• 한국광학회지
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• 제9권3호
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• pp.146-150
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• 1998

광학적 분해능의 한계에 도달한 크기를 갖는 패턴의 분해능과 초점심도를 향상시키기 위해서 여러 가지 결상 방법들이 시도되고 있다. 일반적으로 선형 편광에서는 패턴 방향에 따라 TM mode 와 TE mode 사이에 contrast gap이 존재한다. 하지만 기존의 연구에서 이러한 conteast gap을 해결해 줄 수 있는 방법으로 타원편광 조명법이 제안하였다. 본 연구에서는 서로 방향이 수직인 패턴이 함께 있는 임의의 마스크에 타원편광을 포함한 여러 편광 조건을 적\ulcorner해 봄으로써, 초점심도를 향상시킬 수 있는 편광 조명 상태를 찾았보았다. 각 편광 조건에 따른 초점심도는, 허용 가능한 노광량(Exposure Dose0과 Critical Dimension(CD)의 오차 범위에 대한 ED-Tree(Exposure-Defocus Tree)를 통해 구하였다. 그 결과, 광학계의 조건에 따라 타원편광 조명이 초점심도를 향상시키는 효과가 있음을 알 수 있었다.

• Advances in materials Research
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• 제12권3호
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• pp.179-192
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• 2023

We have studied the structural and optical properties of the non-doped and Co 0.08 at.%, Co 0.02 at.%, and Co 0.11 at.% doped ZnO nanorods (NRs) synthesized using the simple low-temperature chemical bath deposition (CBD) method at 95℃ for 2 hours. The scanning electron microscope (SEM) images confirmed the morphology of the ZnO NRs are affected by Co incorporation. As observed, the Co 0.08 at.% doped ZnO NRs have a larger dimension with an average diameter of 153.4 nm. According to the International Centre for Diffraction Data (ICDD) number #00-036-1451, the x-ray diffraction (XRD) pattern of non-doped and Co-doped ZnO NRs with the preferred orientation of ZnO NRs in the (002) plane possess polycrystalline hexagonal wurtzite structure with the space group P63mc. Optical absorbance indicates the Co 0.08 at.% doped ZnO NRs have stronger and blueshift bandgap energy (3.104 ev). The room temperature photoluminescence (PL) spectra of ZnO NRs exhibited excitonicrelates ultraviolet (UV) and defect-related green band (GB) emissions. By calculating the UV/GB intensity, the Co 0.08 at.% is the proper atomic percentage to have fewer intrinsic defects. We predict that Co-doped ZnO NRs induce a blueshift of near band edge (NBE) emission due to the Burstein-Moss effect. Meanwhile, the redshift of NBE emission is attributed to the modification of the lattice dimensions and exchange energy.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2007년도 춘계학술대회 논문집
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• pp.383-386
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• 2007

In this study, the analysis was carried out for Electrical Discharge Machining (EDM) characteristics of the Cu electrodes by LIGA process. The shape of electrodes has 324 pins for the cavity of BGA(Ball Grid Array) type test socket mold. BGA test sockets are used in the inspection process of the semi-conductor I.C chip manufacturing. In the work, the machining performance for EDM of the electrodes was analyzed on dimensional accuracy and wear rate. The dimensional accuracy was measured for dimension of the pins, pitch size between the pins and the roundness of corner edge using optical measuring machine.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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• pp.1151-1154
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• 2004

In this study, we presented a novel method to calculate unknown voltages on the floating electrodes introduced in a unit pixel of TFT-LCDs using three-dimensional molecular director simulation. For the simulation of the potential distribution profiles generated under the influence of the floating electrodes, we used the floating boundary condition on the surface enclosing the floating electrodes. The constraint for the floating boundary condition was derived from the charge neutrality condition about the floating electrodes disconnected from voltage sources. For the pixel with the floating electrodes patterned between the pixel and the data electrodes, we simulated the molecular director and the potential distribution in three-dimension, and then observed the location of the disclination lines around the edge of the pixel electrode. As a result, it was revealed that the floating electrodes significantly affect the electro-optical characteristics such as the location of the disclination line.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 학술대회 논문집 정보 및 제어부문
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• pp.135-137
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• 2004

