• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.211-211
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• 1999

Titanium nitride (TiN) thin films have useful properties including high hardness, good electrical conductivity, high melting point, and chemical inertness. The applications have included wear-resistant hard coatings on machine tools and bearings, decorative coating making use of the golden color, thermal control coatings for widows, and erosion resistant coatings for spacecraft plasma probes. For all these applications as feature sizes shrink and aspect ratios grow, the issue of good step coverage becomes increasingly important. It is therefore essential to manufacture conformal coatings of TiN. The growth of TiN thin films by chemical vapor deposition (CVD) is of great interest for achieving conformal deposition. The most widely used precursor for TiN is TiCl4 and NH3. However, chlorine impurity in the as-grown films and relatively high deposition temperature (>$600^{\circ}C$) are considered major drawbacks from actual device fabrication. To overcome these problems, recently, MOCVD processes including plasma assisted have been suggested. In this study, therefore, we have doposited Ti(C, N) thin films on Si(100) and D2 steel substrates in the temperature range of 150-30$0^{\circ}C$ using tetrakis diethylamido titanium (TDEAT) and titanium isopropoxide (TIP) by pulsed DC plamsa enhanced metal-organic chemical vapor deposition (PEMOCVD) method. Polycrystalline Ti(C, N) thin films were successfully grown on either D2 steel or Si(100) surfaces at temperature as low as 15$0^{\circ}C$. Compositions of the as-grown films were determined with XPS and RBS. From XPS analysis, thin films of Ti(C, N) with low oxygen concentration were obtained. RBS data were also confirmed the changes of stoichiometry and microhardness of our films. Radical formation and ionization behaviors in plasma are analyzed by optical emission spectroscopy (OES) at various pulsed bias and gases conditions. H2 and He+H2 gases are used as carrier gases to compare plasma parameter and the effect of N2 and NH3 gases as reactive gas is also evaluated in reduction of C content of the films. In this study, we fond that He and H2 mixture gas is very effective in enhancing ionization of radicals, especially N resulting is high hardness. The higher hardness of film is obtained to be ca. 1700 HK 0.01 but it depends on gas species and bias voltage. The proper process is evident for H and N2 gas atmosphere and bias voltage of 600V. However, NH3 gas highly reduces formation of CN radical, thereby decreasing C content of Ti(C, N) thin films in a great deal. Compared to PVD TiN films, the Ti(C, N) film grown by PEMOCVD has very good conformability; the step coverage exceeds 85% with an aspect ratio of more than 3.

• Korean Journal of Optics and Photonics
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• v.19 no.5
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• pp.376-380
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• 2008

This paper presents the Projection Moire method using a line scan camera. The high resolution feature of a line scan camera makes it possible to scan an image quickly, thus enabling a much quicker 3D profile. This method uses a high resolution line scan camera making it possible to scan an image at high speed simultaneously measuring the 3D profile of a large FOV. When using a high resolution scan camera, a full FOV is scanned, thus requiring just one movement of a projection grating. As a result, the number of grating movements is reduced drastically. The end result is a faster and more accurate 3D measurement. Moving the grating too quickly causes vibration in the imaging system, which will normally be required to apply a stitching technique when using an area scan camera. However the technique is not required when using a line scan camera. Compared with the previous techniques, it has the advantages of simple hardware without moving mechanical parts - single exposure for obtaining three-dimensional information. A method using a high resolution line scan camera can be used in mass production to measure the bump height of wafers or the bump height of package substrates.

• Clean Technology
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• v.18 no.4
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• pp.366-372
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• 2012

Three acrylic copolymers containing tris(8-hydroxyquinoline) aluminum (AlQ3) pendant group (25 wt%), acrylateco-HEMA-$AlQ_3$ (25 wt%), were successfully synthesized by free radical polymerization from acrylates [methyl methacrylate (MMA), acrylonitrile (AN) or 2-hydroxyethyl methacrylate (HEMA)] with HEMA functionalized with AlQ3 pendant groups (HEMA-p-$AlQ_3$). The glass transition temperatures ($T_g$) of MMA-co-HEMA-p-$AlQ_3$ (copolymer 1), AN-co-HEMA-p-$AlQ_3$ (copolymer 2) and HEMA-co-HEMA-p-$AlQ_3$ (copolymer 3) were found to be 158, 150 and $126^{\circ}C$, respectively. They have good thermal stability: a very desirable feature for the stability of OLEDs. Their solubility, thermal properties, UV-visible absorption and photoluminescence behaviors were investigated. They were found to be soluble in various organic solvents such as tetrahydrofuran (THF), dimethylformamide (DMF), toluene and chloroform. It was also found that the UV-visible absorption and photoluminescence behaviors of these copolymers were similar to those of pristine $AlQ_3$. Green organic light-emitting diodes (OLEDs) have also been fabricated using these copolymers as light emission/electron transport components obtained easily by spin coating, and their current density voltage (J-V) curves were compared. The OLED device of the copolymer 3 had the lowest turn-on voltage of about 2 V compared to other copolymer types devices.

