• Title/Summary/Keyword: Optical feature

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Role of Features in Plasma Information Based Virtual Metrology (PI-VM) for SiO2 Etching Depth (플라즈마 정보인자를 활용한 SiO2 식각 깊이 가상 계측 모델의 특성 인자 역할 분석)

  • Jang, Yun Chang;Park, Seol Hye;Jeong, Sang Min;Ryu, Sang Won;Kim, Gon Ho
    • Journal of the Semiconductor & Display Technology
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    • v.18 no.4
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    • pp.30-34
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    • 2019
  • We analyzed how the features in plasma information based virtual metrology (PI-VM) for SiO2 etching depth with variation of 5% contribute to the prediction accuracy, which is previously developed by Jang. As a single feature, the explanatory power to the process results is in the order of plasma information about electron energy distribution function (PIEEDF), equipment, and optical emission spectroscopy (OES) features. In the procedure of stepwise variable selection (SVS), OES features are selected after PIEEDF. Informative vector for developed PI-VM also shows relatively high correlation between OES features and etching depth. This is because the reaction rate of each chemical species that governs the etching depth can be sensitively monitored when OES features are used with PIEEDF. Securing PIEEDF is important for the development of virtual metrology (VM) for prediction of process results. The role of PIEEDF as an independent feature and the ability to monitor variation of plasma thermal state can make other features in the procedure of SVS more sensitive to the process results. It is expected that fault detection and classification (FDC) can be effectively developed by using the PI-VM.

MEASUREMENT OF NUCLEAR FUEL ROD DEFORMATION USING AN IMAGE PROCESSING TECHNIQUE

  • Cho, Jai-Wan;Choi, Young-Soo;Jeong, Kyung-Min;Shin, Jung-Cheol
    • Nuclear Engineering and Technology
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    • v.43 no.2
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    • pp.133-140
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    • 2011
  • In this paper, a deformation measurement technology for nuclear fuel rods is proposed. The deformation measurement system includes a high-definition CMOS image sensor, a lens, a semiconductor laser line beam marker, and optical and mechanical accessories. The basic idea of the proposed deformation measurement system is to illuminate the outer surface of a fuel rod with a collimated laser line beam at an angle of 45 degrees or higher. For this method, it is assumed that a nuclear fuel rod and the optical axis of the image sensor for observing the rod are vertically composed. The relative motion of the fuel rod in the horizontal direction causes the illuminated laser line beam to move vertically along the surface of the fuel rod. The resulting change of the laser line beam position on the surface of the fuel rod is imaged as a parabolic beam in the high-definition CMOS image sensor. An ellipse model is then extracted from the parabolic beam pattern. The center coordinates of the ellipse model are taken as the feature of the deformed fuel rod. The vertical offset of the feature point of the nuclear fuel rod is derived based on the displacement of the offset in the horizontal direction. Based on the experimental results for a nuclear fuel rod sample with a formation of surface crud, an inspection resolution of 50 ${\mu}m$ is achieved using the proposed method. In terms of the degree of precision, this inspection resolution is an improvement of more than 300% from a 150 ${\mu}m$ resolution, which is the conventional measurement criteria required for the deformation of neutron irradiated fuel rods.

A Study on the Productivity Improvement of Thermal Infrared Camera an Optical Lens (열적외선 카메라용 광학계 생산성 향상에 관한 연구)

  • Kim, Sung-Yong;Hyun, Dong-Hun
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.18 no.3
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    • pp.285-293
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    • 2009
  • Thermal infrared cameras have been conducted actively in various application areas, such as military, medical service, industries and cars. Because of their characteristic of sensing the radiant heat emitted from subjects in the range of long-wavelength($3{\sim}5{\mu}m$ or $8{\sim}12{\mu}m$), and of materializing a vision system, when general optics materials are used, they don't react to the light in the range of long-wavelength, and can't display their optic functions. Therefore, the materials with the feature of higher refractive index, reacting to the range of long-wavelength, are to be used. The kinds of materials with the characteristic of higher refractive index are limited, and their features are close to those of metals. Because of these metallic features, the existing producing method of optical systems were direct manufacturing method using grinding method or CAD/CAM, which put limit on productivity and made it difficult to properly cope with the increasing demand of markets. GASIR, a material, which can be molded easily, was selected among infrared ray optics materials in this study, and the optical system was designed with two Aspheric lenses. Because the lenses are molded in the environment of high temperature and high pressure, they require a special metallic pattern. The metallic pattern was produced with materials with ultra hardness that can stand high temperature and high pressure. As for the lens mold, GMP(Glass Molding Press) of the linear transfer method was used in order to improve the productivity of optical systems for thermal infrared cameras, which was the goal of this paper.

