• Journal of the Korean Crystal Growth and Crystal Technology
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• v.3 no.2
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• pp.162-166
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• 1993

Spodumene$(LiAlLi_2O_6)$ single crystal was grown by Floating Zone process using the image furnace having the halogen lamp as heat sources. The crystal had the dimension of 50~60mm length and 6~8mm diameter. The colors of as-grown crystals were green, black and pale green respectively. The composition of the crystal was analized by XRD and FUR measurement. Growth orientation was examined by Laue back reflection pattern and for measuring the light transmittance, OPtical transmittance was measured.

• Transactions on Electrical and Electronic Materials
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• v.3 no.3
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• pp.1-7
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• 2002

The developed patterns by direct writing of electron beam are measured by AFM, FESEM and optical profiler of WYKO NT3300. From different measurement methods, the measured linewidths of the patterns are shown a little bit wider than designed pattern size due to electrons scattering effect during direct writing of electron beam. The optimized conditions of these experiments are suggested and explained for the forming of structures below 0.1 ㎛ dimension size. Because of electron scattering effects from the different under layers such as Si, Si$_3$N$_4$ and aluminum, the developed pattern size is also influenced by the accelerated energy of electrons, dose, resist and soft and hard bake conditions in PMMA. The distributions of electron beam and calculations of backscattering coefficient are demonstrated by Monte Carlo simulation. From the measured results, the developed linewidth of PMMA/Al /silicon is shown a little bit wider than that of PMMA/Si$_3$N$_4$/silicon structure due to the backscattering effects.

• Transactions of the Society of Information Storage Systems
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• v.6 no.2
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• pp.74-78
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• 2010

In this paper, 2-axis driving mechanism, which uses voice coil motor (VCM), is proposed to measure the friction force. The proposed VCM actuator consists of two parts; structural part and magnetic circuit part. Structural part is simplified to perform the friction experiments. Magnetic circuit part is composed of two parts. The experiments are accomplished by changing the mass of moving part. Through the experiments, optimal dimension is selected. Finally, the experimental results are verified and the optimal case is applied to the 2-axis driving mechanism, optical image stabilization actuator.

• Journal of the Korea Institute of Military Science and Technology
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• v.17 no.1
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• pp.142-148
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• 2014

The mirror which is considered in designing a MFD is off-axis primary one and its dimension is wide 556mm height 345mm. The MFD(Mirror Fixation Device) load specification is generated for the high resolution mirror. The optical WFEs for unit loads are calculated from mirror sensitivity analysis and they are compared with allocated allowable optical WFE. The parasite load for the MFD is calculated from their comparison. The MFD compliant with the parasite load is designed.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.5
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• pp.142-148
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• 2004

In this paper, to detect exciting frequency on the latticed fence structure, fiber optic sensor using Sagnac interferometer was fabricated and tested. The latticed structure fabricated with dimension of 180 cm wide and 180 cm high, the optical fiber, 50 m in length, distributed and fixed on the latticed structure. Single mode fiber, a laser with 1,550 m wavelength, and $3{\times}3$ coupler were used. Excited vibration signal applied to the latticed structure from 200 Hz to 1 KHz. The detected optical signals were compared to the detected acceleration signals and analyzed on the time and frequency domain. Based on the experimental results, fiber optic sensor using Sagnac interferometer detected exciting frequency, effectively. This system can be applied to the structural health monitoring system.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.7
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• pp.569-576
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• 2004

In this paper, to detect external sound frequencies on the latticed structure, fiber optic sensor net using Sagnac interferometer was fabricated and tested. The latticed structure was fabricated with a dimension of 50 cm in width and 50 cm in height. The optical fiber of 50m in length was distributed and fixed on the surface of the latticed structure. Single mode fiber, a laser with 1,550 nm in wavelength, 2 ${\times}$ 2 coupler were used. External sound signal, 240 Hz, 495 Hz, 1.445 kHz, 2k Hz, applied to the fiber optic sensor net and the detected optical signals were compared to the detected microphone signals against time and frequency domains. Based on the experimental results, fiber optic sensor net using Sagnac interferometer detected external sound frequency, effectively. This system can be expanded to the structural health monitoring system.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.05a
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• pp.68-70
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• 2003