• Journal of the Korean Vacuum Society
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• v.9 no.3
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• pp.227-232
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• 2000

$MgTiO_3$thin films have been grown on various substrates by pulsed laser deposition (PLD) to investigate the application for microwave dielectrics and optical devices. Epitaxial $MgTiO_3$thin films were obtained on sapphire (c-plane$A1_2O_3$$MgTiO_3$thin films deposited on $SiO_2/Si$ and platinized silicon ($Pt/Ti/SiO_2/Si$) substrates were highly oriented. $MgTiO_3$thin films grown on sapphire were transparent in the visible and had a sharp absorption edge about 290 nm. These $MgTiO_3$thin films had extremely fine feature of surface morphology, i.e., rms roughness of 0.87 nm, which was examined by AFM. We have investigated the dielectric properties of the $MgTiO_3$thin films in $MIM(Pt/MgTiO_3/Pt)$ capacitors. Dielectric constant and loss of $MgTiO_3$thin films deposited by PLD were about 24 and 1.5% at 1 MHz, respectively. These $MgTiO_3$thin films also exhibited little dielectric dispersion.

• Journal of the Korean Society of Radiology
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• v.13 no.6
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• pp.825-830
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• 2019

A detector module measuring a depth of interaction was developed using silicon photomultiplier (SiPM) and two layers of scintillation crystal array treated with multiple reflectors. When reconstructing an image based on a signal obtained by using different types of reflector of each layer, the interaction positions of scintillation pixels and gamma rays could be tracked by utilizing the feature that all scintillation pixels were recorded at different positions. The bottom layer uses a specular reflector, and the top layer uses a diffuse reflector to differently process the size of the signal obtained from the SiPM. The optical grease was used to recude the sharp refractive index change between the layers of scintillator and the SiPM. The signals obtained from the 16 SiPMs were reduced to four signals using the Anger equations, and the images were reconstructed using them. All the scintillation pixels composed of the two layers appeared in the reconstructed image, which distinguished the layer where the scintillation pixels and gamma rays interacted. If the detectors, which measure the interaction depth of two layers using different reflectors, will be applied to preclinical positron emission tomography, the degradation of spatial resolution appearing outside the field of interest could be solved.

• Journal of Life Science
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• v.26 no.2
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• pp.253-258
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• 2016

In this study, nano-micelled curcumin was produced with natural sea salt with a view to comparing the in silico molecular binding affinity of pure curcumin compound to the active site of transthyretin. Using an optical light microscope and an electron microscope, it was found that the structure of the surface and the cross-section of nano-micelled curcumin was significantly different from natural sea salt. In particular, the crystal structure and nano-components in the nano-micelled curcumin were united, and the layer was more strongly stabilized than untreated salts. In the virtual 3D structure, in silico molecular docking study, the ligand binding affinity of nano-micelled curcumin to the transthyretin active site was found to be higher than that of pure curcumin. In addition, a nano-micelled curcumin formula interacted with more amino acid residues of transthyretin domains. The pharmacophore feature of the nano-micelled curcumin also showed more condensed and constrained features than normal curcumin. These results suggest that nano-micelled curcumin may effectively bind to and stabilize transthyretin, thereby regulating transthyretin-related physiological diseases. Collectively, the nano-micelled curcumin process suggests that normal curcumin can be modified more efficiently into the novel bio-functional chemical formula to stabilize the transthyretin structure. Therefore, the nano-micelled curcumin process can be applied to the field of the regulation of Alzheimer's disease.

• Korean Journal of Optics and Photonics
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• v.31 no.1
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• pp.7-12
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• 2020

In this paper, we experimentally investigate the fiber fuse in single-mode 2-kW-class high-power fiber amplifiers, depending on the cooling method at the splicing point. We measured the temperature of the splicing point between the pump-signal combiner and gain fiber as a function of laser output power. The temperature of the splicing point increased from 20 to 32℃ with a slope of 0.01℃/W, up to 1.2 kW of laser output power. At higher powers the temperature of the splicing point increased dramatically, with a slope of 0.08℃/W. After that, the fiber amplifier was destroyed during operation at 1.96 kW of output power by fiber fuse. The bullet shape, a common feature of fiber fuse, was observed in the damaged passive fiber core of the pump-signal combiner. Later, we adopted an improved water-cooled cold plate to increase the cooling efficiency at the splicing point, and investigated the laser output power. The temperature at the splicing point was 35.8℃ with a temperature-rise slope of 0.007℃/W at the maximum output power of 2.05 kW. The beam quality M² was measured to be less than 1.3, and the output beam's profile was a stable Gaussian shape. Finally, neither fiber fuse nor mode instability was observed in the fiber amplifier at the maximum output power of 2.05 kW.

