• Industrial Engineering and Management Systems
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• v.14 no.4
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• pp.392-400
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• 2015

Monitoring of plasma etch processes for fault detection is one of the hallmark procedures in semiconductor manufacturing. Optical emission spectroscopy (OES) has been considered as a gold standard for modeling plasma etching processes for on-line diagnosis and monitoring. However, statistical quantitative methods for processing the OES data are still lacking. There is an urgent need for a statistical quantitative method to deal with high-dimensional OES data for improving the quality of etched wafers. Therefore, we propose a robust relevance vector machine (RRVM) for regression with statistical quantitative features for modeling etch rate and uniformity in plasma etch processes by using OES data. For effectively dealing with the OES data complexity, we identify seven statistical features for extraction from raw OES data by reducing the data dimensionality. The experimental results demonstrate that the proposed approach is more suitable for high-accuracy monitoring of plasma etch responses obtained from OES.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.197-202
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• 2005

An aspheric lens is one of a key point optical element in the optical industry. The feature of an aspheric lens is not to have the spherical aberration. An aspheric lens is also essential element for high-precision and light-weight in the optical machine. Generally it have been used in a tailor progression an aspheric lens modelling much. In this study we applied a lay back-tracer using a index of refraction to draw a creative aspheric lens. Also we developed the automatic design program for aspheric lens. We manufactured the aspheric lens and executed a comparison experiment for refraction situation of shape and straightness experiment to inspect the drawn aspheric lens in this study.

• Tribology and Lubricants
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• v.16 no.5
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• pp.317-323
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• 2000

The film thickness and shape of elastohydrodynamic lubrication is measured by optical interferometer, which is the most precise method for EHL film measurement. However, the interpretation of the image pattern from optical viscometer is not simple for two-dimensional shape. A newly developed method of image processing makes it possible to evaluate the film thickness and shape in every point of contact region with two dimensional aspects. In this study, we captured the film shape of EHL film by the monochromatic incident light and analyzed the film thickness with the image processing method, which uses phase shift method. From the values of intensity in fringes, the qualitative feature of film thickness in the contact area are obtained by using Zernike polynomial

• Korean Journal of Optics and Photonics
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• v.31 no.1
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• pp.20-25
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• 2020

To design a wide-field two-mirror system, the system must feature an off-axial field, to avoid ray obstruction and field screening by the secondary mirror. The off-axial aberrations of the system cannot be corrected sufficiently, though, because there are only a few design parameters. The present study designs an improved off-axial-field two-mirror system using a decentered aperture stop.

• Smart Structures and Systems
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• v.1 no.1
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• pp.63-82
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• 2005

This paper introduces a technology for robust and low maintenance cost sensor network capable to detect accelerations below a micro-g in a wide frequency bandwidth (above 1,000 Hz). Sensor networks with such performance are critical for navigation, seismology, acoustic sensing, and for the health monitoring of civil structures. The approach is based on the fabrication of an array of high sensitivity accelerometers, each utilizing Fabry-Perot cavity with wavelength-dependent reflectivity to allow embedded optical detection and serialization. The unique feature of the approach is that no local power source is required for each individual sensor. Instead one global light source is used, providing an input optical signal which propagates through an optical fiber network from sensor-to-sensor. The information from each sensor is embedded onto the transmitted light as an intrinsic wavelength division multiplexed signal. This optical "rainbow" of data is then assessed providing real-time sensing information from each sensor node in the network. This paper introduces the Fabry-Perot based accelerometer and examines its critical features, including the effects of imperfections and resolution estimates. It then presents serialization techniques for the creation of systems of arrayed sensors and examines the effects of serialization on sensor response. Finally, a fabrication process is proposed to create test structures for the critical components of the device, which are dynamically characterized.

