• Journal of the Semiconductor & Display Technology
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• v.14 no.3
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• pp.1-5
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• 2015

In photolithography process, resolution enhancement techniques such as optical proximity correction (OPC) and phase shift mask (PSM) have been applied to improve resolution. Especially, sub-resolution assist feature (SRAF) is one of the most important OPC to enhance image quality including depth of focus (DOF). However, imaging performance of the mask could be varied with the diffraction order amplitude changed by inserting SRAF. Therefore, in this study, we investigated the imaging properties and process margin of attenuated PSM with SRAF. Reflectivities of attenuated PSMs at 13.5 nm were 3, 6, 9% and simulation was performed by $PROLITH^{TM}$. As a result, aerial image properties and DOF as well as diffraction efficiency were improved by increasing the reflectivity of attenuated PSM. Additionally, printed critical dimension variations depending on SRAF width and space error were also reduced for attenuated PSM with high reflectivity. However, SRAF could be printed when reflectivity of attenuated PSM is high enough. In conclusion, optimization of reflectivity of attenuated PSM and SRAF to prevent side-lobe from being printed is needed to be considered.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.9
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• pp.701-709
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• 2011

In semiconductor wafer fabrication, etching is one of the most critical processes, by which a material layer is selectively removed. Because of difficulty to correct a mistake caused by over etching, it is critical that etch should be performed correctly. This paper proposes a new approach for etch endpoint detection of small open area wafers. The traditional endpoint detection technique uses a few manually selected wavelengths, which are adequate for large open areas. As the integrated circuit devices continue to shrink in geometry and increase in device density, detecting the endpoint for small open areas presents a serious challenge to process engineers. In this work, a high-resolution optical emission spectroscopy (OES) sensor is used to provide the necessary sensitivity for detecting subtle endpoint signal. Partial Least Squares (PLS) method is used to analyze the OES data which reduces dimension of the data and increases gap between classes. Support Vector Machine (SVM) is employed to detect endpoint using the data after PLS. SVM classifies normal etching state and after endpoint state. Two data sets from OES are used in training PLS and SVM. The other data sets are used to test the performance of the model. The results show that the trained PLS and SVM hybrid algorithm model detects endpoint accurately.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.377-377
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• 2016

Under nanosecond-pulsed laser irradiation, light-absorbing thin films have been used for photoacoustic transmitters for ultrasound generation. Especially, nanostructured absorbers are attractive due to high optical absorption and efficient thermoacoustic energy conversion: for example, 2-dimensional (2-D) gold nanostructure array, synthetic gold nanoparticles, carbon nanotubes (CNTs), and reduced graphene oxides. Among them, CNT has been used to fabricate a composite film with polydimethylsiloxane (PDMS) that exhibits excellent photoacoustic conversion performance for high-frequency, high-amplitude ultrasound generation. Previously, CNT-PDMS nanocomposite films were made by using a high-temperature chemical vapor deposition (HTCVD) process for CNT growth. However, this approach is not suitable to fabricate large-area CNT films (>several cm2). This is because a chamber dimension of HTCVD is limited and also the process often causes nonuniform CNT growth when the film area increases. As an alternative approach, a solution-based process can be used to overcome these issues. We develop PDMS composite transmitters, based on the solution process, using several nanostructured light-absorbers such as CNTs, nanoink powders, and imprinted regular arrays of gold nanostructure. We compare fabrication processes of each composite transmitters and photoacoustic output performance.

• Journal of Conservation Science
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• v.9 no.1
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• pp.33-39
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• 2000

A well-bucket excavated from Seobu-dong, Kyungju was characterized and conserved. The bucket was heavily degraded by a diverse set of microorganisms during its long-term storage in the burial site. The distribution of maximum saturated moisture content was in the range of 614-1050%. The identification of species using optical microscope showed that the species was Pinus densiflora. The dimensional stability of the bucket was examined using sucrose as a dimension-stabilizing agent. The concentration of sucrose was started at 10% level and raised to 30, 50, 70% for 8 weeks. The changes of weight increase were varied with concentration. When the concentration of sucrose reached to 30%, 50%, the bucket showed the significant increase of weight, especially. Epoxy adhesives was used for the joining and restoring. Dimensional change and crack were not observed afterward.