New Si pin photodiodes with $p^+-cap$ region have been designed and fabricated for the application in a PDIC of the optical pick-up system. The fabricated devices were designed with the incident optical window of $120\mu\textrm{m}$ and were classified into three structures according to <$p^+-cap$ dimensions. As the result of experiments, the devices with the $p^+$-cap dimension of $0\mu\textrm{m}$(no cap), $65\mu\textrm{m}$, and $120\mu\textrm{m}$ showed the sensitivity of 1.0 A/W, 0.86 A/W, and 0.6 A/W, respectively.

• Journal of the Semiconductor & Display Technology
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• v.21 no.1
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• pp.108-113
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• 2022

The deep-learning-based measurement method with the through-focus scanning optical microscopy (TSOM) estimated the size of the object using the classification. However, the measurement performance of the method depends on the number of subdivided classes, and it is practically difficult to prepare data at regular intervals for training each class. We propose an approach to measure the size of an object in the TSOM image using the deep-learning regression model instead of using classification. We attempted our proposed method to estimate the top critical dimension (TCD) of through silicon via (TSV) holes with 2461 TSOM images and the results were compared with the existing method. As a result of our experiment, the average measurement error of our method was within 30 nm (1σ) which is 1/13.5 of the sampling distance of the applied microscope. Measurement errors decreased by 31% compared to the classification result. This result proves that the proposed method is more effective and practical than the classification method.

• Korean Journal of Optics and Photonics
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• v.17 no.2
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• pp.175-180
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• 2006

A single sideband(SSB) modulator operating at 5.5 GHz was fabricated by polarization inversion techniques. The dimension of domain inversion in a $LiINbO_3$ Mach-Zehnder structure was precisely controlled so that the RF signal applied on two Mach-Zehnder arms gives rise to $90^{\circ}$ effective phase difference. The single sideband suppression was maximized by optimization of the polarization status of the optical input and by the DC bias value. The fabricated device showed the center frequency of 5.8 GHz and the maximum sideband suppression of 33dB, where the bandwidth of 15 dB sideband suppression ranged over a 2.5 GHz span. The optical phase delay could be regulated by the DC bias voltage, fur example, the enhanced optical modulation sideband was distinctively switched from the upper sideband to the lower sideband by changing the DC bias voltage from 1.9 V to -10.6 V.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.78-78
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• 2015

Metamaterials, artificially structured nanomaterials, have enabled unprecedented phenomena such as invisibility cloaking and negative refraction. Especially, hyperbolic metamaterials also known as indefinite metamaterials have unique dispersion relation where the principal components of its permittivity tensors are not all with the same signs and magnitudes. Such extraordinary dispersion relation results in hyperbolic dispersion relations which lead to a number of interesting phenomena, such as super-resolution effect which transfers evanescent waves to propagating waves at its interface with normal materials and, the propagation of electromagnetic waves with very large wavevectors comparing they are evanescent waves and thus decay quickly in natural materials. In this abstract, I will focus discussing our efforts in achieving the unique optical property overcoming diffraction limit to achieve several extraordinary metamaterials and metadevices demonstration. First, I will present super-resolution imaging device called "hyperlens", which is the first experimental demonstration of near- to far-field imaging at visible light with resolution beyond the diffraction limit in two lateral dimensions. Second, I will show another unique application of metamaterials for miniaturizing optical cavity, a key component to make lasers, into the nanoscale for the first time. It shows the cavity array which successfully captured light in 20nm dimension and show very high figure of merit experimentally. Last, I will discuss the future direction of the hyperbolic metamaterial and outlook for the practical applications. I believe our efforts in sub-wavelength metamaterials having such extraordinary optical properties will lead to further advanced nanophotonics and nanooptics research.