In this study we'll deal with the small-sized metalized film capacitors with large capacity which head have $5mm{\times}5mm{\times}2.5mm$ dimension. The lead wire is used to weld at both sides of capacitors. At that time the position gap between the welding machine and lead wire supplier would cause the welding error. Also, during the tapping processing of metalized film capacitors, the interval error among the capacitors, the length error of lead frame attached at the capacitors, and the straightness distortion of the lead frame could happen. As mentioned, four kinds of error parameters will be measured and analyzed by using the automatic visual inspection system that is implemented with CCD camera, optical parts, background lighting, and image processing algorithms. Finally we are able to achieve success rate above 99% to detect the welding faults of capacitors in the field test.

• 한국진공학회지
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• 제5권2호
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• pp.169-174
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• 1996

The applications of the high density plasma sources to the etching in semiconductor fabrication process are actively studied because of the more strict requirement from the dry etching process due to shrinking down of the critical dimension. But in the oxide etching with the high density plasma sources, abundant fluorine atoms released from the flurocarbon feed gas make it difficult to get the highly selective $SiO_2/Si$ etching. In this study, to improve the $SiO_2/Si$ etch selectivity through the control of the radical loss channels, we propose the wall heating , one of methods of controlling loss mechanisms. With appearance mass spectroscopy(AMS) and actinometric optical emission spectroscopy(OES), the increase of both radicals impinging on the substrate and existing in bulk plasma, and the decrease of the fluorine atom with wall temperature are observed. As a result, a 40% improvement of the selectivity was achieved for the carbon rich feed gas.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.612-615
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• 2003

Maskless laser patterning process is developed using 3rd harmonic Diode Pumped Solid State Laser with near visible wavelength of 355 nm. Photo-sensitive curable polymer is irradiated by UV laser and developed using polymer solvent to obtain quasi-3D patterns. We performed basic experiments for the various process conditions such as laser power, writing speed, laser focus, and polymer optical property to gain the optimal conditions. Experimentally, the patterns of trapezoidal shape were manufactured into dimension of 8${\mu}{\textrm}{m}$ width and 5.4${\mu}{\textrm}{m}$ height. This process could be applied to fabricate a single mode waveguide without expensive mask projection method.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2002년도 추계학술대회논문초록집
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• pp.329.1-329
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• 2002

To detect external vibration signals on the latticed fence structure, distributed fiber optic sensor using Sagnac interferometer was fabricated and tested. The latticed structure fabricated with dimension of 170cm in width and 180cm in height, the optical fiber, 50m in lengtn, distributed and fixed on the latticed structure. It was verified the sensitivity of the Sagnac interferometer using the PZT phase modulator. Fiber-optic external vibration signal applied to the latticed structure from 100㎐ to several ㎑. (omitted)

• 반도체디스플레이기술학회지
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• 제8권4호
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• pp.7-13
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• 2009

The slender device(long length and thin width) manufactured by stereolithography process suffers from large curl distortion. This paper adapts two control parameters such as a critical exposure and a penetration depth. The measurement of the test parts dimension are carried out by reverse engineering method with the optical 3-dimensional measurement equipment. We investigate how each parameter contributes to the part accuracy and estimates the optimal set of parameters which minimizes the dimensional error of the test parts. Finally, As being an the RAM slot as being an example of the slender device, the RAM slot is made with the optimal values of control parameter and the results are investigated

• 한국광학회지
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• 제5권4호
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• pp.439-444
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• 1994

임의의 2차원 표면양각 유전회절격자에 의한 일반적인 회절현상을 엄밀한 3차원벡터 결합파해석으로 다루는데 있어서 핵심적인 역학을 하는 행렬의 고유값문제가 항상 1/4 크기의 행렬에 대한 것으로 단순화되어, 컴퓨터의 계산시간과 기억용량의 요구를 현저히 줄일 수 있다는 것을 보였다. 한편, 체적형 회절격자에 있어서는 이와 같이 단순화할 수 없음을 논의하였다.