• Journal of the Korean Society for Precision Engineering
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• v.18 no.4
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• pp.203-208
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• 2001

In this paper, a novel dual-type positioning mechanism using a voice coil motor(VCM) and a piezoelectric actuator is proposed for optical disk drive or near-field recording type drive. The VCM is used for a coarse motion actuator and the piezoelectric actuator, "S" configuration deflection motion when voltage applied, is used for a fine motion actuator with self-sensing technique, which allows it to sense and actuate simultaneously in a closed loop frame work. When the VCM rotates and stops, a position feedback control algorithm is adopted to further control residu vibration. The performance of the control scheme is confirmed through simulations and experiments.

• Current Optics and Photonics
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• v.1 no.6
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• pp.618-625
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• 2017

In the present research, a new bending system using a segmented vacuum chuck for Stressed Mirror Polishing (SMP) is developed. SMP is a special fabrication method for thin aspheric mirrors, where simple flat or spherical fabrication is applied while a mirror blank is deflected. Since a mirror blank is usually glued to a bending fixture in the conventional SMP process, there are drawbacks such as long curing time, inconvenience of mirror replacement, risk of mirror breakage, and stress concentration near the glued area. To resolve the drawbacks, a new bending system is designed to effectively hold a mirror blank by vacuum. For the developed bending system, the optimal bending load to achieve the designated mirror deflection is found by finite element analysis and an optimization algorithm. With the measurement results of the deflected mirror surfaces with the optimal bending loads, the feasibility of the developed bending system is investigated. As a result, it is shown that the bending system is appropriate for the SMP process.

• Laser Solutions
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• v.7 no.1
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• pp.29-36
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• 2004

The dynamics of laser-induced plasma/shock wave and the interaction with a surface in the laser shock cleaning process are analyzed by optical diagnostics. Shock wave is generated by a Q-switched Nd:YAG laser in air or with N$_2$, Ar, and He injection into the focal spot. The shock speed is measured by monitoring the photoacoustic probe-beam deflection signal under different conditions. In addition, nanosecond time-resolved images of shock wave propagation and interaction with the substrate are obtained by the laser-flash shadowgraphy. The results reveal the effect of various operation parameters of the laser shock cleaning process on shock wave intensity, energy-conversion efficiency, and flow characteristics. Discussions are made on the cleaning mechanisms based on the experimental observations.

• ETRI Journal
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• v.29 no.5
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• pp.682-684
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• 2007

A new scheme to alleviate contention in optical burst switching networks is proposed. It consists of preventively reserving resources in a node, to be used if resources are busy on the next hop node. The burst is sent back to the preceding node and then resent forward. Simulations are carried out to assess the feasibility of the proposed scheme. Its performance is compared with that of contention resolution based on deflection routing.

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3292-3294
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• 1999

In this paper, electrostatic scanner mirror for optical pick-up head is designed and fabricated. The mirror size is $20{\mu}m{\times}2400{\mu}m{\times}2400{\mu}m$ and torsional beam size is $10{\mu}m{\times}20{\mu}m{\times}500{\mu}m$. Static deflection angle is calculated ${\pm}0.4$ degrees when the maximum driving voltage is 20 V. Silicon mirror was fabricated using KOH etching and deep RIE. For passivation of the patterned mirror from KOH solution, parylene thin film was used and its usefulness has been verified. Driving electrode was fabricated using UV LIGA process. Mirror and electrode were bonded.

• Proceedings of the KIEE Conference
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• 1997.11a
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• pp.612-614
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• 1997

Silicon based micro mirror array is a highly efficient component for use in optical applications such as adaptive optical systems and optical correlators. A micro mirror array designed, fabricated and tested here is consisted of $5{\times}5$ single layer polysilicon, electrostatically driven actuators. In this paper, deflection characteristics and pull-in behavior of the actuators for analog control was studied and particularly, the influence of the residual stress in flexure beams for the restorative force of actuators was considered. The springs are modeled as a residual stress-free spring and a spring with residual stress. In calculation, a mirror with the residual stress-free springs has 30.3N/m spring constant and 31.1V pull-in voltage. On the other hand, a mirror with the stressed springs has 23.6N/m and 27.4V respectively. The experimental result, which is 20.5N/m and 25.5V, shows that the stressed springs ore well modeled.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.6
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• pp.141-147
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• 1999