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Optical Flow-Based Marker Tracking Algorithm for Collaboration Between Drone and Ground Vehicle (드론과 지상로봇 간의 협업을 위한 광학흐름 기반 마커 추적방법)

  • Beck, Jong-Hwan;Kim, Sang-Hoon
    • KIPS Transactions on Software and Data Engineering
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    • v.7 no.3
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    • pp.107-112
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    • 2018
  • In this paper, optical flow based keypoint detection and tracking technique is proposed for the collaboration between flying drone with vision system and ground robots. There are many challenging problems in target detection research using moving vision system, so we combined the improved FAST algorithm and Lucas-Kanade method for adopting the better techniques in each feature detection and optical flow motion tracking, which results in 40% higher in processing speed than previous works. Also, proposed image binarization method which is appropriate for the given marker helped to improve the marker detection accuracy. We also studied how to optimize the embedded system which is operating complex computations for intelligent functions in a very limited resources while maintaining the drone's present weight and moving speed. In a future works, we are aiming to develop collaborating smarter robots by using the techniques of learning and recognizing targets even in a complex background.

Hand Gesture Interface Using Mobile Camera Devices (모바일 카메라 기기를 이용한 손 제스처 인터페이스)

  • Lee, Chan-Su;Chun, Sung-Yong;Sohn, Myoung-Gyu;Lee, Sang-Heon
    • Journal of KIISE:Computing Practices and Letters
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    • v.16 no.5
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    • pp.621-625
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    • 2010
  • This paper presents a hand motion tracking method for hand gesture interface using a camera in mobile devices such as a smart phone and PDA. When a camera moves according to the hand gesture of the user, global optical flows are generated. Therefore, robust hand movement estimation is possible by considering dominant optical flow based on histogram analysis of the motion direction. A continuous hand gesture is segmented into unit gestures by motion state estimation using motion phase, which is determined by velocity and acceleration of the estimated hand motion. Feature vectors are extracted during movement states and hand gestures are recognized at the end state of each gesture. Support vector machine (SVM), k-nearest neighborhood classifier, and normal Bayes classifier are used for classification. SVM shows 82% recognition rate for 14 hand gestures.

Development Plan for the GMT Fast-steering Secondary Mirror

  • Lee, Sugnho;Han, Jeong-Yeol;Park, Chan;Jeong, Ueejeong;Yoon, Yang-noh;Song, Je Heon;Moon, Bongkon;Park, Byeong-Gon;Cho, Myung K.;Dribusch, Christoph;Park, Won Hyun;Jun, Youra;Yang, Ho-Soon;Moon, Il-Kwon;Oh, Chang Jin;Kim, Ho-Sang;Lee, Kyoung-Don;Bernier, Robert;Gardner, Paul;Alongi, Chris;Rakich, Andrew;Dettmann, Lee;Rosenthal, Wylie
    • The Bulletin of The Korean Astronomical Society
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    • v.41 no.2
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    • pp.66.3-67
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    • 2016
  • The Giant Magellan Telescope (GMT) will feature two interchangeable Gregorian secondary mirrors, an adaptive secondary mirror (ASM) and a fast-steering secondary mirror (FSM). The FSM has an effective diameter of 3.2 m and built as seven 1.1 m diameter circular segments, which are conjugated 1:1 to the seven 8.4m segments of the primary. Each FSM segment contains a tip-tilt capability for fine co-alignment of the telescope subapertures and fast guiding to attenuate telescope wind shake and mount control jitter. This tip-tilt capability thus enhances performance of the telescope in the seeing limited observation mode. As the first stage of the FSM development, KASI conducted a Phase 0 study to develop a program plan detailing the design and manufacturing process for the seven FSM segments. The GMTO-KASI team matured this plan via an internal review in May 2016 and the revised plan was further assessed by an external review in June 2016. In this poster, we present the technical aspects of the FSM development plan.