• The Bulletin of The Korean Astronomical Society
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• v.39 no.2
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• pp.69.2-69.2
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• 2014

We present space-based near-IR (NIR) and optical photometry of globular clusters (GCs) of 16 early-type galaxies in the Fornax and Virgo Clusters. The NIR imaging data for the nearby galaxies was acquired with the IR Channel of the Wide Field Camera 3 (WFC3/IR) in the F110W ($J_{110}$) and F160W ($H_{160}$) bandpasses. We introduce the full sample of our WFC3/IR program, describe data reductions and photometric measurements including GC candidate selection criteria, and then show selected GCs' color-magnitude diagrams. The tilted features in the diagrams related to the morphological types of host galaxies are discussed in the context of galaxy formation and evolution histories. Combining F475W ($g_{475}$) and F850LP ($z_{850}$) data taken from the Advanced Camera for Surveys Virgo and Fornax Cluster Surveys with our NIR data, we investigate the bimodality in optical-NIR color distribution and the nonlinear feature of the optical-NIR color relation as a function of optical color for these extragalactic GC systems.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.9 no.5
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• pp.1606-1623
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• 2015

Optical switching will be applied in datacenter networks because electronic switching is costly and power-consuming. In this paper, considering the ring-based interconnection using optical switching in the core of a datacenter, we study the home circuit (HC) construction for the labeled optical burst switching with home circuit (LOBS-HC), a new paradigm trying to share wavelengths among the HCs from the same source. In particular, aiming to construct HCs dynamically and properly, a scheme named optimal path matching and symmetric HC matching (OPM-SHM) is proposed. The main idea of OPM-SHM is to dynamically construct HCs by sharing wavelength(s) not only among the same-source HCs but also with symmetric HCs which have different sources other than the original LOBS-HC features. The simulation results demonstrate that OPM-SHM achieves better performance than some other methods in terms of burst loss rate and wavelength utilization of physical links. More specially, it maintains good load balancing for the datacenter network using an LOBS-HC ring. In addition, due to the symmetric feature of SHM, the proposed scheme can decrease the upper bound of the average hop count of the routing paths to half of the ring size.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.1
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• pp.129-137
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• 2000

In this paper, a new method of noncontact measurement has been developed for a 3 dimensional topography in semiconductor wafer, implementing a new optical probe based on the precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface, and to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. The distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. The precision calibration technique has been applied, giving about 10 nanometer resolution and 72 nanometer of four sigma uncertainty. In order to quantitize the micro pattern in the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and excellent 3 dimensional measurement capability.

• Journal of Broadcast Engineering
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• v.17 no.3
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• pp.519-528
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• 2012

Voice activity detection (VAD) is generally conducted by extracting features from the acoustic signal and a decision rule. The performance of such VAD algorithms driven by the input acoustic signal highly depends on the acoustic noise. When video signals are available as well, the performance of VAD can be enhanced by using the visual information which is not affected by the acoustic noise. Previous visual VAD algorithms usually use single visual feature to detect the lip activity, such as active appearance models, optical flow or intensity variation. Based on the analysis of the weakness of each feature, we propose to combine intensity change measure and the optical flow in the mouth region, which can compensate for each other's weakness. In order to minimize the computational complexity, we develop simple measures that avoid statistical estimation or modeling. Specifically, the optical flow is the averaged motion vector of some grid regions and the intensity variation is detected by simple thresholding. To extract the mouth region, we propose a simple algorithm which first detects two eyes and uses the profile of intensity to detect the center of mouth. Experiments show that the proposed combination of two simple measures show higher detection rates for the given false positive rate than the methods that use a single feature.

• Journal of the Institute of Electronics and Information Engineers
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• v.50 no.8
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• pp.232-237
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• 2013

A newly developed fall detection algorithm using the HMM (Hidden Markov Model) extracted from the video is introduced. To distinguish between the fall from personal difference fall pattern or the normal activities of daily living (ADL), HMM machine learning algorithm is used. For getting fall feature vector of video, the motion vector from the optical flow is applied to the PCA (Principal Component Analysis). The combination of the angle, ratio of long-short axis, velocity from results of PCA make the new fall feature parameters. These parameters were applied to the HMM and the results were compared and analyzed. Among the newly proposed various kinds of fall parameters, the angle of movement showed the best results. The results show that this parameter can distinguish various types of fall from ADLs with 91.5% sensitivity and 88.01% specificity.