• Journal of the Korea institute for structural maintenance and inspection
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• v.28 no.3
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• pp.1-9
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• 2024

This study proposes a multi-scale template matching technique with image pyramids (TMI) to measure structural dynamic displacement using a vision sensor under atmospheric turbulence conditions and evaluates its displacement measurement performance. To evaluate displacement measurement performance according to distance, the three-story shear structure was designed, and an FHD camera was prepared to measure structural response. The initial measurement distance was set at 10m, and increased with an increment of 10m up to 40m. The atmospheric disturbance was generated using a heating plate under indoor illuminance condition, and the image was distorted by the optical turbulence. Through preliminary experiments, the feasibility of displacement measurement of the feature point-based displacement measurement method and the proposed method during atmospheric disturbances were compared and verified, and the verification results showed a low measurement error rate of the proposed method. As a result of evaluating displacement measurement performance in an atmospheric disturbance environment, there was no significant difference in displacement measurement performance for TMI using an artificial target depending on the presence or absence of atmospheric disturbance. However, when natural targets were used, RMSE increased significantly at shooting distances of 20 m or more, showing the operating limitations of the proposed technique. This indicates that the resolution of the natural target decreases as the shooting distance increases, and image distortion due to atmospheric disturbance causes errors in template image estimation, resulting in a high displacement measurement error.

• Economic and Environmental Geology
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• v.18 no.4
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• pp.343-355
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• 1985

Spectral reflectivity and microhardness were measured quantitatively on polished surfaces of a selection of bireflecting minerals obtained from several well known metallic deposits. Incremental errors are much higher than decremental errors and errors were found to be lowest in the spectral region close to the green wavelength ($544m{\mu}$). The characteristics of the spectral profile are significant in their control of white light color. The covellite and graphite have reflectivity profiles similar in shape for each principal direction, showing noticeable difference in magnitude between the profiles: The spectral reflectivity of covellite parallel to the extraordinary vibration is higher (R$$\simeq_-$$10%) than that parallel to the ordinary vibration and graphite shows opposite feature. Reflectivity of the enargite and famatinite cut parallel to the cleavage plane is always higher (R$$\simeq_-$$5%) than that of the section cut normal. The optical symmetry of 5 bireflecting minerals was determined by noting the variation in reflectivity at $544m{\mu}$. The data indicate that covellite is optically uniaxial positive and graphite is optically uniaxial negative. The Rm values for enargite and famatinite are clearly closer to the minimum value for the mineral ($R_1$) than to the maximum value ($R_2$) : the minerals can be recognized as optically biaxial positive. Enargite and famatinite cut parallel to cleavage have much higher hardness values (HV=> $200kg/mm^2$) than those cut normal to cleavage. Vickers indentations exhibit characteristic features for all the bireflecting mineral species studied. Broad radicle groupings of the mineral species can be made with regard to the reflectivity microhardness numbers.

• Korean Journal of Remote Sensing
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• v.33 no.6_1
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• pp.931-946
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• 2017

The purpose of this study is to observe and analyze soil moisture conditions with high resolution and to evaluate its application feasibility to agriculture. For this purpose, we used three Landsat-8 OLI (Operational Land Imager)/TIRS (Thermal Infrared Sensor) optical and thermal infrared satellite images taken from May to June 2015, 2016, and 2017, including the rural areas of Jeollabuk-do, where 46% of agricultural areas are located. The soil moisture conditions at each date in the study area can be effectively obtained through the SPI (Standardized Precipitation Index)3 drought index, and each image has near normal, moderately wet, and moderately dry soil moisture conditions. The temperature vegetation dryness index (TVDI) was calculated to observe the soil moisture status from the Landsat-8 OLI/TIRS images with different soil moisture conditions and to compare and analyze the soil moisture conditions obtained from the SPI3 drought index. TVDI is estimated from the relationship between LST (Land Surface Temperature) and NDVI (Normalized Difference Vegetation Index) calculated from Landsat-8 OLI/TIRS satellite images. The maximum/minimum values of LST according to NDVI are extracted from the distribution of pixels in the feature space of LST-NDVI, and the Dry/Wet edges of LST according to NDVI can be determined by linear regression analysis. The TVDI value is obtained by calculating the ratio of the LST value between the two edges. We classified the relative soil moisture conditions from the TVDI values into five stages: very wet, wet, normal, dry, and very dry and compared to the soil moisture conditions obtained from SPI3. Due to the rice-planing season from May to June, 62% of the whole images were classified as wet and very wet due to paddy field areas which are the largest proportions in the image. Also, the pixels classified as normal were analyzed because of the influence of the field area in the image. The TVDI classification results for the whole image roughly corresponded to the SPI3 soil moisture condition, but they did not correspond to the subdivision results which are very dry, wet, and very wet. In addition, after extracting and classifying agricultural areas of paddy field and field, the paddy field area did not correspond to the SPI3 drought index in the very dry, normal and very wet classification results, and the field area did not correspond to the SPI3 drought index in the normal classification. This is considered to be a problem in Dry/Wet edge estimation due to outlier such as extremely dry bare soil and very wet paddy field area, water, cloud and mountain topography effects (shadow). However, in the agricultural area, especially the field area, in May to June, it was possible to effectively observe the soil moisture conditions as a subdivision. It is expected that the application of this method will be possible by observing the temporal and spatial changes of the soil moisture status in the agricultural area using the optical satellite with high spatial resolution and forecasting the agricultural production.