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CMOS Gigahertz Low Power Optical Preamplier Design (CMOS 저잡음 기가비트급 광전단 증폭기 설계)

  • Whang, Yong-Hee;Kang, Jin-Koo
    • Journal of IKEEE
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    • v.7 no.1 s.12
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    • pp.72-79
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    • 2003
  • Classical designs of optical transimpedance preamplifier for p-i-n photodiode receiver circuits generally employ common source transimpedance input stages. In this paper, we explore the design of a class of current-mode optical transimpedance preamplifier based upon common gate input stages. A feature of current-mode optical transimpedance preamplifier is high gain and high bandwidth. The bandwidth of the transimpedance preamplifier can also be increased by the capacitive peaking technique. In this paper we included the development and application of a circuit analysis technique based on the minimum noise. We develop a general formulation of the technique, illustrate its use on a number of circuit examples, and apply it to the design and optimization of the low-noise transimpedance amplifier. Using the noise minimization method and the capacitive peaking technique we designed a transimpedance preamplifier with low noise, high-speed current-mode transimpedance preamplifier with a 1.57GHz bandwidth, and a 2.34K transimpedance gain, a 470nA input noise current. The proposed preamplifier consumes 16.84mW from a 3.3V power supply.

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Map Creation Algorithm and Initial Attitude Estimation Method for Optical Head Tracker System (광학방식 헤드 트랙커를 위한 맵 생성 알고리즘과 초기자세 추정기법)

  • Lee, Young-Jun;Park, Chan-Gook
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.36 no.7
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    • pp.680-687
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    • 2008
  • This paper presents map creation algorithm and initial attitude estimation method for the proposed optical head tracker system. The optical head tracker system consists of the IR stereo cameras and infrared LEDs as features on the helmet. In order for the stereo camera to track the luminous LEDs, it must take in to account the light radiation from the LEDs to determine the position of the center points. The proposed map creation algorithm makes map data about the position of features center points on the helmet frame. Also, initial attitude estimation method is proposed to estimate the initial attitude and position of a pilot head from the camera frame by the use of the feature pattern on the helmet. Therefore, the head motion can be expressed with respect to the body frame of a flight.

Characteristics of Black Carbon in PM2.5 Observed in Gwangju for Year 2008 and Examination of Filter Loading Effect (2008년 광주지역 검댕입자 특성 및 광학적 산란효과 보상)

  • Jung, Jung-Hoon;Park, Seung-Shik
    • Journal of Korean Society for Atmospheric Environment
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    • v.26 no.4
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    • pp.392-402
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    • 2010
  • Black carbon (BC) concentrations were measured with an aethalometer (AE-16, 880 nm) at time interval of 5-min at an urban site of Gwangju over a year 2008. 24-hr filter-based integrated measurements of $PM_{2.5}$ particles were also made at the same site during the winter and summer intensive periods to test any optical loading bias in the raw BC data measured by aethalometer. BC concentration was higher in winter than in summer, possibly due to increase in emissions from energy consumption and poor dispersion with reduction of boundary layer in winter. Also temporal cycles of BC indicate that short-term transient spikes were common, occurring primarily during the rush-hour periods. A similar feature was also observed in diurnal concentration cycle of CO, mainly emitted from motor vehicles. When both low wind speed and weather patterns such as mist, haze and etc were combined, high BC concentrations frequently occurred. The amount of optical loading effect described by the "k" factor showed the seasonal variation, ranging from 0.0003 to 0.0036. This implies that optical loading effect is not seen at all times. From the comparison between the filter-based elemental carbon (EC) and aethalometer BC data, it was found that the loading compensated BC values were more reasonable than the raw BC ones reported from the aethalometer.

Ultrafast and flexible UV photodetector based on NiO

  • Kim, Hong-sik;Patel, Malkeshkumar;Kim, Hyunki;Kim, Joondong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.389.2-389.2
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    • 2016
  • The flexible solid state device has been widely studied as portable and wearable device applications such as display, sensor and curved circuits. A zero-bias operation without any external power consumption is a highly-demanding feature of semiconductor devices, including optical communication, environment monitoring and digital imaging applications. Moreover, the flexibility of device would give the degree of freedom of transparent electronics. Functional and transparent abrupt p/n junction device has been realized by combining of p-type NiO and n-type ZnO metal oxide semiconductors. The use of a plastic polyethylene terephthalate (PET) film substrate spontaneously allows the flexible feature of the devices. The functional design of p-NiO/n-ZnO metal oxide device provides a high rectifying ratio of 189 to ensure the quality junction quality. This all transparent metal oxide device can be operated without external power supply. The flexible p-NiO/n-ZnO device exhibit substantial photodetection performances of quick response time of $68{\mu}s$. We may suggest an efficient design scheme of flexible and functional metal oxide-based transparent electronics.

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