• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.209-212
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• 2001

Polyimide(PI) films have been considered as the interlayer dielectric materials due to low dielectric constant, low water absorption, high gap-fill and planarization capability. The PI mm Was etched with using inductively coupled plasma (ICP). The etching characteristics such as etch rate and selectivity were evaluated to gas mixing ratio. High etch rate was $8300{\AA}/min$ and vertical profile was approximately acquired $90^{\circ}$ at $CF_{4}/(CF_{4}+O_{2})$ of 0.2. The selectivies of polyimide to PR and $SiO_{2}$ were 1.2, 5.9, respectively. The etching profiles of PI films with an aluminum pattern were measured by a scanning electron microscope (SEM). The chemical states on the PI film surface were investigated by x-ray photoelectron spectroscopy (XPS). Radical densities of oxygen and fluorine in different gas mixing ratio of $O_{2}/CF_{4}$ were investigated by optical emission spectrometer (OES).

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.9
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• pp.994-1000
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• 2004

We studied the characteristics of annular phase gratings as spatial frequency filters. We first calculated the Fraunhofer diffraction patterns of annular gratings and then got the modulation transfer function (MTF) from the zeroth order Hankel transform of the intensity distribution function. Binaryphase annular grating shows higher diffraction efficiency than binary phase rectangular grating. But the MTF decreases linearly in the low-frequency region as that of rectangular grating does. The diffraction pattern of 4-phase annular grating is similar to that of 2-phase grating and hence MTFs of the two are much alike. For 8-phase annular grating, the 7th order diffracted beam is the lowest one next to the first. Consequently, the diffraction efficiency is very high and the MTF graph is curved upward. The diffracted beams except the first order are negligible and hence the MTF characteristics are more improved in the case of 16-phase grating. But the degree of improvement becomes lowered c(Impaled with 8-phase grating. We made a 16-phase annular grating and measured its MTF. The experimental result agrees well with the calculated one.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.413-413
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• 2000

In this paper, we propose a series of calibrations f3r the x-ray three dimensional imaging system. In the developed x-ray system, a three dimensional inner and outer shape of an object can be reconstructed out of two dimensional transmitted x-ray image set, which are acquired by projecting x-ray to the object from different views. To achieve this, a reconstruction algorithm which estimates and updates the three dimensional volume from x-ray images is developed. The algorithm is named as uniform and simultaneous algebraic reconstruction technique(USART) which is an iterative method estimating a 3D volume based on its projected images. In this method, it is assumed that the imaging conditions that are the relative positions between the x-ray sources, object and the image planes are blown. Practically it is not easy to know the three dimensional coordinate of the components of the system, since the x-ray is not visible and the image distortions are present due to the optical components in the system. In this paper, methods of correcting image distortions are present firstly. Then the coordinates of the x-ray systems are calibrated from the x-ray images of the grid pattern. Some experimental results on these calibrations are present and discussed.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.31 no.3 s.258
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• pp.264-272
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• 2007

The aim of this study is to investigate the effects of nozzle orifice shapes and the nozzle length-to-diameter ratio(L/D) on the nozzle cavitation formation inside the orifice and the external flow pattern. The nozzle used in this work was tested the taper orifice nozzle and the rectangular orifice nozzle which was made from the transparent acrylic acid resin. For studying the effect of the nozzle L/D ratio, it was used to three L/D ratios of 3.33, 10, and 20. The cavitation flow of nozzle was visualized by using the ICCD camera and optical system. This work revealed that the flow rate and discharge coefficient($C_d$) of the taper orifice nozzle was larger than those of the rectangular orifice nozzle at the same injection pressure. The cavitation flow was observed in the nozzle orifice at the low injection pressure and the breakup of liquid jet was promoted as the L/D ratio is decreased. The cavitation of biodiesel fuel was formed at the lower injection pressure than that of diesel fuel because of higher viscosity and density.

• Journal of the Korean Society of Industry Convergence
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• v.2 no.2
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• pp.115-124
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• 1999

The interaction of weak normal shock wave with turbulent boundary layer in a supersonic nozzle was investigated experimentally by wall static pressure measurements and by schlieren optical observations. The lime-mean flow in the interaction region was classified into four patterns according to the ratio of the pressure $p_k$ at the first kink point in the pressure distribution of the interaction region to the pressure $p_1$ just upstream of the shock. It is shown for any flow pattern that the wall static pressure rise near the shock foot can be described by the "free interaction" which is defined by Chapman et al. The ratio of the triple point height $h_t$ of the bifurcated shock to the undisturbed boundary layer thickness ${\delta}_1$ upstream of the interaction increases with the upstream Mach number $M_1$, and for a fixed $M_1$, the normalized triple point height $h_t/{\delta}_1$ decreases with increasing ${\delta}_1/h$, where h is the duct half-height.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.10a
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• pp.467-471
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• 2005

