• Korean Journal of Optics and Photonics
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• v.34 no.6
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• pp.235-240
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• 2023

The optical signal injected into an end-fire optical phased array propagates along the waveguides inside the device and is emitted from the edge of the antenna. In general, reflection and scattering occur at the boundary, thereby reducing the emission efficiency of the optical signal. In this article, we propose a silicon nitride (Si₃N₄) tapered waveguide antenna structure whose width is tapered toward the emitting edge, achieving high emission efficiency operating at the 1,550 nm wavelength. The Si₃N₄ tapered waveguide antenna was numerically designed using the 3D finite-difference time-domain method. The optical signal emission efficiency increased from 78% to 96.3%, while reflectance decreased from 22% to 3.7% compared with the untapered waveguide antenna counterpart. This result will not only boost the optical signal intensity but also mitigate optical noise resulting from back reflection along the waveguide in the end-fire optical phased array device.

• Journal of the Semiconductor & Display Technology
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• v.12 no.2
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• pp.13-17
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• 2013

In lighting system where several large-area organic light-emitting diode (OLED) lighting panels are involved, panel aging may appear differently from each other, resulting in a falling-off in lighting quality. To achieve uniform light output across large-area OLED lighting panels, we have employed an optical feedback circuit. Light output from each OLED panel is monitored by the optical feedback circuit that consists of a photodiode, I-V converter, 10-bit analogdigital converter (ADC), and comparator. A photodiode generates current by detecting OLED light from one side of the glass substrate (i.e., edge emission). Namely, the target luminance from the emission area (bottom emission) of OLED panels is monitored by current generated from the photodiode mounted on a glass edge. To this end, we need to establish a mapping table between the ADC value and the luminance of bottom emission. The reference ADC value corresponds to the target luminance of OLED panels. If the ADC value is lower or higher than the reference one (i.e., when the luminance of OLED panel is lower or higher than its target luminance), a micro controller unit (MCU) adjusts the pulse width modulation (PWM) used for the control of the power supplied to OLED panels in such a way that the ADC value obtained from optical feedback is the same as the reference one. As such, the target luminance of each individual OLED panel is unchanged. With the optical feedback circuit included in the lighting system, we have observed only 2% difference in relative intensity of neighboring OLED panels.

• Journal of the Microelectronics and Packaging Society
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• v.7 no.4
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• pp.43-47
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• 2000

The etching characteristic of a tantalum thin film with pure chlorine plasma was studied using an electron cyclotron resonance etcher system. Optical emission actinometry (OEA) was used for the study of the etching mechanism of a tantalum thin film and optimum process condition was achieved by OEA study. Based on this mechanism, double step etching was performed and 0.15 $\mu\textrm{m}$ L & S was acquired successfully suppressing the microloading effect.

• Publications of The Korean Astronomical Society
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• v.15 no.spc1
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• pp.113-118
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• 2000

A magnetic cataclysmic variable has a rotating magnetic white dwarf which accretes matter from its late type companion. Kim & Beuermann (1995) presented a phenomenological model of the accretion from its surrounding structure e.g., a disk into the magnetosphere of the white dwarf, and presented results for the spin modulated X-ray spectrum and light curves. Using this model, we calculate the optical continuum and line emission which result from reprocessing of X-rays in the accretion stream within the magnetosphere. Penning (1985) suggested the observed spin-modulated radial-velocity variations might result from reprocession of X-rays in the disk. We, however, find the radiation can be originated from the magnetosphere accretion stream. We use the same geometrical model to calculate the optical and the X-ray behaviour. The results from the two wavelength bands are internally consistent. We conclude that this approach will increase the diagnostic accuracies of the results.

• Bulletin of the Korean Chemical Society
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• v.25 no.5
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• pp.620-624
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• 2004

Optical emission studies were performed to investigate thermal and dynamical properties of a plume produced by laser ablation of a graphite target in a nitrogen atmosphere. Experimental spectra of $C_2(d^3{\Pi}_g{\to}a^3{\Pi}_u$, ${\Delta}_V$=1) and CN ($B^2{\Sigma}^+{\to}X^2{\Sigma}^+,{\Delta}_V=0)$ were simulated to obtain the vibrational and rotational temperatures of the electronically excited species at various laser fluences and distances from the target. The spectroscopic temperatures of both molecules were found to be nearly independent of the laser fluence. The temperature of CN molecules was peaked in the middle of the plume while that of $C_2$decreased with increase in the distance. At a given distance, the temperature of CN molecules was clearly higher than that of $C_2$.