Optical disk technology with a laser beam for data recording and retrieval is one of the most promising route for high density information storage in multimedia era. As the storage density and data transfer rates are increased, mechanical issues, mainly noise and vibration, become critical. Rubber materials are extensively used in various machine design application, mainly for vibration/shock/noise control devices. Over the years an enormous effort has been put into developing procedures to provide properties of rubber components with complex shape and under pre-deformed state. In this paper, non-linear large deformations of a rubber mount for optical disk drive were investigated using the finite element method. A tension test of rubber material was performed, to calculate a strain energy function. According to the pre-deformed state, the variation of rubber mount stiffness were calculated and the reliability of numerical results were checked by compared with the measuring the deflection values. Also, the effects of the pre-deformed rubber mount on the system dynamic characteristics were investigated and the relation between the static stiffness variation of rubber mount and the natural frequence variation of system was discussed.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.10 s.175
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• pp.195-201
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• 2005

A laterally driven electromagnetic microactuator (LaDEM) is presented, and a micro-optical switch is designed and fabricated as a possible application. LaDEM provides parallel actuation of the microactuator to the silicon substrate surface (in-plane mode) by the Lorentz force. Poly-silicon-on-insulator (Poly-SOI) wafers and a reactive ion etching (RIE) process were used to fabricate high-aspect-ratio vertical microstructures, which allowed the equipment of a vertical micro mirror. A fabricated arch-shaped leaf spring has a thickness of $1.8{\mu}m$, width of $16{\mu}m$, and length of $800{\mu}m$. The resistance of the fabricated structure fer the optical switch was approximately 5$\Omega$. The deflection of the leaf springs increases linearly up to about 400 mA and then it demonstrates a buckling behavior around the current value. Owing to this nonlinear phenomenon, a large displacement of $60{\mu}m$ could be measured at 566 mA. The displacement-load relation and some dynamic characteristics are analyzed using the finite element simulations.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1491-1495
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• 2004

In this paper, resonant ultrasound spectroscopy(RUS) was used to determine the natural frequency of a spherical and a aspherical lens. The objective of the paper is to evaluate defect and shape error by using nondestructive evaluation method with Resonant Ultrasound Spectroscopy(RUS). The principle of RUS is that the mechanical resonant frequency of the materials depends on density, and the coefficient of elasticity. We evaluated existence of flaws through comparison with resonant frequency of a spherical and a aspherical lens. The spherical glass lenses were made of BK-7 glass, one's diameter in 2mm and 5mm. The polished spherical glass lenses had no deflection or a deflection below 2.0${\mu}{\textrm}{m}$. Also, The aspherical lens were made of same material and ones diameter in 7mm and thickness in 3.4mm. In the experiment, we were performed to investigate relationship between frequency measuring parameter($\beta$) and mass of each specimens. The difference between resonant frequency and mode of aspherical glass lens which has no defect was distinguished from aspherical glass lens which has some defects.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.8 no.6
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• pp.55-63
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• 1999

The acceleration of the performance of machine tools influences the development of the semi-conductor and optical technology as the development of NC and measurement technology. Because the measurement has been done to unload condition without considering of mechanical stiffness in the case of machining center as we measure the quasi-static error of machine tools on general study people who works on the spot has many problems on the data value. Also there are no satisfiable results until now in spite of many studys about this because the deflections of the table and the shaft supporting a workpiece influence, influence the accuracy of the table and shaft supporting a workpiece influence the accuracy of the workpiece. And there is doubt about the inspection method of measured error. In this paper Therefor we will help working more accurately on the spot by measuring analyzing displaying the defoec-tion of the table and support shaft when we load on the table and the support shaft of machining center using laser interfer-ometer. Also we try to settle new conception of the measurement method and more accurate grasp of the deflection tenden-cy by verifing the tendency of the error measured through the comparison of the simulated error measured through the comparison of the simulated error using ANSYS a common finite element analysis program which is able to measure heat deformation material deformation and error resulted from this study.