities were affected by the contaminants on the surface of the facilities.

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An Experiment on Performance Evaluation of a Direct Atomization Type Air Washer System for Semiconductor Clean Rooms (반도체 클린룸용 직접분무식 에어와셔 시스템의 성능평가실험)

  • Yeo, Kuk-Hyun;Yoo, Kyung-Hoon;Tae, Kyung-Eung
    • Proceedings of the SAREK Conference
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    • 2006.06a
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    • pp.988-992
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    • 2006
  • In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as $NH_3,\;SO_x$ and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. It is desirable to recover heat from exhaust air and use it to reheat outdoor air. In the present study, an experiment was conducted to investigate the heat recovery and gas removal efficiencies of a direct atomization type heat recovery air washer.

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Study on a Small-scale Wastewater Treatment System using Biological Aerated Filter (생물학적 호기성필터를 이용한 소규모 하수처리시스템에 관한 연구)

  • Park, Chan G.;Jo, Eun Y.;Kim, Young H.;Park, Sung J.
    • The KSFM Journal of Fluid Machinery
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    • v.17 no.3
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    • pp.41-45
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    • 2014
  • The biological aerated filter (BAF) reactor is regarded as an effective biological wastewater treatment method. It can remove pollutants by carrier filtration and biodegradation. Due to its advantages, which include high biomass retention, tolerance to toxicity, excellent removal efficiency, and slurry separation, BAF has been widely used to remove COD, $NH_4{^+}-N$, phosphorus, and other harmful organic substances. In this study, the BAF reactor was used to remove organic contaminants of domestic wastewater of Korea at both the benchand pilot-scale. The main objectives of this study are to: (i) investigate the removal efficiency of organic contaminants (ex. COD, nitrate, phosphorus) in BAF reactors at both scales; (ii) characterize the small-scale wastewater treatment plant using the BAF reactor. The concentration of COD in the influent increased from 69 to 246 mg/L. During the operation period, the final effluent concentration of COD remained maximum 4.0 mg/L, and the average removal efficiency was above 88%. The present study investigated the removal efficiencies of COD, TN, TP and $NH_4{^+}-N$ from smelting wastewater by BAF system. When treating wastewater in both bench and pilot-scale reactors, the BAF worked well.

Potential Application of Environmental Tracer in Hydrogeochemistry Using Sorption Properties (환경 추적자의 흡착 특성을 이용한 수리지화학적 활용 가능성 고찰)

  • Choung, Sungwook;Chang, Seeun;Kim, Minkyung;Kim, Sungpyo;Um, Wooyong
    • Journal of Soil and Groundwater Environment
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    • v.17 no.6
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    • pp.59-68
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    • 2012
  • This study provided sorption properties of chlorofluorocarbons (CFCs), and elucidated potential application of CFC sorption data in hydrogeochemistry. Prior sorption studies were reviewed for hydrophobic organic compounds similar to the CFCs, because there were only few CFC sorption studies. The CFCs are regarded as relatively conservative chemicals in groundwater environments based on their moderate hydrophobicity. However, thermally altered carbonaceous matter (TACM) can significantly increase sorption capacity and nonlinearity for hydrophobic organic compounds such as CFCs, compared to general soil organic matter. CFC sorption behavior are close to the sorption for reviewed organic chemicals. Therefore, the CFC sorption data can be used for determining hydrogeochemical properties and predicting transport of organic contaminants in TACM-containing aquifer environments.