• Industrial Engineering and Management Systems
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• v.14 no.4
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• pp.392-400
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• 2015

Monitoring of plasma etch processes for fault detection is one of the hallmark procedures in semiconductor manufacturing. Optical emission spectroscopy (OES) has been considered as a gold standard for modeling plasma etching processes for on-line diagnosis and monitoring. However, statistical quantitative methods for processing the OES data are still lacking. There is an urgent need for a statistical quantitative method to deal with high-dimensional OES data for improving the quality of etched wafers. Therefore, we propose a robust relevance vector machine (RRVM) for regression with statistical quantitative features for modeling etch rate and uniformity in plasma etch processes by using OES data. For effectively dealing with the OES data complexity, we identify seven statistical features for extraction from raw OES data by reducing the data dimensionality. The experimental results demonstrate that the proposed approach is more suitable for high-accuracy monitoring of plasma etch responses obtained from OES.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.2
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• pp.173-177
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• 2008

We have developed the transparent passivation layer for top emission organic light emitting diodes using CsCl thin film by the thermal evaporation method. The CsCl film was deposited on the Ca/Ag semitransparent cathode. The optical transmittance of Ca/ Ag/CsCl triple layer is higher than that of Ca/Ag double layer in the visible range. The device with a structure of glass/Ni/2-TNATA/a-NPD/Alq3:C545T/BCP/Alq3/Ca/Ag/CsCl results in higher efficiency than the device without CsCl passivation layer. The device without CsCl thin film shows a current efficiency of 7 cd/A, whereas the device passivated with CsCl layer shows an efficiency of 10 cd/A. This increase of efficiency isresulted from the increased optical extraction by the CsCl passivation layer.

• Journal of the Optical Society of Korea
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• v.18 no.1
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• pp.15-22
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• 2014

We present a novel bandwidth measurement scheme for multimode optical fibers. Amplified spontaneous emission (ASE) radiation was utilized for a source of intrinsically modulated light with a wide modulation bandwidth. In our measurement scheme, the continuous-wave (CW) ASE light that passed through a multimode fiber (MMF) under test was analyzed by the fourth-order power with a high-speed photodetector and an electric spectrum analyzer. The modulation transfer function of the multimode fiber could be directly measured with the photoelectric spectra in the modulation frequency domain. The measurement result of our method was experimentally compared to that of the conventional measurement scheme based on the impulse response measurement. It has been found that our scheme provides a stable measurement means of MMF characterization that is suitable for the field testing due to the simplicity of the system.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.12 s.255
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• pp.1557-1563
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• 2006

A scanning electron microscope (SEM) is well known as a measurement and analysis equipment in nano technology, being widely used as a crucial one in measuring objects or analyzing chemical components. It is equipped with an electron optical system that consists of an electron beam source, electromagnetic lenses, and a detector. The present work concerns numerical analysis for the electron optical system so as to facilitate design of each component. Through the numerical analysis, we investigate trajectories of electron beams emitted from a nano-scale field emission tip, and compare the result with that of experimental observations. Effects of various components such as electromagnetic lenses and an aperture are also discussed.

• Journal of the Korean Physical Society
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• v.73 no.10
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• pp.1566-1570
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• 2018

We investigated the visible emission property of $SrTiO_3$ (STO) single crystals irradiated with gammy-ray (${\gamma}$-ray) at various total doses up to 900 kGy. The electric and optical absorption properties of the irradiated STO samples were hardly changed with the ${\gamma}$-ray irradiation, compared with those of un-irradiated STO. In contrast, the visible emission near 550 nm increased with the ${\gamma}$-ray dose increasing. While the development of the visible emission was indicative of the increase of oxygen vacancies inside STO by the ${\gamma}$-ray irradiation, the newly generated oxygen vacancies were not significantly harmful to the electric and optical properties of STO. We concluded that the STO single crystal should have a good tolerance against the damage by the ${\gamma}$-ray irradiation.