In this paper, experimental methods about the flow behavior of thin polymer film by various edge patterns in the spin coating process for stable cover layer coating of a blu-ray disc is described. The blu-ray disc, a next-generation optical disc format over 25GB, consists of a 1.1m thick substrate and a 0.1mm tick cover layer. Generally, cover layer on the blu-ray disc is made by the polymer spin coating process. However, it is hard to secure sufficient coating uniformity around the rim on the cover layer. In order to get the uniform thickness deviation and to minimize the bead around the rim, the edge of the disc substrate can be modified into various patterns, such as normal plain, trench, step and chamfer pattern, etc, around the rim on the disc and experimented with various parameters, such as surface tension, viscosity, coating time, temperature and rotation speed, etc. And the optimal shape of the rim was tried to get by 3 dimensional computer simulation of the polymer expulsion process.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.42-42
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• 2011

본 연구에서는 광학소자에 폭넓게 이용되는 AlGaP III-V족 화합물 반도체 중에서 한쪽 끝 이 종화합물인 AlP의 유전함수를 0.75~5.05 eV의 에너지 영역에서 타원편광분석법을 이용하여 분석하였다. AlP는 산소와 급격히 반응하기 때문에, 대기 중에서 물질 고유의 광특성이 유지되기 어려울 뿐만 아니라, 박막 위에 생성되는 산화막 때문에 순수한 AlP의 유전함수 측정이 불가능 하다. 본 연구에서는 물질의 유전함수에 미치는 산화 효과를 최소화하기 위하여 Molecular Beam Epitaxy로 성장한 $1.0{\mu}m$ 두께의 AlP 박막을 초고진공 상태의 chamber 안에서 타원편광분석기를 이용하여 실시간으로 측정하였다. 박막의 투명도에 의해 나타나는 간섭 pattern과 표면거칠기 효과로 인한 유전함수의 왜곡을 보정하기 위하여 변수화 모델이 이용되었으며 다층 변수화모델 계산을 통하여 순수한 AlP의 유전함수를 얻어낼 수 있었다. 본 연구에서 측정된 순수한 AlP의 유전함수는 타원편광분석기를 이용한 최초의 실험결과로서 이차미분을 이용한 전이점 (Critical Point) 분석결과 이론적인 electronic band structure에서 $E_1$, $E_1+_{{\Delta}_1}$, $E_2$에 해당하는 전이점들을 확인할 수 있었다.

• Textile Coloration and Finishing
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• v.20 no.1
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• pp.8-15
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• 2008

We presented the modified decal-transfer lithography (DTL) and light stamping lithography (LSL) as new powerful methods to generate patterns of poly(dimethylsiloxane) (PDMS) on the substrate. The microstructures of PDMS fabricated by covalent binding between PDMS and substrate had played as barrier to locally control wettability. The transfer mechanism of PDMS is cohesive mechanical failure (CMF) in DTL method. In the LSL method, the features of patterned PDMS are physically torn and transferred onto a substrate via UV-induced surface reaction that results in bonding between PDMS and substrate. Additionally we have exploited to generate the patterning of rhodamine B and quantum dots (QDs), which was accomplished by hydrophobic interaction between dyes and PDMS micropatterns. The topological analysis of micropatterning of PDMS were performed by atomic force microscopy (AFM), and the patterning of rhodamine B and quantum dots was clearly shown by optical and fluorescence microscope. Furthermore, it could be applied to surface guided flow patterns in microfluidic device because of control of surface wettability. The advantages of these methods are simple process, rapid transfer of PDMS, modulation of surface wettability, and control of various pattern size and shape. It may be applied to the fabrication of chemical sensor, display units, and microfluidic devices.

• Applied Microscopy
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• v.46 no.2
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• pp.93-99
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• 2016

The thickness of specimen is an important factor in microscopic researches. Thicker specimen contains more information, but it is difficult to obtain well focused image with precise details due to optical limit of conventional microscope. Recently, a microscope unit that combines improved illumination system, which allows real time three-dimensional (3D) image and automatic z-stack merging software. In this research, we evaluated the usefulness of this unit in observing thick samples; Golgi stained nervous tissue and ground prepared bone, tooth, and non-transparent small sample; zebra fish teeth. Well focused image in thick samples was obtained by processing z-stack images with Panfocal software. A clear feature of neuronal dendrite branching pattern could be taken. 3D features were clearly observed by oblique illumination. Furthermore, 3D array and shape of zebra fish teeth was clearly distinguished. A novel combination of two channel oblique illumination and z-stack imaging process increased depth of field and optimized contrast, which has a potential to be further applied in the field of neuroscience, hard tissue biology, and analysis of small organic structures such as ear ossicles and zebra fish teeth.

• Transactions of the Society of Information Storage Systems
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• v.10 no.1
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• pp.1-6
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• 2014

Plasmonic lithography is the latest technique to overcome diffraction limit of previous optical lithography. In the plasmonic lithography, the nano gap between nano metal wave guide and photoresist should be in sub-wavelength region. SIL-based plasmonic lithography is the one of the solutions to maintain small air gap. However, the nano gap control is so sensitive that a little disturbance is able to have a large effect on the nano gap control. So, we analyzed the characteristics of disturbance, and then modified the previous controller to suppress the disturbance. We applied two peak filters which were fixed one and adaptively changeable one. We experimentally confirmed the improvement of the nano gap control, which reduced nano gap error by 30 %. The proposed control will improve the quality of lithography pattern.