• Korean Journal of Optics and Photonics
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• v.14 no.4
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• pp.406-412
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• 2003

We have developed a radio frequency excited slab waveguide $CO_2$ laser. The dimension of active volume is 2${\times}$40${\times}$400 mm. One concave and one convex mirror are used to make the unstable resonator of the positive branch. The radio frequency is 123 MHz and RF input power is varied from 100 to 900 W. The laser gas is set to a pressure of 10∼60 torr and the mixing ratio is $CO_2$:$N_2$:He=1:1:3. The laser output power of 70.7 W was obtained which corresponds to laser power to RF power conversion efficiency of 9.2%.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.1
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• pp.77-84
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• 2013

In this paper, we review two-dimensional measuring methods referring to target patterns. The patterns consist of two linearly-repeated patterns or is designed repeatedly in two-dimension. The repeated properties are reflectivity, refractivity, air-gapping distance, capacitance, magnetic reluctance, electrical resistance and sloping gradient, etc. However, the optical methods are generally used for high speed processing and density, and their encoding principles are treated here. In case of two-dimensional pattern, as there is not inherently error between single units encoding the pattern except for the metrology frame errors, the end-effector position of an object accompanying the pattern can be measured with respect of the global frame without via error. Therefore, it is regarded as a substitute for laser interferometer with severe environmental constraints and has been applied to the high-accurate planar actuator.

• Proceedings of the KIEE Conference
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• 2008.10a
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• pp.163-164
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• 2008

Chalcogenide glass has been known for many photo induced phenomena and superial electron / optical specific by structure flexibility, unique electronic configuration. It is become known to the greatest specific as photonic material medium that possible to perfect controlling by continuity and photo inducing direction of amorphous chalcogenide. In our experiment, we choose the amorphous As-Ge-Se-S and corning glass as a substrate. And then we have evaporated in the ${\sim}2{\times}10^{-6}$ Torr using a E-beam evaporator, completed thin film sample that have 1um thickness of As-Ge-Se-S in $600{\AA}$, $10{\sim}5{\AA}/s$. At first, we let the change the angle between laser and sample by holography litho method and then, expect that satisfied conclusion which 2-dimension diffraction lattice manufacture and specifics by investing a He-Ne laser for 2000 seconds.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.10 no.10
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• pp.2551-2556
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• 2009

The principal operation of a ring laser gyroscope depends on the phase difference for the counter-propagating waves within a closed path. The reflection mirrors mounted on the resonator block form the traveling waves. Thus, the dimension accuracy of resonator block influences the traveling path of beam. In order to maintain the stable optical beam path in the ring resonator, the piezo-driven moveable mirror is adopted for the path length control under the thermal expansion or mechanical strain of resonator block. This paper presents the mathematical description of the elastic behavior of piezo-driven mirror. This description can be applied for the concept design of piezo-driven mirror.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.941-943
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• 1998

Exploitation of equipment with cross linked polyethylene (XLPE) insulation requires its condition monitoring and diagnostic. Traditionally diagnostics of insulation is carried out by means of partial discharge detection. Many researchers have developed a lot of methods to identify the defect by the PD form. However, such identification of a defect, for example, void, inclusion or treeing, does not say about its danger from a point of view of full insulation gap breakdown and insulation construction failure. The information about the form and size of formed upon high voltage treeing is necessary for prediction of the remained resource of XLPE insulation. For this purpose we carry out experimental research for determination of the dependencies between PD characteristics in XLPE upon time and three dimension PD patterns of corresponding treeing. The investigations were carried out by means of electrical measurement of PD current and simultaneous optical recording of treeing image. Test results show that the PD patterns can be applied for detecting tree growth well.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.130-131
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• 2008

Chalcogenide glass has been known for many photo induced phenomena and superial electron / optical specific by structure flexibility, unique electronic configuration. It is become known to the greatest specific as photonic material medium that possible to perfect controlling by continuity and photo inducing direction of amorphous chalcogenide. In our experiment, we choose the amorphous As-Ge-Se-S and coming glass as a substrate. And then we have evaporated in the ${\sim}2{\times}10^{-6}$ Torr using a E-beam evaporator, completed thin film sample that have 1um thickness of As-Ge-Se-S 600 $\AA$, 10~5 $\AA$/s. At first, we let the change the angle between laser and sample by holography litho method and then, expect that satisfied conclusion which 2-dimension diffraction lattice manufacture and specifics by investing a He-Ne laser for 2000 seconds.