• 제목/요약/키워드: Optofluidic maskless lithography

검색결과 4건 처리시간 0.017초

역학적 유체 리소그래피 기술 (Dynamic Flow Lithography Technologies)

  • 정수은;박욱;권성훈
    • 대한의용생체공학회:의공학회지
    • /
    • 제30권6호
    • /
    • pp.453-460
    • /
    • 2009
  • In this review paper, concepts in optofluidics are applied to an advanced manufacturing technology based on self-assembled microparts. The "optical" aspect of optofluidics will be described in the context of photolithography, and the "fluidic" aspect will be discussed in the context of self-assembly. First, optofluidic maskless lithography will be introduced as a dynamic fabrication method to generate microparticles in microfluidic channels. Next, the history and application of optofluidic lithography will be presented.

Optofluidic packaging and patterning technologies for light emitting devices

  • Chung, Su-Eun;Jang, Ji-Sung;Lee, Seung-Ah;Lee, Ho-Suk;Kwon, Sung-Hoon
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
    • /
    • pp.1272-1273
    • /
    • 2009
  • We demonstrate conformal phosphor coating and patterning methods on light emitting diodes (LEDs) using image processing based optofluidic maskless lithography (IP-OFML) system in microfluidic channels. IP-OFML allows a real-time detection and dynamic mask generation for packaging of randomly dispersed microchips. Our system detects each chip by considering rotation of the chip through image processing regardless of their arrangement error. Therefore, it precisely packages the chip making conformal polymer layer.

  • PDF